WO1997013003A3 - Transparente wärmeschutzfolie und verfahren zu deren herstellung - Google Patents

Transparente wärmeschutzfolie und verfahren zu deren herstellung Download PDF

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Publication number
WO1997013003A3
WO1997013003A3 PCT/DE1996/001905 DE9601905W WO9713003A3 WO 1997013003 A3 WO1997013003 A3 WO 1997013003A3 DE 9601905 W DE9601905 W DE 9601905W WO 9713003 A3 WO9713003 A3 WO 9713003A3
Authority
WO
WIPO (PCT)
Prior art keywords
layers
heat protection
metal
resistant
alternating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE1996/001905
Other languages
English (en)
French (fr)
Other versions
WO1997013003A2 (de
Inventor
Volker Kirchhoff
Siegfried Schiller
Manfred Neumann
Falk Milde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to EP96943863A priority Critical patent/EP0853685B1/de
Publication of WO1997013003A2 publication Critical patent/WO1997013003A2/de
Publication of WO1997013003A3 publication Critical patent/WO1997013003A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10018—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising only one glass sheet
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Die bekannten Wärmeschutzfolien besitzen mehrere Metallschichten, um die Wärmestrahlen zu reflektieren und Licht durchzulassen. Es sind auch Wechselschichtsysteme aus Metall und Nichtmetall bekannt. Es besteht der Nachteil, daß besonders die Metallschichten korrodieren. Die äußerste Schutzschicht hat auch nicht die erforderliche Kratzfestigkeit. Folglich können derartige Wärmeschutzfolien schlecht auf die Außenseite der Scheiben aufgebracht werden. Sie sind auch nicht witterungsbeständig. Erfindungsgemäß ist auf die Kunststoffolie ein selektiv reflektierendes Wechselschichtsystem mit einer Abriebschutzschicht aufgebracht. Das Wechselschichtsystem besteht aus korrosionsbeständigen Metall-, Oxid-, Nitrid- und/oder Oxinitridschichten. Die Abriebschutzschicht besteht aus einer mindestens 1 νm dicken hochtransparenten und homogenen, amorphen Oxidschicht mit hoher Packungsdichte und einer Mikrohärte von mindestens 4 GPa. Die Schichten werden duch Hochratesputtern mittels Dual-Magnetron aufgebracht. Die Abriebschutzschicht wird durch plasma- und/oder ionengestütztes Hochratebedampfen aufgebracht. Die Wärmeschutzfolie ist für Außenanwendung bei Fenster- und Fahrzeugscheiben.
PCT/DE1996/001905 1995-10-06 1996-10-02 Transparente wärmeschutzfolie und verfahren zu deren herstellung Ceased WO1997013003A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP96943863A EP0853685B1 (de) 1995-10-06 1996-10-02 Transparente wärmeschutzfolie und verfahren zu deren herstellung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1995137263 DE19537263C2 (de) 1995-10-06 1995-10-06 Transparente Wärmeschutzfolie und Verfahren zu deren Herstellung
DE19537263.8 1995-10-06

Publications (2)

Publication Number Publication Date
WO1997013003A2 WO1997013003A2 (de) 1997-04-10
WO1997013003A3 true WO1997013003A3 (de) 1997-05-22

Family

ID=7774198

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1996/001905 Ceased WO1997013003A2 (de) 1995-10-06 1996-10-02 Transparente wärmeschutzfolie und verfahren zu deren herstellung

Country Status (3)

