WO1997048986A1 - Sensor device for the 3-dimensional measurement of an attitude or acceleration - Google Patents

Sensor device for the 3-dimensional measurement of an attitude or acceleration Download PDF

Info

Publication number
WO1997048986A1
WO1997048986A1 PCT/FI1997/000396 FI9700396W WO9748986A1 WO 1997048986 A1 WO1997048986 A1 WO 1997048986A1 FI 9700396 W FI9700396 W FI 9700396W WO 9748986 A1 WO9748986 A1 WO 9748986A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
measuring
cavity
acceleration
attitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FI1997/000396
Other languages
French (fr)
Inventor
Erkki Jalkanen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Georesearch Engineering E Jalkanen & Co
Original Assignee
Georesearch Engineering E Jalkanen & Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Georesearch Engineering E Jalkanen & Co filed Critical Georesearch Engineering E Jalkanen & Co
Priority to AU31785/97A priority Critical patent/AU714341B2/en
Priority to CA002257268A priority patent/CA2257268C/en
Priority to AT97927215T priority patent/ATE254288T1/en
Priority to DE69726146T priority patent/DE69726146T2/en
Priority to JP50239898A priority patent/JP4223554B2/en
Priority to US09/202,550 priority patent/US6453745B1/en
Priority to EP97927215A priority patent/EP0906579B1/en
Publication of WO1997048986A1 publication Critical patent/WO1997048986A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/18—Measuring inclination, e.g. by clinometers, by levels by using liquids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/006—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Definitions

