WO2006017385A1 - High-resolution, nondestructive imaging of dielectric materials - Google Patents
High-resolution, nondestructive imaging of dielectric materials Download PDFInfo
- Publication number
- WO2006017385A1 WO2006017385A1 PCT/US2005/026974 US2005026974W WO2006017385A1 WO 2006017385 A1 WO2006017385 A1 WO 2006017385A1 US 2005026974 W US2005026974 W US 2005026974W WO 2006017385 A1 WO2006017385 A1 WO 2006017385A1
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- WO
- WIPO (PCT)
- Prior art keywords
- microwaves
- dielectric material
- features
- recited
- bulk dielectric
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S13/00—Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
- G01S13/02—Systems using reflection of radio waves, e.g. primary radar systems; Analogous systems
- G01S13/06—Systems determining position data of a target
- G01S13/08—Systems for measuring distance only
- G01S13/32—Systems for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S13/00—Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
- G01S13/88—Radar or analogous systems specially adapted for specific applications
- G01S13/89—Radar or analogous systems specially adapted for specific applications for mapping or imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2617—Measuring dielectric properties, e.g. constants
- G01R27/2635—Sample holders, electrodes or excitation arrangements, e.g. sensors or measuring cells
- G01R27/267—Coils or antennae arrangements, e.g. coils surrounding the sample or transmitter/receiver antennae
Definitions
- This invention pertains to an apparatus and method for the enhanced interferometric localization of irregularities in bulk dielectric materials.
- a defect can begin, for example, when a small crack allows moisture inside the rubber. Moisture can then wick along the cords that form part of the composite. The moisture can cause the cord to deteriorate, which can lead to adjacent layers delaminating from one another. Defects such as these inside a joint are difficult to detect nondestructively through conventional means.
- a testing procedure be nondestructive, and be usable whether the plant is running or idle. Furthermore, because the access space outside the joint can be as little as 7-10 cm, any portion of the detection machinery that must be in contact with the joint (or in the vicinity of the joint) should be small enough to fit into such a space.
- Durometer a needle that penetrates a portion of the rubber, and connects to a strain gauge.
- Durometers have poor practical utility, but they are nevertheless commonly used in the non-destructive testing of rubber joints.
- United States patents no. 6,359,446 and 6,653,847 disclose an apparatus and method for the nondestructive inspection of dielectric materials.
- Monochromatic, phase coherent electromagnetic radiation preferably in the 5-50 gigahertz frequency range (i.e., microwaves) impinges on the sample.
- microwaves preferably in the 5-50 gigahertz frequency range
- the microwaves are partly transmitted and partly reflected at each interface where the dielectric constant changes.
- a portion of the reflected beam is combined with the signal reflected by the specimen being inspected.
- These two signals have the same frequency, but may differ in amplitude and phase.
- the signals combine to produce an interference pattern, a pattern that changes as the specimen changes, or as the position of the specimen changes relative to that of the detector.
- the signal-to-noise ratio is enhanced by taking the first derivative of the Fourier transform with respect to either time or displacement.
- United States patent no. 3,278,841 discloses a microwave flaw detection system, particularly for use with large, solid-propellant rocket motors. Microwaves were transmitted from inside the propellant, reflected off a metal casing, and detected by a receiver displaced from the microwave transmitter. Irregularities in the strength of the received signal were correlated with cracks or other flaws in the propellant.
- United States patent no. 4,520,308 discloses a system for measuring the thickness of a dielectric material by measuring the phase shift of microwaves transmitted along a microwave strip line conductor that is adjacent to the material whose thickness is being measured. See also United States patent no. 4,123,703. [0018] United States patent no. 2,999,982 discloses a
- Doppler-effect-based method for microwave detection of homogeneity defects in compact materials such as polished glass Relatively high speeds of scanning were used to generate the desired Doppler effect.
- the relative speed of the glass versus the detector was 650 centimeters per second.
- United States patent no. 3,144,601 discloses a method for microwave detection of non-homogeneous zones in non-conducting materials such as glass sheets and plates. Detection was performed by simple measurement of the echoes of the reflected microwaves; by measuring losses in intensity following transmission through the object; or by mixing incident and reflected waves to create beats, particularly when the material being examined was traveling (i.e., detecting Doppler shifts in the frequency of the reflected microwaves).
