WO2004017385A3 - Dispositif de traitement thermique rapide comportant a l'interieur de la chambre de reaction de lampes infrarouges halogenes a paroi froide - Google Patents

Dispositif de traitement thermique rapide comportant a l'interieur de la chambre de reaction de lampes infrarouges halogenes a paroi froide Download PDF

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Publication number
WO2004017385A3
WO2004017385A3 PCT/FR2003/002492 FR0302492W WO2004017385A3 WO 2004017385 A3 WO2004017385 A3 WO 2004017385A3 FR 0302492 W FR0302492 W FR 0302492W WO 2004017385 A3 WO2004017385 A3 WO 2004017385A3
Authority
WO
WIPO (PCT)
Prior art keywords
casing
halogen
walled
heat treatment
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR2003/002492
Other languages
English (en)
Other versions
WO2004017385A2 (fr
Inventor
Rene-Pierre Ducret
Herve Guillon
Franck Laporte
Pierre-Emmanuel Hickel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Joint Industrial Processors for Electronics
Original Assignee
Joint Industrial Processors for Electronics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Joint Industrial Processors for Electronics filed Critical Joint Industrial Processors for Electronics
Priority to AU2003285678A priority Critical patent/AU2003285678A1/en
Priority to EP03756539A priority patent/EP1573781A2/fr
Publication of WO2004017385A2 publication Critical patent/WO2004017385A2/fr
Publication of WO2004017385A3 publication Critical patent/WO2004017385A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation

Abstract

Un dispositif de traitement thermique rapide comporte des lampes (2) infrarouges halogènes (4) disposées à l'intérieur d'une chambre de réaction à parois métalliques froide (12). Chaque lampe (2) comporte une première enveloppe tubulaire (8) en quartz et une enveloppe externe (9) concentrique à la première enveloppe (8). L'enveloppe externe (9) forme la paroi externe d'un canal de circulation (10) d'un liquide de refroidissement transparent au rayonnement infrarouge des lampes (2), de manière à former des lampes (2) à paroi froide. Le liquide de refroidissement comporte des composés à chaîne carbonée saturée par des halogènes ou des composés à chaîne carbonée et oxygénée saturée par des halogènes. Chaque lampe (2) peut également comporter une enveloppe tubulaire intermédiaire (17), disposée de manière à délimiter un espace tubulaire (18) avec la première enveloppe (8) et à constituer une paroi interne du canal de circulation (10) du liquide de refroidissement. L'espace tubulaire (18) permet de maintenir la première enveloppe (8) à une température comprise entre 200 °C et 900 °C.
PCT/FR2003/002492 2002-08-14 2003-08-08 Dispositif de traitement thermique rapide comportant a l'interieur de la chambre de reaction de lampes infrarouges halogenes a paroi froide Ceased WO2004017385A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2003285678A AU2003285678A1 (en) 2002-08-14 2003-08-08 Device for rapid heat treatment comprising inside the reaction chamber cold-walled halogen infrared lamps
EP03756539A EP1573781A2 (fr) 2002-08-14 2003-08-08 Dispositif de traitement thermique rapide comportant a l'interieur de la chambre de reaction des lampes infrarouges halogenes a paroi froide

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0210292A FR2843629B1 (fr) 2002-08-14 2002-08-14 Dispositif de traitement thermique rapide comportant a l'interieur de la chambre de reaction des lampes infrarouges halogenes a paroi froide
FR02/10292 2002-08-14

Publications (2)

Publication Number Publication Date
WO2004017385A2 WO2004017385A2 (fr) 2004-02-26
WO2004017385A3 true WO2004017385A3 (fr) 2004-04-08

Family

ID=30775989

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2003/002492 Ceased WO2004017385A2 (fr) 2002-08-14 2003-08-08 Dispositif de traitement thermique rapide comportant a l'interieur de la chambre de reaction de lampes infrarouges halogenes a paroi froide

Country Status (4)

Country Link
EP (1) EP1573781A2 (fr)
AU (1) AU2003285678A1 (fr)
FR (1) FR2843629B1 (fr)
WO (1) WO2004017385A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010008084A1 (de) * 2010-02-15 2011-08-18 Leybold Optics GmbH, 63755 Vorrichtung zur thermischen Behandlung von Substraten

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB940627A (en) * 1958-02-01 1963-10-30 Hans Beckmann Method and device for deep freezing of foods (except fish) or medicines
US4960951A (en) * 1989-01-30 1990-10-02 E. I. Du Pont De Nemours And Company Novel perfluoropolyethers
EP1137053A2 (fr) * 2000-03-24 2001-09-26 Micro C Technologies, Inc. Support pour lampes, refroidi par eau et chambre à traitement thermique rapide
US20010031229A1 (en) * 1998-10-20 2001-10-18 Spjut Reed E. UV-enhanced, in-line, infrared phosphorous diffusion furnace

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977289A (ja) * 1982-10-26 1984-05-02 ウシオ電機株式会社 光照射炉
DE10041564C2 (de) * 2000-08-24 2002-06-27 Heraeus Noblelight Gmbh Kühlbares Infrarotstrahlerelement

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB940627A (en) * 1958-02-01 1963-10-30 Hans Beckmann Method and device for deep freezing of foods (except fish) or medicines
US4960951A (en) * 1989-01-30 1990-10-02 E. I. Du Pont De Nemours And Company Novel perfluoropolyethers
US20010031229A1 (en) * 1998-10-20 2001-10-18 Spjut Reed E. UV-enhanced, in-line, infrared phosphorous diffusion furnace
EP1137053A2 (fr) * 2000-03-24 2001-09-26 Micro C Technologies, Inc. Support pour lampes, refroidi par eau et chambre à traitement thermique rapide

Also Published As

Publication number Publication date
FR2843629A1 (fr) 2004-02-20
WO2004017385A2 (fr) 2004-02-26
EP1573781A2 (fr) 2005-09-14
AU2003285678A1 (en) 2004-03-03
FR2843629B1 (fr) 2005-05-06

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