US20200335475A1 - Method for joining a micorelectronic chip to a wire element - Google Patents
Method for joining a micorelectronic chip to a wire element Download PDFInfo
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- US20200335475A1 US20200335475A1 US16/606,684 US201816606684A US2020335475A1 US 20200335475 A1 US20200335475 A1 US 20200335475A1 US 201816606684 A US201816606684 A US 201816606684A US 2020335475 A1 US2020335475 A1 US 2020335475A1
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- H01L24/85—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W95/00—Packaging processes not covered by the other groups of this subclass
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- D—TEXTILES; PAPER
- D02—YARNS; MECHANICAL FINISHING OF YARNS OR ROPES; WARPING OR BEAMING
- D02G—CRIMPING OR CURLING FIBRES, FILAMENTS, THREADS, OR YARNS; YARNS OR THREADS
- D02G3/00—Yarns or threads, e.g. fancy yarns; Processes or apparatus for the production thereof, not otherwise provided for
- D02G3/44—Yarns or threads characterised by the purpose for which they are designed
- D02G3/441—Yarns or threads with antistatic, conductive or radiation-shielding properties
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
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- D—TEXTILES; PAPER
- D10—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
- D10B—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
- D10B2401/00—Physical properties
- D10B2401/18—Physical properties including electronic components
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- H01L2224/85005—
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- H01L2224/85815—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0444—Apparatus for wiring semiconductor or solid-state device
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/015—Manufacture or treatment of bond wires
- H10W72/01515—Forming coatings
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07502—Connecting or disconnecting of bond wires using an auxiliary member
- H10W72/07504—Connecting or disconnecting of bond wires using an auxiliary member the auxiliary member being temporary, e.g. a sacrificial coating
- H10W72/07507—Connecting or disconnecting of bond wires using an auxiliary member the auxiliary member being temporary, e.g. a sacrificial coating the auxiliary member being a temporary substrate, e.g. a removable substrate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07531—Techniques
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07531—Techniques
- H10W72/07535—Applying EM radiation, e.g. induction heating or using a laser
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07531—Techniques
- H10W72/07536—Soldering or alloying
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07541—Controlling the environment, e.g. atmosphere composition or temperature
- H10W72/07551—Controlling the environment, e.g. atmosphere composition or temperature characterised by changes in properties of the bond wires during the connecting
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
Definitions
- the present disclosure relates to a process for assembling a microelectronic chip on a wire element. It finds an exemplary application in the field of RFID (“Radiofrequency Identification”) electronic tagging to directly associate an antenna with a transmission chip and provide a particularly small radiofrequency device by simple manufacture.
- This device can be integrated into a textile thread and this thread itself can be integrated into a wide variety of objects for the identification, tracking, and administration thereof. More generally, it can be used in all areas that can benefit from the integration of an electronic chip, such as a sensor, an actuator, a light-emitting diode, or a solar cell with a wire element such as a textile yarn or a conductive wire for integration into an object.
- the electronic chip may be electrically connected to the electrically conductive wire itself.
- the electrical conductor wire may be inductively coupled to an inductor housed in the electronic chip, without direct electrical contact between the chip and the wire.
- at least one wire that can be of a varied nature (not necessarily an electrical conductor) will be able to ensure the mechanical maintenance of the electronic chip comprising an autonomous component (for example, self-powered by a micro-capacity integrated into the chip).
- E-THREADTM the technology used to assemble a wire and a chip known as E-THREADTM is known from the documents U.S. Pat. No. 8,093,617, U.S. Pat. No. 8,471,773, U.S. Pat. No. 8,723,312, US2015318409, U.S. Pat. No. 8,782,880, U.S. Pat. No. 8,814,054 or US2015230336.
- the chip has a lateral groove and a longitudinal section of the wire is inserted into this groove.
- the assembly can be obtained by embedding the wire in the groove, the dimensions of the wire and of the groove then being sufficiently adjusted to mechanically join the two elements to each other.
- the assembly can be obtained or reinforced by adding an adhesive material between the wire and the chip, or by soldering or brazing the wire and the chip.
- the lateral groove can be obtained by assembling two elementary chips, each comprising a small parallel base and a large parallel base connected by at least one inclined lateral face; the assembly of the elementary chips by their small bases allows the lateral groove of the chip to be formed.
- the assembly of a chip and a cover made from a stack of electrically insulating layers also forms at least one lateral groove.
- An object of the present disclosure is to provide a solution avoiding all or part of the disadvantages the solutions of the prior art.
- An object of the present disclosure is to propose a process for assembling a microelectronic chip on a wire element, relaxing the constraints on the shape of the chip and allowing a precise and reliable fixing of the wire element on the chip.
- the present disclosure proposes a process for assembling a microelectronic chip on at least one wire element; the assembly process comprising:
- FIG. 1 a shows a microelectronic chip compatible with the assembly process according to the present disclosure
- FIG. 1 b shows removable covers, according to a first embodiment, compatible with the assembly process according to the present disclosure
- FIG. 1 e shows a step of applying a cover to a microelectronic chip, of the assembly process according to the present disclosure
- FIG. 2 a shows another microelectronic chip and a removable cover, according to a second embodiment, compatible with the assembly process according to the present disclosure
- FIG. 2 b shows a step of applying a cover to a microelectronic chip, of the assembly process according to the present disclosure
- FIG. 3 shows a step of applying a cover to a microelectronic chip, of the assembly process according to the present disclosure
- FIGS. 4 a and 4 b show a step of inserting a wire element into a temporary groove, of the assembly process according to the present disclosure, respectively in cross-sectional and perspective view;
- FIG. 4 c shows a step of inserting a wire element into a temporary groove, of the assembly process according to the present disclosure
- FIG. 5 shows a step of applying a cover to a microelectronic chip, of the assembly process according to the present disclosure
- FIGS. 6 a , 6 b and 6 c show variants of the step of fixing at least one wire element to a microelectronic chip, of the assembly process according to the present disclosure
- FIG. 6 d shows a step of removing a cover, of the assembly process according to the present disclosure.
- FIGS. 7 a and 7 b show complementary steps of respectively reinforcing and encapsulating an assembled chip and wire element assembly.
- microelectronic chips For the sake of clarity, only the steps and elements useful for understanding embodiments of the present disclosure have been represented and will be described.
- the components e.g., radio-frequency transmission components
- standard devices e.g., measurement sensors, object identifiers
- the steps of collective manufacturing of microelectronic chips on a substrate have also not been detailed, as the present disclosure is again compatible with microelectronic chips developed using conventional techniques.
- FIG. 1 a shows a microelectronic chip 1 (also referred to as a “chip” in the following description) comprising a microelectronic component, compatible with the assembly process according to the present disclosure.
- the microelectronic chip 1 comprises a substrate 3 having a microelectronic component 4 , such as an emitting-receiving circuit, a calculation device, a sensor, a LED or any other form of integrated circuit provided on the substrate 3 , for example, using techniques known in the semiconductor field.
- the microelectronic component 4 is located on the upper side of chip 1 , which is referred to as the first side 11 (or first face) of microelectronic chip 1 .
- a protective layer is advantageously placed on the surface of substrate 3 .
- the lower side of the chip 1 is referred to as the second side 12 .
- the microelectronic component 4 can be electrically connected to one or more connection terminal(s) 4 a opening on the first side 11 of the microelectronic chip 1 , using tracks or via conductors formed on or within substrate 3 .