  • the present invention relates to a sensor device for measuring an attitude, acceleration or gravitational field and its gradient components, said device including a spherical cavity which contains a sensor substance in the form of a fluid or some other inertial material having fluidic properties.
  • An accelerometer provided with a spherical cavity is prior known e.g. from Patent publication US 3461730.
  • This prior known device produces an absolute acceleration value regardless of direction.
  • a device of the invention can be used for sensoring an acceleration as a vector quantity.
  • the prior known device include any indications for identifying the attitude of the device, while one of the fundamental features of the present invention is the identification of an attitude of the device.
  • the sensors may comprise piezoelectric transducers, capacitive membrane sensors and elongation strip sensors. Other types of sensors or transducers can also be used, as described in more detail hereinafter.
  • An object of the invention is to provide a sensor device, capable of determining the attitude of the device or the rate and direction of its acceleration 3-d ⁇ mens ⁇ onally .
  • the sensor device must have an equal directionality in all directions to make it capable of sensoring an acceleration vector, in addition to which the device also serves as an attitude identifier.
  • a sensor device of the invention Some of the application areas for a sensor device of the invention are e.g. as follows: - in industrial manufacturing and robotics as attitude identifier or a triaxial sensor for linear motion (ac ⁇ celeration) in navigation systems (inertial navigation) in land vehicles, water- and aircraft, in various self- controlled or self-navigated mobile devices in so-called black boxes of vehicles (when the kinetic history of a vehicle is to be recorded) in geophysics, geotechnique and in other areas of con ⁇ struction engineering e.g. as a triaxial vibration transducer, as an attitude sensor in drill holes, as a motion/attitude sensor for equipment towed by survey vessels, and as a sensor for gravitational field mea ⁇ suring equipment.
  • con ⁇ struction engineering e.g. as a triaxial vibration transducer, as an attitude sensor in drill holes, as a motion/attitude sensor for equipment towed by survey vessels, and as a sensor for gravitational field mea ⁇ suring equipment.
  • fig. 1 shows a spherical cavity in a measuring sensor with its 3-D coordinate axes
  • fig. 2 shows the same cavity, having its inertial fluid subjected to the action of a vector force F;
  • fig. 3 shows one structural design for a sensor unit in a sensor device of the invention according to one exemplary embodiment
  • fig. 4 is a block diagram, showing an example of a mea ⁇ suring circuit design for a sensor device.
  • a spherical container 3 contains a fluid at a pressure Po.
  • the container 3 is provided with imagi ⁇ nary rectangular coordinates x, y, z, whose positive axial directions intersect the spherical surface at points P 1 , P 3 and P 5 and negative axial directions at points P 2 , P 4 and P 6 , respectively.
  • At least the points P are provided with sensors (measuring sensors or electrodes), which sample some material proper- ty of the sensor fluid as a function of the fluid pres ⁇ sure.
  • This pressure is 0 at the point where the direction of an acceleration vector extending through the centre of the spherical surface intersects said spherical surface and the maximum pressure value according to formula (1 ) is found at the intersection of the opposite vector direction and the spherical surface.
  • the pressure is determined in each case according to individual measuring points and then by applying the formulae according to equation groups (2) and (3).
  • Fig. 4 depicts one example of a measuring circuit design in the case of a passive sensor.
  • a piezo sensor 4 or other pressure responsive sensor is placed at a measuring point P n .
  • a preamplifier 5 amplifies a sensor signal, which is fed by way of a signal adapter 6 to an A/D converter 7.
  • the digital signals received from various sensors are fed to a computer 8, which performs the necessary calculations in accordance with the above formulae.
  • Fig. 3 illustrates a sensor unit which comprises a cubic- shaped body, which is assembled from separate pieces 1, 2 on the opposite sides of a division plane 9 with the halves of a spherical cavity 3 machined and the sensors fitted therein prior to joining the cubic halves together.
  • the sensor material filling the cavity 3 comprises a fluid, liquid or gas or some other substance with fluidic properties, such as gels or colloids. If the sensor fluid to be used is electrically or optically neutral relative to pressure, the pressure is measured directly by means of a sensor (passive or active) integrated in the system.
  • a sensor passive or active
  • An essential feature in the invention is that the sensor fluid is common to all sensors performing 3-dimensional measuring. The sensors may respond to changes in the pressure of a sensor fluid, e.g. with one of the following results : a change in the charge or potential of a piezocrystal or plastics included in a sensor element
  • Sensor substances which have electrical or optical re ⁇ sponses as a result of pressure existing in the substance, may respond to pressure variations caused by acceleration, e.g. with one of the following results: dielectric polarization (changes in an intra-substance electric field)
  • the sensor substance within the cavity may be an integral part of measuring sensors.
  • the mere electrodes on the surface of a cavity are adapted to measure changes occur ⁇ ring in the sensor substance.
  • a sensor device of the invention is characterized in that the construction measuring 3-dimensionally its attitude or acceleration has been created as a compact unit having a high degree of integration. At the moment, such an achievement requires the arrangement of three separate sensor devices whose assemblage involves both mechanical problems and problems relating to the processing of re ⁇ sults. These problems have been resolved by means of a sensor device of the invention.
  • the sensor device is capable of measuring the attitude of its base which is at rest or in constant motion. In case the sensor device is in accelerating motion and it is desirable to measure acceleration of the motion as a vector quantity, the gravitational acceleration and the attitude must be known or brought into the system from an external source. If it is desirable to measure an attitude while the sensor device is in accelerating motion, the acceleration of the motion must be known or brought into the system from external sources.
  • the present invention can be used also for measuring all of the gradient components of the gravi ⁇ tational field, in case the pressure sensoring locations are added as necessary.

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Gyroscopes (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Vehicle Body Suspensions (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Control Of Position Or Direction (AREA)
  • Body Structure For Vehicles (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Position Input By Displaying (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a sensor device for measuring attitude, acceleration or gravitational field and its gradient components. The device includes a spherical cavity (3) which contains a sensor substance in the form of a fluid or some other inertial material having fluidic properties. The cavity (3) is provided with measuring sensors or measuring electrodes (-x, +x; -y, +y; -z, +z) for three different coordinate axes x, y, z, all of said sensors responding to said common inertial mass which fills the cavity (3). Such assembled single compact measuring device can be used for determining any of the said quantities 3-dimensionally.

