WO2006130164A3 - Chip-scale optical spectrum analyzers with enhanced resolution - Google Patents

Chip-scale optical spectrum analyzers with enhanced resolution Download PDF

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Publication number
WO2006130164A3
WO2006130164A3 PCT/US2005/029948 US2005029948W WO2006130164A3 WO 2006130164 A3 WO2006130164 A3 WO 2006130164A3 US 2005029948 W US2005029948 W US 2005029948W WO 2006130164 A3 WO2006130164 A3 WO 2006130164A3
Authority
WO
WIPO (PCT)
Prior art keywords
filter
chip
optical spectrum
mirror
enhanced resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/029948
Other languages
French (fr)
Other versions
WO2006130164A2 (en
Inventor
Hong Koo Kim
Zhijun Sun
Yun Suk Jung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Pittsburgh
Original Assignee
University of Pittsburgh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Pittsburgh filed Critical University of Pittsburgh
Priority to EP05857916A priority Critical patent/EP1784678A2/en
Publication of WO2006130164A2 publication Critical patent/WO2006130164A2/en
Anticipated expiration legal-status Critical
Publication of WO2006130164A3 publication Critical patent/WO2006130164A3/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Analytical Chemistry (AREA)
  • Biophysics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

A Fabry-Perot cavity filter includes a first mirror and a second mirror. A gap between the first and the second mirror monotonically varies as a function of width of the filter. This filter may be used with photodetector and a channel selection filter in an optical device, such as a spectrum analyzer. The channel selection filter may be a metal nanooptic filter array which includes plurality of subwavelength apertures in a metal film or between metal islands.
PCT/US2005/029948 2004-08-19 2005-08-19 Chip-scale optical spectrum analyzers with enhanced resolution Ceased WO2006130164A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP05857916A EP1784678A2 (en) 2004-08-19 2005-08-19 Chip-scale optical spectrum analyzers with enhanced resolution

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60262304P 2004-08-19 2004-08-19
US60/602,623 2004-08-19

Publications (2)

Publication Number Publication Date
WO2006130164A2 WO2006130164A2 (en) 2006-12-07
WO2006130164A3 true WO2006130164A3 (en) 2008-12-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/029948 Ceased WO2006130164A2 (en) 2004-08-19 2005-08-19 Chip-scale optical spectrum analyzers with enhanced resolution

Country Status (3)

Country Link
US (1) US7426040B2 (en)
EP (1) EP1784678A2 (en)
WO (1) WO2006130164A2 (en)

