WO2000031758A1 - Actionneurs bidirectionnels - Google Patents
Actionneurs bidirectionnels Download PDFInfo
- Publication number
- WO2000031758A1 WO2000031758A1 PCT/FR1999/002771 FR9902771W WO0031758A1 WO 2000031758 A1 WO2000031758 A1 WO 2000031758A1 FR 9902771 W FR9902771 W FR 9902771W WO 0031758 A1 WO0031758 A1 WO 0031758A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stator
- magnet
- poles
- spherical
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/08—Electromagnets; Actuators including electromagnets with armatures
- H01F7/16—Rectilinearly-movable armatures
- H01F7/1638—Armatures not entering the winding
- H01F7/1646—Armatures or stationary parts of magnetic circuit having permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/08—Electromagnets; Actuators including electromagnets with armatures
- H01F7/17—Pivoting and rectilinearly-movable armatures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/08—Electromagnets; Actuators including electromagnets with armatures
- H01F7/121—Guiding or setting position of armatures, e.g. retaining armatures in their end position
- H01F7/122—Guiding or setting position of armatures, e.g. retaining armatures in their end position by permanent magnets
Definitions
- the present invention relates to the field of electromagnetic actuators.
- Unidirectional actuators are known implementing a stator structure excited by an electric coil, producing a variable magnetic flux ensuring the positioning of a movable magnet.
- US Pat. No. 4,918,987 describes such an actuator comprising a stator having two poles each surrounded by a coil. The movable magnet is subjected to a linear force as a function of the flux generated by the coils.
- German patent DE3037648 describing a two-dimensional actuator which can include either moving coils or moving magnets.
- the solution comprising moving coils is not satisfactory because it induces high industrialization costs.
- the described solution comprising mobile magnets requires the use of 8 mobile magnets.
- Such an architecture requires multiple control signals and computer processing for controlling the position in XY.
- the patent US Pat. No. 5062055 is also known, which relates to electromagnetic actuators producing both a rotational movement and a translational movement.
- Such an actuator of the state of the art comprises a cylindrical magnet having magnetization boundaries in the peripheral direction and in the axial direction, in which a multipolar magnetization is established in the axial direction, and yokes carrying coils comprising magnetic poles located opposite the magnetization boundaries.
- Such an actuator uses a magnet having several pairs of poles with magnetization directions perpendicular to each other.
- the purpose of the present invention is to provide an actuator enabling the positioning of a member to be controlled according to two degrees of freedom, for example in a plane along two perpendicular axes XY, or according to a degree of freedom in translation and a degree of freedom in rotation, or in spherical rotation, with simple control signals.
- the invention relates in its most general sense to a bidirectional actuator comprising at least one stator structure excited by an electric coil, and a single movable magnet having a single polarity.
- This magnet is placed in a main air gap.
- the stator structure is made up of two stator parts. Each of the stator parts has at least one secondary air gap and is excited by at least one electric coil, has stator structure has at least one air gap for the displacement of the movable magnet with respect to a first degree of freedom, and at least a second secondary air gap for the displacement of the movable magnet with respect to a second degree of freedom.
- the mobile magnet is secured to the cylinder head.
- the stator structure is composed of 4 poles made of a soft magnetic material defining between them two pairs of secondary air gaps crossing at a midpoint and in that the main air gap is plane.
- stator poles are constituted by two pairs of rectangular parts, each pair of parts being excited by at least one electric coil and each defining a secondary air gap.
- the ratio L / E between the thickness L of the magnet and the thickness E of the air gap is between 1 and 2.
- the dimensions of the secondary air gaps are C x + E and C 2 + E, where C_ and C 2 denote the stroke of the movable magnet in the two directions of, secondary air gaps and in that the dimensions of the magnet are C- L + d- L + E and C 2 + d 2 + E, d ⁇ and d 2 designating the width of said secondary air gaps.
- the stator structure is composed of two stator parts arranged on either side of the magnet, each of the stator parts having a pair of stator poles, the pair of stator poles of one of the parts being oriented perpendicular to the pair of stator poles of the other stator part.
- the magnet is of tubular shape and is movable according to a first degree of freedom in axial translation and according to a second degree of freedom in axial rotation relative to a stator structure formed by 4 stator poles in the form of cylinder portions, having a first secondary air gap in the longitudinal median plane, in which is placed a first electrical coil, and a second secondary air gap in the transverse plane, in which is placed a second coil.
