WO2001027559A3 - Feedback mechanism for rate gyroscopes - Google Patents

Feedback mechanism for rate gyroscopes Download PDF

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Publication number
WO2001027559A3
WO2001027559A3 PCT/US2000/041072 US0041072W WO0127559A3 WO 2001027559 A3 WO2001027559 A3 WO 2001027559A3 US 0041072 W US0041072 W US 0041072W WO 0127559 A3 WO0127559 A3 WO 0127559A3
Authority
WO
WIPO (PCT)
Prior art keywords
drive system
mechanical
transverse
rate
gyroscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/041072
Other languages
French (fr)
Other versions
WO2001027559B1 (en
WO2001027559A2 (en
Inventor
John A Geen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Analog Devices Inc
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Priority to JP2001530525A priority Critical patent/JP2003511684A/en
Priority to EP00978903.3A priority patent/EP1221019B1/en
Publication of WO2001027559A2 publication Critical patent/WO2001027559A2/en
Publication of WO2001027559A3 publication Critical patent/WO2001027559A3/en
Publication of WO2001027559B1 publication Critical patent/WO2001027559B1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

A mechanical rate gyroscope (100) including a micro-fabricated mechanical sensor (102). The mechanical sensor includes a first segmented drive system (114) used to impart vibration to a mass and a transverse segmented drive system (166, 168) used to cancel a Coriolis force applied to the mass when the mechanical sensor undergoes rotation. The mechanical rate gyroscope further includes a force-feedback control mechanism (158, 164) used to provide at least one cycle of drive signals employed by the first drive system to the transverse drive system. The force-feedback control mechanism generates a feedback signal used to control the polarity of the drive signals provided to the transverse drive system. The feedback signal has a pulse repetition frequency proportional to the applied angular rate. The proportionality constant relating the applied angular rate to the pulse repetition frequency includes transduction coefficients that are less sensitive to the mechanical and electrical properties of the gyroscope.
PCT/US2000/041072 1999-10-13 2000-10-04 Feedback mechanism for rate gyroscopes Ceased WO2001027559A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001530525A JP2003511684A (en) 1999-10-13 2000-10-04 Feedback mechanism for rate gyroscope
EP00978903.3A EP1221019B1 (en) 1999-10-13 2000-10-04 Gyroscope with feedback mechanism

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15927999P 1999-10-13 1999-10-13
US60/159,279 1999-10-13

Publications (3)

Publication Number Publication Date
WO2001027559A2 WO2001027559A2 (en) 2001-04-19
WO2001027559A3 true WO2001027559A3 (en) 2002-02-07
WO2001027559B1 WO2001027559B1 (en) 2002-03-07

Family

ID=22571869

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/041072 Ceased WO2001027559A2 (en) 1999-10-13 2000-10-04 Feedback mechanism for rate gyroscopes

Country Status (4)

Country Link
US (1) US6470748B1 (en)
EP (1) EP1221019B1 (en)
JP (2) JP2003511684A (en)
WO (1) WO2001027559A2 (en)

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US6713829B1 (en) 2003-03-12 2004-03-30 Analog Devices, Inc. Single unit position sensor
US6845665B2 (en) * 2003-04-28 2005-01-25 Analog Devices, Inc. Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing
DE102005010940B8 (en) * 2004-03-12 2013-01-17 Denso Corporation Electrostatically oscillatable arrangement
DE602005027713D1 (en) * 2005-12-02 2011-06-09 St Microelectronics Srl Device and method for reading a capacitive sensor, in particular a micro-electro-mechanical sensor
RU2314495C1 (en) * 2006-05-02 2008-01-10 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Interface arrangement for a micro mechanical gyroscope
RU2319929C1 (en) * 2006-05-02 2008-03-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Micromechanical gyroscope
JP5181449B2 (en) * 2006-09-14 2013-04-10 セイコーエプソン株式会社 Detection device, sensor and electronic device
JP4576441B2 (en) * 2008-03-21 2010-11-10 日立オートモティブシステムズ株式会社 Angular velocity sensor
US7956783B2 (en) * 2009-01-29 2011-06-07 Analog Devices, Inc. Analog-to-digital converter using digital output as dither
US8322213B2 (en) * 2009-06-12 2012-12-04 The Regents Of The University Of California Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8508290B2 (en) * 2010-09-14 2013-08-13 Ayman Elsayed Interface for MEMS inertial sensors
DE102010053022B4 (en) * 2010-12-02 2014-01-09 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Device for measuring a rate of rotation
US9212908B2 (en) 2012-04-26 2015-12-15 Analog Devices, Inc. MEMS gyroscopes with reduced errors
FR3013445B1 (en) * 2013-11-20 2015-11-20 Sagem Defense Securite MOBILE SENSITIVE ELEMENT SENSOR HAVING VIBRANT AND PENDULAR MIXED OPERATION, AND METHODS OF CONTROLLING SAME
JP6435631B2 (en) * 2014-04-23 2018-12-12 株式会社デンソー Angular velocity sensor
CN105737851B (en) * 2016-01-30 2018-08-21 西北工业大学 The silicon micromechanical gyroscope systematic parameter acquisition methods of Precision-oriented design
JP6571064B2 (en) * 2016-11-21 2019-09-04 株式会社東芝 Detection device and sensor device

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US5945599A (en) * 1996-12-13 1999-08-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Resonance type angular velocity sensor
US6089089A (en) * 1997-10-14 2000-07-18 Microsensors, Inc. Multi-element micro gyro

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US5604312A (en) * 1994-11-25 1997-02-18 Robert Bosch Gmbh Rate-of-rotation sensor
US5945599A (en) * 1996-12-13 1999-08-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Resonance type angular velocity sensor
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Non-Patent Citations (1)

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Title
See also references of EP1221019A4 *

Also Published As

Publication number Publication date
US6470748B1 (en) 2002-10-29
JP2011039074A (en) 2011-02-24
JP2003511684A (en) 2003-03-25
EP1221019B1 (en) 2014-08-06
WO2001027559B1 (en) 2002-03-07
JP4971490B2 (en) 2012-07-11
EP1221019A2 (en) 2002-07-10
WO2001027559A2 (en) 2001-04-19
EP1221019A4 (en) 2006-06-07

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