WO1996021473A3 - Device and methods for plasma sterilization - Google Patents

Device and methods for plasma sterilization

Info

Publication number
WO1996021473A3
WO1996021473A3 PCT/US1995/017071 US9517071W WO9621473A3 WO 1996021473 A3 WO1996021473 A3 WO 1996021473A3 US 9517071 W US9517071 W US 9517071W WO 9621473 A3 WO9621473 A3 WO 9621473A3
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
water vapor
plasma
electromagnetic radiation
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1995/017071
Other languages
French (fr)
Other versions
WO1996021473A2 (en
WO1996021473A9 (en
Inventor
Clinton G Graves
Clinton G Ii Graves
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to AU49625/96A priority Critical patent/AU4962596A/en
Priority to JP8521703A priority patent/JPH11501530A/en
Priority to EP95944755A priority patent/EP0800406A4/en
Publication of WO1996021473A2 publication Critical patent/WO1996021473A2/en
Publication of WO1996021473A9 publication Critical patent/WO1996021473A9/en
Publication of WO1996021473A3 publication Critical patent/WO1996021473A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/02—Disinfection or sterilisation of materials or objects, in general; Accessories therefor using physical processes
    • A61L2/14—Plasma, i.e. ionised gases
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L11/00—Methods specially adapted for refuse

Landscapes

  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)

Abstract

The invention provides methods and apparatus for sterilizing articles. According to one exemplary method, at least one article is placed into a chamber and a vacuum is applied to the chamber. After the pressure within the chamber is sufficiently reduced, water vapor is introduced into the chamber and electromagnetic radiation energy is applied to produce a plasma. In one particularly preferable aspect, the chamber (14) is allowed to reach a static condition before the water vapor is introduced. In this way, the water vapor is able to equally distribute itself throughout the volume of the chamber (14) so that an equally distributed plasma can be produced upon application of the electromagnetic radiation energy.
PCT/US1995/017071 1994-12-29 1995-12-28 Device and methods for plasma sterilization Ceased WO1996021473A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU49625/96A AU4962596A (en) 1994-12-29 1995-12-28 Device and methods for plasma sterilization
JP8521703A JPH11501530A (en) 1994-12-29 1995-12-28 Apparatus and method for plasma sterilization
EP95944755A EP0800406A4 (en) 1994-12-29 1995-12-28 Device and methods for plasma sterilization

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/365,666 US5633424A (en) 1994-12-29 1994-12-29 Device and methods for plasma sterilization
US08/365,666 1994-12-29

Publications (3)

Publication Number Publication Date
WO1996021473A2 WO1996021473A2 (en) 1996-07-18
WO1996021473A9 WO1996021473A9 (en) 1996-10-10
WO1996021473A3 true WO1996021473A3 (en) 1997-01-16

Family

ID=23439822

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1995/017071 Ceased WO1996021473A2 (en) 1994-12-29 1995-12-28 Device and methods for plasma sterilization

Country Status (6)

Country Link
US (3) US5633424A (en)
EP (1) EP0800406A4 (en)
JP (1) JPH11501530A (en)
AU (1) AU4962596A (en)
CA (1) CA2208638A1 (en)
WO (1) WO1996021473A2 (en)

