WO2003046494A3 - Verfahren und vorrichtung zur analyse und überwachung der lichtintensitätsverteilung über den querschnitt eines laserstrahls - Google Patents

Verfahren und vorrichtung zur analyse und überwachung der lichtintensitätsverteilung über den querschnitt eines laserstrahls Download PDF

Info

Publication number
WO2003046494A3
WO2003046494A3 PCT/EP2002/013361 EP0213361W WO03046494A3 WO 2003046494 A3 WO2003046494 A3 WO 2003046494A3 EP 0213361 W EP0213361 W EP 0213361W WO 03046494 A3 WO03046494 A3 WO 03046494A3
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
monitoring
analysis
cross
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2002/013361
Other languages
English (en)
French (fr)
Other versions
WO2003046494A2 (de
Inventor
Wolfgang Vioel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fachhochschule Hildesheim Holzminden Gottingen
Original Assignee
Fachhochschule Hildesheim Holzminden Gottingen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fachhochschule Hildesheim Holzminden Gottingen filed Critical Fachhochschule Hildesheim Holzminden Gottingen
Priority to EP02787845A priority Critical patent/EP1448962B1/de
Priority to DE50210427T priority patent/DE50210427D1/de
Publication of WO2003046494A2 publication Critical patent/WO2003046494A2/de
Publication of WO2003046494A3 publication Critical patent/WO2003046494A3/de
Priority to US10/855,128 priority patent/US7259867B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring devices

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

Zur Analyse und/oder Überwachung der Lichtintensitätsverteilung über den Querschnitt eines Laserstrahls (1) wird der Laserstrahl (1) mit einem Laserspiegel (2) umgelenkt und werden lokale Wärmeausdehnungen des Laserspiegels (2) aufgrund der auf den Laserspiegel (2) einfallenden unterschiedlichen Lichtintensitäten interferometrisch erfasst.
PCT/EP2002/013361 2001-11-30 2002-11-27 Verfahren und vorrichtung zur analyse und überwachung der lichtintensitätsverteilung über den querschnitt eines laserstrahls Ceased WO2003046494A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP02787845A EP1448962B1 (de) 2001-11-30 2002-11-27 Verfahren und vorrichtung zur analyse und überwachung der lichtintensitätsverteilung über den querschnitt eines laserstrahls
DE50210427T DE50210427D1 (de) 2001-11-30 2002-11-27 Verfahren und vorrichtung zur analyse und überwachung der lichtintensitätsverteilung über den querschnitt eines laserstrahls
US10/855,128 US7259867B2 (en) 2001-11-30 2004-05-27 Method and device for analyzing a light intensity distribution over a cross-section of a laser beam

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10158859.3 2001-11-30
DE10158859A DE10158859B4 (de) 2001-11-30 2001-11-30 Verfahren und Vorrichtung zur Analyse und Überwachung der Lichtintensitätsverteilung über den Querschnitt eines Laserstrahls

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/855,128 Continuation-In-Part US7259867B2 (en) 2001-11-30 2004-05-27 Method and device for analyzing a light intensity distribution over a cross-section of a laser beam

Publications (2)

Publication Number Publication Date
WO2003046494A2 WO2003046494A2 (de) 2003-06-05
WO2003046494A3 true WO2003046494A3 (de) 2003-07-31

Family

ID=7707572

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/013361 Ceased WO2003046494A2 (de) 2001-11-30 2002-11-27 Verfahren und vorrichtung zur analyse und überwachung der lichtintensitätsverteilung über den querschnitt eines laserstrahls

Country Status (5)

Country Link
US (1) US7259867B2 (de)
EP (1) EP1448962B1 (de)
AT (1) ATE366408T1 (de)
DE (2) DE10158859B4 (de)
WO (1) WO2003046494A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004008500B4 (de) * 2004-02-20 2007-09-27 Qimonda Ag Verfahren zum Ermitteln einer Strahlungsleistung und eine Belichtungsvorrichtung
WO2006102916A1 (de) 2005-03-31 2006-10-05 Infineon Technologies Ag Verfahren zum ermitteln einer strahlungsleistung und eine belichtungsvorrichtung
DE102005018965B3 (de) * 2005-04-23 2006-10-12 HAWK Hochschule für angewandte Wissenschaft und Kunst Bildwandler mit einer beheizbaren Wandlerschicht
DE102007062825A1 (de) 2007-12-21 2009-07-02 Trumpf Laser- Und Systemtechnik Gmbh Gitterspiegel zur Online-Überwachung eines Laserstrahls und Überwachungsvorrichtung damit
DE102010061950A1 (de) * 2010-11-25 2012-05-31 Carl Zeiss Smt Gmbh Verfahren sowie Anordnung zum Bestimmen des Erwärmungszustandes eines Spiegels in einem optischen System
JP5759232B2 (ja) * 2011-04-04 2015-08-05 キヤノン株式会社 測定装置
FR2980845B1 (fr) * 2011-10-03 2013-10-04 Commissariat Energie Atomique Procede de determination sans contact du rayon d'un faisceau, systeme correspondant
DE102020107944B4 (de) * 2020-03-23 2024-12-19 Rheinische Friedrich-Wilhelms-Universität Bonn Körperschaft des öffentlichen Rechts Verfahren zur Herstellung eines kontinuierlichen diffraktiven optischen Elementes und kontinuierliches diffraktives optisches Element