- a stator structure formed by 4 stator poles in the form of cylinder portions, having a first secondary air gap in the longitudinal median plane, in which is placed a first electrical coil, and a second secondary air gap in the transverse plane, in which is placed a second coil.
- Each of these coils is preferably wound around a ferromagnetic core.
- the magnet is of tubular shape and is movable according to a first degree of freedom in axial translation and according to a second degree of freedom in axial rotation relative to an external cylindrical stator structure formed by 4 stator poles having a concave surface defining the main air gap with the cylindrical yoke placed inside the magnet, each of the four stator poles being surrounded by an electric coil.
- the magnet is of tubular shape and is movable according to a first degree of freedom in axial translation and according to a second degree of freedom in axial rotation with respect to a cylindrical stator structure constituted by a first external stator part for displacement according to a first degree of freedom, and a second internal stator part for displacement according to a degree of freedom, each of the stator parts comprising at least one electric excitation coil.
- the magnet is spherical in shape and is movable in spherical rotation relative to a stator structure in the form of a spherical cap formed by 4 stator poles in the form of a cap sector, comprising two coils housed in grooves. peripherals whose median planes are perpendicular.
- the magnet is spherical in shape and is movable in spherical rotation relative to a stator structure of tubular shape formed by 4 stator poles in the shape of a quarter of a tube, surrounded by an electric coil.
- the main air gap is spherical in shape.
- the magnet is spherical in shape and surrounds a spherical yoke, and is movable in spherical rotation around a stator structure of semi-spherical shape formed by 4 stator poles in the shape of a quarter of a sphere.
- the magnet is spherical in shape and surrounds a spherical yoke, and is movable in spherical rotation around a stator structure formed from two semi-spherical stator parts.
- FIG. 6 and 7 show schematic views respectively in transverse view, and of the stator part of a first alternative embodiment in the form of a linear actuator XY;
- FIG. 10 to 12 show perspective views, respectively without and with magnet, and in cross section, of a linear-rotary actuator
- FIG. 13 to 16 show perspective views, respectively without and with magnet, and in transverse view, and in exploded view of a second version of a linear-rotary actuator
- FIGS. 17 to 19 show perspective views, respectively without and with magnet, and of the stator part of a third version of a linear-rotary actuator;
- FIGS. 20 and 21 show an alternative embodiment of an actuator of the “external linear and rotary” type;
- - Figures 22 and 23 show a second version of an actuator of the "external linear and rotary”type;
- FIGS. 24 and 25 represent a third version of an actuator of the “external linear and rotary” type;
- - Figure 26 shows a first version of a variant of type "Inner linear, outer rotary";
- FIGS. 27 and 27b represent a modified version of a variant of the “internal linear, external rotary” type;
- FIG. 28 and 29 show, in three-quarter view and in transverse view, a second version of a variant of the type "Inner linear, outer rotary";
- - Figures 30 and 31 describe an actuator of the type “Linear exterior, interior rotary” respectively of three quarters face and in partially cut view;
- - Figure 32 shows a three-quarter front view of the stator assembly of a variant of the type "Linear exterior, interior rotation”;
- FIG. 33 and 34 show views of a spherical actuator and the stator of such an actuator;
- Figure 35 shows a view of a second version of spherical actuator;
- Figure 36 shows a view of a third version of spherical actuator;
- - Figures 37 and 38 show views of three quarter face and in section of a fourth version of spherical actuator;
- FIGS. 39 and 40 show views of three quarter face and in section of a fifth version of spherical actuator
- the invention relates to a new type of actuator making it possible to move a mobile part according to two degrees of freedom.
- the targeted applications are:
- Figures 1 and 2 show views of a first embodiment of an XY linear actuator.
- the objective is to move a mobile part in a plane along 2 axes comprising at the base a structure composed of a 4 pole stator, a mobile magnet and a cylinder head which can be fixed or mobile with
- the first version presented with reference to Figures 1 and 2 relates to an actuator with fixed cylinder head. In this architecture, only the magnet (14) is therefore mobile.
- the actuator is then composed of the following functional parts:
- This actuator therefore makes it possible to create a force of intensity and direction adjustable in the plane (XY).
- L be the thickness of the magnet
- E the air gap
- c x and c v the sensor travels in the two dimensions
- d x and d y the pole-to-pole distances along the 2 axes.
- the actuator is then composed of the following functional parts:
- stator Y composed of a flat base (25) and 2 poles (26, 27) with properties similar to stator X. These two poles (26, 27) are oriented perpendicular to the poles (21, 22) stator X
- stator X and the stator Y are arranged with on either side of the main air gap in which the magnet (14) is placed.
