WO2006091791A3 - Methods and apparatus for actuating displays - Google Patents

Methods and apparatus for actuating displays Download PDF

Info

Publication number
WO2006091791A3
WO2006091791A3 PCT/US2006/006552 US2006006552W WO2006091791A3 WO 2006091791 A3 WO2006091791 A3 WO 2006091791A3 US 2006006552 W US2006006552 W US 2006006552W WO 2006091791 A3 WO2006091791 A3 WO 2006091791A3
Authority
WO
WIPO (PCT)
Prior art keywords
methods
display devices
actuating
displays
shutter assemblies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/006552
Other languages
French (fr)
Other versions
WO2006091791A9 (en
WO2006091791A2 (en
Inventor
Nesbitt W Hagood
Jasper Lodewyk Steyn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pixtronix Inc
Original Assignee
Pixtronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/218,690 external-priority patent/US7417782B2/en
Priority claimed from US11/251,034 external-priority patent/US7304785B2/en
Priority claimed from US11/251,035 external-priority patent/US7271945B2/en
Priority claimed from US11/251,452 external-priority patent/US7304786B2/en
Priority to CN2006800058222A priority Critical patent/CN101151206B/en
Priority to BRPI0607880-0A priority patent/BRPI0607880A2/en
Priority to EP06721031A priority patent/EP1858796B1/en
Priority to KR1020107003356A priority patent/KR101157502B1/en
Priority to DE602006019695T priority patent/DE602006019695D1/en
Priority to CA2598740A priority patent/CA2598740C/en
Priority to AT06721031T priority patent/ATE496362T1/en
Priority to JP2007556431A priority patent/JP4616890B2/en
Application filed by Pixtronix Inc filed Critical Pixtronix Inc
Publication of WO2006091791A2 publication Critical patent/WO2006091791A2/en
Publication of WO2006091791A9 publication Critical patent/WO2006091791A9/en
Publication of WO2006091791A3 publication Critical patent/WO2006091791A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/04—Networks or arrays of similar microstructural devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054—For holding or placing an element in a given position
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/051—Translation according to an axis parallel to the substrate
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/0809—Several active elements per pixel in active matrix panels
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0262—The addressing of the pixel, in a display other than an active matrix LCD, involving the control of two or more scan electrodes or two or more data electrodes, e.g. pixel voltage dependent on signals of two data electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Micromachines (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Details Of Measuring Devices (AREA)
  • Push-Button Switches (AREA)

Abstract

The invention relates to MEMS-based display devices. In particular, the display devices may include actuators having two mechanically compliant electrodes. In addition, bi-stable shutter assemblies and means for supporting shutters in shutter assemblies are disclosed inclusion in the display devices.
PCT/US2006/006552 2005-02-23 2006-02-23 Methods and apparatus for actuating displays Ceased WO2006091791A2 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
CA2598740A CA2598740C (en) 2005-02-23 2006-02-23 Methods and apparatus for actuating displays
BRPI0607880-0A BRPI0607880A2 (en) 2005-02-23 2006-02-23 visualization apparatus and method of forming an image in a visualization apparatus
JP2007556431A JP4616890B2 (en) 2005-02-23 2006-02-23 Method and apparatus for operating a display
CN2006800058222A CN101151206B (en) 2005-02-23 2006-02-23 Method and device for actuating a display
AT06721031T ATE496362T1 (en) 2005-02-23 2006-02-23 METHOD AND DEVICE FOR ACTUATING DISPLAYS
EP06721031A EP1858796B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for actuating displays
KR1020107003356A KR101157502B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for actuating displays
DE602006019695T DE602006019695D1 (en) 2005-02-23 2006-02-23 METHOD AND DEVICE FOR ACTUATING DISPLAYS

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
US65582705P 2005-02-23 2005-02-23
US60/655,827 2005-02-23
US67605305P 2005-04-29 2005-04-29
US60/676,053 2005-04-29
US11/218,690 2005-09-02
US11/218,690 US7417782B2 (en) 2005-02-23 2005-09-02 Methods and apparatus for spatial light modulation
US11/251,034 2005-10-14
US11/251,452 US7304786B2 (en) 2005-02-23 2005-10-14 Methods and apparatus for bi-stable actuation of displays
US11/251,035 US7271945B2 (en) 2005-02-23 2005-10-14 Methods and apparatus for actuating displays
US11/251,034 US7304785B2 (en) 2005-02-23 2005-10-14 Display methods and apparatus
US11/251,035 2005-10-14
US11/251,452 2005-10-14

Related Child Applications (3)

