WO2004036727A2 - Appareil de commande - Google Patents

Appareil de commande Download PDF

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Publication number
WO2004036727A2
WO2004036727A2 PCT/JP2003/013298 JP0313298W WO2004036727A2 WO 2004036727 A2 WO2004036727 A2 WO 2004036727A2 JP 0313298 W JP0313298 W JP 0313298W WO 2004036727 A2 WO2004036727 A2 WO 2004036727A2
Authority
WO
WIPO (PCT)
Prior art keywords
actuator
axis
tip
movable body
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2003/013298
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English (en)
Other versions
WO2004036727A3 (fr
Inventor
Junichi Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to AU2003272100A priority Critical patent/AU2003272100A1/en
Publication of WO2004036727A2 publication Critical patent/WO2004036727A2/fr
Publication of WO2004036727A3 publication Critical patent/WO2004036727A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

Definitions

  • the present invention relates to constitution of an oscillatory-wave actuator which drives an oscillator to move an object in contact with the oscillator, and a method of control thereof; and relates also to a positioning apparatus employing the actuator, and a method of control thereof.
  • oscillatory-wave actuators moves a movable member by pressing an oscillator fixed to a piezoelectric element against the movable member and oscillating the piezoelectric element at a frequency higher than the audible range.
  • the structure thereof is disclosed in USP 5,453,653, 5,616,980, and 5,682,076.
  • the actuator has an electrode on the both faces of a flat piezoelectric material, and the electrode on one face is divided into plural sections .
  • Application of a voltage between the electrodes on the both faces causes fine deformation of the piezoelectric material.
  • the piezoelectric material can be deformed in a desired direction by applying a voltage to a selected appropriate electrode.
  • a spacer is provided at the end portion of the piezoelectric material.
  • a movable member can be moved in one direction by an ellipsoidal movement of the spacer caused, for instance, by application of AC signals or pulse signals between the electrodes on the piezoelectric material .
  • Fig. 2 shows an example of a positioning stage which employs an oscillatory-wave actuator.
  • Oscillator 108 of actuator 201 is driven by x-driving circuit 102 to oscillate in an ellipsoid at a high speed as shown by oscillator orbit 117 within the xy- plane in the drawing.
  • This oscillation drives driving plate 109 fixed to moving table 111 which is movable in x-direction in the drawing.
  • Displacement sensor 113 detects the actual position of the table.
  • Position-controlling circuit 101 sends control signals generated by multiplying a control factor to the deviation of the detected position from the targeted position to x-driving circuit 102, constructing a so-called feedback positioning system.
  • the mechanism like this can be made compact in comparison with conventional mechanisms constituted of combination of a rotary motor such as a servo motor with a feed screw, and can be constructed from nonmagnetic members capable of holding the movable body by friction in a motor-stop state in contrast to the mechanism employing a linear magnetic motor, advantageously.
  • the conventional positioning stage for positioning in an xy plane employs generally a device having combination of two of the aforementioned mechanisms in layers with the movement axes directed perpendicularly.
  • a constitution causes increase in size and weight of the entire mechanism by the layer structure, resulting in lower dynamic response.
  • the difference in the loading mass on the two axes causes a problem of low route- controllability owing to asymmetry of dynamic characteristics of the axes, especially in applications requiring precision of the movement route, like in direct laser writing.
  • the present invention provides a driving apparatus which comprises an actuator having a tip displaceable in X,Y,Z three-axis directions, and a movable body having translational movement freedom in X,Y two-axis directions, wherein the tip of the actuator is placed to be displaceable in Z-axis direction to come into pressure contact with the movable body, and the tip of the actuator under pressure contact is displaced within an XY-axis plane to move the movable body translationally in the direction of displacement of the tip of the actuator.
  • Fig. 1 is a drawing for explaining constitution of the apparatus of Example 1 of the present invention .
  • Fig. 2 is a drawing for explaining an example of constitution of an apparatus of a prior art technique .
  • Fig. 3 is a drawing for explaining constitution of the apparatus of Example 2 of the present invention.