Families Citing this family (103)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005223070A (en) * 2004-02-04 2005-08-18 Toshiba Corp Semiconductor light emitting device and semiconductor light emitting device
NO20051850A (en) * 2005-04-15 2006-09-25 Sinvent As Infrared detection of gas - diffractive.
US7715003B2 (en) * 2005-06-14 2010-05-11 President & Fellows Of Harvard College Metalized semiconductor substrates for raman spectroscopy
US8184284B2 (en) * 2005-06-14 2012-05-22 Ebstein Steven M Laser-processed substrate for molecular diagnostics
EP1896805A4 (en) * 2005-06-14 2010-03-31 Steven M Ebstein Applications of laser-processed substrate for molecular diagnostics
US7615161B2 (en) * 2005-08-19 2009-11-10 General Electric Company Simplified way to manufacture a low cost cast type collimator assembly
US7873090B2 (en) * 2005-09-13 2011-01-18 Panasonic Corporation Surface emitting laser, photodetector and optical communication system using the same
US7623165B2 (en) * 2006-02-28 2009-11-24 Aptina Imaging Corporation Vertical tri-color sensor
CN104316987A (en) * 2006-08-09 2015-01-28 光学解决方案纳米光子学有限责任公司 Optical filter and method for the production of the same, and device for the examination of electromagnetic radiation
EP1936340A1 (en) * 2006-12-21 2008-06-25 Koninklijke Philips Electronics N.V. Sub wavelength aperture
WO2008078264A1 (en) * 2006-12-21 2008-07-03 Koninklijke Philips Electronics N.V. Wiregrid waveguide
WO2008085385A2 (en) * 2006-12-29 2008-07-17 Nanolambda, Inc. Plasmonic fabry-perot filter
US20100046077A1 (en) * 2006-12-29 2010-02-25 Nanolambda Inc. Wavelength selective metallic embossing nanostructure
WO2008147403A1 (en) * 2006-12-29 2008-12-04 Nanolambda, Inc. Tunable plasmonic filter
US7956989B2 (en) * 2007-01-22 2011-06-07 University Of North Texas Health Science Center At Fort Worth Surface plasmon assisted microscope
WO2008091858A2 (en) 2007-01-23 2008-07-31 President & Fellows Of Harvard College Non-invasive optical analysis using surface enhanced raman spectroscopy
WO2008091852A2 (en) * 2007-01-23 2008-07-31 President & Fellows Of Harvard College Polymeric substrates for surface enhanced raman spectroscopy
US7772555B2 (en) * 2007-02-05 2010-08-10 Itn Energy Systems, Inc. Plasmon coupling apparatus and method
US9134244B2 (en) * 2007-02-12 2015-09-15 Koninklijke Philips N.V. Wiregrid monitor device
WO2008104928A1 (en) * 2007-03-01 2008-09-04 Philips Intellectual Property & Standards Gmbh Optical detector device
US20080221411A1 (en) * 2007-03-09 2008-09-11 Nellcor Puritan Bennett Llc System and method for tissue hydration estimation
US8014062B2 (en) * 2007-03-09 2011-09-06 Lockheed Martin Corporation Method of making a close proximity filter and multi color MWIR sensor and resultant device
WO2009017846A1 (en) * 2007-07-30 2009-02-05 President And Fellows Of Harvard College Substrates for raman spectroscopy having discontinuous metal coatings
FR2926635B1 (en) * 2008-01-21 2012-08-03 Silios Technologies WAVELENGTH SPECTROSCOPY DEVICE WITH INTEGRATED FILTERS
DE102008011793A1 (en) * 2008-02-29 2009-09-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. multispectral sensor
DE102008014335B4 (en) 2008-03-14 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus and method for determining a refractive index of a DUT
