WO2002097157A3 - Modifizierter dlc-schichtaufbau - Google Patents

Modifizierter dlc-schichtaufbau Download PDF

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Publication number
WO2002097157A3
WO2002097157A3 PCT/EP2002/005931 EP0205931W WO02097157A3 WO 2002097157 A3 WO2002097157 A3 WO 2002097157A3 EP 0205931 W EP0205931 W EP 0205931W WO 02097157 A3 WO02097157 A3 WO 02097157A3
Authority
WO
WIPO (PCT)
Prior art keywords
carbon
material layer
hard material
base material
dlc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2002/005931
Other languages
English (en)
French (fr)
Other versions
WO2002097157A2 (de
Inventor
Reinhard Hoefer
Guenther Durst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saxonia Umformtechnik GmbH
Original Assignee
Saxonia Umformtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saxonia Umformtechnik GmbH filed Critical Saxonia Umformtechnik GmbH
Priority to EP02747332A priority Critical patent/EP1397526A2/de
Publication of WO2002097157A2 publication Critical patent/WO2002097157A2/de
Publication of WO2002097157A3 publication Critical patent/WO2002097157A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Das Verschleissteil besteht aus einem Basismaterial (51) und darauf aufgebrachter Hartstoffschicht (53), welche Kohlenstoff enthält, wobei das Basismaterial an Stelle von Kohlenstoff-Stahl hochlegierter Stahl, insbesondere hochlegierter Chromstahl, ist. Ein erfindungsgemässes Verfahren zum Beschichten eines Basismaterials eines Verschleissteils mit einer Hartstoffschicht kennzeichnet sich dadurch, dass sich zwischen dem Basismaterial und der Hartstoffschicht eine Vermittlerschicht (52) befindet, und dass die amorphen Kohlenstoff enthaltende Hartstoffschicht mittels eines CVD-Verfahrens und/oder mittels eines PVD-Verfahrens aufgebracht wird, insbesondere in der gleichen Reaktionskammer wie das spätere Aufbringen der Hartstoffschicht.
PCT/EP2002/005931 2001-05-29 2002-05-29 Modifizierter dlc-schichtaufbau Ceased WO2002097157A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP02747332A EP1397526A2 (de) 2001-05-29 2002-05-29 Modifizierter dlc-schichtaufbau

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10126118.7 2001-05-29
DE2001126118 DE10126118A1 (de) 2001-05-29 2001-05-29 Modifizierter DLC-Schichtaufbau

Publications (2)

Publication Number Publication Date
WO2002097157A2 WO2002097157A2 (de) 2002-12-05
WO2002097157A3 true WO2002097157A3 (de) 2003-10-23

Family

ID=7686506

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/005931 Ceased WO2002097157A2 (de) 2001-05-29 2002-05-29 Modifizierter dlc-schichtaufbau

Country Status (3)

Country Link
EP (1) EP1397526A2 (de)
DE (1) DE10126118A1 (de)
WO (1) WO2002097157A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1980645A1 (de) 2007-04-13 2008-10-15 Ralf Stein Verfahren zum Aufbringen einer mehrlagigen Beschichtung auf Werkstücke und/oder Werkstoffe
DE102007047629A1 (de) 2007-04-13 2008-10-16 Stein, Ralf Verfahren zum Aufbringen einer hochfesten Beschichtung auf Werkstücke und/oder Werkstoffe
DE102013203464A1 (de) 2013-02-28 2013-06-20 E.G.O. Elektro-Gerätebau GmbH Verfahren zur Herstellung einer Heizeinrichtung und Heizeinrichtung
EP3243946B1 (de) 2016-05-12 2018-12-19 Groz-Beckert KG Textilwerkzeug, verwenden des textilwerkzeugs und verfahren zu dessen herstellung
ES2905965T3 (es) 2017-11-09 2022-04-12 Groz Beckert Kg Herramienta textil con capa indicadora