- the poles (21, 22) of the stator X are oriented perpendicular to the poles (26, 27) of the stator Y, in order to drive the mobile magnet in the two perpendicular directions and to ensure a bidirectional movement of the member to which it is mated.
- FIGS. 6 and 7 show schematic views respectively in transverse view, and of the stator part of a first alternative embodiment in the form of a linear actuator XY.
- This variant of the actuator has the advantage of requiring only one coil per axis.
- the actuator is then composed of the following functional parts: • 1 flat magnet (14) composed of a shade of isotropic or axially anisotropic magnet. In the latter case, the direction of the anisotropy should be perpendicular to the surface of the poles. It will be magnetized in this same direction. • 1 cylinder head (40) consisting of a plate made of a material magnetic with high permeability • 1 stator (41) composed of 4 poles (42 to 45) of rectangular section connected by cores around which the coils (46, 47) will be wound. It will also be made of magnetic material with high permeability.
- This variant can also be produced symmetrically, that is to say by replacing the cylinder head with a stator + coil assembly. We will then increase the amplitude of the force created. You can also make the stator in several distinct parts, for example by separating the poles. We can then obtain a version without ferromagnetic coil core or with independent coil cores, which would facilitate winding. This variant can also be produced in a symmetrical version.
- Figures 8 and 9 show a variant of a cylindrical actuator x- ⁇ , respectively without and with the magnet.
- the actuator has a cylindrical structure, therefore comprising a zone inside the magnet and a zone outside this same magnet.
- This structure fulfills two functions to be ensured: function of rotary actuator and linear actuator.
- the solutions defined below will be defined by the situation (“inside” or “outside”) of each of these functions.
- the actuator comprises a stator structure having four poles (51 to 54) in the form of half-cylinders and a tubular magnet (55). The following description will first present an actuator of the “linear and rotary interior” type.
- a first solution is described in Figures 10 to 12: it consists in the use of a cylindrical internal stator composed of four identical poles. Two coils are surrounded around each of these poles.
- the actuator is then composed of the following functional parts:
- stator composed of 4 poles (62 to 65) of cylindrical external shape connected by cores (70, 71) around which the coils (66 to 69) will be wound. It will also be made of magnetic material with high permeability. According to manufacturing preferences, it can be made in one piece or an assembly of ferromagnetic parts
- Figures 13 to 16 show a second solution of a linear-rotary actuator.
- This second solution consists in replacing 2 of the 4 coils of the previous solution with a coil mounted on the main axis of the mechanism.
- This one, named (4L) will ensure the “axial force” part and the 2 others will create the moment.
- the actuator is then composed of the following functional parts:
- stator composed of 4 poles (62 to 65) of cylindrical external shape.
- the half-moons located opposite the radial are connected 2 to 2 by cores (70, 71) around which the coils (4R) will be wound.
- the assemblies thus formed will be connected by an axial core (72) around which the coil (4L) will be wound.
- All these poles will also be made of magnetic material with high permeability. Depending on manufacturing preferences, it can be made in one piece or an assembly of ferromagnetic parts (see Figure 16).
- a magnet support which surrounds the magnet to transmit the force - or displacement - supplied to an external part.
- This actuator therefore makes it possible to create both a force and a moment of adjustable intensities, both collinear with the X axis.
- FIGs 17 to 19 show a third version of a linear-rotary actuator.
- the stator is formed by a cylindrical part having 4 poles (62 to 65) in the form of half-cylinders.
- 4R the 2 coils previously noted
- This actuator therefore makes it possible to create both a force and a moment of adjustable intensities, both collinear with the X axis.
- Another structure could also be obtained by dividing the coil (4L) into 3 or four coils which are mounted on either side of the axial poles.
- Figures 20 and 21 show an alternative embodiment of an actuator of the "linear and rotary exterior" type.
- stator composed of 4 poles (82 to 85) of cylindrical interior shape connected by a common base. It will also be made of magnetic material with high permeability. Depending on manufacturing preferences, it can be made in one piece or an assembly of ferromagnetic parts.
- This actuator therefore makes it possible to create both a force and a moment of adjustable intensities, both collinear with the X axis.
- Figures 22 and 23 show a second version of an actuator of the "linear-rotary" type.
- the actuator is then composed of the following functional parts:
- the coils (4L) and (4R) are shown here in a rectangular shape to facilitate reading of the drawing, but it goes without saying that they could also, for example, take a cylindrical shape.