- the connection terminals could be present on the second side 12 of chip 1 .
- connection terminals 4 a represent chips 1 with two connection terminals 4 a on their first side 11 , although the presence of these connection terminals 4 a is optional.
- the assembly process according to the present disclosure allows the microelectronic chip 1 to be assembled with at least one wire element 7 a, 7 b (illustrated in FIGS. 4 a -4 c ).
- the assembly of chip 1 with the wire element 7 a, 7 b can have a purely mechanical function.
- the wire element 7 a, 7 b constitutes a mechanical support for chip 1 .
- it is not necessary to provide one or more connection terminals 4 a on the first side 11 of chip 1 as the wire element 7 a, 7 b is not intended to establish electrical contact with chip 1 .
- the wire element 7 a, 7 b may be of any nature, in particular, textile, polymer, metal, etc.
- connection terminals 4 a of chip 1 may be advantageous for many applications to make an electrical contact between the connection terminals 4 a of chip 1 and the wire element 7 a, 7 b.
- the connection terminals 4 a are advantageously placed on the first side 11 of chip 1 and the wire element 7 a, 7 b is an electrical conductor.
- the microelectronic chip 1 can be assembled to two wire elements 7 a, 7 b, one electrically conductive to establish an electrical contact with a connection terminal 4 a and the other of any nature to ensure a purely mechanical support of chip 1 .
- the wire element 7 a, 7 b may be of any nature (subject to the scenarios set out above) provided that it is sufficiently resistant to the mechanical and potentially chemical treatments to which it is likely to be exposed.
- the wire element 7 a, 7 b is an electrically conductive wire, for example, made of stainless steel or a copper-based alloy or copper.
- the wire element 7 a, 7 b can also be made up of any type of conductive textile fibers.
- the assembly process comprises several steps, and first a step of applying a removable cover 5 to a first side 11 of the microelectronic chip 1 , the cover 5 being configured to form with the first side 11 at least one temporary lateral groove 2 a, 2 b, along at least one side face 1 a, 1 b of the microelectronic chip 1 .
- cover 5 has a contact face 51 intended to be applied to the first face 11 and having at least one shoulder 5 a, 5 b ( FIG. 1 b ).
- This shoulder 5 a, 5 b makes it possible to form the temporary lateral groove 2 a, 2 b with the first side 11 of the microelectronic chip 1 when the cover 5 is applied to the chip 1 ( FIG. 1c ).
- the first side 11 is flat (or substantially flat after the manufacturing steps of the microelectronic component) and it is not necessary to create a specific groove.
- FIG. 1 b cover 5 has a contact face 51 intended to be applied to the first face 11 and having at least one shoulder 5 a, 5 b ( FIG. 1 b ).
- This shoulder 5 a, 5 b makes it possible to form the temporary lateral groove 2 a, 2 b with the first side 11 of the microelectronic chip 1 when the cover 5 is applied to the chip 1 ( FIG. 1c ).
- the first side 11 is flat (or substantially flat after the manufacturing steps
- contact face 51 of cover 5 applied to the first face 11 , has two shoulders 5 a, 5 b to form two parallel temporary lateral grooves 2 a, 2 b, with the first flat face 11 of the microelectronic chip 1 .
- contact face 51 of cover 5 may have any number of shoulders, capable of forming temporary grooves, each arranged in any orientation, without departing from the scope of the present disclosure.
- groove 2 a, 2 b is not limited to a general parallelepiped shape; indeed, shoulder 5 a, 5 b of cover 5 can have the shape of a slot ( FIG. 1 b ) but also a bevel or have a rounded concave flank, which can generate a groove 2 a, 2 b of a different shape.
- the cover 5 has a flat contact face 51 and the first face 11 of the microelectronic chip 1 has at least one shoulder 11 a, to form the temporary groove 2 a lateral with the flat contact face 51 of cover 5 .
- the connection terminal 4 a can, in this embodiment, be designed in such a way that it leads to the first flank, in the plane of the first face 11 , of the shoulder 11 a (not shown) or to the other substantially vertical flank of the shoulder 11 a (as shown in FIG. 2 b ).
- the first side 11 of the microelectronic chip 1 has two shoulders along each of its lateral faces 1 a, 1 b to form two parallel temporary lateral grooves 2 a, 2 b, with the flat contact face 51 of the cover 5 .
- first side 11 of chip 1 may alternatively have any number of shoulders, capable of forming temporary grooves, each arranged in any orientation.
- cover 5 and chip 1 each have at least one shoulder to form at least one temporary lateral groove 2 a, 2 b when cover 5 is applied to the first side 11 of chip 1 .
- the three embodiments described for the implementation of the process make it possible to relax the shape constraints of the microelectronic chip 1 to be assembled on the wire element 7 a, 7 b, because it is not necessary to form a specific groove on the chip itself.
- a chip 1 such as the produced by the manufacturing steps of the microelectronic component is compatible.
- a simple engraving on the first side 11 is required to create the shoulder.
- the application step of the assembly process includes advantageously maintaining contact between the contact face 51 of cover 5 and the first face 11 of chip 1 , for example, by vacuum.
- the cover 5 includes at least one channel 52 capable of connecting its contact face 51 to a suction system 53 ( FIG. 3 ).
- the suction system 53 may, for example, include a vacuum pump, but the present disclosure is by no means limited to this embodiment, and any technique to maintain contact between cover 5 and chip 1 may be appropriate.
- cover 5 may be kept in contact with the first side 11 of chip 1 by the presence of a substance with low adhesive strength on its contact face 51 .
- the assembly process according to the present disclosure then includes a step of inserting the wire element 7 a, 7 b into the temporary groove 2 a, 2 b, as shown in FIGS. 4 a and 4 b .
- a longitudinal portion of the wire element 7 a, 7 b is inserted into the temporary lateral groove 2 a, 2 b.
- the assembly process may include a second step of applying a holder 20 to the second side 12 of the microelectronic chip 1 , before the insertion step.
- the presence of holder 20 allows chip 1 to be supported and stiffened, at least during the step of inserting the wire element 7 a, 7 b ( FIG. 4 c ).
- holder 20 may be kept in contact with the second side 12 of chip 1 by suction, or by the presence of a substance with low adhesive strength, or by the simple pressure applied by the cover 5 .
- the height and depth dimensions of the temporary grooves 2 a, 2 b which depend on the structural configuration of cover 5 (first or third embodiment) and/or the structural configuration of chip 1 (second or third embodiment), are chosen large enough that each wire element to be joined can be accommodated in a temporary groove 2 a, 2 b without mechanically forcing its embedding in the temporary groove 2 a, 2 b.
- the longitudinal section of the wire elements to be able to be fully accommodated in the grooves 2 a, 2 b, i.e., the accommodated portion of each wire element does not extend beyond the face of the chip 1 on which the temporary groove 2 a, 2 b is formed.
- microelectronic chip 1 includes at least one stud 6 a, 6 b on its first side 11 , located in the area forming a first flank of the temporary groove 2 a, 2 b, when cover 5 is applied on the first side 11 .
- This stud 6 a, 6 b made of a bonding material, is intended to fix the wire element 7 a, 7 b on chip 1 , during the fixing step of the assembly process that will be described hereinafter.
- the studs 6 a, 6 b are arranged along the entire length of the area forming a first flank of each temporary groove 2 a, 2 b.
- stud 6 a, 6 b may extend over at least part of the length of the first flank of the temporary lateral groove 2 a, 2 b.