- United States patent no. 3,271 ,668 discloses the use of microwaves to measure the rate of progressive attrition from a surface of a body of a solid dielectric material; for example, measuring the burning profile in a solid rocket motor. Microwaves were transmitted through the fuel (or other material), the surface of which reflected some of the microwaves back to a detector. The relative phase of incident and reflected microwaves varied as the distance from the microwave transmitter to the surface of the burning fuel changed, allowing the distance to the surface of the fuel to be determined as a function of time.
- United States patent no. 4,707,652 discloses a technique for detecting impurities in a bulk material by measuring changes in the scattering of microwave radiation incident on the bulk material.
- United States patent no. 4,514,680 discloses a method for detecting knots in lumber, by transmitting microwaves through the lumber from two sources of the same intensity, but with a 180 phase shift. Transmitted microwaves are detected on the opposite side of the lumber. If the lumber is knot-free, there is a null in the microwave field at the detectors, but if a knot is present the phase and amplitude of microwave radiation at the detectors are altered.
- United States patent no. 4,581 ,574 discloses a method for determining the average dielectric constant of a dielectric material having a conductive surface, by transmitting microwaves from two transducers into a sheet of the material, and making measurements of the energies of reflected microwaves. By measuring average dielectric constants along a plurality of paths in the plane of the sheet, locations of variations within the sheet may be identified.
- United States patent no. 4,274,288 discloses an acoustic, interferometric method for measuring the depth of a surface flaw such as a crack.
- United States patent no. 4,087,746 discloses a method for determining optical anisotropy in a dielectric material by measuring changes in the polarization of microwaves transmitted through the material.
- United States patent no. 6,172,510 discloses the probing of targeted portions of a layered material by microwave radiation focused onto the targeted portion by adjustment of antenna position and orientation establishing a single oblique incidence path for reflection of antenna emitted probing radiation. Signal measurements of the radiation along the oblique incidence path are obtained to provide for evaluation and detection of defects in the targeted portion of the structure being probed.
- Monochromatic radiation preferably microwave radiation, more preferably microwaves in the 5-50 gigahertz frequency range, is used to interrogate a sample.
- the microwaves are partly reflected at each defect or other feature where the dielectric constant changes (e.g., where there are delaminations, cracks, holes, impurities, thickness changes, other defects or structures of interest).
- a portion of the transmitted beam is combined with the signal reflected by the specimen being inspected.
- These two signals have the same frequency, but may differ in amplitude and phase.
- the signals combine to produce an interference pattern, a pattern that changes as the specimen changes, or as the position of the specimen changes relative to that of the detector.
- the interrogating radiation may be thought of as a sinusoidal (or quasi-sinusoidal) standing wave.
- the localization or imaging of features or irregularities is enhanced by exploiting the variation in distance resolution that results from the formation of a sinusoidal or quasi-sinusoidal standing wave.
- the standing wave has a high slope, and the amplitude of the wave varies strongly with small changes in distance.
- the standing wave has a small or nearly zero slope, and the amplitude of the wave hardly varies with small changes in distance. See Figure 2 and the discussion below.
- the resolution of detection or imaging is enhanced.
- the resolution of the imaging is not limited by the wavelength of the interrogating radiation, but may be substantially smaller than that wavelength.
- the detector may be scanned relative to the specimen at any desired speed, and the scanning speed need not be uniform.
- the novel detection technique is not based on Doppler-shifts in frequency, which result from motion, but rather is based on interference between reflected and reference microwaves that have substantially the same frequency, where the interference is caused by changes in location (independent of motion perse).
- the novel technique can detect cracks, voids, foreign material inclusions (e.g., water or oil), thickness changes, delaminations, changes in dielectric constant (which in rubber may, for example, indicate aging), and other defects in essentially any dielectric materials. Different types of defects have distinguishable characteristics.
- the technique can also be successfully used on composite materials containing conductive components, but whose construction makes them overall nonconductors - for example, carbon fiber composites.
