WO2001082478A3 - Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices - Google Patents

Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices Download PDF

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Publication number
WO2001082478A3
WO2001082478A3 PCT/US2001/040565 US0140565W WO0182478A3 WO 2001082478 A3 WO2001082478 A3 WO 2001082478A3 US 0140565 W US0140565 W US 0140565W WO 0182478 A3 WO0182478 A3 WO 0182478A3
Authority
WO
WIPO (PCT)
Prior art keywords
subsystem
vibrating micromechanical
signals utilizing
architectures
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2001/040565
Other languages
French (fr)
Other versions
WO2001082478A2 (en
Inventor
Clark T C Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Michigan System
University of Michigan Ann Arbor
Original Assignee
University of Michigan System
University of Michigan Ann Arbor
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Michigan System, University of Michigan Ann Arbor filed Critical University of Michigan System
Priority to AU2001257612A priority Critical patent/AU2001257612A1/en
Priority to JP2001579450A priority patent/JP2004515089A/en
Priority to EP01931148A priority patent/EP1277277A2/en
Priority to CA002406543A priority patent/CA2406543A1/en
Publication of WO2001082478A2 publication Critical patent/WO2001082478A2/en
Publication of WO2001082478A3 publication Critical patent/WO2001082478A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Transceivers (AREA)
  • Transmitters (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Filters And Equalizers (AREA)
  • Amplifiers (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Networks Using Active Elements (AREA)

Abstract

Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. A method and subsystem are provided for processing RF signals utilizing a plurality of vibrating micromechanical devices typically in the form of an IF mixer-filter and an RF channel selector or an image-reject RF filter. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Also, such methods and circuits can elimitate the need for a low noise amplifier in a receiver or transceiver subsystem. Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.
PCT/US2001/040565 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices Ceased WO2001082478A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AU2001257612A AU2001257612A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
JP2001579450A JP2004515089A (en) 2000-04-20 2001-04-20 Method and subsystem for processing a signal utilizing a plurality of vibrating micromechanical element arrays
EP01931148A EP1277277A2 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
CA002406543A CA2406543A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19906300P 2000-04-20 2000-04-20
US60/199,063 2000-04-20

Publications (2)

Publication Number Publication Date
WO2001082478A2 WO2001082478A2 (en) 2001-11-01
WO2001082478A3 true WO2001082478A3 (en) 2002-04-11

Family

ID=22736053

Family Applications (6)

Application Number Title Priority Date Filing Date
PCT/US2001/012806 Ceased WO2001082475A2 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
PCT/US2001/040566 Ceased WO2001082479A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
PCT/US2001/040562 Ceased WO2001082476A2 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
PCT/US2001/040564 Ceased WO2001082477A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
PCT/US2001/040563 Ceased WO2001082467A2 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
PCT/US2001/040565 Ceased WO2001082478A2 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices

Family Applications Before (5)

Application Number Title Priority Date Filing Date
PCT/US2001/012806 Ceased WO2001082475A2 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
PCT/US2001/040566 Ceased WO2001082479A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
PCT/US2001/040562 Ceased WO2001082476A2 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
PCT/US2001/040564 Ceased WO2001082477A2 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
PCT/US2001/040563 Ceased WO2001082467A2 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices

Country Status (5)

Country Link
EP (4) EP1277277A2 (en)
JP (4) JP2003532320A (en)
AU (6) AU2001255868A1 (en)
CA (4) CA2406223A1 (en)
WO (6) WO2001082475A2 (en)