- FIGS 24 and 25 show a third version of an actuator of the "linear-rotary" type, having 2 crossed coils.
- the actuator according to this third version is composed of the following functional parts: • 1 ring half-magnet (90) composed of a shade of isotropic or radially anisotropic magnet, radially magnetized. This can be independent or glued to the cylinder head.
- stator composed of 4 poles (91 to 94) and a common structure (96). Around 2 of them will be wound the coil (4R). The coil (4L) will be located between the poles (91 to 94). All these poles will also be made of magnetic material with high permeability. Depending on manufacturing preferences, it can be made in one piece or an assembly of ferromagnetic parts.
- This actuator therefore makes it possible to create both a force and a moment of adjustable intensities, both collinear with the X axis.
- Another structure could also be obtained by splitting the coil (4L) into 3 or four coils which are mounted on either side of the axial poles, or by adding a second coil (4R), symmetrically to the first with respect to 1 'axis.
- FIG. 26 represents a first version of a variant of the “internal linear, external rotary” type.
- the actuator is then composed of the following functional parts: • 1 half ring magnet (100) composed of a shade of isotropic or radially anisotropic magnet, radially magnetized. This must be independent of the two stators. • 1 cylindrical stator in magnetic material with high permeability, composed of two poles (101, 102) of the same diameter. The coil (103) will be located between these two poles, around a ferromagnetic core.
- 1 stator composed of 2 poles (104, 105) and a common structure (108). Around them will be wound the coils (106, 107). These poles (104, 105) will also be made of magnetic material with high permeability. According to manufacturing preferences, this stator can be made in one piece or an assembly of ferromagnetic parts.
- This actuator therefore makes it possible to create both a force and a moment of adjustable intensities, both collinear with the X axis.
- Another structure could also be obtained by multiplying the external stator structure according to FIG. 27. This gives a structure with more external poles (110, 111, 112, 113), with several magnets (115, 116), which offers a lower angular travel but greater torque. We can thus imagine any structure with (2N) radial poles. This multiplication principle can also be applied to each cylindrical structure described in this text.
- Another structure could also be obtained by using only one coil for the creation of a torque.
- Figures 28 and 29 show three quarter face and sectional views of such a version. This consists of a new arrangement of the external part of the actuator allowing to have only 2 coils.
- the actuator is then composed of the following functional parts:
- stator composed of 2 poles (123, 124) and a common structure.
- the coil (126) surrounds this stator, between the 2 poles (123, 124).
- These poles will also be made of magnetic material with high permeability. According to manufacturing preferences, this stator can be made in one piece or an assembly of ferromagnetic parts.
- a magnetic potential difference is created along the X axis: we therefore create a force Fx along the X axis proportional to the magnetic potential difference created.
- a current i2 in the coil (126) one creates this time a moment of rotation Mx on the magnet collinear with the axis X and proportional to the difference of magnetic potential created.
- This actuator therefore makes it possible to create both a force and a moment of adjustable intensities, both collinear with the X axis.
- FIGS. 30 and 31 describe an actuator of the “external linear, internal rotary” type.
- the actuator is made up of the following functional parts:
- • 1 cylindrical stator in magnetic material with high permeability composed of two poles (141, 142) of the same diameter.
- the coil (143) will be located between the 2 poles.
- • 1 stator (2R) composed of 2 poles (144, 145) and a common core.
- the coil (146) will be located surrounded around this core, between the 2 poles (144, 145). These poles will also be made of magnetic material with high permeability • 1 coil (143) • 1 coil (146)
- This actuator therefore makes it possible to create both a force and a moment of adjustable intensities, both collinear with the X axis.
- the stator in the form of four quarters of cylinders (150 to 153) around which s 'surround 2 coils (154, 155) (cf. Figure 32), a 4-pole rotary version is obtained, with a stroke reduced to less than 90 ° but providing greater torque.
- Figures 33 and 34 show views of a spherical actuator ⁇ - ⁇ and its stator.
- the actuator is composed of the following functional parts: • 1 spherical half-magnet (200) composed of one shade isotropic or radially anisotropic magnet, radially magnetized. This can be independent or glued to the cylinder head, as shown in Figure (33). • 1 hollow spherical yoke (201) made of magnetic material with high permeability • 1 stator composed of 4 poles (202 to 205) of spherical external shape connected by cores around which the four coils will be wound (206 to 209). It will also be made of magnetic material with high permeability. Depending on manufacturing preferences, it can be made in one piece or an assembly of ferromagnetic parts. • 4 coils (206 to 209), surrounding the stator
- composition of the so-called currents will allow us, by the principle of superposition, to create any moment whose axis will be included in this XY plane. Indeed: By feeding (206) and (208) with a current there, we create a moment Mx
- This actuator therefore makes it possible to create independent couples along two orthogonal axes.
