WO1998023128A3 - Miniature silicon condenser microphone - Google Patents
Miniature silicon condenser microphone Download PDFInfo
- Publication number
- WO1998023128A3 WO1998023128A3 PCT/US1997/020942 US9720942W WO9823128A3 WO 1998023128 A3 WO1998023128 A3 WO 1998023128A3 US 9720942 W US9720942 W US 9720942W WO 9823128 A3 WO9823128 A3 WO 9823128A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- jacket
- silicon die
- condenser microphone
- transducer
- acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/02—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R2225/00—Details of deaf aids covered by H04R25/00, not provided for in any of its subgroups
- H04R2225/49—Reducing the effects of electromagnetic noise on the functioning of hearing aids, by, e.g. shielding, signal processing adaptation, selective (de)activation of electronic parts in hearing aid
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R25/00—Electric hearing aids
- H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
- H04R25/604—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Pressure Sensors (AREA)
- Details Of Audible-Bandwidth Transducers (AREA)
Abstract
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT97948325T ATE288178T1 (en) | 1996-11-21 | 1997-11-20 | SILICON CAPACITOR SMALL MICROPHONE |
| DE69732366T DE69732366D1 (en) | 1996-11-21 | 1997-11-20 | SILICON CONDENSER MICROPHONE KLEIN |
| EP97948325A EP0940059B1 (en) | 1996-11-21 | 1997-11-20 | Miniature silicon condenser microphone |
| AU54412/98A AU5441298A (en) | 1996-11-21 | 1997-11-20 | Miniature silicon condenser microphone |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/752,584 | 1996-11-21 | ||
| US08/752,584 US5740261A (en) | 1996-11-21 | 1996-11-21 | Miniature silicon condenser microphone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1998023128A2 WO1998023128A2 (en) | 1998-05-28 |
| WO1998023128A3 true WO1998023128A3 (en) | 1998-08-13 |
Family
ID=25026915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1997/020942 Ceased WO1998023128A2 (en) | 1996-11-21 | 1997-11-20 | Miniature silicon condenser microphone |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5740261A (en) |
| EP (1) | EP0940059B1 (en) |
| AT (1) | ATE288178T1 (en) |
| AU (1) | AU5441298A (en) |
| DE (1) | DE69732366D1 (en) |
| WO (1) | WO1998023128A2 (en) |
Families Citing this family (93)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7208725B2 (en) * | 1998-11-25 | 2007-04-24 | Rohm And Haas Electronic Materials Llc | Optoelectronic component with encapsulant |
| US6324907B1 (en) | 1999-11-29 | 2001-12-04 | Microtronic A/S | Flexible substrate transducer assembly |
| US7043035B2 (en) * | 1999-12-09 | 2006-05-09 | Sonionmicrotronic Nederland B.V. | Miniature microphone |
| DE10004408C1 (en) * | 2000-02-02 | 2001-06-21 | Paragon Sensors & Systems Ag | Microphone module, e.g. for hands-free car telephone or other radio transceiver, has screening shell enclosing microphone capsule and pre-amplifier components |
| US6751326B2 (en) | 2000-03-15 | 2004-06-15 | Knowles Electronics, Llc | Vibration-dampening receiver assembly |
| US6630639B2 (en) | 2000-03-15 | 2003-10-07 | Mcswiggen John P. | Port switch as for a hearing aid device |
| US6535460B2 (en) | 2000-08-11 | 2003-03-18 | Knowles Electronics, Llc | Miniature broadband acoustic transducer |
| US6987859B2 (en) | 2001-07-20 | 2006-01-17 | Knowles Electronics, Llc. | Raised microstructure of silicon based device |
| US7181035B2 (en) * | 2000-11-22 | 2007-02-20 | Sonion Nederland B.V. | Acoustical receiver housing for hearing aids |
| US8629005B1 (en) | 2000-11-28 | 2014-01-14 | Knowles Electronics, Llc | Methods of manufacture of bottom port surface mount silicon condenser microphone packages |
