WO1998029774A1 - Vorrichtung zur ablenkung von lichtstrahlen - Google Patents
Vorrichtung zur ablenkung von lichtstrahlen Download PDFInfo
- Publication number
- WO1998029774A1 WO1998029774A1 PCT/DE1997/003033 DE9703033W WO9829774A1 WO 1998029774 A1 WO1998029774 A1 WO 1998029774A1 DE 9703033 W DE9703033 W DE 9703033W WO 9829774 A1 WO9829774 A1 WO 9829774A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- drive
- drive unit
- read
- deflection
- deflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/1055—Disposition or mounting of transducers relative to record carriers
- G11B11/10556—Disposition or mounting of transducers relative to record carriers with provision for moving or switching or masking the transducers in or out of their operative position
- G11B11/10567—Mechanically moving the transducers
- G11B11/10569—Swing arm positioners
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
- G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
- G11B7/0857—Arrangements for mechanically moving the whole head
- G11B7/08576—Swinging-arm positioners
Definitions
- the invention relates to a device for deflecting light beams, in particular laser beams, according to the preamble of claim 1.
- Such a device is used, for example, to precisely guide a laser beam onto a workpiece to be machined, to generate graphics, to mark objects by means of a laser, etc.
- a device for material processing by means of a polarization-modulated laser beam which comprises a laser, a phase modulator, two deflecting mirrors which can be rotated about different axes, and a focusing lens.
- the laser beam can be focused on any point on a surface of a given size using the focusing lens. This enables materials to be processed in a targeted manner using a laser beam.
- DE 39 15 254 A1 discloses a method and a device for generating an optical marking on the floor of areas which are frequented by the public.
- a bundled beam of light for example a laser beam, traveling cyclically through a predetermined path is projected onto a floor covering.
- the light deflection device which moves the light steel along the predetermined path, is controlled with such a high frequency that the marking produced on the floor covering appears stationary.
- the deflection systems described above, as well as a large number of other similar devices have in common that the focus of a laser beam should be guided precisely and / or at high speed along a specific path. This requires a correspondingly precise and quick adjustability of the associated deflection elements (mirrors or the like).
- the deflection elements are generally adjusted by rotating about a predetermined axis.
- the invention has for its object to provide a device for deflecting light beams of the type mentioned, the deflection elements can be adjusted very precisely and at great speed with the least expensive means.
- the three essential properties of the drives of read / write heads namely low costs due to large quantities, high accuracy and high speed, are used according to the invention to create an accurate, fast and inexpensive drive for a deflection system.
- the drive unit for the deflection element has the drive motor of the read / write head of a data memory with an exchangeable data carrier (floppy disk, removable hard disk).
- an exchangeable data carrier floppy disk, removable hard disk.
- the read / write heads of data storage devices with fixed data carriers are characterized by particularly high speed and accuracy.
- the use of such a drive is therefore advantageous for deflection systems to which particularly high demands are made.
- Both a stepper motor and a continuous drive can be used in the context of the present invention to drive the deflection element. Stepper motors are characterized by great robustness and the possibility of an absolute position or angle adjustment. Continuous motors allow greater accuracy and speed when moving components; however, the position of a component cannot usually be set absolutely with these motors. A feedback is required with which the absolute position can be determined.
- the drive motor of a magnetic data memory but also at least part of the device for converting the drive force of this motor into a head movement (e.g. the actuator axis and / or the access arm pivotable about this axis) is used for the drive unit of the deflection element.
- the motor, the complete actuator and, if applicable, the drive controller of the magnetic data memory are used to form the drive unit of the deflection element.
- a particularly simple coupling of a rotatable deflection element to the drive of a read / write head of a magnetic data memory is possible if this drive has an actuator in a rotating design.
- Actuators are those drive elements of the magnetic data storage device that convert the driving force of the motor into a head movement.
- An actuator in a rotating design has an access arm which can be pivoted about an axis at one end and carries the read / write heads at its other end. If a deflection element is connected to such an access arm in the region of the actuator axis, the deflection element executes a pure rotary movement when the access arm is pivoted.