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US5603895B1 (en) * 1995-06-06 1998-11-03 Abtox Inc Plasma water vapor sterilizer and method
US6325972B1 (en) * 1998-12-30 2001-12-04 Ethicon, Inc. Apparatus and process for concentrating a liquid sterilant and sterilizing articles therewith
US6495100B1 (en) 1996-04-04 2002-12-17 Ethicon, Inc. Method for sterilizing devices in a container
US6030579A (en) * 1996-04-04 2000-02-29 Johnson & Johnson Medical, Inc. Method of sterilization using pretreatment with hydrogen peroxide
JP3014334B2 (en) * 1996-11-29 2000-02-28 キヤノン販売株式会社 Method for manufacturing semiconductor device
FR2759590B1 (en) * 1997-02-14 1999-05-07 Microondes Syst Sa METHOD FOR STERILIZING A SAMPLE
US6066294A (en) 1997-08-21 2000-05-23 Ethicon, Inc. Multi-compartment sterilization system
US6977061B2 (en) * 1997-04-04 2005-12-20 Ethicon Endo-Surgery, Inc. Method and apparatus for sterilizing a lumen device
US6528017B2 (en) 1997-04-04 2003-03-04 Ethicon, Inc. System and method for sterilizing a lumen device
US5879461A (en) * 1997-04-21 1999-03-09 Brooks Automation, Inc. Metered gas control in a substrate processing apparatus
US7803316B2 (en) * 1997-08-21 2010-09-28 Ethicon, Inc. Method and apparatus for processing a lumen device
US7229591B2 (en) * 1997-08-21 2007-06-12 Ethicon, Inc. Lumen sterilization device and method
US6815206B2 (en) * 1997-09-19 2004-11-09 Ethicon, Inc. Container monitoring system
KR100295639B1 (en) * 1998-01-14 2001-08-07 김영환 Method of forming a plug
US6177353B1 (en) * 1998-09-15 2001-01-23 Infineon Technologies North America Corp. Metallization etching techniques for reducing post-etch corrosion of metal lines
FR2790962B1 (en) * 1999-03-16 2003-10-10 Absys PLASMA STERILIZATION PROCESS AND DEVICES
US6096564A (en) * 1999-05-25 2000-08-01 Wisconsin Alumni Research Foundation Plasma-aided treatment of surfaces against bacterial attachment and biofilm deposition
EP1077475A3 (en) * 1999-08-11 2003-04-02 Applied Materials, Inc. Method of micromachining a multi-part cavity
US6724608B2 (en) * 2000-01-14 2004-04-20 Paul Hensley Method for plasma charging a probe
KR20000053747A (en) * 2000-03-23 2000-09-05 고중석 Vaporizer fitted Minute Quantitative Liquid Injection Device
FR2814079B1 (en) * 2000-09-15 2005-05-13 Absys PLASMA STERILIZATION SYSTEM
WO2002047142A1 (en) * 2000-12-05 2002-06-13 Tokyo Electron Limited Method and apparatus for treating article to be treated
GB0110191D0 (en) * 2001-04-25 2001-06-20 Oxford Instr Plasma Technology Sterilization method
US7090808B2 (en) * 2001-07-09 2006-08-15 Pharmaceutical Systems, Inc. Apparatus for testing sterilization methods and materials
WO2003078571A2 (en) * 2002-02-14 2003-09-25 Wen Sheree H Anti-infection and toxin elimination device
US6605484B2 (en) * 2001-11-30 2003-08-12 Axcelis Technologies, Inc. Process for optically erasing charge buildup during fabrication of an integrated circuit
US20040005261A1 (en) * 2002-04-23 2004-01-08 Jung-Suek Ko Plasma sterilization apparatus
KR100411930B1 (en) * 2002-06-17 2003-12-18 Human Meditek Co Ltd Plasma sterilizing apparatus with dehumidifier
US7201869B2 (en) * 2002-06-28 2007-04-10 Ethicon, Inc. Sterilizer with restrictor
US7300637B2 (en) * 2002-09-30 2007-11-27 Ethicon, Inc. Sterilization container kit
KR100414360B1 (en) * 2002-11-08 2004-01-16 주식회사 휴먼메디텍 Sterilizer and Sterilization methode with Plasma Treatment Apparatus
US8092644B2 (en) * 2003-06-16 2012-01-10 Ionfield Systems, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
CN1806066A (en) * 2003-06-16 2006-07-19 赛润克斯公司 Atmospheric pressure athermal plasma area equipment for cleaning and disinfecting surfaces of probes, cannulas, needles, pipettes and nozzles
US20060162740A1 (en) * 2005-01-21 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma
US8366871B2 (en) * 2003-06-16 2013-02-05 Ionfield Holdings, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
US20060272675A1 (en) * 2005-06-02 2006-12-07 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using plasma
US20060272674A1 (en) * 2005-06-02 2006-12-07 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using plasma
US20060162741A1 (en) * 2005-01-26 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
US8092643B2 (en) * 2003-06-16 2012-01-10 Ionfield Systems, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
EP1701747B1 (en) * 2004-01-07 2014-03-12 Noxilizer, Inc. Sterilisation method
US8017074B2 (en) 2004-01-07 2011-09-13 Noxilizer, Inc. Sterilization system and device
US7700039B2 (en) * 2004-03-19 2010-04-20 Japan Science And Technology Agency Microwave plasma sterilizing method and device
JP5301152B2 (en) * 2004-04-07 2013-09-25 ライナット ニューロサイエンス コーポレイション Method for treating bone cancer pain by administering a nerve growth factor antagonist
ITMI20041421A1 (en) * 2004-07-15 2004-10-15 Esambra S R L STERILIZER APPARATUS OF HOSPITAL WASTE AND SIMILAR
US20060237030A1 (en) * 2005-04-22 2006-10-26 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
JP2006331763A (en) * 2005-05-25 2006-12-07 Ngk Insulators Ltd Plasma processing device and plasma processing method using the same
WO2007013160A1 (en) * 2005-07-28 2007-02-01 Saga University Radical sterilization apparatus
KR100650857B1 (en) * 2005-12-23 2006-11-28 주식회사 하이닉스반도체 Manufacturing Method of Flash Memory Device
DE102006025736A1 (en) * 2006-05-31 2007-12-06 RUHR-UNIVERSITäT BOCHUM sterilization procedures
JP2007175529A (en) * 2007-03-08 2007-07-12 Miura Co Ltd Sterilizer
JP5327422B2 (en) * 2008-03-19 2013-10-30 国立大学法人佐賀大学 Filter processing device
US8343422B2 (en) 2008-08-08 2013-01-01 Chokichi Sato Water vapor plasma generating apparatus, sterilization and disinfection method, and method for antioxidative treatment using water vapor plasma
JP4838364B2 (en) * 2009-02-17 2011-12-14 長吉 佐藤 Steam plasma generator and sterilizer
WO2010096766A1 (en) 2009-02-23 2010-08-26 Noxilizer, Inc. Device and method for gas sterilization
WO2011138463A1 (en) * 2010-05-07 2011-11-10 Inp Greifswald - Leibniz-Institut Für Plasmaforschung Und Technologie E. V. Plasma-generated gas sterilization method
US10039849B2 (en) 2010-05-07 2018-08-07 Leibniz-Institut fuer Plasmaforschung und Technologie e. V., INP Greifswald Plasma-generated gas sterilization method and device
CN102172603B (en) * 2011-01-21 2013-05-01 南京工业大学 In-situ medical solid waste disposal method
KR101419386B1 (en) * 2012-05-18 2014-07-15 서울여자대학교 산학협력단 A food sterilizing apparatus using non-thermal plasma generated by microwave and sterilizing method using the same
US9662412B2 (en) 2015-02-11 2017-05-30 EP Technologies LLC Plasma vapor chamber and antimicrobial applications thereof
CA2993803A1 (en) 2015-07-28 2017-02-02 EP Technologies LLC Scrubbing device for cleaning, sanitizing or disinfecting
US10897894B2 (en) 2015-08-31 2021-01-26 Gojo Industries, Inc. Methods of and system for generating antimicrobial wipes
WO2017110501A1 (en) * 2015-12-25 2017-06-29 サントリーホールディングス株式会社 Sterilization system
EP3991210A4 (en) 2019-06-06 2023-08-16 Edwards Vacuum LLC LIQUID FILTER DEVICE FOR GAS/SOLID SEPARATION FOR SEMICONDUCTOR PROCESSES
GB2596278A (en) * 2020-06-01 2021-12-29 Creo Medical Ltd Sterilisation apparatus for producing plasma and hydroxyl radicals
US11931682B2 (en) * 2020-09-22 2024-03-19 Edwards Vacuum Llc Waste gas abatement technology for semiconductor processing
US12599860B2 (en) 2021-11-16 2026-04-14 Edwards Vacuum Llc Liquid filter apparatus with thermal shield