Description

Sensor device for the 3-dιmensιonal measurement of an attitude or acceleration.
The present invention relates to a sensor device for measuring an attitude, acceleration or gravitational field and its gradient components, said device including a spherical cavity which contains a sensor substance in the form of a fluid or some other inertial material having fluidic properties.
An accelerometer provided with a spherical cavity is prior known e.g. from Patent publication US 3461730. This prior known device produces an absolute acceleration value regardless of direction. Unlike this, a device of the invention can be used for sensoring an acceleration as a vector quantity. Neither does the prior known device include any indications for identifying the attitude of the device, while one of the fundamental features of the present invention is the identification of an attitude of the device.
As for the prior art, reference can also be made to publi¬ cations US 3992951 and EP 0566130. The latter relates to a sensor for rotational motion, describing the principles of sensor elements or transducers which can be applied also in the present invention. In other words, the sensors may comprise piezoelectric transducers, capacitive membrane sensors and elongation strip sensors. Other types of sensors or transducers can also be used, as described in more detail hereinafter.
An object of the invention is to provide a sensor device, capable of determining the attitude of the device or the rate and direction of its acceleration 3-dιmensιonally . In other words, the sensor device must have an equal directionality in all directions to make it capable of sensoring an acceleration vector, in addition to which the device also serves as an attitude identifier.
This object is achieved by means of the invention on the basis of the characterizing features set forth in the annexed claims.
Some of the application areas for a sensor device of the invention are e.g. as follows: - in industrial manufacturing and robotics as attitude identifier or a triaxial sensor for linear motion (ac¬ celeration) in navigation systems (inertial navigation) in land vehicles, water- and aircraft, in various self- controlled or self-navigated mobile devices in so-called black boxes of vehicles (when the kinetic history of a vehicle is to be recorded) in geophysics, geotechnique and in other areas of con¬ struction engineering e.g. as a triaxial vibration transducer, as an attitude sensor in drill holes, as a motion/attitude sensor for equipment towed by survey vessels, and as a sensor for gravitational field mea¬ suring equipment.
The invention will now be described in more detail with reference made to the accompanying drawings, in which
fig. 1 shows a spherical cavity in a measuring sensor with its 3-D coordinate axes;
fig. 2 shows the same cavity, having its inertial fluid subjected to the action of a vector force F;
fig. 3 shows one structural design for a sensor unit in a sensor device of the invention according to one exemplary embodiment; and fig. 4 is a block diagram, showing an example of a mea¬ suring circuit design for a sensor device.
First explained is the theoretical background of the invention with reference to figs. 1 and 2. In the arrange¬ ment of fig. 1, a spherical container 3 contains a fluid at a pressure Po. The container 3 is provided with imagi¬ nary rectangular coordinates x, y, z, whose positive axial directions intersect the spherical surface at points P1 , P3 and P5 and negative axial directions at points P2, P4 and P6, respectively.
At least the points P are provided with sensors (measuring sensors or electrodes), which sample some material proper- ty of the sensor fluid as a function of the fluid pres¬ sure.
If a body, which contains the fluid container 3, travels at an acceleration F, the fluid within the container, as a result of inertia, develops a pressure whose magnitude at its maximum is
P = 2γ|F|r (1 ) wherein γ = fluid density and r = container radius.
This pressure is 0 at the point where the direction of an acceleration vector extending through the centre of the spherical surface intersects said spherical surface and the maximum pressure value according to formula (1 ) is found at the intersection of the opposite vector direction and the spherical surface.
If T is a normal plane for the vector F, extending through a point Pn (n = 1...6), it can be concluded on the basis of fig. 2 that: - the distance between the plane T and the centre of the spherical surface is
F° • (OPn) = F° •_ rqn°
= r (F° • qn°) = rcosθn the distance of the plane T from a point, at which the inertia-induced fluid pressure = 0, is r(1 - cosθn)
- at the point Pn prevails a pressure Pn = γr (1 - cosθ )
- pressure ρn + 1 = γr ( 1 + cosθn) F since cos (θ + n) = -cosθ
In the above formulae and in fig. 2 OPn = rqn° r = radius qn° = unit vector
F° = unit vector in the direction of F θn = intervectorial angle If, according to the starting premise, the fluid is fur¬ ther thought to have a pressure pQ, the points Pn and Pn + 1 can be measured to have pressures (pn + p0) and (pn+-| +