Country Link
EP (1) EP0853685B1 (de)
DE (1) DE19537263C2 (de)
WO (1) WO1997013003A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19740793C2 (de) * 1997-09-17 2003-03-20 Bosch Gmbh Robert Verfahren zur Beschichtung von Oberflächen mittels einer Anlage mit Sputterelektroden und Verwendung des Verfahrens
DE10031280A1 (de) * 2000-06-27 2002-01-24 Roth & Rauh Oberflaechentechni Multifunktionale Mehrlagenschicht auf transparenten Kunststoffen und Verfahren zur ihrer Herstellung
DE10117786A1 (de) 2001-04-10 2002-10-17 Bayer Ag Wärmeabsorbierendes Schichtsystem
DE102004058426A1 (de) * 2004-12-03 2006-06-08 Interpane Entwicklungs- Und Beratungsgesellschaft Mbh & Co.Kg Hochtemperaturbeständiger Belag aus TiOx
US20070286995A1 (en) * 2006-06-09 2007-12-13 Exatec, Llc Polycarbonate glazing system having solar reflecting properties
DE102009006832A1 (de) 2009-01-30 2010-08-05 Bayerisches Zentrum für Angewandte Energieforschung e.V. Flüssige oder halbfeste Formulierung spektralselektiver Partikel zur Beschichtung flexibler Körper sowie Verwendung dieser
DE102013004689A1 (de) 2013-03-19 2014-09-25 Remmers Baustofftechnik Gmbh Niedrigemittierende Innenwandbeschichtung
US9359261B2 (en) 2013-05-07 2016-06-07 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
US9684097B2 (en) 2013-05-07 2017-06-20 Corning Incorporated Scratch-resistant articles with retained optical properties
US9366784B2 (en) 2013-05-07 2016-06-14 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
EP3770649A1 (de) 2015-09-14 2021-01-27 Corning Incorporated Kratzfeste antireflexionsartikel mit hoher lichttransmission
EP3837223A1 (de) 2018-08-17 2021-06-23 Corning Incorporated Artikel aus anorganischem oxid mit dünnen beständigen antireflexionsstrukturen
US12147009B2 (en) 2020-07-09 2024-11-19 Corning Incorporated Textured region to reduce specular reflectance including a low refractive index substrate with higher elevated surfaces and lower elevated surfaces and a high refractive index material disposed on the lower elevated surfaces
CN117626183B (zh) * 2024-01-23 2024-04-30 北京科技大学 一种导电耐蚀涂层及其制备方法和应用

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0279550A1 (de) * 1987-02-02 1988-08-24 The BOC Group, Inc. Durch reaktive Zerstäubung hergestellte durchsichtige Überzüge
US4861680A (en) * 1988-02-11 1989-08-29 Southwall Technologies Bronze-grey glazing film and window made therefrom
DE4211363A1 (de) * 1992-04-04 1993-10-07 Leybold Ag Verfahren zum Herstellen von Scheiben mit hohem Transmissionsverhalten im sichtbaren Spektralbereich und mit hohem Reflexionsverhalten für Wärmestrahlung sowie durch das Verfahren hergestellte Scheiben

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE966231C (de) * 1952-01-01 1957-07-18 Heraeus Gmbh W C Gegen Strahlung und Abstrahlung geschuetzte Kleidung
CH358634A (fr) * 1958-08-30 1961-11-30 Commissariat Energie Atomique Matériau composite isolant thermique
US3138517A (en) * 1960-05-27 1964-06-23 Minnesota Mining & Mfg Metalized laminate
DE8231508U1 (de) * 1982-11-10 1984-04-19 Robert Bosch Gmbh, 7000 Stuttgart Mehrschichten-folienbahn fuer waermeschutzanwendung
DE3705440A1 (de) * 1987-02-20 1988-09-01 Man Technologie Gmbh Waermeisolierung fuer hohe temperaturen
DE4002131C2 (de) * 1990-01-25 1996-04-11 Man Technologie Gmbh Hochtemperaturbeständige Reflektorfolie

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0279550A1 (de) * 1987-02-02 1988-08-24 The BOC Group, Inc. Durch reaktive Zerstäubung hergestellte durchsichtige Überzüge
US4861680A (en) * 1988-02-11 1989-08-29 Southwall Technologies Bronze-grey glazing film and window made therefrom
DE4211363A1 (de) * 1992-04-04 1993-10-07 Leybold Ag Verfahren zum Herstellen von Scheiben mit hohem Transmissionsverhalten im sichtbaren Spektralbereich und mit hohem Reflexionsverhalten für Wärmestrahlung sowie durch das Verfahren hergestellte Scheiben

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles

Also Published As

Publication number Publication date
DE19537263A1 (de) 1997-04-10
EP0853685B1 (de) 1999-07-07
WO1997013003A2 (de) 1997-04-10
DE19537263C2 (de) 1998-02-26
EP0853685A2 (de) 1998-07-22

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