US7940463B2 (en) * 2008-04-15 2011-05-10 Qualcomm Mems Technologies, Inc. Fabricating and using hidden features in an image
US8772073B2 (en) * 2008-04-18 2014-07-08 Nxp, B.V. Integrated circuit manufacturing method
US7943202B2 (en) * 2008-05-07 2011-05-17 Qualcomm Mems Technologies, Inc. Apparatus and methods for providing a static interferometric display device
US20090279172A1 (en) * 2008-05-12 2009-11-12 Higashi Robert E Microelectromechanical lamellar grating
JP5195112B2 (en) * 2008-07-18 2013-05-08 株式会社リコー Refractive index sensor, refractive index sensor array and biosensor
ITTO20080614A1 (en) 2008-08-04 2010-02-05 Consiglio Naz Delle Ricerche Infm Istituto PROCEDURE FOR THE REVELATION OF ANALYTES, WITH THE USE OF PHONES OF RESISTANT PHOTOS AND RELATIVE DEVICE.
US20100035335A1 (en) * 2008-08-08 2010-02-11 Lakowicz Joseph R Metal-enhanced fluorescence for the label-free detection of interacting biomolecules
CN102150020A (en) * 2008-09-16 2011-08-10 Nxp股份有限公司 Integrated circuit with grating and manufacturing method therefor
FR2939887B1 (en) 2008-12-11 2017-12-08 Silios Tech OPTICAL SPECTROSCOPY DEVICE HAVING A PLURALITY OF TRANSMISSION SOURCES
EP2409135A4 (en) * 2009-03-20 2012-11-28 Nanolambda Inc Nano-optic filter array based sensor
JP4584352B1 (en) * 2009-04-14 2010-11-17 パナソニック株式会社 Biological component concentration measuring method and measuring apparatus
US8158409B2 (en) * 2010-01-11 2012-04-17 Cfd Research Corporation Nanoscale surface plasmonics sensor with nanofluidic control
FR2960654B1 (en) * 2010-05-27 2012-06-15 Commissariat Energie Atomique CLEAN OPTICAL FILTER FOR TREATING A VARIABLE INCIDENCE RADIATION AND DETECTOR COMPRISING SUCH A FILTER
EP2402738A3 (en) * 2010-07-02 2012-01-11 Imec Spectroscopy using nanopore cavities
JP2012037389A (en) * 2010-08-06 2012-02-23 Fujikura Ltd Method of manufacturing microfluid chip, microfluid chip and generator of surface plasmon resonance light
US20120099188A1 (en) * 2010-10-20 2012-04-26 AEgis Technologies Group, Inc. Laser Protection Structures and Methods of Fabrication
JP5878723B2 (en) 2011-10-04 2016-03-08 浜松ホトニクス株式会社 Spectroscopic sensor
JP6253870B2 (en) 2011-10-04 2017-12-27 浜松ホトニクス株式会社 Spectroscopic sensor
IN2014CN03038A (en) * 2011-11-04 2015-07-03 Imec
EP2773929B1 (en) * 2011-11-04 2023-12-13 IMEC vzw Spectral camera with mosaic of filters for each image pixel
IN2014CN02916A (en) * 2011-11-04 2015-07-03 Imec
FR2984489B1 (en) 2011-12-15 2017-09-15 Office Nat D'etudes Et De Rech Aerospatiales TWO-WAVE INTERFEROMETRIC BLADE COMPRISING A FULL PARTIALLY RESONANT CAVITY AND METHOD OF MANUFACTURING THE SAME
JP5875936B2 (en) 2012-05-18 2016-03-02 浜松ホトニクス株式会社 Spectroscopic sensor
JP5988690B2 (en) * 2012-05-18 2016-09-07 浜松ホトニクス株式会社 Spectroscopic sensor
JP2014169955A (en) 2013-03-05 2014-09-18 Seiko Epson Corp Analysis device, analysis method, optical element and electronic apparatus used in them, and design method of optical element
US20140268146A1 (en) * 2013-03-15 2014-09-18 Michele Hinnrichs Lenslet array with integral tuned optical bandpass filter and polarization
US10191022B2 (en) * 2013-03-15 2019-01-29 Uvia Group Llc Gas imager employing an array imager pixels with order filters
