WO2003081168A3 - Verfahren zur bestimmung und korrektur von führungsfehlern bei einem koordinatenmessgerät - Google Patents
Verfahren zur bestimmung und korrektur von führungsfehlern bei einem koordinatenmessgerät Download PDFInfo
- Publication number
- WO2003081168A3 WO2003081168A3 PCT/EP2003/000217 EP0300217W WO03081168A3 WO 2003081168 A3 WO2003081168 A3 WO 2003081168A3 EP 0300217 W EP0300217 W EP 0300217W WO 03081168 A3 WO03081168 A3 WO 03081168A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- correction
- measuring device
- errors
- graduations
- graduation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003578856A JP4246071B2 (ja) | 2002-03-26 | 2003-01-13 | 座標測定機械における案内誤差を求めかつ補正する方法 |
| EP03702422A EP1488191B1 (de) | 2002-03-26 | 2003-01-13 | Verfahren zur bestimmung und korrektur von führungsfehlern bei einem koordinatenmessgerät |
| DE50313311T DE50313311D1 (de) | 2002-03-26 | 2003-01-13 | Verfahren zur bestimmung und korrektur von führungsfehlern bei einem koordinatenmessgerät |
| US10/944,955 US7142999B2 (en) | 2002-03-26 | 2004-09-20 | Method and device for correcting guiding errors in a coordinate measuring machine |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10214490.7 | 2002-03-26 | ||
| DE10214490A DE10214490B4 (de) | 2002-03-26 | 2002-03-26 | Verfahren zur Korrektur von Führungsfehlern bei einem Koordinatenmeßgerät |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US10/944,955 Continuation US7142999B2 (en) | 2002-03-26 | 2004-09-20 | Method and device for correcting guiding errors in a coordinate measuring machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2003081168A2 WO2003081168A2 (de) | 2003-10-02 |
| WO2003081168A3 true WO2003081168A3 (de) | 2004-08-26 |
Family
ID=28051028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2003/000217 Ceased WO2003081168A2 (de) | 2002-03-26 | 2003-01-13 | Verfahren zur bestimmung und korrektur von führungsfehlern bei einem koordinatenmessgerät |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7142999B2 (de) |
| EP (1) | EP1488191B1 (de) |
| JP (1) | JP4246071B2 (de) |
| DE (2) | DE10214490B4 (de) |
| WO (1) | WO2003081168A2 (de) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005003321A1 (de) * | 2005-01-18 | 2006-07-27 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Bestimmen einer Raumkoordinate eines Messpunktes an einem Messobjekt sowie entsprechendes Koordinatenmessgerät |
| DE102005032749A1 (de) * | 2005-07-13 | 2007-01-18 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Antasten eines Werkstücks mit einem Koordinatenmessgerät und Koordinatenmessgeräte |
| DE102005036719A1 (de) * | 2005-07-28 | 2007-02-01 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Korrigieren von Interpolationsfehlern einer Maschine, insbesondere eines Koordinatenmessgerätes |
| DE102005038454A1 (de) | 2005-08-03 | 2007-02-15 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Korrigieren von Führungsfehlern eines Koordinatenmessgerätes |
| DE102006019382A1 (de) * | 2006-04-24 | 2007-10-25 | Carl Zeiss Industrielle Messtechnik Gmbh | Scanning einer Oberfläche mit einem Koordinatenmessgerät |
| SE530573C2 (sv) * | 2006-11-16 | 2008-07-08 | Hexagon Metrology Ab | Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner |
| DE102007011852A1 (de) * | 2007-03-03 | 2008-09-04 | Afm Technology Gmbh | Verfahren und Vorrichtung zur Korrektur eines Positionierungssystems |
| CN101821582B (zh) | 2007-06-28 | 2013-04-17 | 海克斯康测量技术有限公司 | 用于确定测量机中的动态误差的方法 |
| PL2171394T5 (pl) * | 2007-07-24 | 2021-02-22 | Hexagon Metrology S.P.A. | Sposób kompensacji błędów pomiarowych wynikających z odkształceń łoża maszyny pomiarowej spowodowanych obciążeniem wywieranym przez mierzony przedmiot oraz maszyna pomiarowa pracująca według tego sposobu |
| US8401691B2 (en) * | 2008-04-28 | 2013-03-19 | University Of North Carolina At Charlotte | Dynamic metrology methods and systems |
| KR101255479B1 (ko) * | 2010-01-19 | 2013-04-16 | 경북대학교 산학협력단 | 다축 제어 기계의 직선축과 회전축 간의 기하학적 오차 평가 방법 |
| KR101126808B1 (ko) * | 2010-03-02 | 2012-03-23 | 경북대학교 산학협력단 | 다축 제어 기계의 오차 평가 방법 및 장치 |
| JP2011196732A (ja) * | 2010-03-18 | 2011-10-06 | Hitachi Ltd | 波面収差測定方法及びその装置 |
| DE102010056039B4 (de) * | 2010-12-16 | 2015-01-15 | Carl Zeiss Industrielle Messtechnik Gmbh | Koordinatenmessgerät und Verfahren zum Betreiben eines Koordinatenmessgeräts |