Po>-
When Δpn = ( pn + PD ) - < Pn* ι + Po > = Pn " Pn+ 1 = 2γrFcosθn
ΔPi = p-| - p2 = 2γFrcosθ 1
Δp2 = P3 - P4 = 2γFrcosθ2 ( 2 )
Δp3 = p5 - p6 = 2γFrcosθ 3
On the basis of this
Figure imgf000006_0001
(cos2θ1 + cos2θ2 + cos2θ3) which has a consequence that
1
F 2γr \/(ΔPl)2 + Δp2)2 + (Δp3)2
cosθϊ = Δp, [(Ap,)2 + (Δp2)2 + (Δp3)2H (3) cosθ2 = Δp2 [(ΔPl)2 + (Δp2)2 + (Δp3)2]~5 cosθ3 = Δp3 [(Δp^2 + (Δp2)2 + (Δp3)2H
the rate and direction of the acceleration vector F rela¬ tive to the system axes is thus determined. In the sim- plest case, the relationship between a signal and pressure to be measured at points Pn is linear. Signal = k x pres¬ sure.
S
Figure imgf000007_0001
and
Figure imgf000007_0002
cosθ! = ΔS1 [(ΔS,)2 + (ΔS2)2 + (ΔS3)2]-2 (4) cosθ2 = ΔS2 [(ΔS^2 + (ΔS2)2 4 (ΔS3)2H cosθ3 = ΔS3 [ (ΔST )2 + (ΔS2)2 t- (ΔS3)2H
In cases other than the simple relationships shown in the above formulae, the pressure is determined in each case according to individual measuring points and then by applying the formulae according to equation groups (2) and (3).
In order to determine the pressure from measured signals, it is possible to use a computer or other microprocessor- controlled calculating circuits.
Fig. 4 depicts one example of a measuring circuit design in the case of a passive sensor. A piezo sensor 4 or other pressure responsive sensor is placed at a measuring point Pn. A preamplifier 5 amplifies a sensor signal, which is fed by way of a signal adapter 6 to an A/D converter 7. The digital signals received from various sensors are fed to a computer 8, which performs the necessary calculations in accordance with the above formulae.
Fig. 3 illustrates a sensor unit which comprises a cubic- shaped body, which is assembled from separate pieces 1, 2 on the opposite sides of a division plane 9 with the halves of a spherical cavity 3 machined and the sensors fitted therein prior to joining the cubic halves together.
The sensor material filling the cavity 3 comprises a fluid, liquid or gas or some other substance with fluidic properties, such as gels or colloids. If the sensor fluid to be used is electrically or optically neutral relative to pressure, the pressure is measured directly by means of a sensor (passive or active) integrated in the system. An essential feature in the invention is that the sensor fluid is common to all sensors performing 3-dimensional measuring. The sensors may respond to changes in the pressure of a sensor fluid, e.g. with one of the following results : a change in the charge or potential of a piezocrystal or plastics included in a sensor element
- a capacitance change in a capacitive sensor element caused by the penetration of a sensor substance into the element
- a change in the dimensions of a cavity resonator or resonance cavity of a wave tube.
Sensor substances, which have electrical or optical re¬ sponses as a result of pressure existing in the substance, may respond to pressure variations caused by acceleration, e.g. with one of the following results: dielectric polarization (changes in an intra-substance electric field)
- a change in electric conductivity (piezoresistivity )
- a change in optical properties - piezoelectricity.
When using this type of sensor substances, the sensor substance within the cavity may be an integral part of measuring sensors. For example, the mere electrodes on the surface of a cavity are adapted to measure changes occur¬ ring in the sensor substance. A sensor device of the invention is characterized in that the construction measuring 3-dimensionally its attitude or acceleration has been created as a compact unit having a high degree of integration. At the moment, such an achievement requires the arrangement of three separate sensor devices whose assemblage involves both mechanical problems and problems relating to the processing of re¬ sults. These problems have been resolved by means of a sensor device of the invention.
The sensor device is capable of measuring the attitude of its base which is at rest or in constant motion. In case the sensor device is in accelerating motion and it is desirable to measure acceleration of the motion as a vector quantity, the gravitational acceleration and the attitude must be known or brought into the system from an external source. If it is desirable to measure an attitude while the sensor device is in accelerating motion, the acceleration of the motion must be known or brought into the system from external sources.
As is known, the pressure difference between two points in a fluid due to gravitational acceleration, is related to the gravitational potential difference between the same points.
Thus second order partial differentials of pressure are related to the tensor components of the gravitational field gradient.
This implies that the present invention can be used also for measuring all of the gradient components of the gravi¬ tational field, in case the pressure sensoring locations are added as necessary.