- the technique may also be used to image features that are properly part of the dielectric material, and that are not considered defects, for example the fibers in in fiber-reinforced plastic pipe, or the glass fibers in a fiberglass-reinforced polymer composite.
- the novel method and apparatus have been successfully tested in a prototype embodiment.
- the microwave transmitter/detector was small, and readily suited for use in environments in which access space may be limited.
- the signal from the detector may be plotted as "Z" in a
- X and Y are Cartesian coordinates on the surface of a specimen under test.
- Cartesian coordinate systems may also be used in lieu of an orthogonal Cartesian system, as convenient for the shape of the particular specimen being inspected, for example cylindrical coordinates, toroidal coordinates, spherical , polar coordinates, etc.
- the scan may be optimized for maximum sensitivity at any particular depth range within the specimen by adjusting the distance between the transducer and the specimen's surface.
- the present invention may be used to image features to a depth of centimeters or even tens of centimeters below the surface of the sample.
- the distance between the end of the transducer and the near surface of the specimen under inspection will sometimes be referred to as the "stand-off.”
- the stand-off is illustrated, for example, in each of Figures 1 and 2. Changing the stand-off changes the amplitude and phase of the standing wave throughout the specimen. Changing the phase of the standing wave within the specimen changes the location of the regions of high sensitivity, ⁇ L H , and of low sensitivity, ⁇ L L , illustrated in Figure 2. Therefore, by manipulating the stand-off distance, it is possible to optimize the detection sensitivity at a selected narrow range of depths within the specimen.
- Figure 1 depicts a schematic diagram of a prototype embodiment of an apparatus in accordance with the present invention.
- Fig. 2 depicts schematically a standing wave propagating from a transducer, through the intervening stand-off region (e.g., air), through both surfaces of a specimen, and into the space behind it.
- a stand-off region e.g., air
- Figure 3 depicts a contour image, made by inspection with a prototype device in accordance with the present invention, of a length of new FRP pipe without significant flaws.
- Figure 4 depicts a contour image, made by inspection with a prototype device in accordance with the present invention, of a length of FRP pipe that had experienced in-service wear and failure.
- Substances such as fiberglass that produce noisy reflection patterns in prior ultrasonic techniques may be inspected at low noise levels with the novel microwave technique.
- the novel technique readily detects many common defects in fiberglass.
- the invention may be used to inspect fiber-reinforced plastic (FRP) pipe.
- FRP pipe is a complex composite structure, typically containing many layers of varying composition, density, and dielectric constant. When microwaves are directed towards an FRP pipe, reflections return from all interfaces between materials of different dielectric constant. The returning signal is thus a superposition of many different waveforms, essentially identical in frequency, but generally differing in phase and amplitude.
- the full thickness of the material is inspected, and all interfaces upon which the microwaves impinge contribute to the returning waveform.
- the present invention provides an enhanced, unprecedented ability to "focus" on structures at a particular range of depths within a specimen, to optimize sensitivity and spatial resolution at selected depths within a specimen; or to examine the entire volume of a specimen; or both.
- the novel technique relies, in part, upon the principle that a change in the reflectivity of a specimen generally indicates the presence of a flaw or other feature, lnhomogeneities act as microwave reflectors.
- This "different is bad” (or “different is significant”) approach can be used to identify changes in thickness, foreign material inclusions, cracks, and other defects, as well as desired "features" or other components.
- a defect may be imaged first moving into, and then moving out of the region of high sensitivity in the reflected microwave signal.
- the standing waveform passes from the inspection device (transducer), then usually through an intervening medium such as air, and then into the specimen.
- the wavelength changes, while the frequency remains constant. The higher the index of refraction, the slower the propagation of electromagnetic energy, and the shorter the wavelength becomes.
- the detection sensitivity depends on location.
- the detection sensitivity oscillates as a result of the shape of the standing wave.
- the detection sensitivity to a small defect or structure is proportional to the absolute value of the slope of the amplitude of the standing wave at the location of the defect, as shown schematically in Figure 2. Therefore, by altering the microwave frequency, the axial distance from the transducer to the surface, or both, any given location within the specimen may be placed into a region of high sensitivity.