- Figure 35 shows a second version of a spherical actuator.
- the actuator is made up of the following functional parts:
- stator composed of 4 poles (212 to 215) of spherical exterior shape connected by cores around which the coils will be wound (216, 217). It will also be made of magnetic material with high permeability. Depending on manufacturing preferences, it can be made in one piece or an assembly of ferromagnetic parts.
- composition of said currents will allow us, by the principle of superposition, to create any moment whose axis will be included in this XY plane.
- FIG. 36 corresponds to another arrangement of this same system, more easily achievable industrially but with a shorter stroke.
- the stator parts are made in the form of a quarter of spherical sector (220 to 223). They are surrounded by two coils (224, 225).
- Figures 37 and 38 show views of a spherical actuator of the "All exterior" type.
- the principle of this solution consists in reversing the architecture of the previous actuator, by putting the cylinder head and the magnet inside, the stator poles outside.
- the first version of the actuator is composed of the following functional parts: • 1 magnet in the form of a spherical cap (230) composed of a shade of isotropic or radially anisotropic magnet, magnetized radially. • 1 spherical yoke (231) made of magnetic material with high permeability • 1 stator composed of 4 poles (232 to 235) of external shape in quarter of cylinder and of internal spherical form connected by cores around which the coils (236 to 239). It will also be made of magnetic material with high permeability. Depending on manufacturing preferences, it may be made of a single piece or an assembly of ferromagnetic parts.
- this actuator is in all respects the same as that of the first spherical actuator presented in this text.
- Figures 39 and 40 show a second version of a spherical actuator of the "all exterior" type.
- the actuator is made up of the following functional parts:
- stator composed of 4 poles (252 to 255) of spherical interior shape connected by cores around which the coils will be wound (256, 257). It will also be made of magnetic material with high permeability. Depending on manufacturing preferences, it can be made in one piece or an assembly of ferromagnetic parts.
- Figures 41 and 42 show three quarter face views in partial section of a hybrid actuator (interior & exterior).
- the actuator is made up of the following functional parts:
- composition of the so-called currents will allow us, by the principle of superposition, to create any moment whose axis will be included in this XY plane.
- Each of the above electromagnetic systems can be coupled with non-contact dimensional position sensors.
- Figures 43 and 44 illustrate the application of this principle on a flat XY actuator.
- the position sensor measures the variations in flux created by a mobile magnet in an air gap.
- the stator consists of four rectangular parts (300 to 303) surrounded by four coils
- a thin magnet (305) magnetized transversely is placed in the main air gap (307) formed between the stator and the cylinder head (306).
- Four Hall probes (320 to 323) are placed in the secondary air gaps between the stator parts (300 to 303).
- the probes will measure a variation in flux due to the displacement of the magnet and to the current flowing in the coils. So we have to "dismiss” this flow due to the current. This can be done in two ways:
- the coils By alternating the "sensor" and “actuator” functions. During a given time interval, the coils will be fed in order to produce the desired force (or torque), and, during the following interval, the coils will be cut off to measure only the flux due to the magnet. There will thus be an intermittent force which can be used for joystick type functions.