  • Fig. 4 is a drawing for explaining function in Example 1.
  • Fig. 5 is a drawing for explaining operation in Examples 1 and 2.
  • Fig. 6 is a drawing for explaining operation in Examples 1 and 2.
  • Fig. 7 is a drawing for explaining operation in Examples 1 and 2.
  • the driving apparatus is constituted of an actuator having a tip displaceable in X,Y,Z three-axis directions, and a movable body having translational movement freedom in X,Y two-axis directions.
  • the tip of the actuator element deformable in the direction of X,Y,Z axes (hereinafter referred to as "three axes” ) is brought into pressure contact with the movable body having translational movement freedom in directions of X and Y axes (hereinafter referred to as "plane-defining axes").
  • plane-defining axes In the pressure contact state, displacement of the actuator in an XY plane moves the movable body by friction between the actuator tip and the movable body.
  • the tip When the actuator tip is allowed to oscillate in Z-direction and synchronously in XY-directions, the tip is moved in an ellipsoid within a plane including the Z-axis, namely the plane perpendicular to the XY plane. In one cycle of this ellipsoidal movement, at the phase where the Z-axis displacement is greater, the tip is pressed more strongly against the movable body by a stronger frictional force.
  • the movement of the actuator tip in the XY axis direction drives the movable body in the same direction by the frictional force.
  • this frictional force is a static frictional force to allow the movable body to follow completely the displacement of the actuator. However, a certain extent of slippage is acceptable.
  • the tip is not in contact with the movable body, or is in loose contact with it by a weaker pressing force.
  • the actuator can be returned to the original position by displacement in the direction reverse to the displacement with close contact while the movable body is left unmoved, since no or little frictional force is applied, resulting in slippage.
  • the movable body By repeating the above oscillation, the movable body can be moved translationally in one direction by accumulation of the resultant displacement in a cycle of the actuator's ellipsoidal movement.
  • a mechanism can be constructed in which a tip of an element deformable in three-axis directions is brought into contact with a movable body having movement freedom in the planar two-axis directions, and is moved in an ellipsoid within an arbitrary plane perpendicular to the aforementioned plane to move the movable body in a desired direction within the aforementioned plane.
  • This mechanism can be made compact and is capable of moving the movable body in any directions within the aforementioned plane with less asymmetry of the dynamic characteristics in the two axis directions by allowing the tip to move in an ellipsoid within a plane perpendicular to the aforementioned plane.
  • the driving apparatus of the present invention enables highly precise movement of a movable body within a fine region in the plane by deforming the element in the two-axis plane direction with retention of the static friction between the tip and the movable body.
  • a movable body having a rotational movement freedom in the above plane as well as the two-axis plane direction can be turned in addition to the above translational movement in the plane by similar operation of the elements.
  • FIG. 1 A positioning stage according to the present invention is explained by reference to Fig. 1.
  • Fig. 1 illustrates a mechanism which moves a moving table 111 designed to be movable in an xy- plane which is defined by fixed base 112.
  • Moving table 111 is used for moving a body placed thereon, and is called a stage when the displacement distance thereof is controllable.
  • Guides 110 comprise respectively two sliding devices therein for x-direction and y-direction shown by arrows 121 and 122 having arrowheads at both ends in the figure.
  • Guides 110 are respectively fixed to base 112 at one end and fixed to moving table 111 at the other end, whereby moving table 111 is not movable in z-direction, but is movable freely in xy- directions .
  • Cylindrical piezoelectric element 118 is provided on base 112. Oscillator 108 at the top of the element is pressed against driving plate 109 which is fixed to moving table 111, and drives the table together with the plate. Cylindrical piezoelectric element 118 and base 112 are connected by a spring not shown in the drawing. This spring gives the above contact pressure. The contact pressure (applied pressure) may be caused by air pressure or oil pressure other than the spring force.
  • x-Displacement sensor 113 and y-displacement sensor 114 measure the actual position of moving table 111 in x-axis direction and y-axis direction by detecting the distance from x-displacement mirror 115 and the distance from y-displacement mirror 116.
