WO2002012873A3 - Quartz crystal microbalance - Google Patents
Quartz crystal microbalance Download PDFInfo
- Publication number
- WO2002012873A3 WO2002012873A3 PCT/EP2001/008922 EP0108922W WO0212873A3 WO 2002012873 A3 WO2002012873 A3 WO 2002012873A3 EP 0108922 W EP0108922 W EP 0108922W WO 0212873 A3 WO0212873 A3 WO 0212873A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- quartz crystal
- sensor
- crystal microbalance
- quartz
- test sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/222—Constructional or flow details for analysing fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optical Measuring Cells (AREA)
- Glass Compositions (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Seal Device For Vehicle (AREA)
Abstract
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU8397701A AU8397701A (en) | 2000-08-08 | 2001-08-02 | Novel device |
| US10/344,022 US7055377B2 (en) | 2000-08-08 | 2001-08-02 | Quartz crystal sensor cell |
| DE60128110T DE60128110T2 (en) | 2000-08-08 | 2001-08-02 | Quartz crystal sensor cell |
| EP01962898A EP1314023B1 (en) | 2000-08-08 | 2001-08-02 | Quartz crystal sensor cell |
| AU2001283977A AU2001283977B2 (en) | 2000-08-08 | 2001-08-02 | Quartz crystal microbalance |
| JP2002517507A JP4794112B2 (en) | 2000-08-08 | 2001-08-02 | Quartz crystal microbalance |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0019336A GB0019336D0 (en) | 2000-08-08 | 2000-08-08 | Novel device |
| GB0019340A GB0019340D0 (en) | 2000-08-08 | 2000-08-08 | Novel device |
| GB0019336.7 | 2000-08-08 | ||
| GB0019340.9 | 2000-08-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2002012873A2 WO2002012873A2 (en) | 2002-02-14 |
| WO2002012873A3 true WO2002012873A3 (en) | 2002-05-02 |
Family
ID=26244807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2001/008922 Ceased WO2002012873A2 (en) | 2000-08-08 | 2001-08-02 | Quartz crystal microbalance |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7055377B2 (en) |
| EP (2) | EP1811292A1 (en) |
| JP (1) | JP4794112B2 (en) |
| AT (1) | ATE360815T1 (en) |
| AU (2) | AU8397701A (en) |
| DE (1) | DE60128110T2 (en) |
| RU (1) | RU2242750C2 (en) |
| WO (1) | WO2002012873A2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8912711B1 (en) | 2010-06-22 | 2014-12-16 | Hrl Laboratories, Llc | Thermal stress resistant resonator, and a method for fabricating same |
| US9599470B1 (en) | 2013-09-11 | 2017-03-21 | Hrl Laboratories, Llc | Dielectric high Q MEMS shell gyroscope structure |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004001392A1 (en) * | 2002-06-19 | 2003-12-31 | Biosensor Applications Sweden Ab (Publ) | System, device and method for detection of several individual analytes in a solution, and a disposible flow cell for use therein |
| SE0203772D0 (en) * | 2002-12-19 | 2002-12-19 | Attana Ab | Piezoelectric sensor arrangement |
| SE0300375D0 (en) * | 2003-02-12 | 2003-02-12 | Attana Ab | Piezoelectric resonator |
| JP2004245613A (en) * | 2003-02-12 | 2004-09-02 | Japan Science & Technology Agency | Flow cell type QCM apparatus and sample measuring method |
| US8766745B1 (en) | 2007-07-25 | 2014-07-01 | Hrl Laboratories, Llc | Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same |
| JP4266740B2 (en) * | 2003-07-28 | 2009-05-20 | 株式会社ソディック | Coreless AC linear motor |
| DE102004041595A1 (en) * | 2004-04-30 | 2005-12-01 | Markus Gruber | Measuring cell and method for producing a measuring cell and measuring device for receiving such a measuring cell |
| JP2006162538A (en) * | 2004-12-10 | 2006-06-22 | Seiko Instruments Inc | Apparatus for measuring trace mass |
| EP1830170A4 (en) * | 2004-12-15 | 2012-04-11 | Nihon Dempa Kogyo Co | COMPONENT MEASURING DEVICE |
| WO2006064954A1 (en) * | 2004-12-15 | 2006-06-22 | Nihon Dempa Kogyo Co., Ltd | Quartz sensor and sensing device |