| US7439616B2 (en) * | 2000-11-28 | 2008-10-21 | Knowles Electronics, Llc | Miniature silicon condenser microphone |
| US7166910B2 (en) | 2000-11-28 | 2007-01-23 | Knowles Electronics Llc | Miniature silicon condenser microphone |
| US7434305B2 (en) | 2000-11-28 | 2008-10-14 | Knowles Electronics, Llc. | Method of manufacturing a microphone |
| US6741709B2 (en) * | 2000-12-20 | 2004-05-25 | Shure Incorporated | Condenser microphone assembly |
| US6873863B2 (en) * | 2001-03-19 | 2005-03-29 | Nokia Mobile Phones Ltd. | Touch sensitive navigation surfaces for mobile telecommunication systems |
| US7062058B2 (en) | 2001-04-18 | 2006-06-13 | Sonion Nederland B.V. | Cylindrical microphone having an electret assembly in the end cover |
| US6937735B2 (en) * | 2001-04-18 | 2005-08-30 | SonionMicrotronic Néderland B.V. | Microphone for a listening device having a reduced humidity coefficient |
| US7136496B2 (en) * | 2001-04-18 | 2006-11-14 | Sonion Nederland B.V. | Electret assembly for a microphone having a backplate with improved charge stability |
| US6859542B2 (en) | 2001-05-31 | 2005-02-22 | Sonion Lyngby A/S | Method of providing a hydrophobic layer and a condenser microphone having such a layer |
| US7239714B2 (en) | 2001-10-09 | 2007-07-03 | Sonion Nederland B.V. | Microphone having a flexible printed circuit board for mounting components |
| US7023066B2 (en) * | 2001-11-20 | 2006-04-04 | Knowles Electronics, Llc. | Silicon microphone |
| US6626704B1 (en) * | 2002-04-25 | 2003-09-30 | Daniel Pikel | Acoustic adapter device |
| US7072482B2 (en) | 2002-09-06 | 2006-07-04 | Sonion Nederland B.V. | Microphone with improved sound inlet port |
| US6781231B2 (en) * | 2002-09-10 | 2004-08-24 | Knowles Electronics Llc | Microelectromechanical system package with environmental and interference shield |
| US8280082B2 (en) * | 2002-10-08 | 2012-10-02 | Sonion Nederland B.V. | Electret assembly for a microphone having a backplate with improved charge stability |
| US7917228B2 (en) * | 2003-05-13 | 2011-03-29 | Medtronic, Inc. | Medical lead adaptor assembly |
| EP1515364B1 (en) | 2003-09-15 | 2016-04-13 | Nuvotronics, LLC | Device package and methods for the fabrication and testing thereof |
| US7460681B2 (en) * | 2004-07-20 | 2008-12-02 | Sonion Nederland B.V. | Radio frequency shielding for receivers within hearing aids and listening devices |
| EP1638366B1 (en) * | 2004-09-20 | 2015-08-26 | Sonion Nederland B.V. | A microphone assembly |
| TWI260938B (en) * | 2004-10-01 | 2006-08-21 | Ind Tech Res Inst | Dynamic pressure sensing structure |
| US7795695B2 (en) | 2005-01-27 | 2010-09-14 | Analog Devices, Inc. | Integrated microphone |
| DE102005008511B4 (en) * | 2005-02-24 | 2019-09-12 | Tdk Corporation | MEMS microphone |
| DE102005008514B4 (en) * | 2005-02-24 | 2019-05-16 | Tdk Corporation | Microphone membrane and microphone with the microphone membrane |
| DE102005008512B4 (en) | 2005-02-24 | 2016-06-23 | Epcos Ag | Electrical module with a MEMS microphone |
| US7885423B2 (en) | 2005-04-25 | 2011-02-08 | Analog Devices, Inc. | Support apparatus for microphone diaphragm |
| US7449356B2 (en) * | 2005-04-25 | 2008-11-11 | Analog Devices, Inc. | Process of forming a microphone using support member |
| US20070071268A1 (en) * | 2005-08-16 | 2007-03-29 | Analog Devices, Inc. | Packaged microphone with electrically coupled lid |
| US7825484B2 (en) * | 2005-04-25 | 2010-11-02 | Analog Devices, Inc. | Micromachined microphone and multisensor and method for producing same |
| US20070040231A1 (en) * | 2005-08-16 | 2007-02-22 | Harney Kieran P | Partially etched leadframe packages having different top and bottom topologies |