  • Position-controlling circuit 101 compares the actual position with the target position, and transmits the control signal to x-driving circuit 102, y-driving circuit 103, and z-driving circuit 104 in real time.
  • x-driving circuit 102 compares the actual position with the target position, and transmits the control signal to x-driving circuit 102, y-driving circuit 103, and z-driving circuit 104 in real time.
  • Fig. 4 shows cylindrical piezoelectric element 118 of Fig. 1 viewed from the plus side toward the minus side of the y-axis.
  • the cylindrical piezoelectric element 118 is formed by fabricating a piezoelectric element in a shape of a cylinder, and is polarized such that it extends in z-direction at a positive potential of the outer wall relative to the inner wall, and shrinks in z-direction at a negative potential of the outer wall relative to the inner wall in the drawing.
  • the inside wall is covered entirely with an electrode and is grounded (not shown in the drawing) .
  • the electrode covering the outside wall is divided into an upper electrode part and a lower electrode part.
  • the lower electrode part surrounding the lower part of the element serves as z-driving electrode 107.
  • the upper electrode part is divided into four sections along the circumference at angles of 45° relative to the x-axis or y-axis: the pair of the sections in the x-axis direction serve as x-driving electrodes 105, and the pair of the sections in the y direction serve as y-driving electrodes 106.
  • the pair of the sections in the x-axis direction serve as x-driving electrodes 105
  • the pair of the sections in the y direction serve as y-driving electrodes 106.
  • Oscillator 108 fixed to the tip of this cylindrical piezoelectric element 118 is pressed by a spring against driving plate 109 fixed to moving table 111. Therefore, extension of cylindrical piezoelectric element 118 in z-direction increases the pressure of oscillator 108 against driving plate 109, whereas shrink of cylindrical piezoelectric element 118 in z-direction decreases the pressure of oscillator 108 against driving plate 109.
  • moving table 111 can be driven in a desired direction. That is, moving table 111 is displaced by extension of cylindrical piezoelectric element 118 in z-direction and synchronous displacement thereof in x- and y-axis directions, by the frictional force between oscillator 108 and driving plate 109 for displacement in the same direction as the oscillator.
  • cylindrical piezoelectric element 118 itself is returned to the original position by the shrink in z-axis direction and movement in x- and y- axis directions leaving the moving table 111 unmoved owing to weak frictional force and resulting slippage between oscillator 108 and driving plate 109.
  • moving table 111 is moved at a certain distance in xy-directions in the one extension-shrink cycle of cylindrical piezoelectric element 118.
  • the movement distance in the one cycle depends on the deformation in xy-directions and also on extension in z-direction of cylindrical piezoelectric element 118.
  • the spring force between cylindrical piezoelectric element 118 and base 112 may be adjusted to detach oscillator 108 from driving plate 109 on shrink of cylindrical piezoelectric element 118 in z-direction.
  • x-driving circuit 102, y-driving circuit 103, and z- driving circuit 104 output respectively driving signals to x-driving electrode 105, y-driving electrode 106, and z-driving electrode 107 to oscillate oscillator 108 in an ellipsoid at a high speed within a plane perpendicular to the xy-plane in Fig. 1.
  • movable table 111 moves to the direction turned by 7t/4 rad from the x-axis plus- direction to the y-axis plus-direction by application of a voltage in the waveform of Fig.
  • the movement distance in one cycle of the oscillation can be adjusted by changing the voltage amplitudes of x-driving electrodes 105, y-driving electrodes 106, and z-driving electrode 107.
  • the movement direction can be changed from the direction of 7C/4 rad by changing the amplitudes of the voltages applied to x-driving electrodes 105 and y- driving electrodes 106, the movement being directed by the sum of the deformation vectors by in x- direction and y-direction.
  • Speed of the translational motion of the moving table 111 can be controlled by changing the amplitude and/or the frequency of the actuator's oscillation. Phase difference between the Z-directional oscillation and the XY-plane directional oscillation is also adjustable to change the speed.
  • the present invention can be applied to operation in a finer region.
  • a DC voltage of about +20 V is applied to z-driving electrode 107 to press oscillator 108 strongly against driving plate 109.