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Linear Motors (AREA)
- Amplifiers (AREA)
- Actuator (AREA)
- Electromagnets (AREA)
Abstract
Description
Claims
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000584497A JP2002530879A (ja) | 1998-11-20 | 1999-11-10 | 双方向アクチュエータ |
| DE69930555T DE69930555T2 (de) | 1998-11-20 | 1999-11-10 | Bidirektionale betätigunsvorrichtungen |
| EP99972774A EP1135781B1 (fr) | 1998-11-20 | 1999-11-10 | Actionneurs bidirectionnels |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9814668A FR2786311B1 (fr) | 1998-11-20 | 1998-11-20 | Actionneurs bidirectionnels |
| FR98/14668 | 1998-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2000031758A1 true WO2000031758A1 (fr) | 2000-06-02 |
Family
ID=9533021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/FR1999/002771 Ceased WO2000031758A1 (fr) | 1998-11-20 | 1999-11-10 | Actionneurs bidirectionnels |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1135781B1 (fr) |
| JP (1) | JP2002530879A (fr) |
| AT (1) | ATE321347T1 (fr) |
| DE (1) | DE69930555T2 (fr) |
| FR (1) | FR2786311B1 (fr) |
| WO (1) | WO2000031758A1 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2887376B1 (fr) * | 2005-06-15 | 2007-12-14 | Sonceboz Sa Sa Suisse | Servo-actionneur electromagnetique monophase rotatif comprenant un actionneur et un capteur de position |
| US11108287B2 (en) | 2019-07-05 | 2021-08-31 | Honeywell International Inc. | Spherical electromagnetic machine with two degrees of unconstrained rotational freedom |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3037648A1 (de) * | 1979-10-17 | 1981-04-30 | Jenoptik Jena Gmbh, Ddr 6900 Jena | Zweikoordinatenschrittmotor |
| EP0091685A1 (fr) * | 1982-04-12 | 1983-10-19 | Polaroid Corporation | Mécanismes d'actionnement électromagnétiques |
| US4602848A (en) * | 1982-09-16 | 1986-07-29 | U.S. Philips Corporation | Optical apparatus with 5-degree of-freedom positioning device |
| EP0221228A1 (fr) * | 1985-10-25 | 1987-05-13 | TA TRIUMPH-ADLER Aktiengesellschaft | Entraînement électrique |
| JPS62221856A (ja) * | 1986-03-22 | 1987-09-29 | Nippon Telegr & Teleph Corp <Ntt> | 球面モ−タ |
| US5062095A (en) * | 1988-07-21 | 1991-10-29 | Seiko Epson Corporation | Actuator and method of manufacturing thereof |
| US5600189A (en) * | 1994-07-14 | 1997-02-04 | U.S. Philips Corporation | Electromagnetic actuator having a cylindrical translation coil and a toroidal rotation coil, actuator unit comprising the actuator and a measurement system, and machine comprising the actuator or the actuator unit |
-
1998
- 1998-11-20 FR FR9814668A patent/FR2786311B1/fr not_active Expired - Fee Related
-
1999
- 1999-11-10 DE DE69930555T patent/DE69930555T2/de not_active Expired - Fee Related
- 1999-11-10 EP EP99972774A patent/EP1135781B1/fr not_active Expired - Lifetime
- 1999-11-10 AT AT99972774T patent/ATE321347T1/de not_active IP Right Cessation
- 1999-11-10 WO PCT/FR1999/002771 patent/WO2000031758A1/fr not_active Ceased
- 1999-11-10 JP JP2000584497A patent/JP2002530879A/ja active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3037648A1 (de) * | 1979-10-17 | 1981-04-30 | Jenoptik Jena Gmbh, Ddr 6900 Jena | Zweikoordinatenschrittmotor |
| EP0091685A1 (fr) * | 1982-04-12 | 1983-10-19 | Polaroid Corporation | Mécanismes d'actionnement électromagnétiques |
| US4602848A (en) * | 1982-09-16 | 1986-07-29 | U.S. Philips Corporation | Optical apparatus with 5-degree of-freedom positioning device |
| EP0221228A1 (fr) * | 1985-10-25 | 1987-05-13 | TA TRIUMPH-ADLER Aktiengesellschaft | Entraînement électrique |
| JPS62221856A (ja) * | 1986-03-22 | 1987-09-29 | Nippon Telegr & Teleph Corp <Ntt> | 球面モ−タ |
| US5062095A (en) * | 1988-07-21 | 1991-10-29 | Seiko Epson Corporation | Actuator and method of manufacturing thereof |
| US5600189A (en) * | 1994-07-14 | 1997-02-04 | U.S. Philips Corporation | Electromagnetic actuator having a cylindrical translation coil and a toroidal rotation coil, actuator unit comprising the actuator and a measurement system, and machine comprising the actuator or the actuator unit |
Non-Patent Citations (1)
| Title |
|---|
| PATENT ABSTRACTS OF JAPAN vol. 012, no. 085 (E - 591) 17 March 1988 (1988-03-17) * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2786311A1 (fr) | 2000-05-26 |
| DE69930555T2 (de) | 2007-03-08 |
| JP2002530879A (ja) | 2002-09-17 |
| EP1135781A1 (fr) | 2001-09-26 |
| EP1135781B1 (fr) | 2006-03-22 |
| FR2786311B1 (fr) | 2001-01-19 |
| ATE321347T1 (de) | 2006-04-15 |
| DE69930555D1 (de) | 2006-05-11 |
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