- different transducer combinations different source-detector pairs will be associated with standing waves having the same wavelength, but different phases.
- Multiple scanning may be accomplished by multiple scans with a single transducer with a single detector, single or multiple scans with a single transducer with multiple detectors, single or multiple scans with multiple transducers with a single detector, or single or multiple scans with multiple transducers and multiple detectors.
- the various transducers may operate at the same frequency or at different frequencies. Whichever configuration is employed, it is generally preferred to use mechanical means, such as those known in the art, to adjust the stand-off from the transducer to the specimen surface. It is also generally preferred to use mechanical, electronic, or optical means, such as those known in the art, to accurately track and record the relative positions of the transducer and specimen while data are collected. The operator may place a region of interest in the specimen within a region of high sensitivity; or a portion or all of the specimen may thus be scanned, either manually or automatically.
- Figure 1 depicts, schematically, a prototype embodiment of an apparatus in accordance with the present invention.
- the prototype apparatus comprised a transducer with a single microwave source and two detectors.
- the detectors output two channels of SIGNAL information.
- the detectors were separated by approximately 0.12 inch (0.30 cm) in the direction of propagation, approximately 1/4 wavelength.
- the transducer included mechanical means for adjusting the position and stand-off, so that any chosen region within the specimen could be examined.
- the SIGNALS from the two detectors were transferred to signal conditioning electronics, where they were amplified, filtered, and conditioned priorto being senttothe analog-to- digital converter (ADC).
- ADC analog-to- digital converter
- control of the standoff will be automated.
- the transducer may be housed in a shaft within a hemispheric dielectric material.
- the standoff is controlled by moving the transducer to different positions within the shaft.
- the hemispheric surface allows the device to smoothly travel over uneven surfaces, while precisely controlling standoff.
- Figure 2 depicts schematically a standing wave as it propagates from the transducer, through the intervening air (stand-off), through both surfaces of the specimen and into the space behind it.
- the index of refraction in the specimen has a value of 2.0.
- Also depicted in the figure is a plot of the relative sensitivity at locations throughout the specimen, resulting from the particular orientation of the specimen with respect to the standing wave shown. Note that the sensitivity is the absolute value of the slope of the standing wave.
- a preferred transducer was a microwave transceiver based on a
- the transceiver could be used with or without a section of waveguide.
- the detector had two microwave frequency diodes incorporated as part of the assembly. The detector diodes were located inside the out-going radiation beam, between the aperture and the front surface of the transducer housing.
- the transducer was frequency-stable, and required only a 5-10 Volt DC power supply to produce the desired microwave output energies. It was mounted in a housing, which could be moved either by hand, or in future embodiments preferably by an automated inspection device (robot).
- the transducer included mechanical means to vary stand-off, so that a region of interest within the specimen could be positioned within a region of high sensitivity in the standing wave.
- the transducer was connected to signal processing electronics, data acquisition hardware, and an imaging and analysis computer via a multiple-conductor cable.
- the transducer was also connected to a position-encoder system for determining the X and Y position of the transducer.
- the position encoder outputs were fed to the computer for use in imaging and analysis of the specimen.
- the detection diodes were located at fixed positions within the path of the outgoing microwave beam, so that the output signal maintained a constant amplitude and frequency as seen by each detection diode.
- the positions of the detection diodes could be made variable, independent of varying the stand-off distance.
- the portion that was reflected depended on the angle of incidence, the difference in the dielectric constants between the materials (which is related to the index of refraction), the surface texture, and other factors.
- Some of the reflected portion of the interrogating beam returned to the transducer, where it was detected by the detector diode.
- the reflected signal and the transmitted signal were of identical frequency, but (in general) differed in both amplitude and phase.
- the detector diode output produced a constant DC voltage when the position of the transducer relative to the specimen and the interrogating frequency were both held constant.
- This constant DC voltage is sometimes referred to as the "SIGNAL.”
- the “SIGNAL” may have multiple components, from multiple detectors.
- the SIGNAL was transferred to signal processing electronics via a wired connection.
- the observed SIGNAL was typically on the order of 1 -100 millivolts at the input of the signal processing electronics.
- the SIGNAL was converted from analog to digital form by the data acquisition system described earlier.