Claims

Claims
1. A sensor device for measuring attitude, acceleration or gravitational field and its gradient components, said device including a spherical cavity (3) which contains a sensor substance in the form of a fluid or some other inertial material having fluidic properties, c h a r ¬ a c t e r i z e d in that the cavity (3) is provided with measuring sensors or measuring electrodes (-x, +x; -y, +y; -z, +z) for three different coordinate axes x, y, z, all of said sensors responding to said common inert mass which fills the cavity (3).
2. A sensor device for measuring attitude, acceleration or gravitational field and its gradient components, said device including a spherical cavity (3) which contains a sensor substance in the form of a fluid or some other inertial material having fluidic properties, c h a r ¬ a c t e r i z e d in that the sensor substance fills the cavity (3), through whose centre extend three coordinate axes x, y, z, which are perpendicular to each other and provided with measuring sensors (-x, +x; -y, +y; -z, +z) measuring physical quantities depending on the pressures of the sensor substance, the device being adapted, on the basis of such measuring results, to determine 3- dimensionally the quantity to be measured.
3. A sensor device as set forth in claim 1 or 2, c h a r a c t e r i z e d in that the sensor substance within the cavity (3) responds to pressure fluctuations caused by acceleration and the measuring sensors or elec¬ trodes are adapted to measure changes occurring in the sensor substance as a result of the said response.
4. A sensor device as set forth in claim 1 or 2, c h a r a c t e r i z e d in that the measuring sensors respond to pressure changes in the sensor substance con¬ tained in the cavity (3).
PCT/FI1997/000396 1996-06-20 1997-06-19 Sensor device for the 3-dimensional measurement of an attitude or acceleration Ceased WO1997048986A1 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
AU31785/97A AU714341B2 (en) 1996-06-20 1997-06-19 Sensor device for the 3-dimensional measurement of an attitude or acceleration
CA002257268A CA2257268C (en) 1996-06-20 1997-06-19 Sensor device for the 3-dimensional measurement of an attitude or acceleration
AT97927215T ATE254288T1 (en) 1996-06-20 1997-06-19 MEASUREMENT TRANSDUCER FOR THREE-DIMENSIONAL MEASUREMENT OF A POSITION OR ACCELERATION
DE69726146T DE69726146T2 (en) 1996-06-20 1997-06-19 SENSOR FOR THREE-DIMENSIONAL MEASUREMENT OF A POSITION OR ACCELERATION
JP50239898A JP4223554B2 (en) 1996-06-20 1997-06-19 Sensor device for three-dimensional measurement of posture or acceleration
US09/202,550 US6453745B1 (en) 1996-06-20 1997-06-19 Sensor device for the 3-dimensional measurement of an attitude or acceleration
EP97927215A EP0906579B1 (en) 1996-06-20 1997-06-19 Sensor device for the 3-dimensional measurement of an attitude or acceleration