| US7552639B2 (en) | 2004-12-15 | 2009-06-30 | Nihon Dempa Kogyo Co., Ltd. | Quartz sensor and sensing device |
| JP4134025B2 (en) * | 2004-12-28 | 2008-08-13 | 日本電波工業株式会社 | Sensing device |
| GB0506710D0 (en) | 2005-04-01 | 2005-05-11 | Akubio Ltd | Cartridge for a fluid sample analyser |
| EP1864120B1 (en) | 2005-04-01 | 2011-11-30 | Alere Switzerland GmbH | Docking station for a sensor cartridge |
| US7749445B2 (en) * | 2005-05-02 | 2010-07-06 | Bioscale, Inc. | Method and apparatus for analyzing bioprocess fluids |
| US7611908B2 (en) * | 2005-05-02 | 2009-11-03 | Bioscale, Inc. | Method and apparatus for therapeutic drug monitoring using an acoustic device |
| US7648844B2 (en) * | 2005-05-02 | 2010-01-19 | Bioscale, Inc. | Method and apparatus for detection of analyte using an acoustic device |
| US7300631B2 (en) * | 2005-05-02 | 2007-11-27 | Bioscale, Inc. | Method and apparatus for detection of analyte using a flexural plate wave device and magnetic particles |
| US7845230B2 (en) | 2005-08-03 | 2010-12-07 | Nihon Dempa Kogyo Co., Ltd. | Concentration sensor and concentration detector |
| JP4772563B2 (en) * | 2006-03-31 | 2011-09-14 | 日本製紙株式会社 | How to measure the degree of foreign object deposition |
| DE102006015512B4 (en) * | 2006-03-31 | 2010-01-21 | Andreas Hettich Gmbh & Co. Kg | Device comprising a measuring chamber and a resonator for the liquid sensor system which can be integrated into the measuring chamber via a quick-action closure |
| JP4299325B2 (en) * | 2006-08-30 | 2009-07-22 | 日本電波工業株式会社 | Quartz sensor and sensing device |
| GB0619008D0 (en) * | 2006-09-27 | 2006-11-08 | Akubio Ltd | Cartridge for a fluid sample analyser |
| GB0708346D0 (en) * | 2007-04-30 | 2007-06-06 | Attana Ab | Sensor |
| US10266398B1 (en) | 2007-07-25 | 2019-04-23 | Hrl Laboratories, Llc | ALD metal coatings for high Q MEMS structures |
| US8354280B2 (en) * | 2007-09-06 | 2013-01-15 | Bioscale, Inc. | Reusable detection surfaces and methods of using same |
| US7802466B2 (en) * | 2007-11-28 | 2010-09-28 | Sierra Sensors Gmbh | Oscillating sensor and fluid sample analysis using an oscillating sensor |
| US8397762B2 (en) * | 2008-02-04 | 2013-03-19 | Bioscale, Inc. | Fluidic system with improved flow characteristics |
| GB0803257D0 (en) | 2008-02-22 | 2008-04-02 | Univ Leeds | Apparatus for inspection of a fliuid and method |
| ES2629101T3 (en) * | 2008-05-05 | 2017-08-07 | Kistler Holding Ag | Load cell |
| FR2931550B1 (en) * | 2008-05-20 | 2012-12-07 | Commissariat Energie Atomique | DEVICE FOR THE GRAVIMETRIC DETECTION OF PARTICLES IN A FLUID MEDIA COMPRISING AN OSCILLATOR BETWEEN TWO FLUIDIC CHANNELS, A METHOD FOR PRODUCING THE SAME, AND METHOD FOR THE IMPLEMENTATION OF THE DEVICE |
| FR2931549B1 (en) * | 2008-05-20 | 2017-12-08 | Commissariat Energie Atomique | DEVICE FOR THE GRAVIMETRIC DETECTION OF PARTICLES IN A FLUID ENVIRONMENT, COMPRISING AN OSCILLATOR CROSSED BY A FLUIDIC VEIN, METHOD FOR PRODUCING THE SAME, AND METHOD FOR IMPLEMENTING THE DEVICE |
| AT504958B1 (en) * | 2008-05-29 | 2009-08-15 | Avl List Gmbh | PIEZOELECTRIC SENSOR DEVICE |
| CN101957297B (en) * | 2009-07-16 | 2012-04-18 | 河南科瑞科技有限公司 | Quartz crystal sensor detection pool |
| JP2011137639A (en) * | 2009-12-25 | 2011-07-14 | Ulvac Japan Ltd | Flow-through cell and measuring instrument using the same |
| US9086338B2 (en) * | 2010-06-25 | 2015-07-21 | Nihon Dempa Kogyo Co., Ltd. | Sensing device |
| CN102135525B (en) * | 2010-12-31 | 2012-12-05 | 重庆工商大学 | Mechanics analysis device and mechanics analysis method for piezomodulated and sensed single cell |
| DE102013200935A1 (en) * | 2013-01-22 | 2014-07-24 | Robert Bosch Gmbh | Connector for fuel injection system of combustion engine, has annular elements which are arranged axially spaced from each other and seal flow sections arranged axially between annular elements |