| US8130979B2 (en) * | 2005-08-23 | 2012-03-06 | Analog Devices, Inc. | Noise mitigating microphone system and method |
| US8351632B2 (en) * | 2005-08-23 | 2013-01-08 | Analog Devices, Inc. | Noise mitigating microphone system and method |
| US8477983B2 (en) * | 2005-08-23 | 2013-07-02 | Analog Devices, Inc. | Multi-microphone system |
| US7961897B2 (en) * | 2005-08-23 | 2011-06-14 | Analog Devices, Inc. | Microphone with irregular diaphragm |
| DE102005053767B4 (en) * | 2005-11-10 | 2014-10-30 | Epcos Ag | MEMS microphone, method of manufacture and method of installation |
| DE102005053765B4 (en) * | 2005-11-10 | 2016-04-14 | Epcos Ag | MEMS package and method of manufacture |
| US8344487B2 (en) * | 2006-06-29 | 2013-01-01 | Analog Devices, Inc. | Stress mitigation in packaged microchips |
| JP4951067B2 (en) * | 2006-07-25 | 2012-06-13 | アナログ デバイシス, インコーポレイテッド | Multiple microphone systems |
| US20080042223A1 (en) * | 2006-08-17 | 2008-02-21 | Lu-Lee Liao | Microelectromechanical system package and method for making the same |
| US20080075308A1 (en) * | 2006-08-30 | 2008-03-27 | Wen-Chieh Wei | Silicon condenser microphone |
| US20080083957A1 (en) * | 2006-10-05 | 2008-04-10 | Wen-Chieh Wei | Micro-electromechanical system package |
| US7894622B2 (en) | 2006-10-13 | 2011-02-22 | Merry Electronics Co., Ltd. | Microphone |
| TW200847827A (en) * | 2006-11-30 | 2008-12-01 | Analog Devices Inc | Microphone system with silicon microphone secured to package lid |
| US8705775B2 (en) | 2007-04-25 | 2014-04-22 | University Of Florida Research Foundation, Inc. | Capacitive microphone with integrated cavity |
| TWI323242B (en) * | 2007-05-15 | 2010-04-11 | Ind Tech Res Inst | Package and packageing assembly of microelectromechanical system microphone |
| TWI370101B (en) * | 2007-05-15 | 2012-08-11 | Ind Tech Res Inst | Package and packaging assembly of microelectromechanical sysyem microphone |
| US7694610B2 (en) * | 2007-06-27 | 2010-04-13 | Siemens Medical Solutions Usa, Inc. | Photo-multiplier tube removal tool |
| US8385573B2 (en) | 2007-09-19 | 2013-02-26 | Starkey Laboratories, Inc. | System for hearing assistance device including receiver in the canal |
| TWI336770B (en) * | 2007-11-05 | 2011-02-01 | Ind Tech Res Inst | Sensor |
| CA2639555A1 (en) | 2008-08-11 | 2008-12-15 | Hyman Ngo | High definition litho applique and emblems |
| US8781141B2 (en) | 2008-08-27 | 2014-07-15 | Starkey Laboratories, Inc. | Modular connection assembly for a hearing assistance device |
| US20100135513A1 (en) * | 2008-12-01 | 2010-06-03 | Sonion Nederland B.V. | Radio frequency shielding for receivers within hearing aids and listening devices |
| US8798299B1 (en) | 2008-12-31 | 2014-08-05 | Starkey Laboratories, Inc. | Magnetic shielding for communication device applications |
| US8155366B2 (en) * | 2009-05-15 | 2012-04-10 | Mwm Acoustics, Llc | Transducer package with interior support frame |
| US7825509B1 (en) | 2009-06-13 | 2010-11-02 | Mwm Acoustics, Llc | Transducer package with transducer die unsupported by a substrate |
| DK2278828T3 (en) | 2009-07-23 | 2017-11-27 | Starkey Labs Inc | METHOD AND APPARATUS FOR AN ISOLATED ELECTROMAGNETIC SCREEN FOR USE IN HEARING DEVICES |
| JP5584086B2 (en) * | 2010-10-14 | 2014-09-03 | パナソニック株式会社 | Electronics |
| EP2469705B1 (en) | 2010-12-21 | 2015-12-02 | Sonion Nederland B.V. | Generation of a supply voltage from output of a class-D audio amplifier |
| US9374643B2 (en) | 2011-11-04 | 2016-06-21 | Knowles Electronics, Llc | Embedded dielectric as a barrier in an acoustic device and method of manufacture |
| CN104145484A (en) | 2011-11-17 | 2014-11-12 | 应美盛股份有限公司 | Microphone Module with Sound Pipe |
| US9738515B2 (en) * | 2012-06-27 | 2017-08-22 | Invensense, Inc. | Transducer with enlarged back volume |
