WO2006028797A3 - Adaptive mirror system - Google Patents

Adaptive mirror system Download PDF

Info

Publication number
WO2006028797A3
WO2006028797A3 PCT/US2005/030784 US2005030784W WO2006028797A3 WO 2006028797 A3 WO2006028797 A3 WO 2006028797A3 US 2005030784 W US2005030784 W US 2005030784W WO 2006028797 A3 WO2006028797 A3 WO 2006028797A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical surface
wavefront
errors
mirror
mirror system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/030784
Other languages
French (fr)
Other versions
WO2006028797A2 (en
Inventor
Mark A Ealey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Adaptive Optics Associates Inc
Original Assignee
Xinetics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xinetics Inc filed Critical Xinetics Inc
Priority to CA002579640A priority Critical patent/CA2579640A1/en
Priority to JP2007531211A priority patent/JP2008512724A/en
Priority to EP05795404A priority patent/EP1803013A2/en
Publication of WO2006028797A2 publication Critical patent/WO2006028797A2/en
Publication of WO2006028797A3 publication Critical patent/WO2006028797A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Telescopes (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Communication System (AREA)

Abstract

An adaptive mirror system includes an array of phase mirror segments for correcting for errors in a wavefront incident on the mirror system; each phase mirror segment includes an integrated wavefront correction module, having an optical surface; a high spatial and temporal frequency correction system for deforming the optical surface to correct for high spatial and temporal frequency phase errors in the incident local wavefront on the optical surface; and a tip-tilt correction system for adjusting the optical surface to compensate for tip-tilt errors in the incident local wavefront.
PCT/US2005/030784 2004-09-08 2005-08-30 Adaptive mirror system Ceased WO2006028797A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA002579640A CA2579640A1 (en) 2004-09-08 2005-08-30 Adaptive mirror system
JP2007531211A JP2008512724A (en) 2004-09-08 2005-08-30 Adaptive mirror system
EP05795404A EP1803013A2 (en) 2004-09-08 2005-08-30 Adaptive mirror system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/936,229 2004-09-08
US10/936,229 US20060050421A1 (en) 2004-09-08 2004-09-08 Adaptive mirror system

Publications (2)

Publication Number Publication Date
WO2006028797A2 WO2006028797A2 (en) 2006-03-16
WO2006028797A3 true WO2006028797A3 (en) 2007-03-01

Family

ID=35995938

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/030784 Ceased WO2006028797A2 (en) 2004-09-08 2005-08-30 Adaptive mirror system

Country Status (5)

Country Link
US (1) US20060050421A1 (en)
EP (1) EP1803013A2 (en)
JP (1) JP2008512724A (en)
CA (1) CA2579640A1 (en)
WO (1) WO2006028797A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005040120A1 (en) * 2005-08-25 2007-03-01 Robert Bosch Gmbh Multifunctional electrode design for piezo actuators
US7547107B2 (en) 2006-04-27 2009-06-16 Xinetics, Inc. Edge constrained optical membrane deformable mirror and method of fabricating
US7663269B2 (en) * 2006-12-13 2010-02-16 A-Tech Corporation High bandwidth linear actuator for steering mirror applications
DE102008014615A1 (en) * 2008-03-17 2009-10-01 Friedrich-Schiller-Universität Jena Adaptive deformable mirror to compensate for wavefront errors
JP5428375B2 (en) * 2009-02-18 2014-02-26 株式会社ニコン Holding apparatus, optical system, exposure apparatus, and device manufacturing method
EP2727516B1 (en) * 2012-10-30 2020-01-01 Canon Kabushiki Kaisha Ophthalmologic apparatus
US20150062294A1 (en) * 2013-08-27 2015-03-05 Thomas S. Sibley Holoscope: Digital Virtual Object Projector
EP3206862B1 (en) * 2014-10-15 2024-01-17 Media Lario s.r.l. Process for forming an article with a precision surface
US20180252504A1 (en) * 2016-04-28 2018-09-06 Kiwamu Takehisa Laser defense system and high altitude airship
CN111650717B (en) * 2020-05-09 2022-03-25 中国科学院西安光学精密机械研究所 Surface-shaped high-stability reflector assembly and assembling method thereof
US12181660B2 (en) 2020-11-11 2024-12-31 Northrop Grumman Systems Corporation Actively deformable metamirror
US11595628B2 (en) 2021-05-02 2023-02-28 Thomas S. Sibley Projection system and method for three-dimensional images
DE102021205368A1 (en) * 2021-05-27 2022-12-01 Carl Zeiss Smt Gmbh Component for a projection exposure system for semiconductor lithography and method for designing the component
CN116931252A (en) * 2022-04-02 2023-10-24 中国科学院半导体研究所 Deformable mirror

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655563A (en) * 1985-11-25 1987-04-07 Itek Corporation Variable thickness deformable mirror
US4825062A (en) * 1987-10-29 1989-04-25 Kaman Aerospace Corporation Extendable large aperture phased array mirror system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4944580A (en) * 1988-07-27 1990-07-31 Thermo Electron Technologies Corp. Active segmented mirror including a plurality of piezoelectric drivers
US5229889A (en) * 1991-12-10 1993-07-20 Hughes Aircraft Company Simple adaptive optical system
US6236490B1 (en) * 2000-01-05 2001-05-22 The B. F. Goodrich Company Dual stage deformable mirror
JP3964193B2 (en) * 2000-12-22 2007-08-22 日本碍子株式会社 Matrix type actuator
US6803994B2 (en) * 2002-06-21 2004-10-12 Nikon Corporation Wavefront aberration correction system
JP2003161894A (en) * 2002-08-23 2003-06-06 National Institute Of Advanced Industrial & Technology Telescope, telescope adjustment device, telescope adjustment method, and recording medium storing processing program executed by the adjustment method
US7174792B2 (en) * 2004-08-09 2007-02-13 Xinetics, Inc. Multi-axis transducer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655563A (en) * 1985-11-25 1987-04-07 Itek Corporation Variable thickness deformable mirror
US4825062A (en) * 1987-10-29 1989-04-25 Kaman Aerospace Corporation Extendable large aperture phased array mirror system

Also Published As

Publication number Publication date
US20060050421A1 (en) 2006-03-09
EP1803013A2 (en) 2007-07-04
WO2006028797A2 (en) 2006-03-16
CA2579640A1 (en) 2006-03-16
JP2008512724A (en) 2008-04-24

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