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI962576A FI100558B (en) 1996-06-20 1996-06-20 Sensor device for 3-dimensional measurement of position and acceleration
FI962576 1996-06-20

Publications (1)

Publication Number Publication Date
WO1997048986A1 true WO1997048986A1 (en) 1997-12-24

Family

ID=8546259

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FI1997/000396 Ceased WO1997048986A1 (en) 1996-06-20 1997-06-19 Sensor device for the 3-dimensional measurement of an attitude or acceleration

Country Status (10)

Country Link
US (1) US6453745B1 (en)
EP (1) EP0906579B1 (en)
JP (1) JP4223554B2 (en)
AT (1) ATE254288T1 (en)
AU (1) AU714341B2 (en)
CA (1) CA2257268C (en)
DE (1) DE69726146T2 (en)
FI (1) FI100558B (en)
RU (1) RU2202803C2 (en)
WO (1) WO1997048986A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3311329B2 (en) 1999-04-01 2002-08-05 章三 平山 3-axis accelerometer using magnetic fluid
DE10259196A1 (en) * 2001-12-18 2003-07-10 Visteon Global Tech Inc Electrical control for automotive headlights
GB2509243B (en) * 2011-06-02 2018-11-21 Baker Hughes Inc Apparatus and method for determining inclination of a downhole tool using pressure measurements

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6851317B2 (en) * 2002-03-19 2005-02-08 Michael Naumov Device for measuring horizontal acceleration
KR100741875B1 (en) * 2004-09-06 2007-07-23 동부일렉트로닉스 주식회사 CMS image sensor and its manufacturing method
GB2419410B (en) * 2004-10-20 2008-05-21 Vetco Gray Controls Ltd Sensor configuration
WO2006129556A1 (en) * 2005-05-31 2006-12-07 Idex Co., Ltd. Transportation packaging test apparatus
US7623414B2 (en) * 2006-02-22 2009-11-24 Westerngeco L.L.C. Particle motion vector measurement in a towed, marine seismic cable
US7466625B2 (en) * 2006-06-23 2008-12-16 Westerngeco L.L.C. Noise estimation in a vector sensing streamer
US7841249B2 (en) * 2006-07-10 2010-11-30 Southwest Research Institute Fluidized sensor for mapping a pipeline
US8593907B2 (en) * 2007-03-08 2013-11-26 Westerngeco L.L.C. Technique and system to cancel noise from measurements obtained from a multi-component streamer
IL186077A (en) * 2007-09-19 2010-12-30 Michael Naumov Method for determining true meridian and device for its implementation
GB2456313B (en) * 2008-01-10 2010-05-12 Westerngeco Seismic Holdings Sensor devices
CN101349560B (en) * 2008-07-07 2011-07-06 北京信息工程学院 Horizontal attitude sensitive chip and its manufacturing method, horizontal attitude sensor
RU2382990C1 (en) * 2008-08-22 2010-02-27 Анатолий Алексеевич Сперанский Detector of mechanical oscillations
US9300409B1 (en) * 2011-08-01 2016-03-29 eentec, LLC Rotational electrochemical seismometer using magnetohydrodynamic technology and related methods
TWI475243B (en) * 2013-09-30 2015-03-01 Univ Nat Sun Yat Sen Ball-type wheel-type self-propelled pointing device
EP3264982A4 (en) * 2015-03-04 2018-09-26 California Institute of Technology Position sensing and guiding system
AU2016344004A1 (en) 2015-10-30 2018-06-14 Ion Geophysical Corporation Multi-axis, single mass accelerometer
US11170625B2 (en) 2018-05-18 2021-11-09 California Institute Of Technology Head positioner for retinal surgery patients
EP3850373B1 (en) 2018-09-13 2025-01-01 TGS-NOPEC Geophysical Company Multi-axis, single mass accelerometer