| US9402118B2 (en) | 2012-07-27 | 2016-07-26 | Knowles Electronics, Llc | Housing and method to control solder creep on housing |
| US9491539B2 (en) | 2012-08-01 | 2016-11-08 | Knowles Electronics, Llc | MEMS apparatus disposed on assembly lid |
| US9078063B2 (en) | 2012-08-10 | 2015-07-07 | Knowles Electronics, Llc | Microphone assembly with barrier to prevent contaminant infiltration |
| CN104956472A (en) | 2012-12-19 | 2015-09-30 | 美商楼氏电子有限公司 | Apparatus and method for high voltage i/o electro-static discharge protection |
| US9676614B2 (en) | 2013-02-01 | 2017-06-13 | Analog Devices, Inc. | MEMS device with stress relief structures |
| US8965027B2 (en) | 2013-02-15 | 2015-02-24 | Invensense, Inc. | Packaged microphone with frame having die mounting concavity |
| US9467785B2 (en) | 2013-03-28 | 2016-10-11 | Knowles Electronics, Llc | MEMS apparatus with increased back volume |
| US9301075B2 (en) | 2013-04-24 | 2016-03-29 | Knowles Electronics, Llc | MEMS microphone with out-gassing openings and method of manufacturing the same |
| DE102013106353B4 (en) * | 2013-06-18 | 2018-06-28 | Tdk Corporation | Method for applying a structured coating to a component |
| US20150090030A1 (en) * | 2013-09-27 | 2015-04-02 | Infineon Technologies Ag | Transducer arrangement comprising a transducer die and method of covering a transducer die |
| US9307328B2 (en) | 2014-01-09 | 2016-04-05 | Knowles Electronics, Llc | Interposer for MEMS-on-lid microphone |
| US10138115B2 (en) * | 2014-08-06 | 2018-11-27 | Infineon Technologies Ag | Low profile transducer module |
| US10167189B2 (en) | 2014-09-30 | 2019-01-01 | Analog Devices, Inc. | Stress isolation platform for MEMS devices |
| US9554214B2 (en) | 2014-10-02 | 2017-01-24 | Knowles Electronics, Llc | Signal processing platform in an acoustic capture device |
| US9800971B2 (en) | 2015-03-17 | 2017-10-24 | Knowles Electronics, Llc | Acoustic apparatus with side port |
| US9794661B2 (en) | 2015-08-07 | 2017-10-17 | Knowles Electronics, Llc | Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package |
| US9859879B2 (en) | 2015-09-11 | 2018-01-02 | Knowles Electronics, Llc | Method and apparatus to clip incoming signals in opposing directions when in an off state |
| US10131538B2 (en) | 2015-09-14 | 2018-11-20 | Analog Devices, Inc. | Mechanically isolated MEMS device |
| US10319654B1 (en) | 2017-12-01 | 2019-06-11 | Cubic Corporation | Integrated chip scale packages |
| USD867346S1 (en) * | 2018-01-19 | 2019-11-19 | Dynamic Ear Company B.V. | Ambient filter |
| US11417611B2 (en) | 2020-02-25 | 2022-08-16 | Analog Devices International Unlimited Company | Devices and methods for reducing stress on circuit components |
| US11981560B2 (en) | 2020-06-09 | 2024-05-14 | Analog Devices, Inc. | Stress-isolated MEMS device comprising substrate having cavity and method of manufacture |
| EP4469388A4 (en) | 2022-01-25 | 2026-01-28 | Analog Devices Inc | LOAD INSULATION FOR INTEGRATED CIRCUIT PACKING INTEGRATION |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4430520A (en) * | 1982-04-07 | 1984-02-07 | Tibbetts Industries, Inc. | Transducer shielding enclosure |
| US4993072A (en) * | 1989-02-24 | 1991-02-12 | Lectret S.A. | Shielded electret transducer and method of making the same |
| EP0424916A2 (en) * | 1989-10-26 | 1991-05-02 | Knowles Electronics, Inc. | Magnetically shielded electromagnetic acoustic transducer |
| JPH0494560A (en) * | 1990-08-10 | 1992-03-26 | Seiko Epson Corp | Semiconductor device |
| DE4343702C1 (en) * | 1993-12-21 | 1995-03-09 | Siemens Audiologische Technik | Hearing aid worn on the head |