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JP4176450B2 (en) * 2002-02-13 2008-11-05 松下電器産業株式会社 Micro mechanical vibration filter
JP4075503B2 (en) * 2002-07-30 2008-04-16 ソニー株式会社 Micromachine and manufacturing method thereof
AU2003271082A1 (en) * 2002-10-03 2004-04-23 Sharp Kabushiki Kaisha Microresonator, microfilter, micro-oscillator, and wireless communication device
DE10252828B4 (en) * 2002-11-13 2018-07-05 Epcos Ag Acoustic wave device and method of fabricating a device
EP1432119A1 (en) * 2002-12-17 2004-06-23 Dialog Semiconductor GmbH High quality serial resonance oscillator
JP4575075B2 (en) * 2003-08-12 2010-11-04 パナソニック株式会社 Electromechanical filter, electric circuit and electric device using the same
US6870444B1 (en) 2003-08-28 2005-03-22 Motorola, Inc. Electromechanical resonator and method of operating same
WO2005029700A1 (en) * 2003-09-19 2005-03-31 Sony Corporation Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter
US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A7 (en) 2004-02-03 2005-08-04 Nokia Oyj Stabilizing the frequency of the reference oscillator
JP2005311568A (en) * 2004-04-20 2005-11-04 Sony Corp Filter device and transceiver
JP2005311567A (en) * 2004-04-20 2005-11-04 Sony Corp Filter device and transceiver
JP4586404B2 (en) * 2004-04-28 2010-11-24 ソニー株式会社 Filter device and transceiver
JP4470606B2 (en) 2004-06-18 2010-06-02 ソニー株式会社 High frequency element and communication device
JP4608984B2 (en) * 2004-07-21 2011-01-12 ソニー株式会社 Microresonator, manufacturing method thereof, and electronic device
JP2006041911A (en) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd MEMS filter device and manufacturing method thereof
JP4635619B2 (en) * 2005-01-20 2011-02-23 ソニー株式会社 Microresonator and communication device
JP4604730B2 (en) * 2005-01-20 2011-01-05 ソニー株式会社 Micro vibrator, semiconductor device, and communication device
JP4617904B2 (en) * 2005-02-01 2011-01-26 ソニー株式会社 Micro vibrator, semiconductor device, and communication device
JP4645227B2 (en) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 Vibrator structure and manufacturing method thereof
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
JP2007150736A (en) * 2005-11-28 2007-06-14 Sony Corp Micro electromechanical device
JP2007174438A (en) 2005-12-23 2007-07-05 Toshiba Corp Filter circuit and wireless communication system provided with filter
JP4930769B2 (en) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 Oscillator
JP2008211420A (en) * 2007-02-26 2008-09-11 Seiko Instruments Inc Oscillator
JP5122888B2 (en) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 OSCILLATOR, METHOD FOR MANUFACTURING OSCILLATOR, AND OSCILLATOR
US7907035B2 (en) * 2007-12-18 2011-03-15 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
CN102067442B (en) 2008-06-18 2014-07-23 Nxp股份有限公司 MEMS resonator for filtering and mixing
FR2939581B1 (en) * 2008-12-09 2010-11-26 Commissariat Energie Atomique NETWORK OF COUPLED RESONATORS, PASS-BAND FILTER AND OSCILLATOR.
FR2942681B1 (en) * 2009-02-27 2011-05-13 Commissariat Energie Atomique MICROMETRIC OR NANOMETRIC RESONANT DEVICE WITH TRANSISTORS
JP5453705B2 (en) * 2009-06-25 2014-03-26 学校法人立命館 Resonator
CN103905009A (en) 2012-12-27 2014-07-02 精工爱普生株式会社 Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator

Citations (3)

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US5537083A (en) * 1992-12-11 1996-07-16 Regents Of The University Of California Microelectromechanical signal processors
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
EP0962999A2 (en) * 1998-06-02 1999-12-08 Nokia Mobile Phones Ltd. Resonator structures

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Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US5537083A (en) * 1992-12-11 1996-07-16 Regents Of The University Of California Microelectromechanical signal processors
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
EP0962999A2 (en) * 1998-06-02 1999-12-08 Nokia Mobile Phones Ltd. Resonator structures

Non-Patent Citations (1)

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Title
See also references of EP1277277A2 *

Also Published As

Publication number Publication date
JP2003532322A (en) 2003-10-28
WO2001082467A2 (en) 2001-11-01
EP1275201A2 (en) 2003-01-15
JP2003532323A (en) 2003-10-28
WO2001082479A3 (en) 2002-04-11
WO2001082475A2 (en) 2001-11-01
AU2001255868A1 (en) 2001-11-07
WO2001082476A2 (en) 2001-11-01
EP1290788A2 (en) 2003-03-12
WO2001082477A2 (en) 2001-11-01
AU2001261036A1 (en) 2001-11-07
WO2001082467A3 (en) 2002-04-11
WO2001082476A3 (en) 2002-08-15
AU2001255865A1 (en) 2001-11-07
WO2001082475A3 (en) 2002-02-21
WO2001082479A2 (en) 2001-11-01
AU2001255867A1 (en) 2001-11-07
JP2003532320A (en) 2003-10-28
CA2406543A1 (en) 2001-11-01
WO2001082477A3 (en) 2002-04-11
CA2406176A1 (en) 2001-11-01
EP1277277A2 (en) 2003-01-22
AU2001255866A1 (en) 2001-11-07
JP2004515089A (en) 2004-05-20
CA2406518A1 (en) 2001-11-01
AU2001257612A1 (en) 2001-11-07
EP1285491A2 (en) 2003-02-26
CA2406223A1 (en) 2001-11-01
WO2001082478A2 (en) 2001-11-01

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