Citations (2)

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US5171525A (en) * 1987-02-25 1992-12-15 Adir Jacob Process and apparatus for dry sterilization of medical devices and materials
US5213758A (en) * 1990-04-27 1993-05-25 Kawasaki Jukogyo Kabushiki Kaisha Method and apparatus for treating medical wastes

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US4207286A (en) * 1978-03-16 1980-06-10 Biophysics Research & Consulting Corporation Seeded gas plasma sterilization method
US4976920A (en) * 1987-07-14 1990-12-11 Adir Jacob Process for dry sterilization of medical devices and materials
US5200158A (en) * 1987-02-25 1993-04-06 Adir Jacob Process and apparatus for dry sterilization of medical devices and materials
JPH02279160A (en) * 1989-03-08 1990-11-15 Abtox Inc Plasma sterilization method and plasma sterilizer
US5325020A (en) * 1990-09-28 1994-06-28 Abtox, Inc. Circular waveguide plasma microwave sterilizer apparatus
US5184046A (en) * 1990-09-28 1993-02-02 Abtox, Inc. Circular waveguide plasma microwave sterilizer apparatus
US5223231A (en) * 1991-12-06 1993-06-29 Drake Robert C Apparatus for sterilizing medical waste by microwave autoclaving
AU3333993A (en) * 1991-12-20 1993-07-28 Advanced Plasma Systems, Inc. Gas plasma container apparatus and method
GB2274947B (en) * 1993-02-02 1996-10-02 Atomic Energy Authority Uk Gas activation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5171525A (en) * 1987-02-25 1992-12-15 Adir Jacob Process and apparatus for dry sterilization of medical devices and materials
US5213758A (en) * 1990-04-27 1993-05-25 Kawasaki Jukogyo Kabushiki Kaisha Method and apparatus for treating medical wastes

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP0800406A4 *

Also Published As

Publication number Publication date
JPH11501530A (en) 1999-02-09
WO1996021473A2 (en) 1996-07-18
CA2208638A1 (en) 1996-07-18
US5633424A (en) 1997-05-27
EP0800406A4 (en) 2000-07-12
US20010024887A1 (en) 2001-09-27
EP0800406A2 (en) 1997-10-15
AU4962596A (en) 1996-07-31
US5920799A (en) 1999-07-06

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