WO1998028647A3 - Mikroskop - Google Patents

Mikroskop Download PDF

Info

Publication number
WO1998028647A3
WO1998028647A3 PCT/DE1997/003015 DE9703015W WO9828647A3 WO 1998028647 A3 WO1998028647 A3 WO 1998028647A3 DE 9703015 W DE9703015 W DE 9703015W WO 9828647 A3 WO9828647 A3 WO 9828647A3
Authority
WO
WIPO (PCT)
Prior art keywords
microscope
rotation
dove
wedge
avoiding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE1997/003015
Other languages
English (en)
French (fr)
Other versions
WO1998028647A2 (de
Inventor
Heinrich Ulrich
Johann Engelhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Lasertechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Lasertechnik GmbH filed Critical Leica Lasertechnik GmbH
Priority to EP97952751A priority Critical patent/EP0950206B1/de
Priority to JP52824498A priority patent/JP2001511260A/ja
Priority to US09/331,189 priority patent/US6738189B1/en
Priority to DE59710481T priority patent/DE59710481D1/de
Publication of WO1998028647A2 publication Critical patent/WO1998028647A2/de
Publication of WO1998028647A3 publication Critical patent/WO1998028647A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G02B27/642—Optical derotators, i.e. systems for compensating for image rotation, e.g. using rotating prisms, mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Ein Mikroskop, insbesondere ein konfokales Mikroskop, ist zur Vermessung eines Objekts aus mehreren Winkelpositionen heraus unter Vermeidung eines Drehens des zu vermessenden Objekts, gekennzeichnet durch eine im Strahlengang (1) des Mikroskops vorgesehene optische Anordnung (2), ein Dove- oder Abbe-Prisma oder eine 'K'-Spiegelanordnung zur Bildrotation zur Vermeidung von Interferenzen ist ein keilförmiger oder dicker Strahlteiler vorgesehen.
PCT/DE1997/003015 1996-12-24 1997-12-23 Mikroskop Ceased WO1998028647A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP97952751A EP0950206B1 (de) 1996-12-24 1997-12-23 Mikroskop
JP52824498A JP2001511260A (ja) 1996-12-24 1997-12-23 顕微鏡
US09/331,189 US6738189B1 (en) 1996-12-24 1997-12-23 Microscope for measuring an object from a plurality of angular positions
DE59710481T DE59710481D1 (de) 1996-12-24 1997-12-23 Mikroskop

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19654208A DE19654208C2 (de) 1996-12-24 1996-12-24 Mikroskop
DE19654208.1 1996-12-24

Publications (2)

Publication Number Publication Date
WO1998028647A2 WO1998028647A2 (de) 1998-07-02
WO1998028647A3 true WO1998028647A3 (de) 1998-10-29

Family

ID=7816134

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1997/003015 Ceased WO1998028647A2 (de) 1996-12-24 1997-12-23 Mikroskop

Country Status (5)

Country Link
US (1) US6738189B1 (de)
EP (1) EP0950206B1 (de)
JP (1) JP2001511260A (de)
DE (2) DE19654208C2 (de)
WO (1) WO1998028647A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974938B1 (en) * 2000-03-08 2005-12-13 Tibotec Bvba Microscope having a stable autofocusing apparatus
DE10133017C2 (de) * 2001-07-06 2003-07-03 Leica Microsystems Konfokales Mikroskop
US20050280892A1 (en) * 2004-05-28 2005-12-22 Nobuyuki Nagasawa Examination method and examination apparatus
EP1936423B1 (de) * 2005-10-11 2019-08-21 Nikon Corporation Mikroskop und beobachtungsverfahren
US7760426B2 (en) * 2006-11-27 2010-07-20 Seiler Instrument & Manufacturing Company, Inc. Optical axis reorientation device for surgical microscope
HU229592B1 (en) * 2007-09-03 2014-02-28 Univ Szegedi Tomographic optical microscope system and method for reconstructing the image of an object
JP5319766B2 (ja) * 2008-06-20 2013-10-16 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置の光学系及びマイクロリソグラフィ露光方法
DE102008054317A1 (de) * 2008-11-03 2010-05-06 Carl Zeiss Microlmaging Gmbh Kombinationsmikroskopie
DE102011114754A1 (de) * 2011-09-29 2013-04-04 Carl Zeiss Microscopy Gmbh "Laser-Scanning-Mikroskop"
LU92924B1 (de) 2015-12-23 2017-08-07 Leica Microsystems Abtastvorrichtung zum Abtasten eines Objekts für den Einsatz in einem Rastermikroskop