KR102040153B1 (en) * 2013-06-19 2019-11-04 삼성전자주식회사 Optical device and method of controlling direction of light and surface plasmon using the optical device
US9296609B2 (en) * 2013-09-03 2016-03-29 Northrop Grumman Systems Corporation Optical-microwave-quantum transducer
JP2015152492A (en) * 2014-02-17 2015-08-24 セイコーエプソン株式会社 Analysis device and electronic apparatus
JP6365817B2 (en) 2014-02-17 2018-08-01 セイコーエプソン株式会社 Analytical device and electronic device
FR3020878B1 (en) 2014-05-06 2025-06-06 Commissariat Energie Atomique OPTICAL FILTERING DEVICE COMPRISING FABRY-PEROT CAVITIES WITH STRUCTURED LAYERS AND DIFFERENT THICKNESSES
CN104090320B (en) * 2014-06-12 2016-03-30 中国科学院上海技术物理研究所 A kind of for the second order spectrum integrated optical filter that disappears in ultra-optical spectrum imaging system
CN104134860B (en) * 2014-07-02 2016-10-19 上海大学 Single-Layer Dielectric Board Fabry-Perot Antennas Fed by Coplanar Waveguide in Millimeter Waveband
KR102223279B1 (en) * 2014-07-08 2021-03-05 엘지전자 주식회사 Apparatus for measuring condition of object and wearable device
KR102214832B1 (en) 2014-07-17 2021-02-10 삼성전자주식회사 Optical filter and Optical measuring equipment employing the optical filter
EP3221897A1 (en) * 2014-09-08 2017-09-27 The Research Foundation Of State University Of New York Metallic gratings and measurement methods thereof
US10050075B2 (en) 2014-11-21 2018-08-14 Lumilant, Inc. Multi-layer extraordinary optical transmission filter systems, devices, and methods
KR20160087223A (en) * 2015-01-13 2016-07-21 삼성전자주식회사 Spectrometer chip for analyzing fluid sample and method of manufacturing the same
CN108348180A (en) * 2015-09-04 2018-07-31 波士顿科学国际有限公司 Pressure Sensing Guidewire
US10451548B2 (en) * 2016-01-15 2019-10-22 The Mitre Corporation Active hyperspectral imaging system
US9749044B1 (en) * 2016-04-05 2017-08-29 Facebook, Inc. Luminescent detector for free-space optical communication
FR3050831B1 (en) 2016-04-29 2018-04-27 Silios Technologies MULTISPECTRAL IMAGING DEVICE
US10677790B2 (en) * 2016-07-20 2020-06-09 City University Of Hong Kong Optochemical detector and a method for fabricating an optochemical detector
DE102016217846A1 (en) * 2016-09-19 2018-03-22 Robert Bosch Gmbh Fabry-Pérot interferometer unit, method of operating a Fabry-Pérot interferometer unit and method of manufacturing a Fabry-Pérot interferometer unit
CN109792817B (en) * 2016-09-22 2021-08-06 Lg电子株式会社 Display device using semiconductor light-emitting device and method of manufacturing the same
KR102721072B1 (en) * 2016-11-01 2024-10-24 삼성전자주식회사 Spectral detector and spectral detecting method using the spectral detector
KR102395781B1 (en) * 2017-03-24 2022-05-09 삼성전자주식회사 Optical filter and spectrometer including sub-wavelength double grating
US10969275B2 (en) * 2017-08-02 2021-04-06 Nanolamda Korea On-chip spectrometer employing pixel-count-modulated spectral channels and method of manufacturing the same
EP3518280B1 (en) * 2018-01-25 2020-11-04 Murata Manufacturing Co., Ltd. Electronic product having embedded porous dielectric and method of manufacture
JP2019140230A (en) * 2018-02-09 2019-08-22 ソニーセミコンダクタソリューションズ株式会社 Solid-state image sensor, electronic device and manufacturing method for electronic device