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4530750A (en) * 1981-03-20 1985-07-23 A. S. Laboratories, Inc. Apparatus for coating optical fibers
JPH04108638A (ja) * 1990-08-27 1992-04-09 Kyowa Densen Kk 光ファイバ素材の製造方法
US5238741A (en) * 1989-10-19 1993-08-24 United Kingdom Atomic Energy Authority Silicon carbide filaments bearing a carbon layer and a titanium carbide or titanium boride layer
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition
EP0651385A2 (de) * 1993-10-28 1995-05-03 Matsushita Electric Industrial Co., Ltd. Herstellungsverfahren für diamantähnlichen Kohlenstoffilm und Bandantriebsgerät
US5482602A (en) * 1993-11-04 1996-01-09 United Technologies Corporation Broad-beam ion deposition coating methods for depositing diamond-like-carbon coatings on dynamic surfaces

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047888A1 (de) * 1980-12-19 1982-07-15 Philips Patentverwaltung Gmbh, 2000 Hamburg "schneidwerkzeug, verfahren zu seiner herstellung und seine verwendung"
JPH1045327A (ja) * 1996-07-31 1998-02-17 Kyocera Corp 耐摩耗性ガイド材及びこれを用いたスレッドガイド
DE19749459A1 (de) * 1997-11-10 1999-05-20 Schmidt Betonwerk Gmbh C Läufer für Ringspinn- oder Ringzwirnmaschinen

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4530750A (en) * 1981-03-20 1985-07-23 A. S. Laboratories, Inc. Apparatus for coating optical fibers
US5238741A (en) * 1989-10-19 1993-08-24 United Kingdom Atomic Energy Authority Silicon carbide filaments bearing a carbon layer and a titanium carbide or titanium boride layer
JPH04108638A (ja) * 1990-08-27 1992-04-09 Kyowa Densen Kk 光ファイバ素材の製造方法
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition
EP0651385A2 (de) * 1993-10-28 1995-05-03 Matsushita Electric Industrial Co., Ltd. Herstellungsverfahren für diamantähnlichen Kohlenstoffilm und Bandantriebsgerät
US5482602A (en) * 1993-11-04 1996-01-09 United Technologies Corporation Broad-beam ion deposition coating methods for depositing diamond-like-carbon coatings on dynamic surfaces

Non-Patent Citations (8)

* Cited by examiner, † Cited by third party
Title
COOPER C V ET AL: "SPECTROSCOPIC AND SELECTED MECHANICAL PROPERTIES OF DIAMOND-LIKE CARBON FILMS SYNTHESIZED BY BROAD-BEAM ION DEPOSITION FROM METHANE", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 3, no. 4/6, 1 April 1994 (1994-04-01), pages 534 - 541, XP000466676, ISSN: 0925-9635 *
DENG J ET AL: "DLC MULTILAYER COATINGS FOR WEAR PROTECTION", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 4, no. 7, 15 May 1995 (1995-05-15), pages 936 - 943, XP000511923, ISSN: 0925-9635 *
DENG J ET AL: "RESIDUAL STRESS AND MICROHARDNESS OF DLC MULTILAYER COATINGS", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 5, no. 3/5, 1 April 1996 (1996-04-01), pages 478 - 482, XP000627550, ISSN: 0925-9635 *
J.R. DAVIS ET AL: "METALS HANDBOOK 10.TH ED, VOL 1.", 1 May 1990, ASM INTERNATIONAL, US, XP002216280, 167750 *
LANGLADE C ET AL: "EFFECT OF DIFFERENT A:C-H FILMS ON THE FRETTING BEHAVIOR OF BEARINGSTEEL", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 5, no. 10, 1 August 1996 (1996-08-01), pages 1143 - 1151, XP000690357, ISSN: 0925-9635 *
LEE K-R ET AL: "Design of W buffer layer for adhesion improvement of DLC films on tool steels", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 377-378, 1 December 2000 (2000-12-01), pages 261 - 268, XP004226702, ISSN: 0040-6090 *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 356 (C - 0969) 31 July 1992 (1992-07-31) *
REPENNING D: "MEC:CH-COATINGS PRODUCED BY ARC-IONPLATING PROCESS", LE VIDE: SCIENCE, TECHNIQUE ET APPLICATIONS, SFV, FR, vol. 51, no. 276, 1 April 1995 (1995-04-01), pages 197 - 209, XP000534677, ISSN: 1266-0167 *

Also Published As

Publication number Publication date
DE10126118A1 (de) 2002-12-12
WO2002097157A2 (de) 2002-12-05
EP1397526A2 (de) 2004-03-17

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