| US9939412B2 (en) | 2013-02-06 | 2018-04-10 | Empire Technology Development Llc | Devices, systems, and methods for detecting odorants |
| US9977097B1 (en) | 2014-02-21 | 2018-05-22 | Hrl Laboratories, Llc | Micro-scale piezoelectric resonating magnetometer |
| US9991863B1 (en) | 2014-04-08 | 2018-06-05 | Hrl Laboratories, Llc | Rounded and curved integrated tethers for quartz resonators |
| EP3140646A1 (en) * | 2014-05-07 | 2017-03-15 | Exxonmobil Upstream Research Company | High pressure utilization of quartz crystal microbalance |
| US10308505B1 (en) | 2014-08-11 | 2019-06-04 | Hrl Laboratories, Llc | Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite |
| US10031191B1 (en) | 2015-01-16 | 2018-07-24 | Hrl Laboratories, Llc | Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors |
| EP3384280B1 (en) * | 2015-11-30 | 2023-10-11 | Robert Bosch GmbH | Nanostructured nickel oxide environmental sensor device and a package for encapsulating the device |
| US10110198B1 (en) | 2015-12-17 | 2018-10-23 | Hrl Laboratories, Llc | Integrated quartz MEMS tuning fork resonator/oscillator |
| US10175307B1 (en) | 2016-01-15 | 2019-01-08 | Hrl Laboratories, Llc | FM demodulation system for quartz MEMS magnetometer |
| CN110550942B (en) * | 2019-09-16 | 2022-03-08 | 陕西理工大学 | Preparation method of nano twin crystal silicon dioxide piezoelectric material |
| US20240361275A1 (en) * | 2023-04-25 | 2024-10-31 | Championx Llc | Laboratory scale deposition measurement with flush mounted crystal and free-floating liquid-facing crystal surface of a quartz crystal microbalance assembly |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5201215A (en) * | 1991-10-17 | 1993-04-13 | The United States Of America As Represented By The United States Department Of Energy | Method for simultaneous measurement of mass loading and fluid property changes using a quartz crystal microbalance |
| DE4404309A1 (en) * | 1994-02-11 | 1995-08-17 | Polster Schlageter Klaus | Investigation of precipitation of materials from, or solution in, liquids |
| JPH0875629A (en) * | 1994-09-09 | 1996-03-22 | Nippon Steel Corp | Element for continuously measuring adsorbed amount in fluid and method for coating material layer |
| JPH09304259A (en) * | 1996-05-09 | 1997-11-28 | Yuasa Corp | Quartz type concentration sensor |
| WO2000025118A1 (en) * | 1998-10-26 | 2000-05-04 | Smithkline Beecham P.L.C. | Quartz crystal microbalance with feedback loop for automatic gain control |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55137353U (en) * | 1979-03-23 | 1980-09-30 | ||
| JPS5642499A (en) * | 1979-05-15 | 1981-04-20 | Nippon Ceramic Kk | Ultrasonic-wave transducer |
| CH662421A5 (en) * | 1983-07-13 | 1987-09-30 | Suisse Horlogerie Rech Lab | PIEZOELECTRIC CONTAMINATION DETECTOR. |
| SU1454799A1 (en) * | 1987-03-16 | 1989-01-30 | Московский Инженерно-Физический Институт | Method of joining quartz elements of piezoelectric resonance sensors |
| SU1649296A1 (en) * | 1988-05-30 | 1991-05-15 | Предприятие П/Я М-5539 | Cryogenic quartz microbalance |
| US5021701A (en) * | 1988-10-20 | 1991-06-04 | Tdk Corporation | Piezoelectric vibrator mounting system for a nebulizer |
| JPH0534349A (en) * | 1991-07-30 | 1993-02-09 | Oki Electric Ind Co Ltd | Detecting method of food-poisoning bacteria and sensor using the same |
| JP3179178B2 (en) * | 1992-04-16 | 2001-06-25 | セイコーインスツルメンツ株式会社 | Quartz crystal cell |
| DE4334834A1 (en) * | 1993-10-13 | 1995-04-20 | Andrzej Dr Ing Grzegorzewski | Biosensor for measuring changes in viscosity and / or density |
| US5455475A (en) * | 1993-11-01 | 1995-10-03 | Marquette University | Piezoelectric resonant sensor using the acoustoelectric effect |
