WO1992021018A1

WO1992021018A1 - A gas sensor

Info

Publication number: WO1992021018A1
Application number: PCT/GB1992/000897
Authority: WO
Inventors: David Edward Williams
Original assignee: Capteur Sensors and Analysers Ltd; UK Atomic Energy Authority
Current assignee: Capteur Sensors and Analysers Ltd; UK Atomic Energy Authority
Priority date: 1991-05-18
Filing date: 1992-05-18
Publication date: 1992-11-26
Anticipated expiration: 1993-11-18
Also published as: GB2256055A; EP0591240A1; JPH07500412A; DE69209837D1; GB2256055B; JP3155275B2; CA2109619C; CA2109619A1; GB9210333D0; DE69209837T2; EP0591240B1; GB9110797D0

Abstract

A gas sensor, for detecting the presence of a gas in a gas mixture, comprises two pairs of electrodes (2, 3; 2, 4) mounted on a sensing element (5) either with the electrodes of each pair spaced apart by a different amount, or with the relationship between the electrodes of one pair and the active surface of the sensing element being different in the case of each set. In use, the ratio of the electrical resistances across the two pairs of electrodes is measured, and the measured values of this ratio are compared with a calibration curve indicating how the ratio varies with concentration of the gas to be detected.

Description

A GAS SENSOR

This invention relates to methods for detecting at least one gaseous medium in the presence of at least one other gaseous medium, and to gas sensors suitable for use in such methods and having a sensing element made of a semiconducting metal oxide material.

It is well known that the electrical conductivities of metal oxide semiconducting materials are sensitive to the presence of various gases or vapours and can be used in sensors to detect their presence, see for example the documents GB-A-2 149 120; GB-A-2 149 121; GB-A-2 149 122; GB-A-2 149 123; GB-A-2 166 244 and GB-A-2 218 532, and papers "The Tin Oxide Gas Sensor and its applications", J. Watson, Sensors and Actuators 54(1984) 29-42; "The Detection and Measurement of CO using ZnO Single Crystals", B. Bott et al, Sensors and Actuators 5(1984) 65-73; "The Role of Catalysis in Solid State Gas Sensors", S. J. Gentry et al, Sensors and Actuators 10(1986) 141-163; "Selectivity in Semiconductor Gas Sensors", S. R. Morrison, Sensors and Actuators 12(1987) 425-440; and "Electrical Conduction in Solid State Gas Sensors", J. W. Gardner, Sensors and Actuators 18(1989) 373-387.

All such gas sensors rely on the gaseous medium under observation impinging on a surface of a body of the semiconducting metal oxide material and then undergoing some reaction with it which affects the conductance of the semiconducting metal oxide material, which is detected by means of at least one pair of electrodes which are formed upon the body of semiconducting metal oxide material. Hence their performance can be affected by the presence of substances, gaseous or otherwise (other than the materials to be detected) , that affect the surface chemistry of the body of semiconducting metal oxide material. It is important to be able to detect when such spurious effects are occurring.

The present invention is based upon the fact that in a perfectly operating detector, at a given temperature the ratio of the resistance between a first pair of electrodes which form part of the sensor and that between a second pair of electrodes, which also form part of the sensor, but which have a different separation than that between the first pair of electrodes, should vary in a consistent way as a function of the concentration of one gaseous medium, to which the sensor material is adapted to respond, when in the presence of another.

If, however, any changes occur in the surface chemistry of the semiconducting metal oxide material such as may be caused by a poisoning material, then the ratio of the two resistances corresponding to various compositions of the gaseous mixture will no longer vary in the same way as before. Hence by making continuous measurements of the ratio of the resistances between the two sets of electrodes and comparing the changes in the ratio of the resistances with a calibration curve, one can distinguish between changes due to real changes in the composition of the gaseous medium under observation and spurious changes due to changes in the performance of the sensor.

According to the invention in a first aspect, a method for determining the presence of a first gaseous medium in a second gaseous medium, is characterised by the operations of:

(1) Exposing to the second gaseous medium an active surface of a body of electrically conductive material the electrical conductivity of which is sensitive to the presence of the first gaseous medium in the second gaseous medium and which forms part of a gas sensor;

(2) measuring as a function of time the ratio of the electrical resistances between a first set of electrodes and a second set of electrodes formed on the said body, the spacings between the sets of electrodes or their position in relation to the said active surface of the body being different; and

(3) comparing the measured values of the said ratio of the resistances between the two sets of electrodes with a calibration curve indicative of the variation of the said ratio with the concentration of the first gaseous medium in the second gaseous medium, whereby to determine the composition of the gaseous medium and to detect any malfunctioning of the sensor.