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3461730A (en) * 1965-04-02 1969-08-19 Endevco Corp Accelerometer
US3706217A (en) * 1970-06-10 1972-12-19 North American Rockwell Accelerometer
US3742767A (en) * 1971-02-02 1973-07-03 Onera (Off Nat Aerospatiale) Ball electrostatic accelerometer
US3992951A (en) * 1975-05-12 1976-11-23 Sperry Rand Corporation Compensated toroidal accelerometer
DE2812775A1 (en) * 1978-03-23 1979-09-27 Ver Flugtechnische Werke Space flight accelerometer with sphere in evacuated housing - has sphere position nulling electrodes with electrode pair displacement measurement
DE2844646A1 (en) * 1978-10-13 1980-04-24 Autoflug Gmbh Acceleration detector for vehicle passenger safety device triggering - contains press sensor at centre of spherical fluid container
EP0460789A1 (en) * 1990-06-05 1991-12-11 Western Atlas International, Inc. Position-independent vertically sensitive seismometer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2728868A (en) * 1951-09-24 1955-12-27 Northrop Aircraft Inc Liquid filled accelerometer
US3084557A (en) * 1957-07-19 1963-04-09 Ahlefeldt Rolf S Von Accelerometer
US3270565A (en) * 1962-12-26 1966-09-06 Wilbur W Hawley Omnidirectional acceleration device
US4648273A (en) * 1977-04-22 1987-03-10 Ozols Karlis V Force responsive device
US4255976A (en) 1979-08-13 1981-03-17 Theodore P. Zoli, Jr. Apparatus and method for measuring the velocity of a moving dielectric material
US4395908A (en) * 1981-08-27 1983-08-02 Western Geophysical Co. Of America Means for adjusting the sensitivity of a crystal detector
US4671113A (en) * 1983-02-17 1987-06-09 Carome Edward F Fiber optic accelerometer
US4613752A (en) * 1983-08-04 1986-09-23 Optical Technologies, Inc. Fiber optic force measuring device
GB8616904D0 (en) * 1986-07-11 1986-08-20 Texas Instruments Ltd Motion sensing device
SU1501726A1 (en) * 1986-12-01 1995-09-10 Тульский государственный педагогический институт им.Л.Н.Толстого Angular accelerometer
US5046056A (en) 1990-06-05 1991-09-03 Halliburton Geophysical Services, Inc. Self-orienting vertically sensitive accelerometer
RU2010235C1 (en) * 1991-02-15 1994-03-30 Евгений Тимофеевич Дюндиков Fibre-optical accelerometer
EP0566130A1 (en) 1992-04-17 1993-10-20 Hughes Aircraft Company Rotation sensor
AU6211898A (en) 1997-01-24 1998-08-18 Gerd Reime Acceleration sensor for detecting inertia forces

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3461730A (en) * 1965-04-02 1969-08-19 Endevco Corp Accelerometer
US3706217A (en) * 1970-06-10 1972-12-19 North American Rockwell Accelerometer
US3742767A (en) * 1971-02-02 1973-07-03 Onera (Off Nat Aerospatiale) Ball electrostatic accelerometer
US3992951A (en) * 1975-05-12 1976-11-23 Sperry Rand Corporation Compensated toroidal accelerometer
DE2812775A1 (en) * 1978-03-23 1979-09-27 Ver Flugtechnische Werke Space flight accelerometer with sphere in evacuated housing - has sphere position nulling electrodes with electrode pair displacement measurement
DE2844646A1 (en) * 1978-10-13 1980-04-24 Autoflug Gmbh Acceleration detector for vehicle passenger safety device triggering - contains press sensor at centre of spherical fluid container
EP0460789A1 (en) * 1990-06-05 1991-12-11 Western Atlas International, Inc. Position-independent vertically sensitive seismometer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3311329B2 (en) 1999-04-01 2002-08-05 章三 平山 3-axis accelerometer using magnetic fluid
DE10259196A1 (en) * 2001-12-18 2003-07-10 Visteon Global Tech Inc Electrical control for automotive headlights
DE10259196B4 (en) * 2001-12-18 2004-06-03 Visteon Global Technologies, Inc., Dearborn Automotive lighting system
GB2509243B (en) * 2011-06-02 2018-11-21 Baker Hughes Inc Apparatus and method for determining inclination of a downhole tool using pressure measurements