- linear motor is used here to refer to continuous motors, which in turn can be used both with actuators in a linear version and with actuators in a rotating version.
- a linear motor is mainly used in hard disk drives together with a rotating actuator to generate an arcuate movement of the read / write heads.
- a rod-shaped component that projects perpendicularly from the arm is particularly suitable for connecting a deflection element to the access arm of an actuator.
- the deflection element itself is preferably designed as a mirror.
- the access arm can also be replaced by another component which carries the deflection element and which is mounted in a corresponding manner on the actuator axis.
- a sensor module is provided for determining the angle and / or position of the deflecting element. This can also be used to determine the speed.
- One element of the sensor assembly can be connected to a component that is movable together with the deflecting element, while another element of the sensor assembly is connected to a stationary component.
- all sensor types are suitable as sensors which enable highly precise determination of the position and / or the angular position of a component, e.g. optical, magnetic and capacitive sensors.
- the sensor module is integrated in a control circuit which continuously compares the current position of the deflection element with its target position and initiates the necessary corrections when the deflection element moves.
- deflection systems for laser beams have several adjustable deflection elements, each of which can be rotated about different axes. Each of these deflection elements can be operatively connected to its own drive. It is also conceivable that several deflection elements are actuated by a common drive.
- the deflection system according to the invention can be used wherever laser beams are to be guided precisely and / or at high speed to different points. Examples of this include material processing using laser beams, the creation of graphics using laser beams, and labeling using laser beams.
- Figure 1 - a schematic representation of a deflection system for laser beams with two deflecting mirrors which can be rotated about different axes;
- Figure 2 is a schematic representation of a hard disk drive, the read / write head is moved by an actuator with a stepper motor;
- FIG. 3 shows an illustration of the deflection device according to the invention for a deflection system according to FIG. 1 using the drive unit for a read / write head shown in FIG. 2;
- Figure 4 is a schematic representation of a hard disk drive, the read / write head is moved by an actuator with a linear motor;
- FIG. 5 shows an illustration of the deflection device according to the invention for a deflection system according to FIG. 1 using the drive unit shown in FIG. 4 for a read / write head.
- a deflection system 10 for the laser beam 2 of a laser 1 is shown, with which a marking, graphics, lettering or the like on a surface 9. should be generated.
- This can be a device for material processing, the surface 9 e.g. is formed by the surface of a workpiece, as well as by a device for producing a still image, the surface 9 being formed by a reflective material.
- the laser 1 can be, for example, an Nd: YAG laser, the laser beam 2 of which is guided to the deflection system 10 by means of a first deflection mirror 3.
- the deflection system 10 comprises two further deflecting mirrors 4, 6, which are each rotatable about an axis of rotation 5 and 7, respectively.
- the axes of rotation 5, 7 of the two deflecting mirrors 4, 6 are perpendicular to one another.
- the laser beam 2 After the deflection by the two mirrors 4, 6, the laser beam 2 passes through a plane field focusing optics 8, which ensure that the focal point of the laser beam is always in the desired plane 9.
- each of the deflecting mirrors 4, 6 is assigned a drive unit 24, 26, which is controlled by a control unit 20.
- the control unit 20 comprises a microcomputer 12 with corresponding operating elements for entering control commands, a laser control 14 with which the operation of the laser 1 is regulated, and a mirror control 16 with which the setting of the deflecting mirrors 4, 6 is controlled by the drive units 24, 26 becomes.
- the control unit 20 can e.g. through a PC or the like. are formed, the laser control 14 and the mirror control 16 being implemented by appropriate software. If additional hardware components are required to control laser 1 or deflection mirrors 4, 6, these are connected to the PC.
- the structure of the above-described deflection system 10 is basically known.
- the main difference between the deflection system according to the invention and the known deflection systems is that in the present case the Drive units 24, 26 of the deflecting mirrors 4, 6 are each formed by a drive of a read / write head for magnetic data storage devices.
- FIG. 2 shows a schematic representation of a hard disk drive in plan view, on the basis of which the drive elements for read / write heads used to adjust the deflection mirrors can be recognized.