- each stud 6 a, 6 b may also be possible to form each stud 6 a, 6 b of a plurality of elementary studs, distinct from each other, arranged over a more or less extensive length of the area of the first face 11 forming a first flank of the temporary groove 2 a, 2 b.
- each stud 6 a, 6 b forms a reserve of a bonding material that will allow the wire element 7 a, 7 b housed in a temporary groove 2 a, 2 b to be fixed to the chip 1 .
- the assembly of chip 1 on the wire element 7 a, 7 b may have only a mechanical function.
- the bonding material forming the studs 6 a, 6 b can be a simple adhesive substance, e.g., a polymer. It may be a viscous substance, which can be cured during the next fixing step and thus bond the wire element 7 a, 7 b and the chip 1 together.
- the studs 6 a, 6 b are advantageously deposited prior to the application step of cover 5 on the first face 11 of chip 1 .
- the connecting material of stud 6 a, 6 b is chosen from electrically conductive materials. It may include a plurality of elemental compounds. For example, it may be an alloy of metals, such as tin, silver and copper.
- the material constituting each stud 6 a, 6 b is chosen so that its melting point is relatively low. This melting temperature is lower than the maximum temperature to which the microelectronic component 4 of the chip 1 can be exposed without causing damage.
- this maximum temperature is 350° C.
- the material of the studs 6 a, 6 b should be chosen so that their melting temperature is lower than 350° C., for example, 300° C.
- this material is chosen so that its melting temperature is between 80° C. and 250° C., between 80° C. and 150° C., or even between 80° C. and 100° C.
- the studs 6 a, 6 b can be advantageously manufactured during the manufacture of chip 1 , for example, by forming them by deposition on the substrate 3 , in contact with the connection terminals 4 a.
- the studs 6 a, 6 b are advantageously formed before the application step of cover 5 on the first face 11 of chip 1 .
- a longitudinal portion of at least one wire element 7 a, 7 b is placed along the (at least one) temporary groove 2 a, 2 b.
- the wire element 7 a, 7 b is then submitted to limited forces to press it against stud 6 a, 6 b.
- the assembly process according to the present disclosure also includes a step of fixing the wire element 7 a, 7 b on the microelectronic chip 1 .
- the fixing step uses a bonding material or adhesive substance to maintain contact between the wire element 7 a, 7 b and chip 1 , even when the temporary cover 5 is no longer in contact with chip 1 .
- This bonding material or adhesive may have been dispensed before or after the application of cover 5 and the insertion of wire element 7 a, 7 b, as previously stated.
- the fixing step can be done by injecting an adhesive substance along the wire near the first face 11 of chip 1 , after its insertion into the temporary groove 2 a, 2 b.
- the fixing step can also provide for the application of a bonding material, for example, by soldering.
- studs 6 a, 6 b were previously formed in groove 2 a, 2 b.
- the fixing step solidarizes all or part of the longitudinal portion of the wire element 7 a, 7 b inserted in the temporary groove 2 a, 2 b on the first face 11 via the studs 6 a, 6 b.
- the substance will deform when the wire element 7 a, 7 b is inserted and partially surround the wire element 7 a, 7 b.
- the fixing step is completed as soon as the adhesive substance has cured in order to ensure fixation. This curing may require the adhesive substance to be treated, for example, with ultraviolet radiation.
- the material of the cover 5 or at least the material placed on the surface of cover 5 shall be chosen in such a way that the adhesive substance does not adhere to it, or will adhere only slightly, in order to prevent it from becoming fixed to cover 5 , since the cover 5 is intended to be removed from the first face 11 of chip 1 .
- the fixing step includes a sequence of localized heating near the temporary groove 2 a, 2 b to melt the stud 6 a, 6 b against the wire element 7 a, 7 b ( FIG. 6 b ).
- the heating sequence can be carried out with a heating means, for example, a generator of an air flow or another heated fluid flow, by induction, or by electromagnetic irradiation such as laser irradiation or ultraviolet radiation, generating a heat flow defining the heated zone at chip 1 .
- a heating means for example, a generator of an air flow or another heated fluid flow, by induction, or by electromagnetic irradiation such as laser irradiation or ultraviolet radiation, generating a heat flow defining the heated zone at chip 1 .
- Heating can alternatively be obtained by thermal conduction, for example, by heating the cover 5 by means of heating resistors incorporated in the mass of this cover 5 .
- the heating means is integrated into the cover 5 itself.
- studs 6 a, 6 b are heated at a processing temperature above the melting point of the bonding material they contain, and for a sufficient time to melt it.
- the change of the bonding material into the liquid state combined with the weak forces exerted on the wire element 7 a, 7 b to maintain it against the temporary groove 2 a, 2 b, leads to the partial coating of the wire element 7 a, 7 b into the temporary groove 2 a, 2 b, as shown in FIG. 6 c .
- the wire element 7 a, 7 b is made integral with the first face 11 and can establish electrical contact with the connection terminals 4 a of chip 1 .
- the cover is made of a material to which the conductive material of the studs 6 a, 6 b does not adhere in order to avoid adhesion of the studs 6 a, 6 b to the cover 5 , which is intended, as described above, to be removed from the first face 11 of chip 1 .
- stud 6 a, 6 b, deposited and fixed on a connection terminal 4 a of chip 1 could be made of an alloy of metals, for example, tin, silver and copper.
- the fixing step allows the wire element 7 a, 7 b, made, for example, of stainless steel, copper or a copper-based alloy, to be attached to stud 6 a, 6 b.
- Cover 5 may consist of a type of ceramic, silicon oxide, metal oxide or metal alloy, for example, coated with chromium, to which the tin-based solder (conductor material of stud 6 a, 6 b ) does not adhere.
- the fixing step can be carried out successively or simultaneously for each of the wire elements 7 a, 7 b.
- the zone exposed to the processing temperature may be large enough to at least partially include all the studs 6 a, 6 b.
- the insertion step may include the simultaneous or successive exposure of several distinct zones, each encompassing at least a portion of the studs 6 a, 6 b.
- the assembly process according to the present disclosure includes a step of removing the cover 5 from the microelectronic chip 1 ( FIG. 6 d ), after the fixing step described above.
- the contact face 51 is then separated from the first face 11 of chip 1 .
- the removal step may include interrupting the vacuuming of channels 52 , which stops the suction contact between contact face 51 and first face of chip 1 .
- Cover 5 can be attached to the end of an articulated arm of a chip handling device such as an automatic “pick and place” machine.
- the articulated arm equipped with a suction nozzle will be able to grasp a chip 1 in a storage area and place it precisely in an assembly position, for example, on a holder 20 , to successively apply and remove cover 5 from the first face 11 .
- the present disclosure takes advantage of the respective configurations of the cover 5 and the microelectronic chip 1 to form at least one temporary groove 2 a, 2 b in which a wire element 7 a, 7 b can be easily and precisely positioned.
- the fixing of the wire element 7 a, 7 b on chip 1 for example, by means of a stud 6 a, 6 b placed on the first face 11 of chip 1 , allows the attachment and mechanical resistance of the chip / wire assembly.
- Cover 5 can then be removed from chip 1 and applied to another chip 1 .
- the process according to the present disclosure can be repeated and allows the assembly of a plurality of microelectronic chips 1 on at least one wire element 7 a, 7 b, to form a chain of chips 1 .