FR3084459B1 (en) 2018-07-30 2020-07-10 Silios Technologies MULTISPECTRAL IMAGING SENSOR PROVIDED WITH MEANS FOR LIMITING CROSS-TALK
WO2020237016A1 (en) * 2019-05-23 2020-11-26 Tokyo Electron Limited Optical diagnostics of semiconductor process using hyperspectral imaging
US11085878B2 (en) 2019-06-18 2021-08-10 Eagle Technology, Llc Radiation detection system with surface plasmon resonance detection and related methods
US11009611B2 (en) 2019-06-18 2021-05-18 Eagle Technology, Llc Radiation detection system with surface plasmon resonance detection and related methods
CN110381243B (en) * 2019-07-31 2024-03-12 清华大学 An image acquisition chip, object imaging recognition equipment and object imaging recognition method
US11327084B2 (en) * 2019-09-19 2022-05-10 Invidx Corp. Joint hematology and biochemistry point-of-care testing system
US11161109B2 (en) 2019-09-19 2021-11-02 Invidx Corp. Point-of-care testing cartridge with sliding cap
KR102906610B1 (en) * 2019-10-24 2025-12-31 삼성전자주식회사 Color separation element and image sensor including the same
US11682685B2 (en) 2019-10-24 2023-06-20 Samsung Electronics Co., Ltd. Color separation element and image sensor including the same
KR102869875B1 (en) 2019-12-20 2025-10-10 삼성전자주식회사 Polarization spectral filter, polarization spectral filter array, and polarization spectral sensor
CN113447121A (en) * 2020-03-26 2021-09-28 中国工程物理研究院激光聚变研究中心 Super surface spectrum sensing system and spectrum appearance
CN113447122A (en) * 2020-03-26 2021-09-28 中国工程物理研究院激光聚变研究中心 Nanopore spectrum sensing system and spectrometer
US11545288B2 (en) 2020-04-15 2023-01-03 Northrop Grumman Systems Corporation Superconducting current control system
DE102020118842A1 (en) * 2020-07-16 2022-01-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Optical filter with nanostructured layers and spectral sensor with such layers
JP2022053088A (en) * 2020-09-24 2022-04-05 セイコーエプソン株式会社 Optical filter, spectroscopic module, and spectrometric method
CN114447008A (en) * 2020-10-30 2022-05-06 三星电子株式会社 Image sensor including color separation lens array and electronic device including the same
WO2022130085A1 (en) * 2020-12-18 2022-06-23 3M Innovative Properties Company Optical construction including lens film and mask
US11333811B1 (en) * 2020-12-23 2022-05-17 Viavi Solutions Inc. Optical device
CN115078266B (en) * 2021-03-11 2025-07-04 上海与光彩芯科技有限公司 Optical system and design method thereof
GB202111592D0 (en) * 2021-08-12 2021-09-29 Secr Defence Multispectral image sensor
US11757467B2 (en) 2021-08-13 2023-09-12 Northrop Grumman Systems Corporation Circuits for converting SFQ-based RZ and NRZ signaling to bilevel voltage NRZ signaling
CN113916799A (en) * 2021-09-29 2022-01-11 江苏联格科技有限公司 A detector array chip with spectral resolution
EP4184136B1 (en) * 2021-11-18 2024-03-13 Universität Stuttgart Imaging device for multispectral or hyperspectral imaging an object
CN115718339B (en) * 2022-10-28 2024-09-06 厦门大学 Method for realizing microcavity filter array
US12597925B2 (en) 2022-12-08 2026-04-07 Northrop Grumman Systems Corporation Superconducting current control system
US12395140B2 (en) 2023-07-27 2025-08-19 Northrop Grumman Systems Corporation Non-return to zero (NRZ) amplifier system