- the hard disk drive 30 comprises a stepper motor 31 with a motor shaft 32, an actuator 33 which is operatively connected to the stepper motor 31 and which carries read / write heads 37, and a hard disk 39 which rotates on the spindle shaft 38 of a spindle motor (not shown) .
- the actuator 33 consists of a drive lever 34 which engages with the motor shaft 32 of the stepping motor 31 (for example frictionally or via a toothing), and an access arm 36 which can be pivoted about an actuator axis 35 by the motor-driven movement of the drive lever 34 and which carries the read / write heads 37 at its front end.
- the stepper motor 31 is controlled by a drive plant controller, not shown, in such a way that the read / write heads 37 assume a specific, predeterminable position above the hard disk 39 for reading or storing data.
- the drive controller can either be integrated into a microcomputer or into the hard drive itself; in the latter case it is called an intelligent drive.
- hard disk drives Of particular importance in hard disk drives is that the read / write heads 37 can be used to move very precisely to certain zones on the hard disk 39. This must also be done in very short times in order to minimize the access time to the data. These properties of hard disk drives can be used in an excellent way for the control of deflection mirrors for deflection systems.
- hard disk drive shown in FIG. 2 is only an exemplary variant.
- Other hard disk or floppy disk drives can of course also be used to implement the invention.
- FIG. 3 shows a side view of the stepper motor 31 of a drive 30 according to FIG. 2, the motor shaft 32 of which is in operative connection with the drive lever 34 of an actuator (here only indicated schematically).
- a rod-shaped element 40 projects vertically upward from the access arm 36, which can be pivoted about the actuator axis 35, and a deflecting mirror 4 is attached to the upper end 41 thereof.
- the rod-shaped element 40 is oriented concentrically with respect to the actuator axis 35. Accordingly, the center line of the actuator axis 35 also forms the center line of the rod-shaped element 40. Due to the above-described arrangement of the rod-shaped element 40, each pivoting movement of the arm 36 caused by the stepping motor 31 is converted into a pure rotary movement of the deflecting mirror 4.
- the rotary movements can be carried out with high speed and high precision (angular accuracy); because the drive unit 24 shown in FIG. 3 is the drive unit of a read / write head for magnetic data storage devices. With these, high speed and accuracy are prerequisites for being able to use them for writing and / or reading data.
- a programmable computer can be used, which has control elements for entering the necessary control commands.
- a drive controller can be used as part of the mirror control to implement the control commands from the microcomputer and to transfer them to the electronics of the stepper motor 31; compare the control unit 20 in FIG. 1, which has a microcomputer 12 and a mirror controller 16.
- the drive controller which in the conventional application of the drive unit 24 for moving read / write heads serves as a link between the computer and the magnetic data storage device, can also serve as a corresponding link if the drive unit 24 is used to set a deflection mirror.
- the hard disk drive 30 shown in FIG. 4 corresponds to that shown in FIG. 2; Identical components are provided with identical reference symbols in the two figures.
- one of the read / write heads is generally designed as a servo head, to which a so-called servo or index track of the hard disk is assigned.
- the servo track forms a reference track with which the servo head recognizes the positioning of the read / write heads above the hard disk.
- a separate sensor module can be provided which detects the respective position of the access arm.
- FIG. 5 shows a side view of an example of a deflection system for a deflection mirror 4, in which the (continuous) linear drive 51, 52 shown in FIG. 4 can be used to move the arm 36 around the axis 35, in FIG detailed representation of the linear drive 51, 52 was dispensed with.
- connection between the access arm 36 and the deflecting mirror 4 takes place in the present manner in the same way as in the exemplary embodiment according to FIG. 3.
- the movement of the deflecting mirror 4 also corresponds to that explained with reference to FIG. 3.
- the access arm 36 additionally carries a sensor 56 (e.g. an optical sensor) to which a fixed angle scale 57 (e.g. attached to the axis 35) is assigned.
- a sensor 56 e.g. an optical sensor
- a fixed angle scale 57 e.g. attached to the axis 35
- the sensor module 56, 57 can already be installed in the drive used for the read / write heads of a data memory or can also be added subsequently.
