WO2003024864A1 - Micro-actuator, micro-actuator device, optical switch and optical switch array - Google Patents

Micro-actuator, micro-actuator device, optical switch and optical switch array Download PDF

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Publication number
WO2003024864A1
WO2003024864A1 PCT/JP2002/009023 JP0209023W WO03024864A1 WO 2003024864 A1 WO2003024864 A1 WO 2003024864A1 JP 0209023 W JP0209023 W JP 0209023W WO 03024864 A1 WO03024864 A1 WO 03024864A1
Authority
WO
WIPO (PCT)
Prior art keywords
micro
optical switch
substrate
actuator
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/009023
Other languages
English (en)
French (fr)
Inventor
Keiichi Akagawa
Junji Suzuki
Tohru Ishizuya
Yoshihiko Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to DE60219937T priority Critical patent/DE60219937T2/de
Priority to KR1020047003910A priority patent/KR100623469B1/ko
Priority to EP02767894A priority patent/EP1437325B1/en
Priority to TW092105761A priority patent/TWI274200B/zh
Publication of WO2003024864A1 publication Critical patent/WO2003024864A1/ja
Priority to US10/792,427 priority patent/US6936950B2/en
Anticipated expiration legal-status Critical
Priority to US11/131,089 priority patent/US20050206986A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
PCT/JP2002/009023 2001-09-17 2002-09-05 Micro-actuator, micro-actuator device, optical switch and optical switch array Ceased WO2003024864A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE60219937T DE60219937T2 (de) 2001-09-17 2002-09-05 Mikroaktuator, mikroaktuatorvorrichtung, optischer schalter und optische schaltanordnung
KR1020047003910A KR100623469B1 (ko) 2001-09-17 2002-09-05 마이크로 액츄에이터, 마이크로 액츄에이터 장치,광스위치 및 광스위치 어레이
EP02767894A EP1437325B1 (en) 2001-09-17 2002-09-05 Micro-actuator, micro-actuator device, optical switch and optical switch array
TW092105761A TWI274200B (en) 2002-09-05 2003-03-17 Micro actuator, micro actuator device, optical switch and optical switch array
US10/792,427 US6936950B2 (en) 2001-09-17 2004-03-02 Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same
US11/131,089 US20050206986A1 (en) 2001-09-17 2005-05-16 Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001-282421 2001-09-17
JP2001282421 2001-09-17
JP2001368060A JP4089215B2 (ja) 2001-09-17 2001-12-03 マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー
JP2001-368060 2001-12-03

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/792,427 Continuation US6936950B2 (en) 2001-09-17 2004-03-02 Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same

Publications (1)

Publication Number Publication Date
WO2003024864A1 true WO2003024864A1 (en) 2003-03-27

Family

ID=26622373

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/009023 Ceased WO2003024864A1 (en) 2001-09-17 2002-09-05 Micro-actuator, micro-actuator device, optical switch and optical switch array

Country Status (7)

Country Link
US (2) US6936950B2 (ja)
EP (1) EP1437325B1 (ja)
JP (1) JP4089215B2 (ja)
KR (1) KR100623469B1 (ja)
CN (1) CN1268537C (ja)
DE (1) DE60219937T2 (ja)
WO (1) WO2003024864A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6936950B2 (en) * 2001-09-17 2005-08-30 Nikon Corporation Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003266391A (ja) * 2002-03-19 2003-09-24 Japan Aviation Electronics Industry Ltd 静電駆動デバイス
JP2004004649A (ja) * 2002-03-28 2004-01-08 Ntt Electornics Corp 光学装置
JP4300766B2 (ja) * 2002-08-01 2009-07-22 株式会社ニコン 立体構造素子およびその製造方法、光スイッチ、マイクロデバイス
JP3715611B2 (ja) * 2002-10-11 2005-11-09 エヌティティエレクトロニクス株式会社 マイクロアクチュエータ装置及びこれを用いた光スイッチシステム
JP4227531B2 (ja) * 2004-01-27 2009-02-18 Ｈｏｙａ株式会社 ヒンジ構造
KR100631835B1 (ko) * 2004-03-22 2006-10-09 삼성전기주식회사 컨티레버형 ｐｌｃ 광 감쇠기 및 그 제조방법
JP4569161B2 (ja) * 2004-04-30 2010-10-27 株式会社ニコン マイクロアクチュエータアレー、光学装置及び光スイッチアレー
JP4525206B2 (ja) * 2004-06-24 2010-08-18 株式会社ニコン マイクロアクチュエータアレー、光学装置及び光スイッチアレー
US7356880B2 (en) * 2004-07-26 2008-04-15 Pentax Corporation Hinge structure of micromirror device
TWI304394B (en) * 2006-07-03 2008-12-21 Nat Univ Tsing Hua Magnetic element and manufacturing process, driving structure and driving method therefor
DE102006052414B4 (de) * 2006-11-07 2015-10-01 Robert Bosch Gmbh Mikromechanischer Aktor mit einer Welle
JP5446122B2 (ja) * 2008-04-25 2014-03-19 パナソニック株式会社 ミアンダ形振動子およびこれを用いた光学反射素子
JP5803615B2 (ja) * 2011-11-29 2015-11-04 富士通株式会社 電子デバイスとその製造方法
JP5924456B2 (ja) * 2013-09-06 2016-05-25 株式会社村田製作所 多層基板
DE112018001349T5 (de) 2017-03-14 2019-11-21 Hamamatsu Photonics K.K. Optisches Modul
US11561388B2 (en) 2017-03-14 2023-01-24 Hamamatsu Photonics K.K. Light module
JP6778134B2 (ja) * 2017-03-14 2020-10-28 浜松ホトニクス株式会社 光モジュール及びその実装方法
WO2018168927A1 (ja) * 2017-03-14 2018-09-20 浜松ホトニクス株式会社 光モジュール
JP6782651B2 (ja) * 2017-03-14 2020-11-11 浜松ホトニクス株式会社 光モジュール
WO2018168929A1 (ja) * 2017-03-14 2018-09-20 浜松ホトニクス株式会社 光モジュール
CN108726470B (zh) 2017-04-21 2020-02-21 华为技术有限公司 Mems芯片及其电封装方法