| JP2748246B2 (en) * | 1995-11-14 | 1998-05-06 | デベロップメント センター フォー バイオテクノロジー | Cartridge-shaped piezoelectric sensor chip |
| DE19734706A1 (en) * | 1997-08-11 | 1999-02-18 | Fraunhofer Ges Forschung | Piezoelectric resonator, method for producing the resonator and its use as a sensor element for detecting the concentration of a substance contained in a fluid and / or the determination of physical properties of the fluid |
| US6106149A (en) * | 1997-12-02 | 2000-08-22 | Allan L. Smith | Mass and heat flow measurement sensor |
| US6544478B1 (en) * | 1998-11-02 | 2003-04-08 | Kabushiki Kaisha Meidensha | QCM sensor |
| JP3700559B2 (en) * | 1999-12-16 | 2005-09-28 | 株式会社村田製作所 | Piezoelectric acoustic component and manufacturing method thereof |
-
2001
- 2001-08-02 AT AT01962898T patent/ATE360815T1/en not_active IP Right Cessation
- 2001-08-02 US US10/344,022 patent/US7055377B2/en not_active Expired - Lifetime
- 2001-08-02 AU AU8397701A patent/AU8397701A/en active Pending
- 2001-08-02 RU RU2003106392/28A patent/RU2242750C2/en not_active IP Right Cessation
- 2001-08-02 DE DE60128110T patent/DE60128110T2/en not_active Expired - Lifetime
- 2001-08-02 WO PCT/EP2001/008922 patent/WO2002012873A2/en not_active Ceased
- 2001-08-02 AU AU2001283977A patent/AU2001283977B2/en not_active Ceased
- 2001-08-02 JP JP2002517507A patent/JP4794112B2/en not_active Expired - Lifetime
- 2001-08-02 EP EP07007685A patent/EP1811292A1/en not_active Withdrawn
- 2001-08-02 EP EP01962898A patent/EP1314023B1/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5201215A (en) * | 1991-10-17 | 1993-04-13 | The United States Of America As Represented By The United States Department Of Energy | Method for simultaneous measurement of mass loading and fluid property changes using a quartz crystal microbalance |
| DE4404309A1 (en) * | 1994-02-11 | 1995-08-17 | Polster Schlageter Klaus | Investigation of precipitation of materials from, or solution in, liquids |
| JPH0875629A (en) * | 1994-09-09 | 1996-03-22 | Nippon Steel Corp | Element for continuously measuring adsorbed amount in fluid and method for coating material layer |
| JPH09304259A (en) * | 1996-05-09 | 1997-11-28 | Yuasa Corp | Quartz type concentration sensor |
| WO2000025118A1 (en) * | 1998-10-26 | 2000-05-04 | Smithkline Beecham P.L.C. | Quartz crystal microbalance with feedback loop for automatic gain control |
Non-Patent Citations (3)
| Title |
|---|
| KOMPLIN G C ET AL: "A HIGH-STABILITY QUARTZ CRYSTAL MICROBALANCE ELECTRODE FOR SIMULTANEOUS SOLUTION-PHASE ELECTROCHEMISTRY/MICROGRAVITOMETRY", REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, VOL. 64, NR. 6, PAGE(S) 1530-1535, ISSN: 0034-6748, XP000380687 * |
| PATENT ABSTRACTS OF JAPAN vol. 1996, no. 07 31 July 1996 (1996-07-31) * |
| PATENT ABSTRACTS OF JAPAN vol. 1998, no. 03 27 February 1998 (1998-02-27) * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8912711B1 (en) | 2010-06-22 | 2014-12-16 | Hrl Laboratories, Llc | Thermal stress resistant resonator, and a method for fabricating same |
| US9599470B1 (en) | 2013-09-11 | 2017-03-21 | Hrl Laboratories, Llc | Dielectric high Q MEMS shell gyroscope structure |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1314023A2 (en) | 2003-05-28 |
| JP4794112B2 (en) | 2011-10-19 |
| JP2004506194A (en) | 2004-02-26 |
| EP1314023B1 (en) | 2007-04-25 |
| AU8397701A (en) | 2002-02-18 |
| WO2002012873A2 (en) | 2002-02-14 |
| RU2242750C2 (en) | 2004-12-20 |
| EP1811292A1 (en) | 2007-07-25 |
| US20040016297A1 (en) | 2004-01-29 |
| DE60128110D1 (en) | 2007-06-06 |
| ATE360815T1 (en) | 2007-05-15 |
| US7055377B2 (en) | 2006-06-06 |
| DE60128110T2 (en) | 2008-01-10 |
| AU2001283977B2 (en) | 2005-03-10 |
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