- the analog SIGNAL was digitized into 14 bits in the prototype, resulting in a resolution of 1 part in 16,384 (16K).
- the data acquisition system supported eight differentially connected analog input channels, each with its own negative signal connection.
- One or two analog channels were used to input amplified SIGNAL, depending on whether the transducer was equipped with one or two detector diodes.
- Two additional channels were used for input from the X and Y position encoders.
- the resulting image shows the internal features of the specimen.
- the collected dataset contains far more detail than is conveniently represented in a single image.
- the features of interest are therefore selected, and an image is created by changing the scale and color (or gray scale) gradient for the SIGNAL for a clear visual display of the features of interest.
- contour lines may be used to display the features of interest.
- the stand-off spacing is selected to obtain the depth resolution desired, which is a function of the frequency of the microwaves being used, and the index of refraction of the specimen. If a transducer with multiple detectors is used (rather than a single detector), then the number of scans may be reduced, as multiple images optimized at different depths may be created with data from a single scan.
- the power supply for the microwave generator comprised a regulated, low-voltage power supply between 5 and 12 VDC, capable of approximately 750 milliamps.
- the 5-12 volts were delivered to the transducer housing, where power was delivered to the transducer.
- the same power supply was configured to provide the required voltages for the amplifiers, position encoders, and data acquisition system. Power for the data acquisition system could also be provided by the notebook computer via the USB interface.
- the novel technique is based, in part, on the principle that interfaces of differing dielectric constant (defects or structures of interest) act as microwave reflectors.
- interfaces of differing dielectric constant defects or structures of interest
- a scan is made by measuring the SIGNAL at different X and Y positions, and the data are used to create an image, these interfaces can be observed, and information concerning the nature of the defect or structure may be characterized or inferred.
- a marker or other defect is deliberately placed at a known depth within a test specimen.
- the "seeded” test specimen is then scanned to determine empirically the stand-off distances that optimize resolution of the intentionally introduced marker or defect at a particular depth. Similar tests are repeated with defects at different depths within the sample. This test information may then be used to better interpret scans of similar materials, as the relationship between optimal standoff and defect depth will already be known from the "calibration standards.”
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Abstract
Description
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Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP05775204A EP1779123A4 (en) | 2004-08-05 | 2005-08-01 | High-resolution, nondestructive imaging of dielectric materials |
| AU2005271738A AU2005271738B2 (en) | 2004-08-05 | 2005-08-01 | High-resolution, nondestructive imaging of dielectric materials |
| US11/573,020 US7777499B2 (en) | 2004-08-05 | 2005-08-01 | High-resolution, nondestructive imaging of dielectric materials |
| CA2615685A CA2615685C (en) | 2004-08-05 | 2005-08-01 | High-resolution, nondestructive imaging of dielectric materials |
| US12/840,677 US8035400B2 (en) | 2004-08-05 | 2010-07-21 | High-resolution, nondestructive imaging of dielectric materials |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US59898904P | 2004-08-05 | 2004-08-05 | |
| US60/598,989 | 2004-08-05 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/573,020 A-371-Of-International US7777499B2 (en) | 2004-08-05 | 2005-08-01 | High-resolution, nondestructive imaging of dielectric materials |
| US12/840,677 Continuation US8035400B2 (en) | 2004-08-05 | 2010-07-21 | High-resolution, nondestructive imaging of dielectric materials |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2006017385A1 true WO2006017385A1 (en) | 2006-02-16 |