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4173442A (en) * 1977-05-27 1979-11-06 The United States Of America As Represented By The Secretary Of Commerce Apparatus and method for determination of wavelength
DE4006618A1 (de) * 1990-03-02 1991-09-05 Fraunhofer Ges Forschung Verfahren und messvorrichtung zur laserstrahlanalyse
WO1994010538A1 (fr) * 1992-11-03 1994-05-11 Communaute Economique Europeenne (Cee) Detecteur de variations d'une grandeur physique
EP0893675A1 (de) * 1997-07-21 1999-01-27 European Atomic Energy Community (EURATOM) Lichtintensität-Sensorelement und Verfahren zur Lichtstrahlen-Modulation und Vorrichtung die ein solches Sensorelement verwendet

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3857636A (en) * 1973-10-03 1974-12-31 United Aircraft Corp Measurement of phase profile across a high power laser beam
US4993824A (en) * 1989-12-18 1991-02-19 United Technologies Corporation Thermal mapping compensated mirror and method of making the same
DE4036120C2 (de) * 1990-11-13 1994-06-23 Steinbichler Hans Verfahren zur Bestimmung der Wegänderung von Strahlen, insbesondere von Lichtstrahlen, und Vorrichtung zur Durchführung des Verfahrens
FR2725802B1 (fr) * 1994-10-12 1996-11-15 Commissariat Energie Atomique Analyseur de faisceaux laser
EP1168532A1 (de) * 2000-06-23 2002-01-02 Universität Bern Verfahren zur Kompensation thermisch optischer Effekte

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4173442A (en) * 1977-05-27 1979-11-06 The United States Of America As Represented By The Secretary Of Commerce Apparatus and method for determination of wavelength
DE4006618A1 (de) * 1990-03-02 1991-09-05 Fraunhofer Ges Forschung Verfahren und messvorrichtung zur laserstrahlanalyse
WO1994010538A1 (fr) * 1992-11-03 1994-05-11 Communaute Economique Europeenne (Cee) Detecteur de variations d'une grandeur physique
EP0893675A1 (de) * 1997-07-21 1999-01-27 European Atomic Energy Community (EURATOM) Lichtintensität-Sensorelement und Verfahren zur Lichtstrahlen-Modulation und Vorrichtung die ein solches Sensorelement verwendet

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
FISCHER, ROBERT E.; TADIC-GALEB, BILJANA: "Optical System Design", 1 June 2000, MCGRAW-HILL, ISBN: 0071349162, XP002240111 *

Also Published As

Publication number Publication date
DE10158859A1 (de) 2003-06-18
EP1448962B1 (de) 2007-07-04
EP1448962A2 (de) 2004-08-25
US7259867B2 (en) 2007-08-21
WO2003046494A2 (de) 2003-06-05
DE50210427D1 (de) 2007-08-16
DE10158859B4 (de) 2004-02-19
ATE366408T1 (de) 2007-07-15
US20040218186A1 (en) 2004-11-04

Similar Documents

Publication Publication Date Title
WO2001006297A3 (en) Method and apparatus for combining light output from multiple laser diode bars
WO2004047239A3 (en) Laser diode bar integrator/reimager
AU3347699A (en) Illumination device for generating non-symmetric light beam, optical lens array and optical lens
AU3471899A (en) Beam shaping optics for diverging illumination, such as produced by laser diodes
EP1073170A3 (de) Wellenlängenstabilisierte Laserlichtquelle
EP1126412A3 (de) Bilderfassungsgerät und Abstandsmessverfahren
AU4140697A (en) Producing laser light of different wavelengths
GB2304423B (en) Tunable wavelength laser emission components
AU4800899A (en) Optical device, exposure system, and laser beam source, and gas feed method, exposure method, and device manufacturing method
AU3717699A (en) Optical device for splitting up a multi-wavelength light beam
CA2408183A1 (en) Inspection system for edges of glass
ATE507472T1 (de) Verfahren und vorrichtung zur überwachung von wasserstoffgas und einer wasserstoffflamme
AU4044599A (en) Method and device for optoelectric acquisition of shapes by axial illumination
WO2003046494A3 (de) Verfahren und vorrichtung zur analyse und überwachung der lichtintensitätsverteilung über den querschnitt eines laserstrahls
AU2003246422A1 (en) Optical device for the combination of light beams
AU4181499A (en) Method and system for determining the wavelength of light transmitted through anoptical fiber
GB9426242D0 (en) Laser diode for raman spectroscopy
DE69718961D1 (de) Wellenlängenabstimmbarer Laser
DK129396A (da) Optisk forstærker og fremgangsmåde til forhindring af, at der fra en sådan udsendes optisk effekt, som overstiger en foresk
AU2003272734A1 (en) Method and apparatus for determining the wavelength of an input light beam
DE60300998D1 (de) Optische Vorrichtung zur Sammlung von Laserbündeln und Lichtquellenvorrichtung
IL138662A0 (en) Wavelength conversion crystal and method for generating laser beam, and apparatus for generating laser beam
CA2322212A1 (en) Apparatus and processes for laser deformation of dielectric particles
AU2002363842A1 (en) Method for the separation of optical fibers by means of co2 laser radiation
DE69717913D1 (de) Laser zur Umwandlung optischer Wellenlängen

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): US

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LU MC NL PT SE SK TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 10855128

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 2002787845

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2002787845

Country of ref document: EP

WWG Wipo information: grant in national office

Ref document number: 2002787845

Country of ref document: EP