WO2006028795A3 - Integrated wavefront correction module - Google Patents

Integrated wavefront correction module Download PDF

Info

Publication number
WO2006028795A3
WO2006028795A3 PCT/US2005/030781 US2005030781W WO2006028795A3 WO 2006028795 A3 WO2006028795 A3 WO 2006028795A3 US 2005030781 W US2005030781 W US 2005030781W WO 2006028795 A3 WO2006028795 A3 WO 2006028795A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical surface
correction module
wavefront correction
integrated wavefront
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/030781
Other languages
French (fr)
Other versions
WO2006028795A2 (en
Inventor
Mark A Ealey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Adaptive Optics Associates Inc
Original Assignee
Xinetics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xinetics Inc filed Critical Xinetics Inc
Priority to JP2007531209A priority Critical patent/JP2008512722A/en
Priority to EP05795473A priority patent/EP1794635A2/en
Priority to CA002579698A priority patent/CA2579698A1/en
Publication of WO2006028795A2 publication Critical patent/WO2006028795A2/en
Publication of WO2006028795A3 publication Critical patent/WO2006028795A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Lenses (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

An integrated wave front correction module includes an optical surface; a high spatial and temporal frequency correction system for deforming the optical surface to correct for high spatial and temporal frequency phase errors in an incident wavefront on the optical surface; and a tip-tilt correction system for adjusting the optical surface to compensate for tip-tilt errors in the incident wavefront.
PCT/US2005/030781 2004-09-08 2005-08-30 Integrated wavefront correction module Ceased WO2006028795A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007531209A JP2008512722A (en) 2004-09-08 2005-08-30 Integrated wavefront correction module
EP05795473A EP1794635A2 (en) 2004-09-08 2005-08-30 Integrated wavefront correction module
CA002579698A CA2579698A1 (en) 2004-09-08 2005-08-30 Integrated wavefront correction module

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/935,810 US20060050419A1 (en) 2004-09-08 2004-09-08 Integrated wavefront correction module
US10/935,810 2004-09-08

Publications (2)

Publication Number Publication Date
WO2006028795A2 WO2006028795A2 (en) 2006-03-16
WO2006028795A3 true WO2006028795A3 (en) 2007-02-01

Family

ID=35995936

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/030781 Ceased WO2006028795A2 (en) 2004-09-08 2005-08-30 Integrated wavefront correction module

Country Status (5)

Country Link
US (1) US20060050419A1 (en)
EP (1) EP1794635A2 (en)
JP (1) JP2008512722A (en)
CA (1) CA2579698A1 (en)
WO (1) WO2006028795A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7172299B2 (en) 2004-09-08 2007-02-06 Xinetics, Inc. Integrated wavefront correction module with reduced translation
WO2009007447A2 (en) * 2007-07-11 2009-01-15 Universite Libre De Bruxelles Deformable mirror
US8322870B2 (en) * 2010-09-21 2012-12-04 Raytheon Company Fast steering, deformable mirror system and method for manufacturing the same
JP6308790B2 (en) 2013-02-18 2018-04-11 キヤノン株式会社 Deformable mirror and manufacturing method thereof
CN105390606A (en) * 2015-12-23 2016-03-09 海鹰企业集团有限责任公司 Array formation method of piezoelectric ceramic dimensional array
DE102020201724A1 (en) * 2020-02-12 2021-08-12 Carl Zeiss Smt Gmbh OPTICAL SYSTEM AND LITHOGRAPH SYSTEM
CN111595559B (en) * 2020-06-22 2021-05-25 中国科学院长春光学精密机械与物理研究所 First-order wavefront error measuring system of non-continuous mirror telescope
DE102021200113A1 (en) 2021-01-08 2022-07-14 Carl Zeiss Smt Gmbh Optical device, method for controlling an optical device, computer program product and lithography system
CN113311580B (en) * 2021-05-21 2022-12-30 中国人民解放军国防科技大学 Method for preparing differential array beam wavefront corrector based on aberration measurement
US12504603B1 (en) * 2021-07-09 2025-12-23 Bae Systems Space & Mission Systems Inc. Actuator and method for precise positioning
NL2033651B1 (en) 2022-12-01 2024-06-06 Airbus Defence And Space Netherlands B V Uplink Adaptor for Optical Links and Method therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655563A (en) * 1985-11-25 1987-04-07 Itek Corporation Variable thickness deformable mirror

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4825062A (en) * 1987-10-29 1989-04-25 Kaman Aerospace Corporation Extendable large aperture phased array mirror system
US4944580A (en) * 1988-07-27 1990-07-31 Thermo Electron Technologies Corp. Active segmented mirror including a plurality of piezoelectric drivers
US5229889A (en) * 1991-12-10 1993-07-20 Hughes Aircraft Company Simple adaptive optical system
US6236490B1 (en) * 2000-01-05 2001-05-22 The B. F. Goodrich Company Dual stage deformable mirror
US7174792B2 (en) * 2004-08-09 2007-02-13 Xinetics, Inc. Multi-axis transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655563A (en) * 1985-11-25 1987-04-07 Itek Corporation Variable thickness deformable mirror

Also Published As

Publication number Publication date
JP2008512722A (en) 2008-04-24
EP1794635A2 (en) 2007-06-13
CA2579698A1 (en) 2006-03-16
WO2006028795A2 (en) 2006-03-16
US20060050419A1 (en) 2006-03-09

Similar Documents

Publication Publication Date Title
WO2006028795A3 (en) Integrated wavefront correction module
WO2006028797A3 (en) Adaptive mirror system
AU2003243479A1 (en) Photovoltaic module with light reflecting backskin
TW200801628A (en) Lens apparatus focus adjustment support device and focus adjusting method
WO2002087428A3 (en) Defocus and astigmatism compensation in a wavefront aberration measurement system
WO2006036762A3 (en) Ophthalmic lenses incorporating a diffractive element
AU2003270546A1 (en) Image projection system with a polarizing beam splitter
WO2001050173A3 (en) Dual stage deformable mirror
WO2007149333A3 (en) Curved screen display system and method
AU2003252137A1 (en) Intraocular lens system
AU2003238225A1 (en) Adjustable soft mounts in kinematic mounting system for deformable lens
AU2003237304A1 (en) Optical polarization beam combiner/splitter
WO2011069079A3 (en) Concentrating solar collector with shielding mirrors
WO2008094499A3 (en) Wafer level camera module and method of manufacture
WO2006078388A3 (en) Projection system including intrinsic polarizer
WO2010002177A3 (en) Solar tracking apparatus
WO2008107105A3 (en) Imaging device comprising an adaptive optical element, and holographic projection apparatus
AU2002368362A1 (en) Projection lens with non- round diaphragm for microlithography
WO2006132815A3 (en) Modules and backplanes
WO2009048100A1 (en) Optical unit and projection display device
EP1724568A3 (en) Optoelectronic sensor device
WO2006028796A3 (en) Integrated wavefront correction module with reduced translation
AU2003217502A1 (en) An optical module with multiplexer
WO2007053338A3 (en) Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate
TW200600829A (en) Optical system, exposure device, and exposure method

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2005795473

Country of ref document: EP

Ref document number: 2007531209

Country of ref document: JP

Ref document number: 2579698

Country of ref document: CA

NENP Non-entry into the national phase

Ref country code: DE

WWP Wipo information: published in national office

Ref document number: 2005795473

Country of ref document: EP