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Optical Recording Or Reproduction (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Laser Surgery Devices (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Moving Of Heads (AREA)
- Moving Of The Head To Find And Align With The Track (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
Claims
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52954798A JP2001507474A (ja) | 1996-12-27 | 1997-12-23 | 光のビームを偏向させるための装置 |
| DE59702361T DE59702361D1 (de) | 1996-12-27 | 1997-12-23 | Vorrichtung zur ablenkung von lichtstrahlen |
| US09/331,858 US6721241B1 (en) | 1996-12-27 | 1997-12-23 | Optical information system with motor controlled reflector means in a swivel arm |
| AT97954337T ATE196368T1 (de) | 1996-12-27 | 1997-12-23 | Vorrichtung zur ablenkung von lichtstrahlen |
| EP97954337A EP0950209B1 (de) | 1996-12-27 | 1997-12-23 | Vorrichtung zur ablenkung von lichtstrahlen |
| AU58520/98A AU5852098A (en) | 1996-12-27 | 1997-12-23 | Device for deflecting light beams |
| CA002276141A CA2276141A1 (en) | 1996-12-27 | 1997-12-23 | Device for deflecting light beams |
| IL13059797A IL130597A0 (en) | 1996-12-27 | 1997-12-23 | Device for deflecting light beams |
| NO993164A NO993164L (no) | 1996-12-27 | 1999-06-25 | Anordning til avboeyning av lysstråler |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19654845.4 | 1996-12-27 | ||
| DE19654845A DE19654845C2 (de) | 1996-12-27 | 1996-12-27 | Vorrichtung zur Ablenkung von Lichtstrahlen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1998029774A1 true WO1998029774A1 (de) | 1998-07-09 |
Family
ID=7816472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/DE1997/003033 Ceased WO1998029774A1 (de) | 1996-12-27 | 1997-12-23 | Vorrichtung zur ablenkung von lichtstrahlen |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US6721241B1 (de) |
| EP (1) | EP0950209B1 (de) |
| JP (1) | JP2001507474A (de) |
| KR (1) | KR20000062376A (de) |
| AT (1) | ATE196368T1 (de) |
| AU (1) | AU5852098A (de) |
| CA (1) | CA2276141A1 (de) |
| DE (2) | DE19654845C2 (de) |
| IL (1) | IL130597A0 (de) |
| NO (1) | NO993164L (de) |
| WO (1) | WO1998029774A1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6700094B1 (en) | 1997-02-06 | 2004-03-02 | Compact Laser Solutions Gmbh | Device for laser writing on materials |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5153870A (en) * | 1989-06-29 | 1992-10-06 | Digital Equipment Corporation | Rotary head actuator for optical disk |
| EP0588490A1 (de) * | 1992-09-03 | 1994-03-23 | Hitachi, Ltd. | Elektromotor für Drucker und Diskettenantriebe mit einem Magnetlager |
| US5319509A (en) * | 1990-10-12 | 1994-06-07 | Servo Track Writer Corporation | Method and apparatus for controlling and analyzing a data storage system |
| WO1995002243A1 (en) * | 1993-07-07 | 1995-01-19 | Digital Equipment Corporation | Rotary actuator for optical disk drive |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4282598A (en) * | 1972-10-24 | 1981-08-04 | Discovision Associates | Video disc read back scanner |
| SE7405076L (sv) * | 1974-04-16 | 1975-10-17 | Erik Gerhard Natanel Westberg | Optiskt massdataminne. |
| FR2325951A1 (fr) * | 1975-09-29 | 1977-04-22 | Thomson Brandt | Procede de diminution de bruit optique et dispositif mettant en oeuvre un tel procede |
| FR2474221A1 (fr) * | 1980-01-23 | 1981-07-24 | Thomson Csf | Dispositif optique d'enregistrement-lecture de supports d'information et systeme de memoire optique comportant un tel systeme |