- the assembly process according to the present disclosure offers a solution that relaxes the stresses on the shape of the chip (and, in particular, on the presence of grooves) and allows a precise and reliable fixing of the wire element 7 a, 7 b on chip 1 , due to the presence of the temporary groove 2 a, 2 b.
- the assembly process according to the present disclosure may also include additional steps, after the wire element(s) 7 a, 7 b have been assembled on chip 1 and the cover 5 has been removed.
- the process may include a step of reinforcing the assembly formed by chip 1 and the wire element(s) 7 a, 7 b.
- the reinforcement step may include dispensing an adhesive 18 on at least part of the wire element attached to the microelectronic chip 1 , as shown in FIG. 7 a .
- Dispensing the adhesive 18 can be complemented by the curing thereof, for example, by UV treatment, which can be very short, of the order of one second or a few seconds, to stiffen the adhesive and promote the attachment thereof to the elements with which it is in contact.
- the process may also include, as a complementary step, a step of encapsulating the microelectronic chip 1 and the longitudinal portion of the wire element 7 a, 7 b fixed on the chip, in a sufficiently rigid and waterproof material 19 , such as resin, to protect the assembly from mechanical or chemical stresses in its final application ( FIG. 7 b ).
- a sufficiently rigid and waterproof material 19 such as resin
- this encapsulation is such that all sides of chip 1 are well covered with the encapsulating material.
- the encapsulation step can be done with or without a pre-strengthening step.
- the process may also include, as a complementary step, a step of cutting one or more wire element(s) 7 a, 7 b.
- This may involve sampling one segment of the chain for its integration into an object. It may also involve cutting a portion of the wire element 7 a, 7 b to form a dipole antenna connected to chip 1 , thus constituting a transmission circuit as taught in the document U.S. Pat. No. 8,471,773.
- the cutting of the wire element 7 a, 7 b can be carried out by any means known per se, for example, by using a mechanical shearing tool or by laser cutting.
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Abstract
Description
- This application is a national phase entry under 35 U.S.C. § 371 of International Patent Application PCT/FR2018/050955, filed Apr. 16, 2018, designating the United States of America and published as International Patent Publication WO 2018/193198 A1 on Oct. 25, 2018, which claims the benefit under Article 8 of the Patent Cooperation Treaty to French Patent Application Serial No. 1753404, filed Apr. 19, 2017.
- The present disclosure relates to a process for assembling a microelectronic chip on a wire element. It finds an exemplary application in the field of RFID (“Radiofrequency Identification”) electronic tagging to directly associate an antenna with a transmission chip and provide a particularly small radiofrequency device by simple manufacture. This device can be integrated into a textile thread and this thread itself can be integrated into a wide variety of objects for the identification, tracking, and administration thereof. More generally, it can be used in all areas that can benefit from the integration of an electronic chip, such as a sensor, an actuator, a light-emitting diode, or a solar cell with a wire element such as a textile yarn or a conductive wire for integration into an object.
- In some cases, the electronic chip may be electrically connected to the electrically conductive wire itself. In other cases, the electrical conductor wire may be inductively coupled to an inductor housed in the electronic chip, without direct electrical contact between the chip and the wire. In still other cases, at least one wire that can be of a varied nature (not necessarily an electrical conductor) will be able to ensure the mechanical maintenance of the electronic chip comprising an autonomous component (for example, self-powered by a micro-capacity integrated into the chip).
- For example, the technology used to assemble a wire and a chip known as E-THREAD™ is known from the documents U.S. Pat. No. 8,093,617, U.S. Pat. No. 8,471,773, U.S. Pat. No. 8,723,312, US2015318409, U.S. Pat. No. 8,782,880, U.S. Pat. No. 8,814,054 or US2015230336.
- With this technology, the chip has a lateral groove and a longitudinal section of the wire is inserted into this groove. The assembly can be obtained by embedding the wire in the groove, the dimensions of the wire and of the groove then being sufficiently adjusted to mechanically join the two elements to each other. In addition, the assembly can be obtained or reinforced by adding an adhesive material between the wire and the chip, or by soldering or brazing the wire and the chip.
- In document U.S. Pat. No. 8,093,617, the lateral groove can be obtained by assembling two elementary chips, each comprising a small parallel base and a large parallel base connected by at least one inclined lateral face; the assembly of the elementary chips by their small bases allows the lateral groove of the chip to be formed. In US2015230336, the assembly of a chip and a cover made from a stack of electrically insulating layers also forms at least one lateral groove.
- The formation of grooves by assembly or engraving on the side faces of a chip is a delicate operation but also constraining in terms of the chip's structural configuration. However, the absence of grooves on the chip makes it difficult to accurately position the wires and assemble them reliably on the chip, especially in an industrial context where it is necessary to maintain a high production rate.
- An object of the present disclosure is to provide a solution avoiding all or part of the disadvantages the solutions of the prior art. An object of the present disclosure is to propose a process for assembling a microelectronic chip on a wire element, relaxing the constraints on the shape of the chip and allowing a precise and reliable fixing of the wire element on the chip.
- In order to achieve one of these goals, the present disclosure proposes a process for assembling a microelectronic chip on at least one wire element; the assembly process comprising:
-
- A first step of applying a cover to a first face of the microelectronic chip, the cover being configured to form with the first face at least one temporary lateral groove;
- A step of inserting the wire element into the temporary groove;
- A step of fixing the wire element on the microelectronic chip; and
- A step of removing the cover from the microelectronic chip.
- According to other advantageous and non-limiting characteristics of the present disclosure, taken alone or in any technically feasible combination:
-
- the cover has a contact face applied to the first face of the microelectronic chip and having at least one shoulder to form the temporary lateral groove with the first face;
- the contact face applied to the first face has two shoulders to form two parallel temporary lateral grooves, with the first face;
- the first face of the microelectronic chip has at least one shoulder to form the temporary lateral groove with a contact face of the cover;
- the first side of the microelectronic chip has two shoulders to form two parallel temporary lateral grooves, with the contact side of the cover;
- the first step of applying the cover to the first face of the microelectronic chip comprises maintaining contact between the contact face of the cover and the first face by vacuum;
- during the insertion step, a longitudinal portion of the wire element is inserted at least partially into the temporary lateral groove;
- the assembly process comprises a second step of applying a holder on a second side of the microelectronic chip, to stiffen the microelectronic chip at least during the step of inserting the wire element;
- the microelectronic chip comprises at least one stud on its first side, located in the area forming a first flank of the temporary groove when the cover is applied to the first face;
- the fixing step is carried out between the wire element and the stud;
- the cover is made of a material to which the material from which the stud is made does not adhere;
- the wire element and the stud comprise at least one electrically conductive material;
- the fixing step includes a sequence of heating located near the temporary groove, to melt the stud against the wire element;
- the cover includes a heating means for the implementation of the heating sequence;
- the cover is attached to the end of an articulated arm of a chip handling device;
- the assembly process comprises, after the step of removing the cover, a reinforcement step involving the dispensation of an adhesive on at least a part of the wire element fixed on the microelectronic chip; and
- the assembly process comprises, after the step of removing the cover, a step of encapsulating the microelectronic chip and at least the longitudinal portion of the wire element fixed on the chip.
- Further characteristics and advantages of the present disclosure will be clear from the following detailed description, made in reference to the appended figures. The figures are schematic representations that, for the sake of clarity, are not necessarily to scale.