| WO1995031082A1 (en) * | 1994-05-05 | 1995-11-16 | Knowles Electronics, Inc. | Solid state condenser and microphone devices |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4705659A (en) * | 1985-04-01 | 1987-11-10 | Motorola, Inc. | Carbon film oxidation for free-standing film formation |
| US4793821A (en) * | 1986-01-17 | 1988-12-27 | Engineered Transitions Company, Inc. | Vibration resistant electrical coupling |
| US5216490A (en) * | 1988-01-13 | 1993-06-01 | Charles Stark Draper Laboratory, Inc. | Bridge electrodes for microelectromechanical devices |
| US5212988A (en) * | 1988-02-29 | 1993-05-25 | The Reagents Of The University Of California | Plate-mode ultrasonic structure including a gel |
| US5006749A (en) * | 1989-10-03 | 1991-04-09 | Regents Of The University Of California | Method and apparatus for using ultrasonic energy for moving microminiature elements |
| US5146435A (en) * | 1989-12-04 | 1992-09-08 | The Charles Stark Draper Laboratory, Inc. | Acoustic transducer |
| US5203208A (en) * | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
| US5178015A (en) * | 1991-07-22 | 1993-01-12 | Monolithic Sensors Inc. | Silicon-on-silicon differential input sensors |
| US5317107A (en) * | 1992-09-24 | 1994-05-31 | Motorola, Inc. | Shielded stripline configuration semiconductor device and method for making the same |
| US5335210A (en) * | 1992-10-28 | 1994-08-02 | The Charles Stark Draper Laboratory Inc. | Integrated liquid crystal acoustic transducer |
| US5303210A (en) * | 1992-10-29 | 1994-04-12 | The Charles Stark Draper Laboratory, Inc. | Integrated resonant cavity acoustic transducer |
| US5633552A (en) * | 1993-06-04 | 1997-05-27 | The Regents Of The University Of California | Cantilever pressure transducer |
| US5635754A (en) * | 1994-04-01 | 1997-06-03 | Space Electronics, Inc. | Radiation shielding of integrated circuits and multi-chip modules in ceramic and metal packages |
| US5406117A (en) * | 1993-12-09 | 1995-04-11 | Dlugokecki; Joseph J. | Radiation shielding for integrated circuit devices using reconstructed plastic packages |
-
1996
- 1996-11-21 US US08/752,584 patent/US5740261A/en not_active Expired - Lifetime
-
1997
- 1997-11-20 WO PCT/US1997/020942 patent/WO1998023128A2/en not_active Ceased
- 1997-11-20 AT AT97948325T patent/ATE288178T1/en not_active IP Right Cessation
- 1997-11-20 EP EP97948325A patent/EP0940059B1/en not_active Expired - Lifetime
- 1997-11-20 DE DE69732366T patent/DE69732366D1/en not_active Expired - Lifetime
- 1997-11-20 AU AU54412/98A patent/AU5441298A/en not_active Abandoned
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4430520A (en) * | 1982-04-07 | 1984-02-07 | Tibbetts Industries, Inc. | Transducer shielding enclosure |
| US4993072A (en) * | 1989-02-24 | 1991-02-12 | Lectret S.A. | Shielded electret transducer and method of making the same |
| EP0424916A2 (en) * | 1989-10-26 | 1991-05-02 | Knowles Electronics, Inc. | Magnetically shielded electromagnetic acoustic transducer |
| JPH0494560A (en) * | 1990-08-10 | 1992-03-26 | Seiko Epson Corp | Semiconductor device |
| DE4343702C1 (en) * | 1993-12-21 | 1995-03-09 | Siemens Audiologische Technik | Hearing aid worn on the head |
| WO1995031082A1 (en) * | 1994-05-05 | 1995-11-16 | Knowles Electronics, Inc. | Solid state condenser and microphone devices |
Non-Patent Citations (1)
| Title |
|---|
| PATENT ABSTRACTS OF JAPAN vol. 016, no. 324 (E - 1234) 15 July 1992 (1992-07-15) * |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE288178T1 (en) | 2005-02-15 |
| DE69732366D1 (en) | 2005-03-03 |
| EP0940059B1 (en) | 2005-01-26 |
| US5740261A (en) | 1998-04-14 |
| WO1998023128A2 (en) | 1998-05-28 |
| EP0940059A2 (en) | 1999-09-08 |
| AU5441298A (en) | 1998-06-10 |
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