| US4727528A (en) * | 1986-04-22 | 1988-02-23 | Sri International | Optical media tracking method and apparatus for optical storage system |
| DE3915254A1 (de) * | 1989-05-10 | 1990-11-22 | Berg Gmbh | Verfahren und vorrichtung zur erzeugung einer optischen markierungslinie auf dem fussboden von publikumsfrequentierten bereichen |
| JPH0670857B2 (ja) * | 1989-07-05 | 1994-09-07 | 三菱電機株式会社 | 光学式情報記録再生装置 |
| DE3939866A1 (de) * | 1989-12-01 | 1991-06-06 | Baasel Carl Lasertech | Vorrichtung zum beschriften einer zylindermantelflaeche mittels lasergravur |
| US5420848A (en) * | 1990-08-02 | 1995-05-30 | Canon Kabushiki Kaisha | Optical system for optical information recording/reproducing apparatus having a galvano mirror |
| DE4102936A1 (de) * | 1991-01-31 | 1992-08-13 | Max Planck Gesellschaft | Verfahren und einrichtung zur materialbearbeitung durch einen polarisationsmodulierten laserstrahl |
| DE19706038A1 (de) | 1997-02-06 | 1998-08-20 | Chromatron Laser Sys Gmbh | Vorrichtung zum Beschriften von Materialien mit einem Laser |
-
1996
- 1996-12-27 DE DE19654845A patent/DE19654845C2/de not_active Expired - Fee Related
-
1997
- 1997-12-23 AT AT97954337T patent/ATE196368T1/de not_active IP Right Cessation
- 1997-12-23 DE DE59702361T patent/DE59702361D1/de not_active Expired - Fee Related
- 1997-12-23 IL IL13059797A patent/IL130597A0/xx unknown
- 1997-12-23 EP EP97954337A patent/EP0950209B1/de not_active Expired - Lifetime
- 1997-12-23 CA CA002276141A patent/CA2276141A1/en not_active Abandoned
- 1997-12-23 KR KR1019997005899A patent/KR20000062376A/ko not_active Withdrawn
- 1997-12-23 JP JP52954798A patent/JP2001507474A/ja not_active Ceased
- 1997-12-23 US US09/331,858 patent/US6721241B1/en not_active Expired - Fee Related
- 1997-12-23 AU AU58520/98A patent/AU5852098A/en not_active Abandoned
- 1997-12-23 WO PCT/DE1997/003033 patent/WO1998029774A1/de not_active Ceased
-
1999
- 1999-06-25 NO NO993164A patent/NO993164L/no not_active Application Discontinuation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5153870A (en) * | 1989-06-29 | 1992-10-06 | Digital Equipment Corporation | Rotary head actuator for optical disk |
| US5319509A (en) * | 1990-10-12 | 1994-06-07 | Servo Track Writer Corporation | Method and apparatus for controlling and analyzing a data storage system |
| EP0588490A1 (de) * | 1992-09-03 | 1994-03-23 | Hitachi, Ltd. | Elektromotor für Drucker und Diskettenantriebe mit einem Magnetlager |
| WO1995002243A1 (en) * | 1993-07-07 | 1995-01-19 | Digital Equipment Corporation | Rotary actuator for optical disk drive |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6700094B1 (en) | 1997-02-06 | 2004-03-02 | Compact Laser Solutions Gmbh | Device for laser writing on materials |
Also Published As
| Publication number | Publication date |
|---|---|
| US6721241B1 (en) | 2004-04-13 |
| EP0950209B1 (de) | 2000-09-13 |
| CA2276141A1 (en) | 1998-07-09 |
| NO993164D0 (no) | 1999-06-25 |
| DE19654845A1 (de) | 1998-07-02 |
| AU5852098A (en) | 1998-07-31 |
| ATE196368T1 (de) | 2000-09-15 |
| KR20000062376A (ko) | 2000-10-25 |
| DE59702361D1 (de) | 2000-10-19 |
| DE19654845C2 (de) | 2000-04-06 |
| EP0950209A1 (de) | 1999-10-20 |
| JP2001507474A (ja) | 2001-06-05 |
| IL130597A0 (en) | 2000-06-01 |
| NO993164L (no) | 1999-08-05 |
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