According to the invention in a second aspect, a gas sensor for determining the presence of a first gaseous medium in a second gaseous medium, is characterised by: a body of an electrically conductive material having an electrical conductivity sensitive to the presence of the first gaseous medium in the second gaseous medium; a first set of electrodes disposed on the said body; a second set of electrodes disposed on the said body, the distance between the electrodes of a set of electrodes, or the relationship between the electrodes of a set and an active surface of the said body, being different in the case of each said set; and means for determining the ratio of the resistance between a pair of electrodes of the first set and that between a pair of electrodes of the second set.

In a preferred embodiment of the invention, the pair of electrodes used include a common electrode situated asymetrically between two outer electrodes. This arrangement is applicable to both planar and cylindrical geometries for the device.

In another arrangement, the electrically conductive body is in the form of a porous disc with a common electrode formed over one planar surface, a central disc electrode on the other planar surface of the disc and an annular electrode surrounding the central disc electrode and concentric with it.

A preferred material for use in the present invention comprises a semiconducting metal oxide ceramic material, which may be in the form of a single such oxide or a mixture of such oxides. Examples of such oxides are tin (IV) oxide, zinc oxide, tungsten (VI) oxide and the oxides described in U.K. patent specifications Nos. GB-A-2 149 120; GB-A-2 149 121;

GB-A-2 149 122; GB-A-2 149 123; GB-A-2 166 244. The above oxides can be made to be catalytic for a combustion reaction for use in the performance of the present invention by providing a thin surface coating of particles of one of the well-known catalytic metals such as Pt or Pd; alternatively, they can be made to be catalytic for a decomposition reaction by providing a coating of a suitable material. A decomposition catalyst may be chosen that is specific to a selected gas. Also, the semiconducting metal oxide material can be chosen to be sensitive to a decomposition product of a selected gas.

Examples of gases the presence of which may be detected by the present invention include hydrocarbons such as methane, ethane, propane, butane, ethylene, benzene and toluene; carbon monoxide; hydrogen; ammonia; hydrogen sulphide; nitrogen dioxide; sulphur dioxide; alcohol vapours such as those of methanol and ethanol; and aldehyde and ketone vapours such as those of formaldehyde, acetone and methyl ethyl ketone.

Embodiments of the invention will now be described, by way of example only and with reference to the accompanying drawings in which:-

Figure 1 is in two parts denoted (a) and (b) , which are a plan view and a cross sectional view, respectively, of a gas sensor in a first embodiment of the invention;

Figure 2 is again in two parts denoted (a) and (b), which are a cross sectional view and a plan view, respectively, of a gas sensor in a second embodiment of the invention;

Figure 3 is a general view of a gas sensor in a third embodiment of the invention;

Figure 4 shows, for the sensor of Figure 1, the variation of the ratio of the resistance measured between widely spaced electrodes to that measured between closely spaced electrodes, as a function of gas concentration for reactive and unreactive gases; Figure 5 shows, for the sensor of Figure 2, a three- dimensional plot of the ratio of the resistance measured between a common electrode and an inner disc electrode to that measured between the common electrode and an outer ring electrode, as a function of gas concentration and temperature; and

Figure 6 is a plot, in respect of planar sensors as shown in Figure 1 , of the variable shown in Figure 4 for a sensor which is working perfectly and one which is not.

The sensor shown in Figure 1 consists of a gas- impermeable substrate 1 such as a piece of alumina, upon which are deposited three electrodes 2, 3 and 4. The central electrode 3 is closer to the electrode 2 than to the electrode 4. A body of semiconducting metal oxide material partly covers the electrodes 2, 3 and 4 and constitutes a sensing element 5. The sensing element 5 is porous and has an electrical conductivity which is sensitive to a gas to be detected by the sensor. Its outer surface is active, i.e. exposed to the gaseous environment. If necessary a catalytic layer, not shown, can be deposited on the sensing element 5 to ensure that this gas either burns or is decomposed, so as to cause a change to occur in the conductivity of the sensing element 5.