  • arbitrary voltages are applied respectively to x-driving electrode 105 and y-driving electrode 106 to move the moving table 111.
  • the positional resolution is very high, although the movement region is limited within the deformation range of cylindrical piezoelectric element 118.
  • the stage can be moved by combination of coarse movement and fine movement : the coarse movement for moving a movable body by deformation in x-direction and y-direction synchronously with deformation in z- direction, and the fine movement for moving the movable body by deformation in x-direction and y- direction with the deformation fixed in z-direction.
  • Example 2 the coarse movement for moving a movable body by deformation in x-direction and y-direction synchronously with deformation in z- direction, and the fine movement for moving the movable body by deformation in x-direction and y- direction with the deformation fixed in z-direction.
  • Example 2 of the present invention is explained below in detail by reference to Fig. 3.
  • FIG. 3 A positioning stage according to the present invention is explained by reference to Fig. 3.
  • moving table 111 is placed on base 112 constituting an xy-plane in a non-contact state kept by an air pressure (so-called air-slide constitution)
  • air pressure so-called air-slide constitution
  • moving table 111 is turnable in the xy-plane in addition to the translational movability in xy-axis directions.
  • x-Shearing piezoelectric elements 301, y- shearing piezoelectric elements 302, and z-extendable piezoelectric elements 303 have respectively an electrode on each of the top and bottom faces.
  • the top-face electrodes are grounded, and the elements are driven by application of driving voltages to the bottom-face electrodes in x, y and z direction shoun by arrows 121, 122 and 123 having arrowheads at both ends, respectively, in Fig. 3.
  • Each of the elements is polarized to be displaceable toward the minus axis direction when the bottom face is positively charged relative to the top face.
  • Driving elements 304 through 307 which are respectively constituted of the set of the aforementioned three elements in layers, are fixed at the top face relative to base 112. Oscillator 108 fixed to the bottom face of the each driving element has been being pressed previously to each of the four driving plates 109 fixed to moving table 111. The table is moved by the driving plates.
  • Position-controlling circuit 101 sends control signals to x-driving circuit 102, y- driving circuit 103, and z-driving circuit 104 in real time.
  • x-driving circuit 102, y-driving circuit 103, and z- driving circuit 104 output respectively driving signals to the bottom-face electrodes of x-shearing piezoelectric elements 301, y-shearing piezoelectric elements 302, and z-extendible piezoelectric elements 303 to oscillate oscillator 108 in an ellipsoid at a high speed within a plane perpendicular to the xy plane in the drawing.
  • movable table 111 moves to the direction turned by ⁇ /4 rad from the plus direction of the x-axis to the plus direction of the y-axis by application of a voltage in the waveform of Fig.
  • the movement direction can be changed from the direction of 7t/4 rad by changing the amplitudes of voltages applied to x-shearing piezoelectric elements 301 and y-shearing piezoelectric elements 302, the movement being directed to the sum of the movement vectors caused by x-shearing piezoelectric elements 301 and y-shearing piezoelectric elements 302.
  • Moving table 111 is turned from the x-axis plus-direction to the y-axis plus-direction in the drawing by application of the voltage of the waveform in Fig.
  • the turning speed can be adjusted by changing the voltage amplitude or the frequency.
  • the turning center can be shifted from the center of four driving elements 304 through 307 by such a procedure that the movement distances by the each of the driving elements are made proportional to the distance between the turning center and that the driving element and the movement direction by the respective driving element is set to be perpendicular to the line connecting the turning center with the driving element .
  • the present invention can be applied to finer operation.
  • a DC voltage of about +20 V is applied to the bottom-face electrodes of all of z-extendible piezoelectric elements 303 to press the respective oscillators 108 strongly against driving plates 109.
  • a suitable voltage is applied to any of x-shearing piezoelectric elements 301 and y-shearing piezoelectric elements 302 to displace or turn finely the moving table 111.
  • This operation can be conducted with extremely high resolution although the region of the movement and turning is limited within the range of the deformation of the respective driving elements.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