-
FIG. 1a shows a microelectronic chip compatible with the assembly process according to the present disclosure; -
FIG. 1b shows removable covers, according to a first embodiment, compatible with the assembly process according to the present disclosure; -
FIG. 1e shows a step of applying a cover to a microelectronic chip, of the assembly process according to the present disclosure; -
FIG. 2a shows another microelectronic chip and a removable cover, according to a second embodiment, compatible with the assembly process according to the present disclosure; -
FIG. 2b shows a step of applying a cover to a microelectronic chip, of the assembly process according to the present disclosure; -
FIG. 3 shows a step of applying a cover to a microelectronic chip, of the assembly process according to the present disclosure; -
FIGS. 4a and 4b show a step of inserting a wire element into a temporary groove, of the assembly process according to the present disclosure, respectively in cross-sectional and perspective view; -
FIG. 4c shows a step of inserting a wire element into a temporary groove, of the assembly process according to the present disclosure; -
FIG. 5 shows a step of applying a cover to a microelectronic chip, of the assembly process according to the present disclosure; -
FIGS. 6a, 6b and 6c show variants of the step of fixing at least one wire element to a microelectronic chip, of the assembly process according to the present disclosure; -
FIG. 6d shows a step of removing a cover, of the assembly process according to the present disclosure; and -
FIGS. 7a and 7b show complementary steps of respectively reinforcing and encapsulating an assembled chip and wire element assembly. - For the sake of clarity, only the steps and elements useful for understanding embodiments of the present disclosure have been represented and will be described. In particular, the components (e.g., radio-frequency transmission components) developed on microelectronic chips have not been detailed, as the present disclosure is compatible with standard devices (e.g., measurement sensors, object identifiers), depending on the application concerned. The steps of collective manufacturing of microelectronic chips on a substrate have also not been detailed, as the present disclosure is again compatible with microelectronic chips developed using conventional techniques.
-
FIG. 1a shows a microelectronic chip 1 (also referred to as a “chip” in the following description) comprising a microelectronic component, compatible with the assembly process according to the present disclosure. - The
microelectronic chip 1 comprises asubstrate 3 having amicroelectronic component 4, such as an emitting-receiving circuit, a calculation device, a sensor, a LED or any other form of integrated circuit provided on thesubstrate 3, for example, using techniques known in the semiconductor field. Themicroelectronic component 4 is located on the upper side ofchip 1, which is referred to as the first side 11 (or first face) ofmicroelectronic chip 1. To protect themicroelectronic component 4, a protective layer is advantageously placed on the surface ofsubstrate 3. - The lower side of the
chip 1 is referred to as thesecond side 12. - The
microelectronic component 4 can be electrically connected to one or more connection terminal(s) 4 a opening on thefirst side 11 of themicroelectronic chip 1, using tracks or via conductors formed on or withinsubstrate 3. Alternatively, the connection terminals could be present on thesecond side 12 ofchip 1. - The figures, for simplicity, represent
chips 1 with twoconnection terminals 4 a on theirfirst side 11, although the presence of theseconnection terminals 4 a is optional. - The assembly process according to the present disclosure allows the
microelectronic chip 1 to be assembled with at least one 7 a, 7 b (illustrated inwire element FIGS. 4a-4c ). - The assembly of
chip 1 with the 7 a, 7 b can have a purely mechanical function. In such embodiments, thewire element 7 a, 7 b constitutes a mechanical support forwire element chip 1. In such a case, it is not necessary to provide one ormore connection terminals 4 a on thefirst side 11 ofchip 1, as the 7 a, 7 b is not intended to establish electrical contact withwire element chip 1. - The
7 a, 7 b may be of any nature, in particular, textile, polymer, metal, etc.wire element - Alternatively, it may be advantageous for many applications to make an electrical contact between the
connection terminals 4 a ofchip 1 and the 7 a, 7 b. In this case, thewire element connection terminals 4 a are advantageously placed on thefirst side 11 ofchip 1 and the 7 a, 7 b is an electrical conductor.wire element - According to yet another alternative, the
microelectronic chip 1 can be assembled to two 7 a, 7 b, one electrically conductive to establish an electrical contact with awire elements connection terminal 4 a and the other of any nature to ensure a purely mechanical support ofchip 1. - The
7 a, 7 b may be of any nature (subject to the scenarios set out above) provided that it is sufficiently resistant to the mechanical and potentially chemical treatments to which it is likely to be exposed.wire element - Especially in the case where the wire is to be electrically connected to a terminal 4 a of
microelectronic component 4 ofchip 1, the 7 a, 7 b is an electrically conductive wire, for example, made of stainless steel or a copper-based alloy or copper. Thewire element 7 a, 7 b can also be made up of any type of conductive textile fibers.wire element - The assembly process comprises several steps, and first a step of applying a
removable cover 5 to afirst side 11 of themicroelectronic chip 1, thecover 5 being configured to form with thefirst side 11 at least one temporary 2 a, 2 b, along at least onelateral groove 1 a, 1 b of theside face microelectronic chip 1. - According to a first embodiment,
cover 5 has acontact face 51 intended to be applied to thefirst face 11 and having at least one 5 a, 5 b (shoulder FIG. 1b ). This 5 a, 5 b makes it possible to form the temporaryshoulder 2 a, 2 b with thelateral groove first side 11 of themicroelectronic chip 1 when thecover 5 is applied to the chip 1 (FIG. 1c ). According to this embodiment, thefirst side 11 is flat (or substantially flat after the manufacturing steps of the microelectronic component) and it is not necessary to create a specific groove. Advantageously, as shown inFIG. 1c , contact face 51 ofcover 5, applied to thefirst face 11, has two 5 a, 5 b to form two parallel temporaryshoulders 2 a, 2 b, with the firstlateral grooves flat face 11 of themicroelectronic chip 1. - Of course, the
contact face 51 ofcover 5 may have any number of shoulders, capable of forming temporary grooves, each arranged in any orientation, without departing from the scope of the present disclosure. - The geometric shape of
2 a, 2 b is not limited to a general parallelepiped shape; indeed,groove 5 a, 5 b ofshoulder cover 5 can have the shape of a slot (FIG. 1b ) but also a bevel or have a rounded concave flank, which can generate a 2 a, 2 b of a different shape.groove - According to a second embodiment of the present disclosure, illustrated in
FIGS. 2a, 2b and 2c , thecover 5 has aflat contact face 51 and thefirst face 11 of themicroelectronic chip 1 has at least oneshoulder 11 a, to form thetemporary groove 2 a lateral with theflat contact face 51 ofcover 5. Theconnection terminal 4 a can, in this embodiment, be designed in such a way that it leads to the first flank, in the plane of thefirst face 11, of theshoulder 11 a (not shown) or to the other substantially vertical flank of theshoulder 11 a (as shown inFIG. 2b ). - According to an advantageous variant (not shown), the
first side 11 of themicroelectronic chip 1 has two shoulders along each of its lateral faces 1 a, 1 b to form two parallel temporary 2 a, 2 b, with thelateral grooves flat contact face 51 of thecover 5. - Of course, the
first side 11 ofchip 1 may alternatively have any number of shoulders, capable of forming temporary grooves, each arranged in any orientation. - According to a third embodiment (not shown),
cover 5 andchip 1 each have at least one shoulder to form at least one temporary 2 a, 2 b whenlateral groove cover 5 is applied to thefirst side 11 ofchip 1. - The three embodiments described for the implementation of the process make it possible to relax the shape constraints of the
microelectronic chip 1 to be assembled on the 7 a, 7 b, because it is not necessary to form a specific groove on the chip itself. According to the first embodiment, awire element chip 1 such as the produced by the manufacturing steps of the microelectronic component is compatible. According to the second and third embodiments, a simple engraving on thefirst side 11 is required to create the shoulder. - The first embodiment described will be used in the following description and figures. The characteristics that will be presented may nevertheless apply to all the embodiments of the process according to the present disclosure.