In the sensor shown in Figure 2, the sensing element is in the form of a disc 21 of porous semiconducting metal oxide material. A metal electrode 22 covers one flat face of the sensing element 21. On the other flat face of the sensing element 21 , a central disc electrode 23 and an annular outer electrode 24 are arranged coaxially. The sensing element 21 , together with its electrodes 22, 23 and 24 are sandwiched between two flat, parallel, impervious insulating tiles. Contact leads 27 and 28 are attached to the edges of the electrodes 22 and 24 respectively, and a further lead 29 is attached to the electrode 23 via a hole 30 in the corresponding tile. The active surface of the element 21 is here its outer cylindrical surface, which is exposed.

In Figure 2, it can be seen that the relationship between the set 22, 23 and the active surface is different from that between the set 22, 24 and the same surface, in that the electrode 24 is close to the latter whereas the electrode 23 is as far away from it as is possible with this configuration.

Figure 3 shows a sensor of tubular geometry, but in fact it is similar to the sensor of Figure 1. In the Figures, corresponding elements have corresponding reference numerals. The common electrode 3 is closer to one of the electrodes 2, 4 than to the other. Contact with the electrodes 2, 3 and 4 in Figure 3 is made via leads 31 , 32 and 33 respectively, which run inside the tubular substrate 34, the outer surfaces of which are active.

In describing the operation of such devices, it is necessary to introduce two parameters Kp and K_τ. Kp is a measure of the sensitivity of the material of the sensing element to a given gas and hence the concentration of that gas in a gaseous medium under test. K*p is a measure of the rate of diffusion, through the sensing element, of the gas or of products of its combustion or decomposition. Kq> is a function of the operating temperature of the sensor, and this gives the opportunity to use one sensor for the detection of different gases in a mixture by varying the operating temperature of the sensor.

Referring to Figures 4 and 5, Figure 4 shows, for the sensor of Figure 1 , the variation of the ratio of the resistance measured between the electrodes 3 and 4 to the resistance measured between the electrodes 2 and 3, as a function (Kp) of the concentration of two gases. Gas 1 is a reactive gas such as carbon monoxide or hydrogen. Gas 2 is an unreactive gas such as methane. Both curves were obtained at the same temperature, so that K«r is constant in both cases.

Figure 5, on the other hand, shows for the sensor of Figure 2 a three-dimensional plot of the ratio of the resistance (R [inner disc]) between the inner disc 23 and the common electrode 22 and the resistance (R [outer ring]) between the annular outer electrode 24 and the electrode 22, with variation of both the gas concentration parameter Kp and the gas reactivity or diffusion rate parameter Kip.

Both Figures show that, for unreactive gases (which have a low diffusion parameter Kf) , the ratio of resistances between the different pairs of electrodes is independent of gas concentration, whereas for reactive gases (which have a high diffusion parameter Kip) the ratio of the resistances between the different pairs of electrodes varies considerably with the concentration of the gas. Any zero drift of the sensor is of course cancelled out in the respective resistance ratios. If a further number of electrodes at different spacings are used in a planar sensor (e.g. as in Figure 1), or in different radial positions in a disc sensor (e.g. as in Figure 2), then taking appropriate ratios will allow the measurement of multiple gases in mixtures to be made. This is because it will usually be possible, especially if use is also made of the possibility of varying the temperature, that one particular gas in the mixture has a composition gradient extending across the gas-sensitive part of the sensor, whereas the other gases in the mixture are either uniform in concentration throughout the gas-sensitive part of the sensor, or have a concentration which falls rapidly to zero at the outer surface of the sensing element.

Referring now to Figure 6, this includes a plot, for a planar sensor such as that of Figure 1 , of the resistance measured between the more widely-spaced electrodes 3 and 4 against the resistance measured between the closer electrodes 2 and 3, with Kp (the concentration of the reactive gas) as parameter. The value of K<p is fixed, as Figure 6 refers to a single gas at a fixed sensor temperature. If the sensor is operating correctly, then the resistance between the two pairs of electrodes will move along the line shown as the concentration of the reactive gas changes. This line my be referred to as "the operating line". If something other than the concentration of the reactive gas changes, then the measured operating point will move off the expected operating line and the operating line of the sensor as measured will change also.

Also shown in Figure 6 is a measured operating line where the sensing element of a sensor according to the invention has become poisoned such that, in the outer part of the sensing element extending inwardly from its surface through some fraction of its thickness, the reactive gas does not burn and the conductivity of the material of the sensing element does not respond to the presence of the reactive gas.