Application Number Title Priority Date Filing Date
EP10177217.6A Previously-Filed-Application EP2336081B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for actuating displays
EP10176478.5A Previously-Filed-Application EP2287110B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for actuating displays
EP10177223.4A Previously-Filed-Application EP2322971B1 (en) 2005-02-23 2006-02-23 Methods and Apparatus for Actuating Displays

Publications (3)

Publication Number Publication Date
WO2006091791A2 WO2006091791A2 (en) 2006-08-31
WO2006091791A9 WO2006091791A9 (en) 2006-10-12
WO2006091791A3 true WO2006091791A3 (en) 2006-11-23

Family

ID=36406025

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/006552 Ceased WO2006091791A2 (en) 2005-02-23 2006-02-23 Methods and apparatus for actuating displays

Country Status (10)

Country Link
EP (5) EP2336081B1 (en)
JP (7) JP4616890B2 (en)
KR (2) KR101157502B1 (en)
CN (6) CN103345058A (en)
AT (1) ATE496362T1 (en)
BR (1) BRPI0607880A2 (en)
CA (4) CA2795329C (en)
DE (1) DE602006019695D1 (en)
ES (3) ES2507498T3 (en)
WO (1) WO2006091791A2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9128277B2 (en) 2006-02-23 2015-09-08 Pixtronix, Inc. Mechanical light modulators with stressed beams
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7417782B2 (en) 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
EP2030192B1 (en) * 2006-06-05 2015-09-16 Pixtronix, Inc. Circuits for controlling display apparatus
JP2013061658A (en) * 2007-01-19 2013-04-04 Pixtronix Inc Mems display apparatus
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
CN103399399A (en) * 2008-02-12 2013-11-20 皮克斯特隆尼斯有限公司 Mechanical light modulator with stressed beam
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
JP5677971B2 (en) * 2008-11-07 2015-02-25 キャベンディッシュ・キネティックス・インコーポレイテッドＣａｖｅｎｄｉｓｈ Ｋｉｎｅｔｉｃｓ， Ｉｎｃ． Method of replacing a relatively large MEMS device with a plurality of relatively small MEMS devices
KR101557485B1 (en) 2008-12-09 2015-10-06 삼성전자 주식회사 Micro shutter device and manufacturing method thereof
KR101588000B1 (en) 2009-08-18 2016-01-25 삼성디스플레이 주식회사 Display device driving method and display device using the same
KR101570854B1 (en) * 2009-08-21 2015-11-23 삼성디스플레이 주식회사 Microshutter and display apparatus having the same
KR101614463B1 (en) 2009-11-05 2016-04-22 삼성디스플레이 주식회사 Display device using mems element and manufacturing method thereof
KR101723149B1 (en) * 2009-12-30 2017-04-05 삼성디스플레이 주식회사 Microelectromechanical system substrate and display apparatus having the same
WO2011097258A1 (en) 2010-02-02 2011-08-11 Pixtronix, Inc. Circuits for controlling display apparatus
EP2531881A2 (en) 2010-02-02 2012-12-12 Pixtronix Inc. Methods for manufacturing cold seal fluid-filled display apparatus
KR20120067695A (en) 2010-12-16 2012-06-26 삼성전자주식회사 Display apparatus and fabrication method of the same
US8953120B2 (en) 2011-01-07 2015-02-10 Semiconductor Energy Laboratory Co., Ltd. Display device
KR20120102387A (en) 2011-03-08 2012-09-18 삼성전자주식회사 Display apparatus and fabrication method of the same