- The application step of the assembly process includes advantageously maintaining contact between the
contact face 51 ofcover 5 and thefirst face 11 ofchip 1, for example, by vacuum. For this purpose, thecover 5 includes at least onechannel 52 capable of connecting itscontact face 51 to a suction system 53 (FIG. 3 ). Thesuction system 53 may, for example, include a vacuum pump, but the present disclosure is by no means limited to this embodiment, and any technique to maintain contact betweencover 5 andchip 1 may be appropriate. In particular,cover 5 may be kept in contact with thefirst side 11 ofchip 1 by the presence of a substance with low adhesive strength on itscontact face 51. - The assembly process according to the present disclosure then includes a step of inserting the
7 a, 7 b into thewire element 2 a, 2 b, as shown intemporary groove FIGS. 4a and 4b . In the insertion step, a longitudinal portion of the 7 a, 7 b is inserted into the temporarywire element 2 a, 2 b.lateral groove - Optionally, the assembly process may include a second step of applying a
holder 20 to thesecond side 12 of themicroelectronic chip 1, before the insertion step. The presence ofholder 20 allowschip 1 to be supported and stiffened, at least during the step of inserting the 7 a, 7 b (wire element FIG. 4c ). For example,holder 20 may be kept in contact with thesecond side 12 ofchip 1 by suction, or by the presence of a substance with low adhesive strength, or by the simple pressure applied by thecover 5. - According to the present disclosure, the height and depth dimensions of the
2 a, 2 b, which depend on the structural configuration of cover 5 (first or third embodiment) and/or the structural configuration of chip 1 (second or third embodiment), are chosen large enough that each wire element to be joined can be accommodated in atemporary grooves 2 a, 2 b without mechanically forcing its embedding in thetemporary groove 2 a, 2 b. To promote the connection of thetemporary groove 7 a, 7 b towire element chip 1, it is generally preferable, for the longitudinal section of the wire elements to be able to be fully accommodated in the 2 a, 2 b, i.e., the accommodated portion of each wire element does not extend beyond the face of thegrooves chip 1 on which the 2 a, 2 b is formed.temporary groove - When a plurality of
2 a, 2 b are present, they are not necessarily of the same size. Similarly, thetemporary grooves 7 a, 7 b that are to be accommodated in thewire elements 2 a, 2 b are not necessarily of the same nature and do not necessarily have identical cross-sections.temporary grooves - Advantageously,
microelectronic chip 1 includes at least one 6 a, 6 b on itsstud first side 11, located in the area forming a first flank of the 2 a, 2 b, whentemporary groove cover 5 is applied on thefirst side 11. This 6 a, 6 b, made of a bonding material, is intended to fix thestud 7 a, 7 b onwire element chip 1, during the fixing step of the assembly process that will be described hereinafter. - In the example shown in
FIG. 5 , the 6 a, 6 b are arranged along the entire length of the area forming a first flank of eachstuds 2 a, 2 b. In general,temporary groove 6 a, 6 b may extend over at least part of the length of the first flank of the temporarystud 2 a, 2 b.lateral groove - It may also be possible to form each
6 a, 6 b of a plurality of elementary studs, distinct from each other, arranged over a more or less extensive length of the area of thestud first face 11 forming a first flank of the 2 a, 2 b.temporary groove - Whatever the shape, volume or arrangement of the
6 a, 6 b in thestuds 2 a, 2 b, they are advantageously so large that it is not possible to perfectly accommodate the wire elements in thetemporary grooves 2 a, 2 b without the wires establishing contact with thetemporary grooves 6 a, 6 b. Eachstuds 6 a, 6 b forms a reserve of a bonding material that will allow thestud 7 a, 7 b housed in awire element 2 a, 2 b to be fixed to thetemporary groove chip 1. - As stated above, according to a first embodiment, the assembly of
chip 1 on the 7 a, 7 b may have only a mechanical function. In this case, the bonding material forming thewire element 6 a, 6 b can be a simple adhesive substance, e.g., a polymer. It may be a viscous substance, which can be cured during the next fixing step and thus bond thestuds 7 a, 7 b and thewire element chip 1 together. - The
6 a, 6 b are advantageously deposited prior to the application step ofstuds cover 5 on thefirst face 11 ofchip 1. - According to a second embodiment, in which it is desired to establish an electrical connection between
chip 1 and 7 a, 7 b, the connecting material ofwire element 6 a, 6 b is chosen from electrically conductive materials. It may include a plurality of elemental compounds. For example, it may be an alloy of metals, such as tin, silver and copper. The material constituting eachstud 6 a, 6 b is chosen so that its melting point is relatively low. This melting temperature is lower than the maximum temperature to which thestud microelectronic component 4 of thechip 1 can be exposed without causing damage. If, for example, this maximum temperature is 350° C., the material of the 6 a, 6 b should be chosen so that their melting temperature is lower than 350° C., for example, 300° C. Advantageously, for reasons of simplicity of implementation of the assembly process, this material is chosen so that its melting temperature is between 80° C. and 250° C., between 80° C. and 150° C., or even between 80° C. and 100° C. In addition, it is not necessary that allstuds 6 a, 6 b be made of the same material.elementary studs - The
6 a, 6 b can be advantageously manufactured during the manufacture ofstuds chip 1, for example, by forming them by deposition on thesubstrate 3, in contact with theconnection terminals 4 a. The 6 a, 6 b are advantageously formed before the application step ofstuds cover 5 on thefirst face 11 ofchip 1. - During the insertion step, a longitudinal portion of at least one
7 a, 7 b is placed along the (at least one)wire element 2 a, 2 b. Thetemporary groove 7 a, 7 b is then submitted to limited forces to press it againstwire element 6 a, 6 b.stud - The assembly process according to the present disclosure also includes a step of fixing the
7 a, 7 b on thewire element microelectronic chip 1. In general, the fixing step uses a bonding material or adhesive substance to maintain contact between the 7 a, 7 b andwire element chip 1, even when thetemporary cover 5 is no longer in contact withchip 1. - This bonding material or adhesive may have been dispensed before or after the application of
cover 5 and the insertion of 7 a, 7 b, as previously stated. Thus, the fixing step can be done by injecting an adhesive substance along the wire near thewire element first face 11 ofchip 1, after its insertion into the 2 a, 2 b. The fixing step can also provide for the application of a bonding material, for example, by soldering.temporary groove - In the preferred method of application,
6 a, 6 b were previously formed instuds 2 a, 2 b. As shown ingroove FIG. 6a , the fixing step solidarizes all or part of the longitudinal portion of the 7 a, 7 b inserted in thewire element 2 a, 2 b on thetemporary groove first face 11 via the 6 a, 6 b.studs - In the first embodiment in which the