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4181436A (en) * 1975-09-25 1980-01-01 Ernst Leitz Wetzlar Gmbh Microscope scanning accessory for a photometer
EP0464236A1 (de) * 1988-09-30 1992-01-08 Global Surgical Corporation Multibenutzer-Mikroskop mit Ausrichtungssteuerung und Verfahren
WO1994008425A1 (en) * 1992-10-01 1994-04-14 Advanced Laser Projection, Inc. Image mover
US5682245A (en) * 1995-03-10 1997-10-28 Research Development Corporation Of Japan Microscopic photometry apparatus

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999304A (ja) * 1982-11-30 1984-06-08 Asahi Optical Co Ltd 顕微鏡系のレーザ光による比較測長装置
JPS59101828A (ja) * 1982-12-01 1984-06-12 Canon Inc 観察装置
EP0193001B1 (de) * 1985-02-04 1989-04-05 Olympus Optical Co., Ltd. Mikroskopvorrichtung zum Prüfen von Wafern
DE3610165A1 (de) * 1985-03-27 1986-10-02 Olympus Optical Co., Ltd., Tokio/Tokyo Optisches abtastmikroskop
DE3518043A1 (de) * 1985-05-20 1986-11-20 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zur automatischen bestimmung der abweichung zwischen den strukturen einer vorlage und denen eines vergleichsobjektes
US4856891A (en) * 1987-02-17 1989-08-15 Eye Research Institute Of Retina Foundation Eye fundus tracker/stabilizer
US5052789A (en) 1988-09-30 1991-10-01 Storz Instrument Company Multi-user microscope with orientation adjustment and method
GB9016632D0 (en) * 1990-07-28 1990-09-12 Medical Res Council Confocal imaging system for microscopy
JP2966514B2 (ja) * 1990-11-19 1999-10-25 オリンパス光学工業株式会社 焦準機構付き顕微鏡
GB9218482D0 (en) * 1992-09-01 1992-10-14 Dixon Arthur E Apparatus and method for scanning laser imaging of macroscopic samples
US5394268A (en) * 1993-02-05 1995-02-28 Carnegie Mellon University Field synthesis and optical subsectioning for standing wave microscopy
US5532873A (en) * 1993-09-08 1996-07-02 Dixon; Arthur E. Scanning beam laser microscope with wide range of magnification
US5896224A (en) * 1994-08-30 1999-04-20 Carl-Zeiss-Stiftung Confocal microscope with a diaphragm disc having many transparent regions
JPH08122238A (ja) * 1994-10-24 1996-05-17 Akashi:Kk ビッカース硬さ試験機
JP3523348B2 (ja) * 1994-11-08 2004-04-26 株式会社ニデック 細隙灯顕微鏡
JP2697663B2 (ja) * 1995-03-04 1998-01-14 株式会社ニッショー 複数薬液混注具
JPH08334698A (ja) * 1995-06-08 1996-12-17 Nikon Corp 光走査型顕微鏡
JPH1048527A (ja) * 1996-08-01 1998-02-20 Olympus Optical Co Ltd イメージローテータ装置及び走査型光学顕微鏡
DE19654207A1 (de) * 1996-12-24 1998-06-25 Leica Lasertechnik TV-Kamera
US6072625A (en) * 1997-02-03 2000-06-06 Olympus Optical Co., Ltd. Optical microscope apparatus
DE10050529B4 (de) * 2000-10-11 2016-06-09 Leica Microsystems Cms Gmbh Verfahren zur Strahlsteuerung in einem Scanmikroskop, Anordnung zur Strahlsteuerung in einem Scanmikroskop und Scanmikroskop

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4181436A (en) * 1975-09-25 1980-01-01 Ernst Leitz Wetzlar Gmbh Microscope scanning accessory for a photometer
EP0464236A1 (de) * 1988-09-30 1992-01-08 Global Surgical Corporation Multibenutzer-Mikroskop mit Ausrichtungssteuerung und Verfahren
WO1994008425A1 (en) * 1992-10-01 1994-04-14 Advanced Laser Projection, Inc. Image mover
US5682245A (en) * 1995-03-10 1997-10-28 Research Development Corporation Of Japan Microscopic photometry apparatus

Also Published As

Publication number Publication date
DE19654208A1 (de) 1998-06-25
EP0950206A2 (de) 1999-10-20
DE59710481D1 (de) 2003-10-02
DE19654208C2 (de) 2001-05-10
JP2001511260A (ja) 2001-08-07
US6738189B1 (en) 2004-05-18
EP0950206B1 (de) 2003-07-23
WO1998028647A2 (de) 1998-07-02

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