KR20120111809A (en) 2011-04-01 2012-10-11 삼성디스플레이 주식회사 Display device
JP5801602B2 (en) * 2011-05-12 2015-10-28 ピクストロニクス，インコーポレイテッド Image display device
JP5727303B2 (en) * 2011-06-03 2015-06-03 ピクストロニクス，インコーポレイテッド Display device
JP5762842B2 (en) * 2011-06-21 2015-08-12 ピクストロニクス，インコーポレイテッド Display device and manufacturing method of display device
US9134529B2 (en) 2011-07-21 2015-09-15 Pixronix, Inc. Display device with tapered light reflecting layer and manufacturing method for same
KR20130072847A (en) 2011-12-22 2013-07-02 삼성디스플레이 주식회사 Display apparatus and fabrication method of the same
JP6273255B2 (en) * 2012-03-27 2018-01-31 ケー．エー．アドバタイジング ソリューションズ リミテッド Reflective dynamic color device
US9030723B2 (en) * 2013-01-18 2015-05-12 Pixtronix, Inc. Asymmetric travel for MEMS light modulator
JP2014142491A (en) * 2013-01-24 2014-08-07 Pixtronix Inc Display device
US9217857B2 (en) * 2013-03-12 2015-12-22 Pixtronix, Inc. Multi-state shutter assemblies having segmented drive electrode sets
US9134530B2 (en) * 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus incorporating dual-level shutters
JP2014178513A (en) 2013-03-15 2014-09-25 Pixtronix Inc Display device
US9747846B2 (en) 2013-07-01 2017-08-29 Sharp Kabushiki Kaisha Display device
JP5935849B2 (en) 2013-10-04 2016-06-15 カシオ計算機株式会社 Image processing apparatus, image processing method, and program
US9245311B2 (en) 2014-01-02 2016-01-26 Pixtronix, Inc. Display apparatus actuators including anchored and suspended shutter electrodes
FR3042788B1 (en) * 2015-10-21 2017-12-08 Commissariat Energie Atomique MICROELECTROMECHANICAL AND / OR NANOELECTROMECHANICAL STRUCTURE WITH ELECTROTHERMIC ACTUATURE PROVIDING IMPROVED PERFORMANCE
FR3042789B1 (en) 2015-10-21 2019-07-12 Commissariat A L'energie Atomique Et Aux Energies Alternatives MICROELECTROMECHANICAL AND / OR NANOELECTROMECHANICAL STRUCTURE WITH ELECTROTHERMIC ACTUATION COMPRISING AT LEAST TWO DIFFERENTLY POLARIZABLE ACTUATION BEAMS
CN105607247B (en) * 2016-01-04 2019-02-19 京东方科技集团股份有限公司 A light valve, an array substrate and a display device
JP6953118B2 (en) * 2016-07-04 2021-10-27 エドワード・パクチャン MEMS light modulators for displays
JP6953117B2 (en) * 2016-07-04 2021-10-27 エドワード・パクチャン Light modulators for MEMS displays
JP7016350B2 (en) * 2017-03-17 2022-02-04 住友精密工業株式会社 MEMS element and optical device using it
WO2018168658A1 (en) * 2017-03-17 2018-09-20 住友精密工業株式会社 Displacement enlargement mechanism and shutter device using same
RU2688904C1 (en) * 2018-09-28 2019-05-22 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Optical signal receiver
RU2694463C1 (en) * 2018-09-28 2019-07-15 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Pulse photodetector
RU2688907C1 (en) * 2018-09-28 2019-05-22 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Photodetector
RU2688906C1 (en) * 2018-09-28 2019-05-22 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Optical pulse receiver
RU2692830C1 (en) * 2018-09-28 2019-06-28 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Laser pulse receiver
CN121941656A (en) * 2023-09-08 2026-04-28 精励微机电技术公司 MEMS rotary micro-actuator