6 a, 6 b are formed by an adhesive substance not yet cured, the substance will deform when thestuds 7 a, 7 b is inserted and partially surround thewire element 7 a, 7 b. The fixing step is completed as soon as the adhesive substance has cured in order to ensure fixation. This curing may require the adhesive substance to be treated, for example, with ultraviolet radiation.wire element - The material of the
cover 5 or at least the material placed on the surface ofcover 5 shall be chosen in such a way that the adhesive substance does not adhere to it, or will adhere only slightly, in order to prevent it from becoming fixed to cover 5, since thecover 5 is intended to be removed from thefirst face 11 ofchip 1. - In the second embodiment in which the
6 a, 6 b are formed of a conductive material, for example, a metallic material, the fixing step includes a sequence of localized heating near the temporary groove2 a, 2 b to melt thestuds 6 a, 6 b against thestud 7 a, 7 b (wire element FIG. 6b ). - The heating sequence can be carried out with a heating means, for example, a generator of an air flow or another heated fluid flow, by induction, or by electromagnetic irradiation such as laser irradiation or ultraviolet radiation, generating a heat flow defining the heated zone at
chip 1. - Heating can alternatively be obtained by thermal conduction, for example, by heating the
cover 5 by means of heating resistors incorporated in the mass of thiscover 5. In this case, the heating means is integrated into thecover 5 itself. - Thus,
6 a, 6 b are heated at a processing temperature above the melting point of the bonding material they contain, and for a sufficient time to melt it. The change of the bonding material into the liquid state, combined with the weak forces exerted on thestuds 7 a, 7 b to maintain it against thewire element 2 a, 2 b, leads to the partial coating of thetemporary groove 7 a, 7 b into thewire element 2 a, 2 b, as shown intemporary groove FIG. 6c . Of course, it is not necessary for the bonding material of 6 a, 6 b to entirely pass into the liquid state to cause this partial coating.studs - Once the heating sequence is complete, a temperature lower than the melting temperature of the bonding material is restored, typically the ambient temperature, which leads to the solidification of the bonding material. As a result, the
7 a, 7 b is made integral with thewire element first face 11 and can establish electrical contact with theconnection terminals 4 a ofchip 1. - In this second embodiment, the cover is made of a material to which the conductive material of the
6 a, 6 b does not adhere in order to avoid adhesion of thestuds 6 a, 6 b to thestuds cover 5, which is intended, as described above, to be removed from thefirst face 11 ofchip 1. For example, 6 a, 6 b, deposited and fixed on astud connection terminal 4 a ofchip 1, could be made of an alloy of metals, for example, tin, silver and copper. The fixing step allows the 7 a, 7 b, made, for example, of stainless steel, copper or a copper-based alloy, to be attached towire element 6 a, 6 b.stud Cover 5 may consist of a type of ceramic, silicon oxide, metal oxide or metal alloy, for example, coated with chromium, to which the tin-based solder (conductor material of 6 a, 6 b) does not adhere.stud - When the
chip 1 has several 2 a, 2 b to accommodatetemporary grooves 7 a, 7 b, the fixing step can be carried out successively or simultaneously for each of theseveral wire elements 7 a, 7 b. The zone exposed to the processing temperature may be large enough to at least partially include all thewire elements 6 a, 6 b. Alternatively, the insertion step may include the simultaneous or successive exposure of several distinct zones, each encompassing at least a portion of thestuds 6 a, 6 b.studs - Lastly, the assembly process according to the present disclosure includes a step of removing the
cover 5 from the microelectronic chip 1 (FIG. 6d ), after the fixing step described above. Thecontact face 51 is then separated from thefirst face 11 ofchip 1. For example, the removal step may include interrupting the vacuuming ofchannels 52, which stops the suction contact betweencontact face 51 and first face ofchip 1. -
Cover 5 can be attached to the end of an articulated arm of a chip handling device such as an automatic “pick and place” machine. The articulated arm equipped with a suction nozzle will be able to grasp achip 1 in a storage area and place it precisely in an assembly position, for example, on aholder 20, to successively apply and removecover 5 from thefirst face 11. - The present disclosure takes advantage of the respective configurations of the
cover 5 and themicroelectronic chip 1 to form at least one 2 a, 2 b in which atemporary groove 7 a, 7 b can be easily and precisely positioned. The fixing of thewire element 7 a, 7 b onwire element chip 1, for example, by means of a 6 a, 6 b placed on thestud first face 11 ofchip 1, allows the attachment and mechanical resistance of the chip / wire assembly.Cover 5 can then be removed fromchip 1 and applied to anotherchip 1. The process according to the present disclosure can be repeated and allows the assembly of a plurality ofmicroelectronic chips 1 on at least one 7 a, 7 b, to form a chain ofwire element chips 1. - The assembly process according to the present disclosure offers a solution that relaxes the stresses on the shape of the chip (and, in particular, on the presence of grooves) and allows a precise and reliable fixing of the
7 a, 7 b onwire element chip 1, due to the presence of the 2 a, 2 b.temporary groove - The assembly process according to the present disclosure may also include additional steps, after the wire element(s) 7 a, 7 b have been assembled on
chip 1 and thecover 5 has been removed. - Thus, the process may include a step of reinforcing the assembly formed by
chip 1 and the wire element(s) 7 a, 7 b. The reinforcement step may include dispensing an adhesive 18 on at least part of the wire element attached to themicroelectronic chip 1, as shown inFIG. 7a . Dispensing the adhesive 18 can be complemented by the curing thereof, for example, by UV treatment, which can be very short, of the order of one second or a few seconds, to stiffen the adhesive and promote the attachment thereof to the elements with which it is in contact. - The process may also include, as a complementary step, a step of encapsulating the
microelectronic chip 1 and the longitudinal portion of the 7 a, 7 b fixed on the chip, in a sufficiently rigid andwire element waterproof material 19, such as resin, to protect the assembly from mechanical or chemical stresses in its final application (FIG. 7b ). Preferably, this encapsulation is such that all sides ofchip 1 are well covered with the encapsulating material. - The encapsulation step can be done with or without a pre-strengthening step.
- The process may also include, as a complementary step, a step of cutting one or more wire element(s) 7 a, 7 b. This may involve sampling one segment of the chain for its integration into an object. It may also involve cutting a portion of the
7 a, 7 b to form a dipole antenna connected towire element chip 1, thus constituting a transmission circuit as taught in the document U.S. Pat. No. 8,471,773. The cutting of the 7 a, 7 b can be carried out by any means known per se, for example, by using a mechanical shearing tool or by laser cutting.wire element - Of course, the invention is not limited to the described embodiments and alternative solutions can be used without departing from the scope of the invention, as defined in the claims.