Also Published As

Publication number Publication date
CA2257268C (en) 2005-06-07
EP0906579A1 (en) 1999-04-07
FI100558B (en) 1997-12-31
DE69726146T2 (en) 2004-09-16
AU3178597A (en) 1998-01-07
JP2000512387A (en) 2000-09-19
US6453745B1 (en) 2002-09-24
AU714341B2 (en) 1999-12-23
DE69726146D1 (en) 2003-12-18
JP4223554B2 (en) 2009-02-12
CA2257268A1 (en) 1997-12-24
EP0906579B1 (en) 2003-11-12
RU2202803C2 (en) 2003-04-20
ATE254288T1 (en) 2003-11-15
FI962576A0 (en) 1996-06-20

Similar Documents

Publication Publication Date Title
US6453745B1 (en) Sensor device for the 3-dimensional measurement of an attitude or acceleration
US8322216B2 (en) Micromachined accelerometer with monolithic electrodes and method of making the same
US20180074090A1 (en) Multiple degree of freedom mems sensor chip and method for fabricating the same
JPH09501498A (en) Inclinometer
KR100771458B1 (en) Inclination sensor and inclination-detecting method
US7143648B2 (en) Magnetofluidic accelerometer with capacitive sensing of inertial body position
CN108089027A (en) Sensor and navigation attitude instrument based on MEMS capacitive micro-acceleration gauge
Lobo et al. Inertial navigation system for mobile land vehicles
JP2008275583A (en) Inertial sensor and manufacturing method thereof
Jo et al. An angular accelerometer with high sensitivity and low crosstalk utilizing a piezoresistive cantilever and spiral liquid channels
US6382025B1 (en) Rotational rate sensor
JPH08504035A (en) Device made of single crystal material for measuring force component, method for manufacturing the device, and method for using the device
CN101910788A (en) Systems and methods for measuring tilt using a lowest degree of freedom accelerometer
CN108469251B (en) A spherical tilt sensor based on image recognition
WO1996006328A1 (en) Three-dimensional measurement unit and position indicator
Baek et al. 3D printing-assisted soft capacitive inclinometers for simultaneous monitoring of tilt angles and directions
Nathan et al. Dynamic compensation of ultra-low-range pressure sensors
US3320817A (en) Electrostatically suspended gyroscope signal pickoff
Lehtonen et al. Monolithic accelerometer for 3D measurements
CN207623364U (en) Sensor based on MEMS capacitive micro-acceleration gauge and navigation attitude instrument
CN114057154A (en) MEMS device
RU2733099C1 (en) Apparatus for determining angles of spatial orientation of dynamic and static objects
Kapser et al. A low-g accelerometer for inertial measurement units
JP3311329B2 (en) 3-axis accelerometer using magnetic fluid
KR101365227B1 (en) Triaxial angle measuring sensor, apparatus and method for measuring angle using the same

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AU CA CN IL JP NO RU US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
ENP Entry into the national phase

Ref document number: 2257268

Country of ref document: CA

Ref country code: CA

Ref document number: 2257268

Kind code of ref document: A

Format of ref document f/p: F

WWE Wipo information: entry into national phase

Ref document number: 09202550

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 1997927215

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1997927215

Country of ref document: EP

WWG Wipo information: grant in national office

Ref document number: 1997927215

Country of ref document: EP