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020171327A1 (en) * 2000-04-11 2002-11-21 Miller Samuel Lee Microelectromechanical apparatus for elevating and tilting a platform
US20020196522A1 (en) * 2000-03-20 2002-12-26 Little Michael J. Compliant mechanism and method of forming same
US6507138B1 (en) * 1999-06-24 2003-01-14 Sandia Corporation Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement
US6639572B1 (en) * 1998-10-28 2003-10-28 Intel Corporation Paper white direct view display
US6738177B1 (en) * 2000-09-05 2004-05-18 Siwave, Inc. Soft snap-down optical element using kinematic supports

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933077U (en) * 1982-08-23 1984-02-29 株式会社小糸製作所 LCD display
KR950010659B1 (en) * 1992-11-10 1995-09-21 재단법인한국전자통신연구소 Micro photo-switching device and its manufacturing method
JP2555922B2 (en) * 1993-02-26 1996-11-20 日本電気株式会社 Electrostatically driven micro shutters and shutter arrays
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
JP3533759B2 (en) * 1995-06-08 2004-05-31 凸版印刷株式会社 Color liquid crystal display using hologram
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
JP3799092B2 (en) * 1995-12-29 2006-07-19 アジレント・テクノロジーズ・インク Light modulation device and display device
JPH09218360A (en) * 1996-02-08 1997-08-19 Ricoh Co Ltd Mechanical light shutter
FR2747802B1 (en) * 1996-04-18 1998-05-15 Commissariat Energie Atomique OPTOMECHANICAL MICRODISPOSITIVE, AND APPLICATION TO AN OPTOMECHANICAL MICRODEFLECTOR
JPH10333145A (en) * 1997-05-30 1998-12-18 Sanyo Electric Co Ltd Liquid crystal display device equipped with lighting mechanism
US6046836A (en) * 1998-03-06 2000-04-04 Electro-Optical Products Corporation Low frequency optical shutter
US6523961B2 (en) * 2000-08-30 2003-02-25 Reflectivity, Inc. Projection system and mirror elements for improved contrast ratio in spatial light modulators
EP1116063B1 (en) * 1998-09-24 2006-06-07 Reflectivity Inc. A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
JP2000214393A (en) * 1999-01-20 2000-08-04 Fuji Photo Film Co Ltd Optical modulator, array optical modulator and flat- panel display device
JP2000111813A (en) * 1998-10-05 2000-04-21 Fuji Photo Film Co Ltd Optical modulation element and array type optical modulation element as well as plane display device
US6034807A (en) * 1998-10-28 2000-03-07 Memsolutions, Inc. Bistable paper white direct view display
US6288824B1 (en) * 1998-11-03 2001-09-11 Alex Kastalsky Display device based on grating electromechanical shutter
EP1216469A1 (en) * 1999-03-04 2002-06-26 Flixel Ltd. Micro-mechanical flat panel display with touch sensitive input and vibration source
JP2000321566A (en) * 1999-05-11 2000-11-24 Ricoh Microelectronics Co Ltd Liquid crystal display device
US6275320B1 (en) * 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US7041224B2 (en) * 1999-10-26 2006-05-09 Reflectivity, Inc. Method for vapor phase etching of silicon
KR100312432B1 (en) * 1999-11-25 2001-11-05 오길록 Optical Switch using Micro Structures
JP3884207B2 (en) * 2000-01-20 2007-02-21 インターナショナル・ビジネス・マシーンズ・コーポレーション Liquid crystal display
JP4439084B2 (en) * 2000-06-14 2010-03-24 日東電工株式会社 Liquid crystal display
JP2002040337A (en) * 2000-07-24 2002-02-06 Fuji Photo Film Co Ltd Optical modulation element and exposure device and flat display device using the same
US6775048B1 (en) * 2000-10-31 2004-08-10 Microsoft Corporation Microelectrical mechanical structure (MEMS) optical modulator and optical display system
US6760505B1 (en) * 2000-11-08 2004-07-06 Xerox Corporation Method of aligning mirrors in an optical cross switch
JP2002333619A (en) * 2001-05-07 2002-11-22 Nec Corp Liquid crystal display element and manufacturing method therefor
JP2003029295A (en) * 2001-07-11 2003-01-29 Sony Corp Liquid crystal display
US6701039B2 (en) * 2001-10-04 2004-03-02 Colibrys S.A. Switching device, in particular for optical applications
EP2420873A3 (en) * 2001-12-14 2013-01-16 QUALCOMM MEMS Technologies, Inc. Uniform illumination system
JP3755460B2 (en) * 2001-12-26 2006-03-15 ソニー株式会社 Electrostatically driven MEMS element and manufacturing method thereof, optical MEMS element, light modulation element, GLV device, laser display, and MEMS apparatus
US7705826B2 (en) * 2002-02-09 2010-04-27 New Visual Media Group, L.L.C. Flexible video displays and their manufacture
KR100949845B1 (en) * 2002-03-26 2010-03-29 훈츠만 어드밴스트 머티리얼스(스위처랜드) 게엠베하 Micro light modulator device
US7125451B2 (en) * 2002-04-23 2006-10-24 Sharp Laboratories Of America, Inc. Crystal-structure-processed mechanical devices and methods and systems for making
US7362889B2 (en) * 2002-05-10 2008-04-22 Massachusetts Institute Of Technology Elastomeric actuator devices for magnetic resonance imaging
JP2004053839A (en) * 2002-07-18 2004-02-19 Murata Mfg Co Ltd Light switching device
US7370185B2 (en) * 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
KR100513723B1 (en) * 2002-11-18 2005-09-08 삼성전자주식회사 MicroElectro Mechanical system switch
WO2004086098A2 (en) * 2002-12-03 2004-10-07 Flixel Ltd. Display devices
CA2460765C (en) * 2003-03-19 2010-07-06 Xerox Corporation Mems optical latching switch
US7218499B2 (en) * 2003-05-14 2007-05-15 Hewlett-Packard Development Company, L.P. Charge control circuit
JP4338442B2 (en) * 2003-05-23 2009-10-07 富士フイルム株式会社 Manufacturing method of transmissive light modulation element
JP4178327B2 (en) * 2003-08-11 2008-11-12 株式会社村田製作所 Buckling actuator
JP2005134896A (en) * 2003-10-10 2005-05-26 Japan Aviation Electronics Industry Ltd Micro movable device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6639572B1 (en) * 1998-10-28 2003-10-28 Intel Corporation Paper white direct view display
US6507138B1 (en) * 1999-06-24 2003-01-14 Sandia Corporation Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement
US20020196522A1 (en) * 2000-03-20 2002-12-26 Little Michael J. Compliant mechanism and method of forming same
US20020171327A1 (en) * 2000-04-11 2002-11-21 Miller Samuel Lee Microelectromechanical apparatus for elevating and tilting a platform
US6738177B1 (en) * 2000-09-05 2004-05-18 Siwave, Inc. Soft snap-down optical element using kinematic supports