La présente invention a trait à un appareil de commande, comportant un dispositif de commande présentant une extrémité mobile dans des directions à trois axes X, Y, Z, et un corps mobile ayant une liberté de mouvement en translation dans des directions à deux axes X, Y, dans lequel l'extrémité du dispositif de commande est disposé de manière à se déplacer dans une direction à axe Z pour venir en contact à pression avec le corps mobile et l'extrémité du dispositif de commande sous le contact à pression se déplace au sein d'un plan à axe XY pour déplacer le corps mobile en translation dans la direction de déplacement de l'extrémité du dispositif de commande
PCT/JP2003/013298 2002-10-18 2003-10-17 Appareil de commande Ceased WO2004036727A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003272100A AU2003272100A1 (en) 2002-10-18 2003-10-17 Piezoelectric driving apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002304558A JP2004140946A (ja) 2002-10-18 2002-10-18 アクチュエータ
JPNO.2002-304558 2002-10-18

Publications (2)

Publication Number Publication Date
WO2004036727A2 true WO2004036727A2 (fr) 2004-04-29
WO2004036727A3 WO2004036727A3 (fr) 2004-10-28

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PCT/JP2003/013298 Ceased WO2004036727A2 (fr) 2002-10-18 2003-10-17 Appareil de commande

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JP (1) JP2004140946A (fr)
AU (1) AU2003272100A1 (fr)
WO (1) WO2004036727A2 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006117525A3 (fr) * 2005-04-29 2007-03-29 Univ Northumbria Newcastle Appareil et procede de positionnement
CN106026763A (zh) * 2016-05-17 2016-10-12 西安交通大学 一种压电陶瓷驱动的三自由度角度调节装置及调节方法
WO2019008281A1 (fr) * 2017-07-06 2019-01-10 Sorbonne Université Mécanisme de transmission à rapport de translation variable
CN111338037A (zh) * 2020-04-10 2020-06-26 季华实验室 光纤耦合调节装置及其调节方法
US20230296963A1 (en) * 2020-08-12 2023-09-21 Huawei Technologies Co., Ltd. Ultrasonic Piezoelectric Motor, Camera Module, and Electronic Device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4649263B2 (ja) * 2005-04-22 2011-03-09 キヤノン株式会社 光学機器
JP5620065B2 (ja) * 2009-03-26 2014-11-05 株式会社日本総合研究所 外力方向検出システム
JP2012178947A (ja) 2011-02-28 2012-09-13 Ngk Insulators Ltd 圧電アクチュエータ及び圧電アクチュエータアレイ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0424609A1 (fr) * 1989-09-28 1991-05-02 Rockwell International Corporation Dispositif d'actionnement piézoélectrique
JPH06204107A (ja) * 1992-12-25 1994-07-22 Canon Inc 位置決めステージ装置
DE19715226A1 (de) * 1997-04-11 1998-10-15 Univ Schiller Jena Verfahren und Vorrichtung zur hochgenauen Mikropositionierung
WO1999059192A1 (fr) * 1998-05-14 1999-11-18 Massachusetts Institute Of Technology Platine de positionnement omnidirectionnelle de haute precision a entrainement par friction
DE19859024A1 (de) * 1998-12-21 2000-06-29 Bosch Gmbh Robert Antriebsvorrichtung

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006117525A3 (fr) * 2005-04-29 2007-03-29 Univ Northumbria Newcastle Appareil et procede de positionnement
US8179019B2 (en) 2005-04-29 2012-05-15 Nanomobile Ltd. Positioning apparatus and method
CN106026763A (zh) * 2016-05-17 2016-10-12 西安交通大学 一种压电陶瓷驱动的三自由度角度调节装置及调节方法
CN106026763B (zh) * 2016-05-17 2017-05-17 西安交通大学 一种压电陶瓷驱动的三自由度角度调节装置及调节方法
WO2019008281A1 (fr) * 2017-07-06 2019-01-10 Sorbonne Université Mécanisme de transmission à rapport de translation variable
FR3068751A1 (fr) * 2017-07-06 2019-01-11 Universite Pierre Et Marie Curie Mecanisme de transmission a rapport de translation variable
CN111338037A (zh) * 2020-04-10 2020-06-26 季华实验室 光纤耦合调节装置及其调节方法
US20230296963A1 (en) * 2020-08-12 2023-09-21 Huawei Technologies Co., Ltd. Ultrasonic Piezoelectric Motor, Camera Module, and Electronic Device

Also Published As

Publication number Publication date
JP2004140946A (ja) 2004-05-13
AU2003272100A8 (en) 2004-05-04
WO2004036727A3 (fr) 2004-10-28
AU2003272100A1 (en) 2004-05-04

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