Citations (3)

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Publication number Priority date Publication date Assignee Title
JPH0888984A (ja) * 1992-12-28 1996-04-02 Matsushita Giken Kk 静電モータおよびその製造方法
US6198565B1 (en) * 1998-11-16 2001-03-06 Victor Company Of Japan, Limited Light deflection element and display apparatus using same
JP2001076605A (ja) * 1999-07-01 2001-03-23 Advantest Corp 集積型マイクロスイッチおよびその製造方法

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DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
DE3914031C2 (de) * 1989-04-28 1993-10-28 Deutsche Aerospace Mikromechanischer Aktuator
JP3109220B2 (ja) 1992-03-09 2000-11-13 株式会社ニコン マイクログリッパー
KR960019139A (ko) * 1994-11-10 1996-06-17 사또오 후미오 갈바노미러 및 그것을 이용한 광디스크 장치
US5945898A (en) * 1996-05-31 1999-08-31 The Regents Of The University Of California Magnetic microactuator
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
DE69830153T2 (de) * 1998-01-20 2005-10-13 Seiko Epson Corp. Optische schaltvorrichtung und bildanzeigevorrichtung
CA2299832C (en) * 1999-03-04 2002-11-12 Japan Aviation Electronics Industry Limited Optical switch and method of making the same
JP3500497B2 (ja) 1999-07-27 2004-02-23 日本航空電子工業株式会社 光スイッチ
US6658177B1 (en) * 1999-12-13 2003-12-02 Memlink Ltd. Switching device and method of fabricating the same
US6396975B1 (en) * 2000-01-21 2002-05-28 Jds Uniphase Corporation MEMS optical cross-connect switch
JP4089215B2 (ja) * 2001-09-17 2008-05-28 株式会社ニコン マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0888984A (ja) * 1992-12-28 1996-04-02 Matsushita Giken Kk 静電モータおよびその製造方法
US6198565B1 (en) * 1998-11-16 2001-03-06 Victor Company Of Japan, Limited Light deflection element and display apparatus using same
JP2001076605A (ja) * 1999-07-01 2001-03-23 Advantest Corp 集積型マイクロスイッチおよびその製造方法

Non-Patent Citations (1)

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Title
See also references of EP1437325A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6936950B2 (en) * 2001-09-17 2005-08-30 Nikon Corporation Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same

Also Published As

Publication number Publication date
US20040183395A1 (en) 2004-09-23
US6936950B2 (en) 2005-08-30
KR100623469B1 (ko) 2006-09-19
EP1437325A1 (en) 2004-07-14
KR20040035804A (ko) 2004-04-29
JP4089215B2 (ja) 2008-05-28
DE60219937T2 (de) 2008-01-17
CN1268537C (zh) 2006-08-09
JP2003159698A (ja) 2003-06-03
US20050206986A1 (en) 2005-09-22
DE60219937D1 (de) 2007-06-14
EP1437325B1 (en) 2007-05-02
CN1555339A (zh) 2004-12-15
EP1437325A4 (en) 2005-07-06

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