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9128277B2 (en) 2006-02-23 2015-09-08 Pixtronix, Inc. Mechanical light modulators with stressed beams
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators

Also Published As

Publication number Publication date
EP2322971A3 (en) 2012-04-04
WO2006091791A9 (en) 2006-10-12
EP2808864A3 (en) 2014-12-24
KR20070114161A (en) 2007-11-29
DE602006019695D1 (en) 2011-03-03
CN103336360B (en) 2016-07-06
EP2336081A3 (en) 2012-04-25
KR20100034040A (en) 2010-03-31
CN103345058A (en) 2013-10-09
CN103336362A (en) 2013-10-02
KR101157502B1 (en) 2012-06-15
CA2795329A1 (en) 2006-08-31
ES2507498T3 (en) 2014-10-15
EP2336081A2 (en) 2011-06-22
ES2468017T3 (en) 2014-06-13
CA2795302A1 (en) 2006-08-31
JP2008532068A (en) 2008-08-14
JP5551208B2 (en) 2014-07-16
EP2808864A2 (en) 2014-12-03
CA2598740A1 (en) 2006-08-31
JP2012212149A (en) 2012-11-01
EP1858796A2 (en) 2007-11-28
CN102323665B (en) 2015-01-28
CN103336362B (en) 2015-10-14
JP2011039534A (en) 2011-02-24
EP2287110A3 (en) 2012-06-13
CN103336361A (en) 2013-10-02
JP2014098924A (en) 2014-05-29
JP5936813B2 (en) 2016-06-22
EP2287110B1 (en) 2014-07-23
WO2006091791A2 (en) 2006-08-31
EP2336081B1 (en) 2014-09-24
BRPI0607880A2 (en) 2009-10-20
CA2795356A1 (en) 2006-08-31
CN102323665A (en) 2012-01-18
CN102323666A (en) 2012-01-18
EP1858796B1 (en) 2011-01-19
JP2012212150A (en) 2012-11-01
CA2598740C (en) 2013-02-19
JP2012168562A (en) 2012-09-06
CA2795302C (en) 2015-06-23
JP5636395B2 (en) 2014-12-03
EP2322971B1 (en) 2014-04-30
CA2795329C (en) 2015-04-07
JP4616890B2 (en) 2011-01-19
CN103336360A (en) 2013-10-02
JP5676525B2 (en) 2015-02-25
ES2524296T3 (en) 2014-12-05
ATE496362T1 (en) 2011-02-15
CN102323666B (en) 2015-02-04
EP2322971A2 (en) 2011-05-18
EP2287110A2 (en) 2011-02-23
JP2012212151A (en) 2012-11-01
JP5722470B2 (en) 2015-05-20

Similar Documents

Publication Publication Date Title
IL187065A0 (en) Systems and methods of actuating mems display elements
EP1923835A4 (en) Face image display, face image display method, and face image display program
EP1932131A4 (en) Equipment and method for producing optical sheet for display
AU2005901389A0 (en) Multi-panel display device
AU2005904626A0 (en) Banner raising apparatus
HK1134705B (en) Display actuator
AU2005905308A0 (en) Teaching aid apparatus
EM04150390004S (en) Display equipment
EM04150390002S (en) Display equipment
EM04150390003S (en) Display equipment
HK1120153A (en) Teaching apparatus
AU2005902201A0 (en) Variable Message Sign
AU2004906545A0 (en) Image rotator
EM05287240004S (en) Display units
EM05287240005S (en) Display units
EM05287240001S (en) Display units
EM05287240003S (en) Display units
EM05287240002S (en) Display units
EM03602760003S (en) Screen displays
EM03602760007S (en) Screen displays
EM03602760006S (en) Screen displays
EM03602760009S (en) Screen displays
EM03602760012S (en) Screen displays
EM03602760013S (en) Screen displays
EM03602760001S (en) Screen displays

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200680005822.2

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2007556431

Country of ref document: JP

ENP Entry into the national phase

Ref document number: 2598740

Country of ref document: CA

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 1020077021296

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 2006721031

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 4228/CHENP/2007

Country of ref document: IN

ENP Entry into the national phase

Ref document number: PI0607880

Country of ref document: BR

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 1020107003356

Country of ref document: KR