Claims (20)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1753404A FR3065578B1 (en) | 2017-04-19 | 2017-04-19 | METHOD FOR ASSEMBLING A MICROELECTRONIC CHIP ON A WIRED ELEMENT |
| FR1753404 | 2017-04-19 | ||
| PCT/FR2018/050955 WO2018193198A1 (en) | 2017-04-19 | 2018-04-16 | Method for joining a microelectronic chip to a wire element |
Publications (2)
| Publication Number | Publication Date |
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| US20200335475A1 true US20200335475A1 (en) | 2020-10-22 |
| US11081466B2 US11081466B2 (en) | 2021-08-03 |
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|---|---|---|---|
| US16/606,684 Active 2038-05-22 US11081466B2 (en) | 2017-04-19 | 2018-04-16 | Method for joining a micorelectronic chip to a wire element |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11081466B2 (en) |
| EP (1) | EP3613074B1 (en) |
| CN (1) | CN110520978B (en) |
| FR (1) | FR3065578B1 (en) |
| WO (1) | WO2018193198A1 (en) |
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| FR3103043B1 (en) | 2019-11-08 | 2022-08-05 | Primo1D | ELECTRONIC IDENTIFICATION TAG COMPRISING A WIRED ELECTRONIC IDENTIFICATION DEVICE, METHOD FOR MANUFACTURING SUCH A LABEL AND TEXTILE PART PROVIDED WITH SUCH A LABEL. |
| FR3103293B1 (en) * | 2019-11-19 | 2022-07-08 | Commissariat Energie Atomique | RFID Tag |
| EP3923195B1 (en) | 2020-06-11 | 2023-08-23 | Primo1D | Electronic label with a flexible and deformable nature |
| FR3150613B1 (en) | 2023-06-30 | 2025-12-12 | Primo1D | Radio frequency transmission and reception device comprising a conductive wire forming an antenna wound in turns |
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| US7023093B2 (en) * | 2002-10-24 | 2006-04-04 | International Business Machines Corporation | Very low effective dielectric constant interconnect Structures and methods for fabricating the same |
| DE102005055280B3 (en) * | 2005-11-17 | 2007-04-12 | Infineon Technologies Ag | Connecting elements for semiconductor components have mushroom shape with first metal area filling out indentations on top of insulating layer and with second metal area on containing refractory inter-metallic phases of metals of solder |
| JP4855849B2 (en) * | 2006-06-30 | 2012-01-18 | 富士通株式会社 | RFID tag manufacturing method and RFID tag |
| FR2905518B1 (en) | 2006-08-29 | 2008-12-26 | Commissariat Energie Atomique | LATERAL FACED MICROELECTRONIC CHIP WITH GROOVES AND METHOD OF MANUFACTURE |
| WO2008080245A2 (en) * | 2006-12-28 | 2008-07-10 | Gerhard Staufert | Filament |
| FR2917895B1 (en) | 2007-06-21 | 2010-04-09 | Commissariat Energie Atomique | METHOD FOR MANUFACTURING AN ASSEMBLY OF MECHANICALLY CONNECTED CHIPS USING A FLEXIBLE CONNECTION |
| FR2928491A1 (en) | 2008-03-06 | 2009-09-11 | Commissariat Energie Atomique | METHOD AND DEVICE FOR MANUFACTURING AN ASSEMBLY OF AT LEAST TWO MICROELECTRONIC CHIPS |
| JP5498751B2 (en) * | 2009-10-05 | 2014-05-21 | ルネサスエレクトロニクス株式会社 | Manufacturing method of semiconductor device |
| JP5693605B2 (en) | 2009-12-09 | 2015-04-01 | コミサリア ア レネルジー アトミック エ オ ゼネルジー アルテルナティブCommissariat Al’Energie Atomique Et Aux Energiesalternatives | Solar cell, method of assembling a plurality of cells, and assembly of a plurality of solar cells |
| FR2954588B1 (en) * | 2009-12-23 | 2014-07-25 | Commissariat Energie Atomique | METHOD FOR ASSEMBLING AT LEAST ONE CHIP WITH A WIRED ELEMENT, ELECTRONIC CHIP WITH DEFORMABLE BONDING ELEMENT, METHOD FOR MANUFACTURING A PLURALITY OF CHIPS, AND ASSEMBLY OF AT LEAST ONE CHIP WITH A WIRED ELEMENT |
| FR2960339B1 (en) * | 2010-05-18 | 2012-05-18 | Commissariat Energie Atomique | METHOD FOR PRODUCING CHIP ELEMENTS WITH WIRE INSERTION GROOVES |
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| FR2961947B1 (en) | 2010-06-24 | 2013-03-15 | Commissariat Energie Atomique | INCORPORATION OF CHIP ELEMENTS IN A GUIPE WIRE |
| FR2964786B1 (en) * | 2010-09-09 | 2013-03-15 | Commissariat Energie Atomique | METHOD FOR PRODUCING CHIP ELEMENTS WITH WIRE INSERTION GROOVES |
| JP2013077631A (en) * | 2011-09-29 | 2013-04-25 | Ulvac Japan Ltd | Manufacturing method of semiconductor device and semiconductor device |
| FR2995721B1 (en) | 2012-09-17 | 2014-11-21 | Commissariat Energie Atomique | HOOD FOR GROOVING DEVICE AND CHIP, DEVICE EQUIPPED WITH THE HOOD, ASSEMBLING THE DEVICE WITH A WIRED ELEMENT AND METHOD OF MANUFACTURE |
| EP2897084A1 (en) * | 2014-01-20 | 2015-07-22 | King's Metal Fiber Technologies Co., Ltd. | Structure of textile |
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- 2018-04-16 CN CN201880024863.9A patent/CN110520978B/en active Active
- 2018-04-16 EP EP18719983.1A patent/EP3613074B1/en active Active
- 2018-04-16 WO PCT/FR2018/050955 patent/WO2018193198A1/en not_active Ceased
- 2018-04-16 US US16/606,684 patent/US11081466B2/en active Active
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|---|---|---|---|---|
| US12175849B2 (en) | 2018-05-22 | 2024-12-24 | Tyco Fire & Security Gmbh | Elongate flexible tag |
| US12223814B2 (en) | 2019-09-16 | 2025-02-11 | Sensormatic Electronics, LLC | Security tag for textiles using conductive thread |
| US11861440B2 (en) | 2019-09-18 | 2024-01-02 | Sensormatic Electronics, LLC | Systems and methods for providing tags adapted to be incorporated with or in items |
| US11928538B2 (en) | 2019-09-18 | 2024-03-12 | Sensormatic Electronics, LLC | Systems and methods for laser tuning and attaching RFID tags to products |
| US11769026B2 (en) | 2019-11-27 | 2023-09-26 | Sensormatic Electronics, LLC | Flexible water-resistant sensor tag |
| US12524640B2 (en) | 2019-11-27 | 2026-01-13 | Sensormatic Electronics, LLC | Flexible water-resistant sensor tag |
| EP4044364A1 (en) | 2021-02-15 | 2022-08-17 | Primo1D | Radiofrequency transceiver device using an antenna made up of a textile wire and a conductive ribbon and associated electronic tag |
| FR3119944A1 (en) | 2021-02-15 | 2022-08-19 | Primo1D | Radiofrequency transmission-reception device using an antenna composed of a textile yarn and a conductive tape and associated electronic tag |
| US11755874B2 (en) | 2021-03-03 | 2023-09-12 | Sensormatic Electronics, LLC | Methods and systems for heat applied sensor tag |
| FR3131253A1 (en) | 2021-12-23 | 2023-06-30 | Primo1D | Tire equipped with a radiofrequency transmission-reception device |
| US11869324B2 (en) | 2021-12-23 | 2024-01-09 | Sensormatic Electronics, LLC | Securing a security tag into an article |
| EP4201712A1 (en) | 2021-12-23 | 2023-06-28 | Primo1D | Tyre equipped with a radiofrequency transmission-reception device |
| US12536401B2 (en) | 2022-08-31 | 2026-01-27 | Sensormatic Electronics, LLC | Security tag |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3613074B1 (en) | 2022-06-22 |
| FR3065578B1 (en) | 2019-05-03 |
| CN110520978A (en) | 2019-11-29 |
| FR3065578A1 (en) | 2018-10-26 |
| US11081466B2 (en) | 2021-08-03 |
| WO2018193198A1 (en) | 2018-10-25 |
| EP3613074A1 (en) | 2020-02-26 |
| CN110520978B (en) | 2023-08-15 |
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