WO1995034945A3 - A method and an apparatus for controlling the transfer of high frequency power from an electric ac generator to an item to be treated - Google Patents

A method and an apparatus for controlling the transfer of high frequency power from an electric ac generator to an item to be treated Download PDF

Info

Publication number
WO1995034945A3
WO1995034945A3 PCT/DK1995/000219 DK9500219W WO9534945A3 WO 1995034945 A3 WO1995034945 A3 WO 1995034945A3 DK 9500219 W DK9500219 W DK 9500219W WO 9534945 A3 WO9534945 A3 WO 9534945A3
Authority
WO
WIPO (PCT)
Prior art keywords
item
treated
need
impedance matching
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DK1995/000219
Other languages
French (fr)
Other versions
WO1995034945A2 (en
Inventor
Steen Adser-Larsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADSER LARSEN STEEN
Original Assignee
ADSER LARSEN STEEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADSER LARSEN STEEN filed Critical ADSER LARSEN STEEN
Priority to AU26119/95A priority Critical patent/AU2611995A/en
Priority to EP19950920794 priority patent/EP0764361A2/en
Publication of WO1995034945A2 publication Critical patent/WO1995034945A2/en
Publication of WO1995034945A3 publication Critical patent/WO1995034945A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/04—Dielectric heating, e.g. high-frequency welding, i.e. radio frequency welding of plastic materials having dielectric properties, e.g. PVC
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/912—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux
    • B29C66/9131—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the heat or the thermal flux, i.e. the heat flux
    • B29C66/91311—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the heat or the thermal flux, i.e. the heat flux by measuring the heat generated by Joule heating or induction heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/914—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
    • B29C66/9161—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux
    • B29C66/91651—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux by controlling or regulating the heat generated by Joule heating or induction heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/914—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
    • B29C66/9161—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux
    • B29C66/91651—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux by controlling or regulating the heat generated by Joule heating or induction heating
    • B29C66/91653—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux by controlling or regulating the heat generated by Joule heating or induction heating by controlling or regulating the voltage, i.e. the electric potential difference or electric tension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/919—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/96—Measuring or controlling the joining process characterised by the method for implementing the controlling of the joining process
    • B29C66/961—Measuring or controlling the joining process characterised by the method for implementing the controlling of the joining process involving a feedback loop mechanism, e.g. comparison with a desired value
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/46—Dielectric heating
    • H05B6/48—Circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/94—Measuring or controlling the joining process by measuring or controlling the time
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/94—Measuring or controlling the joining process by measuring or controlling the time
    • B29C66/949—Measuring or controlling the joining process by measuring or controlling the time characterised by specific time values or ranges

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Discharge Heating (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)

Abstract

When treating items with high-frequency electric power there is a need for making a correct impedance matching can be made between a generator and a tool holding the item to be treated, and there is a need to avoid the formation of standing waves in transmission lines, etc.. In addition there is a need to be able to treat items having a dimension which is comparable with the wave length at the frequency used, and to be able to exactly measure the power transmitted to the treated item. This object is attained by means of a method which comprises tuning of a circuit to resonance and adjustment of an impedance transforming ratio to correct impedance matching, as well as correction of said adjustments during the treatment of the item. For carrying out the method an apparatus is provided which comprises at least two variable impedances as well as means for detecting deviation from resonance and from correct impedance matching. The two variable impedances are preferably a continuously variable capacitor and a continuously variable coil, and the detection is performed by measuring of the standing wave ratio on the transmission line.
PCT/DK1995/000219 1994-06-06 1995-06-02 A method and an apparatus for controlling the transfer of high frequency power from an electric ac generator to an item to be treated Ceased WO1995034945A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU26119/95A AU2611995A (en) 1994-06-06 1995-06-02 A method and an apparatus for controlling the transfer of high frequency power from an electric ac generator to an item to be treated
EP19950920794 EP0764361A2 (en) 1994-06-06 1995-06-02 A method and an apparatus for controlling the transfer of high frequency power from an electric ac generator to an item to be treated

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DK0636/94 1994-06-06
DK63694A DK63694A (en) 1994-06-06 1994-06-06 Method and apparatus for controlling the transmission of high frequency power from an electric alternator to a subject to be treated

Publications (2)

Publication Number Publication Date
WO1995034945A2 WO1995034945A2 (en) 1995-12-21
WO1995034945A3 true WO1995034945A3 (en) 1996-02-01

Family

ID=8095831

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DK1995/000219 Ceased WO1995034945A2 (en) 1994-06-06 1995-06-02 A method and an apparatus for controlling the transfer of high frequency power from an electric ac generator to an item to be treated

Country Status (5)

Country Link
EP (1) EP0764361A2 (en)
AU (1) AU2611995A (en)
CA (1) CA2192082A1 (en)
DK (1) DK63694A (en)
WO (1) WO1995034945A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7433755B2 (en) 2001-03-21 2008-10-07 Signature Control Systems, Inc. Controlling the curing of a rubber compound

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9708268D0 (en) 1997-04-24 1997-06-18 Gyrus Medical Ltd An electrosurgical instrument
US7167773B2 (en) 2001-03-21 2007-01-23 Signature Control Systems Process and apparatus for improving and controlling the curing of natural and synthetic moldable compounds
KR102791775B1 (en) 2019-05-07 2025-04-03 램 리써치 코포레이션 Closed-loop multiple output radio frequency (rf) matching
US12205796B2 (en) 2019-07-31 2025-01-21 Lam Research Corporation Radio frequency power generator having multiple output ports
CN114762079B (en) 2019-12-02 2025-02-28 朗姆研究公司 Impedance transformation in RF-assisted plasma generation
US11994542B2 (en) 2020-03-27 2024-05-28 Lam Research Corporation RF signal parameter measurement in an integrated circuit fabrication chamber
US12626895B2 (en) 2020-03-27 2026-05-12 Lam Research Corporation RF signal parameter measurement in an integrated circuit fabrication chamber
CN116075917A (en) 2020-06-12 2023-05-05 朗姆研究公司 Control of Plasma Formation by RF Coupling Structures
EP4009744B1 (en) * 2020-12-03 2025-10-15 Fresenius Kabi Deutschland GmbH Control circuitry comprising an adjustable capacitor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2415799A (en) * 1945-03-09 1947-02-11 Stevens Arnold Company Inc Automatic means for controlling the power fed to an oscillator load
US4499358A (en) * 1984-03-27 1985-02-12 The Mead Corporation Driving circuit for radio frequency dryer
EP0546502A2 (en) * 1991-12-09 1993-06-16 W.R. Grace & Co.-Conn. Apparatus and method for radio frequency sealing thermoplastic films together

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2415799A (en) * 1945-03-09 1947-02-11 Stevens Arnold Company Inc Automatic means for controlling the power fed to an oscillator load
US4499358A (en) * 1984-03-27 1985-02-12 The Mead Corporation Driving circuit for radio frequency dryer
EP0546502A2 (en) * 1991-12-09 1993-06-16 W.R. Grace & Co.-Conn. Apparatus and method for radio frequency sealing thermoplastic films together

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7433755B2 (en) 2001-03-21 2008-10-07 Signature Control Systems, Inc. Controlling the curing of a rubber compound

Also Published As

Publication number Publication date
DK169902B1 (en) 1995-03-27
WO1995034945A2 (en) 1995-12-21
EP0764361A2 (en) 1997-03-26
CA2192082A1 (en) 1995-12-21
DK63694A (en) 1995-03-27
AU2611995A (en) 1996-01-05

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