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ID=35839603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2005/026974 Ceased WO2006017385A1 (en) | 2004-08-05 | 2005-08-01 | High-resolution, nondestructive imaging of dielectric materials |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7777499B2 (en) |
| EP (1) | EP1779123A4 (en) |
| AU (1) | AU2005271738B2 (en) |
| CA (1) | CA2615685C (en) |
| WO (1) | WO2006017385A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015014545A1 (en) * | 2013-07-31 | 2015-02-05 | Siemens Aktiengesellschaft | Object detector and method for detecting an object |
| US9046605B2 (en) | 2012-11-05 | 2015-06-02 | The Curators Of The University Of Missouri | Three-dimensional holographical imaging |
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| US9177371B2 (en) * | 2008-06-09 | 2015-11-03 | Siemens Energy, Inc. | Non-destructive examination data visualization and analysis |
| BRPI0822878A2 (en) | 2008-06-11 | 2015-06-30 | Prad Res & Dev Ltd | Well Failure Detection System and Well Failure Detection Method |
| US8400166B2 (en) * | 2009-04-29 | 2013-03-19 | The Boeing Company | Non-destructive determination of electromagnetic properties |
| US9482627B2 (en) * | 2013-07-31 | 2016-11-01 | Michelin Recherche Et Technique S.A. | Tire inspection using microwave imaging methodologies |
| WO2015047931A1 (en) | 2013-09-25 | 2015-04-02 | Evisive, Inc. | Nondestructive, absolute determination of thickness of or depth in dielectric materials |
| WO2020060501A1 (en) * | 2018-09-17 | 2020-03-26 | Koc Universitesi | A method and apparatus for detecting nanoparticles and biological molecules |
| RU201679U1 (en) * | 2020-08-12 | 2020-12-28 | федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" | DEVICE FOR DIAGNOSTICS AND CONTROL BY RADIO WAVE METHOD OF POLYMERIC COMPOSITE MATERIALS |
| DE102021112584B4 (en) | 2021-05-14 | 2024-11-14 | Thomas Fritsch | Inspection procedures for detecting foreign bodies and/or material inhomogeneities |
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| EP1017996B1 (en) * | 1997-09-25 | 2008-05-28 | Jack R.. Little, Jr. | Nondestructive testing of dielectric materials |
| US6480141B1 (en) * | 2001-03-13 | 2002-11-12 | Sandia Corporation | Detection of contraband using microwave radiation |
| EP1664932B1 (en) * | 2003-09-15 | 2015-01-28 | Zygo Corporation | Interferometric analysis of surfaces |
| US7190177B2 (en) * | 2004-08-18 | 2007-03-13 | The Curators Of The University Of Missouri | Method and apparatus for nondestructive sample inspection |
-
2005
- 2005-08-01 EP EP05775204A patent/EP1779123A4/en not_active Ceased
- 2005-08-01 CA CA2615685A patent/CA2615685C/en not_active Expired - Fee Related
- 2005-08-01 US US11/573,020 patent/US7777499B2/en active Active
- 2005-08-01 WO PCT/US2005/026974 patent/WO2006017385A1/en not_active Ceased
- 2005-08-01 AU AU2005271738A patent/AU2005271738B2/en not_active Ceased
-
2010
- 2010-07-21 US US12/840,677 patent/US8035400B2/en not_active Expired - Fee Related
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|---|---|---|---|---|
| US5138255A (en) * | 1989-03-20 | 1992-08-11 | Semitex Co., Ltd. | Method and apparatus for measuring lifetime of semiconductor material including waveguide tuning means |
| US6172510B1 (en) * | 1998-12-30 | 2001-01-09 | The United Sates Of America As Represented By The Secretary Of The Navy | System for detection of flaws by use of microwave radiation |
| US20040100279A1 (en) * | 2002-11-22 | 2004-05-27 | Talanov Vladimir V. | Method and system for non-contact measurement of microwave capacitance of miniature structures of integrated circuits |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9046605B2 (en) | 2012-11-05 | 2015-06-02 | The Curators Of The University Of Missouri | Three-dimensional holographical imaging |
| WO2015014545A1 (en) * | 2013-07-31 | 2015-02-05 | Siemens Aktiengesellschaft | Object detector and method for detecting an object |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1779123A4 (en) | 2007-11-21 |
| US20100283483A1 (en) | 2010-11-11 |
| US20090009191A1 (en) | 2009-01-08 |
| US7777499B2 (en) | 2010-08-17 |
| AU2005271738A1 (en) | 2006-02-16 |
| CA2615685A1 (en) | 2006-02-16 |
| CA2615685C (en) | 2015-06-23 |
| AU2005271738B2 (en) | 2010-08-19 |
| EP1779123A1 (en) | 2007-05-02 |
| US8035400B2 (en) | 2011-10-11 |
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