| EP2543955B1 (de) * | 2011-07-06 | 2015-10-14 | Hexagon Metrology S.p.A. | Verfahren zur Kalibration eines mathematischen Modells einer Koordinatenmessmaschine zur Kompensierung von dynamischen Fehlern aufgrund von Verformung |
| CN103278118B (zh) * | 2013-05-20 | 2016-03-02 | 西北工业大学 | 确定闭式整体叶盘三坐标测量机测头角度的方法 |
| CN103697824B (zh) * | 2013-12-26 | 2016-04-13 | 北京信息科技大学 | 用于坐标测量机的测头的系统标定方法 |
| CN103759685B (zh) * | 2014-01-10 | 2017-01-04 | 天津大学 | 一种辨识四轴加工中心几何精度的检测方法 |
| CN103868466B (zh) * | 2014-02-08 | 2017-05-17 | 合肥工业大学 | 一种平行双关节坐标测量机转动臂变形综合测量装置 |
| CN104215205B (zh) * | 2014-09-17 | 2016-10-05 | 西安工业大学 | 用于曲轴测量的测头装置 |
| DE102015201582B4 (de) * | 2015-01-29 | 2020-10-01 | Carl Zeiss Industrielle Messtechnik Gmbh | Ermittlung und Korrektur eines Fehlers einer Drehvorrichtung für ein Koordinatenmessgerät |
| CN106441188A (zh) * | 2016-08-30 | 2017-02-22 | 安徽巨自动化装备有限公司 | 轴类卡槽测量机构及测量方法 |
| DE102017113695B3 (de) * | 2017-06-21 | 2018-12-27 | Carl Mahr Holding Gmbh | Wippenloses Messsystem für ein Messgerät |
| DE102017113699B3 (de) | 2017-06-21 | 2018-06-28 | Carl Mahr Holding Gmbh | Messsystem mit einer Kugelführungseinheit für ein Messgerät |
| JP7310541B2 (ja) * | 2019-10-28 | 2023-07-19 | オムロン株式会社 | 位置測定方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4939678A (en) * | 1987-11-19 | 1990-07-03 | Brown & Sharpe Manufacturing Company | Method for calibration of coordinate measuring machine |
| EP0687890A2 (de) * | 1994-06-17 | 1995-12-20 | Leitz Messtechnik Gesellschaft mit beschränkter Haftung | Verfahren zur Eliminierung des Rollwinkels einer Messachse einer Koordinatenmessmaschine sowie Vorrichtung zur Durchführung des Verfahrens |
| US5610846A (en) * | 1994-05-27 | 1997-03-11 | Carl Zeiss Stiftung | Method for coordinate measurement on workpieces adjusted for bending of measuring apparatus structure |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3150977A1 (de) * | 1981-12-23 | 1983-06-30 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und einrichtung zur ermittlung und korrektur von fuehrungsfehlern |
| DE3334460A1 (de) * | 1983-09-23 | 1985-04-11 | Fa. Carl Zeiss, 7920 Heidenheim | Mehrkoordinaten-messmaschine |
| DE4436507A1 (de) | 1994-10-13 | 1996-04-18 | Zeiss Carl Fa | Verfahren zur Koordinatenmessung an Werkstücken |
| DE19830646C2 (de) * | 1998-07-09 | 2003-11-27 | Leitz Messtechnik Gmbh | Verfahren zur Korrektur von geometrischen Ablauffehlern einer Koordinatenmeßmaschine |
| JP2001330428A (ja) * | 2000-05-23 | 2001-11-30 | Natl Inst Of Advanced Industrial Science & Technology Meti | 3次元測定機の測定誤差評価方法及び3次元測定機用ゲージ |
| DE10155430B4 (de) * | 2001-11-12 | 2006-12-14 | Siemens Ag | Adaption von Kompensationsdaten zur Verringerung von Stellungsfehlern bei Werkzeugmaschinen und Robotern |
-
2002
- 2002-03-26 DE DE10214490A patent/DE10214490B4/de not_active Expired - Fee Related
-
2003
- 2003-01-13 WO PCT/EP2003/000217 patent/WO2003081168A2/de not_active Ceased
- 2003-01-13 JP JP2003578856A patent/JP4246071B2/ja not_active Expired - Lifetime
- 2003-01-13 DE DE50313311T patent/DE50313311D1/de not_active Expired - Lifetime
- 2003-01-13 EP EP03702422A patent/EP1488191B1/de not_active Expired - Lifetime
-
2004
- 2004-09-20 US US10/944,955 patent/US7142999B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4939678A (en) * | 1987-11-19 | 1990-07-03 | Brown & Sharpe Manufacturing Company | Method for calibration of coordinate measuring machine |
| US5610846A (en) * | 1994-05-27 | 1997-03-11 | Carl Zeiss Stiftung | Method for coordinate measurement on workpieces adjusted for bending of measuring apparatus structure |
| EP0687890A2 (de) * | 1994-06-17 | 1995-12-20 | Leitz Messtechnik Gesellschaft mit beschränkter Haftung | Verfahren zur Eliminierung des Rollwinkels einer Messachse einer Koordinatenmessmaschine sowie Vorrichtung zur Durchführung des Verfahrens |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1488191A2 (de) | 2004-12-22 |
| JP4246071B2 (ja) | 2009-04-02 |
| EP1488191B1 (de) | 2010-12-08 |
| US7142999B2 (en) | 2006-11-28 |
| DE50313311D1 (de) | 2011-01-20 |
| DE10214490A1 (de) | 2003-10-23 |
| US20050102118A1 (en) | 2005-05-12 |
| DE10214490B4 (de) | 2010-12-02 |
| JP2005538342A (ja) | 2005-12-15 |
| WO2003081168A2 (de) | 2003-10-02 |
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