WO2003010092A1 - Method for producing spherical oxide powder and apparatus for producing spherical powder, composite dielectric material, and substrate and process for producing substrate - Google Patents

Method for producing spherical oxide powder and apparatus for producing spherical powder, composite dielectric material, and substrate and process for producing substrate Download PDF

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Publication number
WO2003010092A1
WO2003010092A1 PCT/JP2002/007595 JP0207595W WO03010092A1 WO 2003010092 A1 WO2003010092 A1 WO 2003010092A1 JP 0207595 W JP0207595 W JP 0207595W WO 03010092 A1 WO03010092 A1 WO 03010092A1
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WIPO (PCT)
Prior art keywords
producing
substrate
powder
producing spherical
dielectric material
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Ceased
Application number
PCT/JP2002/007595
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English (en)
French (fr)
Inventor
Shenglei Che
Ikuka Chiba
Shigeo Okamoto
Tomohiro Sogabe
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TDK Corp
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TDK Corp
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Publication date
Priority claimed from JP2001227077A external-priority patent/JP4596111B2/ja
Priority claimed from JP2001345307A external-priority patent/JP2003151352A/ja
Application filed by TDK Corp filed Critical TDK Corp
Priority to US10/483,315 priority Critical patent/US7374704B2/en
Priority to EP02751718A priority patent/EP1422196A4/en
Publication of WO2003010092A1 publication Critical patent/WO2003010092A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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PCT/JP2002/007595 2001-07-27 2002-07-26 Method for producing spherical oxide powder and apparatus for producing spherical powder, composite dielectric material, and substrate and process for producing substrate Ceased WO2003010092A1 (en)

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US10/483,315 US7374704B2 (en) 2001-07-27 2002-07-26 Method of producing spherical oxide powder
EP02751718A EP1422196A4 (en) 2001-07-27 2002-07-26 METHOD FOR PRODUCING BALL-MOLDED OXIDE POWDER AND DEVICE FOR PRODUCING BALLULAR POWDER, DIELECTRIC COMPOSITE MATERIAL AND SUBSTRATE AND METHOD OF PRODUCING SUBSTRATE

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JP2001-227077 2001-07-27
JP2001227077A JP4596111B2 (ja) 2001-07-27 2001-07-27 球状酸化物粉末の製造方法および球状粉末製造装置
JP2001-345307 2001-11-09
JP2001345307A JP2003151352A (ja) 2001-11-09 2001-11-09 複合誘電体材料、基板、基板の製造方法

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US7374704B2 (en) 2008-05-20
KR20040018902A (ko) 2004-03-04
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EP1422196A1 (en) 2004-05-26
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