WO1996021182A3 - Flow controller, parts of flow controller, and related method - Google Patents

Flow controller, parts of flow controller, and related method Download PDF

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Publication number
WO1996021182A3
WO1996021182A3 PCT/US1995/015157 US9515157W WO9621182A3 WO 1996021182 A3 WO1996021182 A3 WO 1996021182A3 US 9515157 W US9515157 W US 9515157W WO 9621182 A3 WO9621182 A3 WO 9621182A3
Authority
WO
WIPO (PCT)
Prior art keywords
fluid flow
flow path
controller
rod structure
bushing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1995/015157
Other languages
French (fr)
Other versions
WO1996021182A2 (en
Inventor
Daniel T Mudd
Hai Duong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Tylan General Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tylan General Inc filed Critical Tylan General Inc
Priority to US08/860,343 priority Critical patent/US5901741A/en
Priority to KR1019970704536A priority patent/KR100323958B1/en
Priority to DE69517447T priority patent/DE69517447T2/en
Priority to AU42423/96A priority patent/AU4242396A/en
Priority to EP95940785A priority patent/EP0800672B1/en
Priority to JP52098096A priority patent/JP3717520B2/en
Publication of WO1996021182A2 publication Critical patent/WO1996021182A2/en
Publication of WO1996021182A3 publication Critical patent/WO1996021182A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P11/00—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for 
    • B23P11/005—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for  by expanding or crimping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0753—Control by change of position or inertia of system
    • Y10T137/0898—By shifting of liquid level
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87338—Flow passage with bypass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87338—Flow passage with bypass
    • Y10T137/87354—Including flowmeter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
    • Y10T29/49416—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting
    • Y10T29/49423—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting including metal deforming
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49426—Valve or choke making including metal shaping and diverse operation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Lift Valve (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
  • Temperature-Responsive Valves (AREA)

Abstract

A mass fluid flow controller has a valve which is controlled by a controller rod structure which is substantially pivotally mounted on a metallic diaphragm which stretches and unstretches with the movement of the rod structure. The actuation of the rod structure is by the expansion and contraction of an actuator wire which is heated for the expansion and allowed to cool for the contraction. The primary fluid flow path through the controller is straight. A sensor conduit, provididng a parallel sensor fluid flow path, is connected in position using metallic sealer members which extend in openings to the primary fluid flow path and which are rounded along the direction through such openings. The pressure drop, along the primary fluid flow path, to create flow through the sensor conduit, is provided by a fluid flow restrictor having a core and having lengths of wire along the core which are squeezed between the core and a tapered fluid flow path wall in the vicinity of the sensor conduit input and output connections. A spherical or a conical shape may be used for the form of the core. A valve seat bushing is mounted in pipe structure providing the primary fluid flow path by applying a force against an end surface of the bushing, with movement of the bushing blocked, in order to deform the end surface, push the outer wall of the bushing against the inner wall of the pipe structure, and fix the bushing in the pipe structure. In the relationship between the controller rod structure and a ball which acts as a gate-member for the valve, an elongated stem rod having a sleeve about it may be used in fixing the ball to the controller rod structure. The stem rod may be mounted by fixing it to the elongated sleeve, a distance from the gate-member side of the controller rod structure that is substantially greater than the distance of the position of the ball from the gate-member side of the controller rod structure.
PCT/US1995/015157 1994-12-29 1995-11-20 Flow controller, parts of flow controller, and related method Ceased WO1996021182A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US08/860,343 US5901741A (en) 1994-12-29 1995-11-20 Flow controller, parts of flow controller, and related method
KR1019970704536A KR100323958B1 (en) 1994-12-29 1995-11-20 Fluid flow controller
DE69517447T DE69517447T2 (en) 1994-12-29 1995-11-20 FLOW CONTROLLER
AU42423/96A AU4242396A (en) 1994-12-29 1995-11-20 Flow controller, parts of flow controller, and related method
EP95940785A EP0800672B1 (en) 1994-12-29 1995-11-20 Flow controller
JP52098096A JP3717520B2 (en) 1994-12-29 1995-11-20 Flow controller, flow controller parts and related methods

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/365,861 US5660207A (en) 1994-12-29 1994-12-29 Flow controller, parts of flow controller, and related method
US08/365,861 1994-12-29

Publications (2)

Publication Number Publication Date
WO1996021182A2 WO1996021182A2 (en) 1996-07-11
WO1996021182A3 true WO1996021182A3 (en) 1996-09-06

Family

ID=23440685

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1995/015157 Ceased WO1996021182A2 (en) 1994-12-29 1995-11-20 Flow controller, parts of flow controller, and related method

Country Status (10)

Country Link
US (4) US5660207A (en)
EP (4) EP0940740A3 (en)
JP (1) JP3717520B2 (en)
KR (1) KR100323958B1 (en)
CN (2) CN100334515C (en)
AU (1) AU4242396A (en)
DE (3) DE69526378T2 (en)
ES (1) ES2148585T3 (en)
TW (1) TW285723B (en)
WO (1) WO1996021182A2 (en)

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DE69517447D1 (en) 2000-07-13
TW285723B (en) 1996-09-11
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AU4242396A (en) 1996-07-24
US5901741A (en) 1999-05-11
EP0800672B1 (en) 2000-06-07
EP0940742A2 (en) 1999-09-08
EP0800672A2 (en) 1997-10-15
EP0940740A3 (en) 2000-07-12
EP0940741A3 (en) 2000-07-12
CN1155864C (en) 2004-06-30
CN100334515C (en) 2007-08-29
DE69517447T2 (en) 2001-01-11
WO1996021182A2 (en) 1996-07-11
JPH10512071A (en) 1998-11-17
EP0940742A3 (en) 2000-07-12
EP0940741A2 (en) 1999-09-08
ES2148585T3 (en) 2000-10-16
DE69535683D1 (en) 2008-02-21
US5660207A (en) 1997-08-26
KR100323958B1 (en) 2002-06-22
DE69535683T2 (en) 2009-01-08
EP0940742B1 (en) 2002-04-10
EP0940740A2 (en) 1999-09-08
US5850850A (en) 1998-12-22
CN1601420A (en) 2005-03-30
CN1175310A (en) 1998-03-04
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US5765283A (en) 1998-06-16
JP3717520B2 (en) 2005-11-16

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