Thus should a point defined by measured resistances be found to be off an operating line obtained under perfect conditions as a calibration curve, then there is indicated a change in conditions other than a change in the concentration of the reactive gas. Factors, other than the poisoning of the sensitive element, which can cause such a change include drifts in the zero resistance of the sensor and the presence of reactive gases other than a specific reactive gas. The use of sensors according to the invention and the taking of repeated measurements to derive a measured operating line enables such changes to be distinguished from changes in the concentration of the specific reactive gas that is to be detected. This reduces the possibility of false alarms if a sensor is being used to monitor the composition of the given mixture, or can give an indication that a sensor has become faulty and needs to be changed. The value of the gas concentration would be obtained from the value of one of the measured resistances, or from the ratio of the measured resistances when compared with calibration values.

In circumstances where it is known that progressive sensor poisoning takes place, a more elaborate arrangement (not illustrated) enables the progression of the poisoning of the sensor to be followed, and a warning given when it is no longer performing usefully. Instead of two pairs of electrodes being used, there are in this case three pairs of electrodes, of narrow, intermediate and wide spcings. There are now two operating lines, defined by "narrow/intermediate" and "narrow/wide" electrode spacing resistance ratios. Poisoning of the sensitive element will affect the narrow/wide operating line first and the changes in this operating line will chart the progress of the poisoning. Eventually the narrow/intermediate operating line will begin to be affected. The onset of this change can be used to trigger a suitable warning device.

If three pairs of electrodes are used, then the three resistances define an operating surface instead of an operating line, and a measured operating point would move off this surfce in the event of poisoning of the sensor.

It is evident that the above statements apply equally to the disc geometry, with the inner disc 23 corresponding to the closer electrodes 2 and 3 of the planar geometry, and with concentric ring electrodes of increasing radius then corresponding to progressively more widely-spaced electrodes of the planar geometry.

So far as the material of the sensitive layer is concerned, any of the materials listed above can be used. A particular material is chosen in relation to a specific reactive gas to be detected. For example, if it is desired to detect methane in air, then tin dioxide is a suitable material for the sensitive layer. Carbon monoxide in air may be detected also using tin dioxide for the sensitive layer.

Claims

1. A method for determining the presence of a first gaseous medium in a second gaseous medium, characterised by the operations of:

(1) Exposing to the second gaseous medium an active surface of a body (5; 21) of electrically conductive material the electrical conductivity of which is sensitive to the presence of the first gaseous medium in the second gaseous medium and which forms part of a gas sensor;

(2) measuring as a function of time the ratio of the electrical resistances between a first set of electrodes (2, 3; 22, 23) and a second set of electrodes (3, 4; 22, 24) formed on the said body, the spacings between the sets of electrodes or their position in relation to the said active surface of the body being different; and

2. A gas sensor for determining the presence of a first gaseous medium in a second gaseous medium, characterised by: a body (5; 21) of an electrically conductive material having an electrical conductivity sensitive to the presence of the first gaseous medium in the second gaseous medium; a first set of electrodes (2, 3; 22 , 23) disposed on the said body; a second set of electrodes (3, 4; 22, 24) disposed on the said body, the distance between the electrodes of a set of electrodes, or the relationship between the electrodes of a set and an active surface of the said body, being different in the case of each said set; and means for determining the ratio of the resistance between a pair of electrodes of the first set and that between a pair of electrodes of the second set.

3. A sensor according to Claim 2, characterised by an electrode (3; 22) common to more than one said set.

4. A sensor according to Claim 2 or Claim 3, characterised in that the sensor is of planar configuration, the said body (5) being generally planar with the electrodes (2 to 4) being disposed in contact with a flat surface of the body.

5. A sensor according to Claim 2 or Claim 3, characterised in that the sensor is of cylindrical configuration, the said body (5) being generally cylindrical with the electrodes (2 to 4) being disposed in contact with a cylindrical surface of the body.

6. A sensor according to Claim 3, characterised in that the electrically conductive body is in the form of a porous disc (21) with an electrode (22), common to both said sets, formed over one planar surface, a central disc electrode (23) of one said set on its other planar surface, and an annular electrode (24) of the other said set surrounding the central disc electrode and concentric with it.

7. A sensor according to any one of Claims 2 to 6, characterised in that the body (5; 21) is made of at least one semiconducting metal oxide ceramic material.

8. A sensor according to Claim 7, characterised in that the body (5; 21) has a thin coating of a catalytic material suitable for catalysing at least one type of reaction in the group comprising combustion and decomposition reactions.