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5202939A (en) * 1992-07-21 1993-04-13 Institut National D'optique Fabry-perot optical sensing device for measuring a physical parameter
US5666195A (en) * 1995-05-01 1997-09-09 Electro-Optical Sciences, Inc. Efficient fiber coupling of light to interferometric instrumentation
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
US6151114A (en) * 1998-03-31 2000-11-21 The Boeing Company Coherent laser warning system
US20030123125A1 (en) * 2000-03-20 2003-07-03 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
US20050175939A1 (en) * 2002-12-20 2005-08-11 Piero Perlo Percolated metal structure with electrochromic and photochromic properties
US20060039009A1 (en) * 2004-08-23 2006-02-23 Palo Alto Research Center Incorporated Chip-size wavelength detector

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4410454A (en) * 1982-03-02 1983-10-18 Uop Inc. Noble metal and rare earth metal catalyst
US4662747A (en) 1983-08-03 1987-05-05 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
US4659429A (en) 1983-08-03 1987-04-21 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
WO1987006028A2 (en) 1986-03-28 1987-10-08 Shimadzu Corporation X-ray reflective mask and system for image formation with use of the same
US4815854A (en) 1987-01-19 1989-03-28 Nec Corporation Method of alignment between mask and semiconductor wafer
CA1321488C (en) 1987-08-22 1993-08-24 Martin Francis Finlan Biological sensors
US6514936B1 (en) 1988-09-01 2003-02-04 Bayer Corporation Antiviral methods using human rhinovirus receptor (ICAM-1)
US5250812A (en) 1991-03-29 1993-10-05 Hitachi, Ltd. Electron beam lithography using an aperture having an array of repeated unit patterns
US6147756A (en) 1992-01-22 2000-11-14 Northeastern University Microspectrometer with sacrificial layer integrated with integrated circuit on the same substrate
US5351127A (en) 1992-06-17 1994-09-27 Hewlett-Packard Company Surface plasmon resonance measuring instruments
US5455594A (en) * 1992-07-16 1995-10-03 Conductus, Inc. Internal thermal isolation layer for array antenna
US5306902A (en) 1992-09-01 1994-04-26 International Business Machines Corporation Confocal method and apparatus for focusing in projection lithography
US5359681A (en) 1993-01-11 1994-10-25 University Of Washington Fiber optic sensor and methods and apparatus relating thereto
US5354985A (en) 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
US5451980A (en) 1993-10-19 1995-09-19 The University Of Toledo Liquid crystal flat panel color display with surface plasmon scattering
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5570139A (en) 1994-05-13 1996-10-29 Wang; Yu Surface plasmon high efficiency HDTV projector
DE4438391C2 (en) 1994-10-27 1997-07-03 Evotec Biosystems Gmbh Device for determining substance-specific parameters of one or fewer molecules by means of correlation spectroscopy
US5550373A (en) 1994-12-30 1996-08-27 Honeywell Inc. Fabry-Perot micro filter-detector
US5663798A (en) 1995-05-08 1997-09-02 Dr. Khaled Karrai Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts Far-field characterization of sub-wavelength sized apertures
US5633972A (en) 1995-11-29 1997-05-27 Trustees Of Tufts College Superresolution imaging fiber for subwavelength light energy generation and near-field optical microscopy
US6111248A (en) 1996-10-01 2000-08-29 Texas Instruments Incorporated Self-contained optical sensor system
US5946083A (en) 1997-10-01 1999-08-31 Texas Instruments Incorporated Fixed optic sensor system and distributed sensor network
US5986808A (en) 1996-10-11 1999-11-16 California Institute Of Technology Surface-plasmon-wave-coupled tunable filter
US5789742A (en) 1996-10-28 1998-08-04 Nec Research Institute, Inc. Near-field scanning optical microscope probe exhibiting resonant plasmon excitation
US6014251A (en) * 1997-04-08 2000-01-11 The United States Of America As Represented By The Secretary Of The Navy Optical filters based on uniform arrays of metallic waveguides
US5864641A (en) 1997-04-11 1999-01-26 F&S, Inc. Optical fiber long period sensor having a reactive coating
US5973316A (en) 1997-07-08 1999-10-26 Nec Research Institute, Inc. Sub-wavelength aperture arrays with enhanced light transmission
US6282005B1 (en) 1998-05-19 2001-08-28 Leo J. Thompson Optical surface plasmon-wave communications systems
US6097456A (en) 1998-08-12 2000-08-01 California Institute Of Technology Efficient color display using low-absorption in-pixel color filters
US6040936A (en) 1998-10-08 2000-03-21 Nec Research Institute, Inc. Optical transmission control apparatus utilizing metal films perforated with subwavelength-diameter holes
US6236033B1 (en) 1998-12-09 2001-05-22 Nec Research Institute, Inc. Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography
US6539156B1 (en) 1999-11-02 2003-03-25 Georgia Tech Research Corporation Apparatus and method of optical transfer and control in plasmon supporting metal nanostructures
US6285020B1 (en) 1999-11-05 2001-09-04 Nec Research Institute, Inc. Enhanced optical transmission apparatus with improved inter-surface coupling
US6836366B1 (en) 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same
US6441298B1 (en) 2000-08-15 2002-08-27 Nec Research Institute, Inc Surface-plasmon enhanced photovoltaic device
JP3828426B2 (en) 2002-01-08 2006-10-04 アルプス電気株式会社 Optical waveguide device
US6649901B2 (en) * 2002-03-14 2003-11-18 Nec Laboratories America, Inc. Enhanced optical transmission apparatus with improved aperture geometry
US6797405B1 (en) * 2002-05-01 2004-09-28 The Ohio State University Method for uniform electrochemical reduction of apertures to micron and submicron dimensions using commercial biperiodic metallic mesh arrays and devices derived therefrom
KR20050051652A (en) 2002-08-28 2005-06-01 유니버시티 오브 피츠버그 Self-organized nanopore arrays with controlled symmetry and order
US7528350B2 (en) 2002-09-06 2009-05-05 Tyco Electronics Raychem Kk Process for producing PTC element/metal lead element connecting structure and PTC element for use in the process
JP2007501391A (en) 2003-08-06 2007-01-25 ユニバーシティー オブ ピッツバーグ Nano-optical element for enhancing surface plasmon and method for manufacturing the same
US7319560B2 (en) * 2003-09-29 2008-01-15 Teledyne Licensing, Llc Partitioned-cavity tunable fabry-perot filter
WO2005057247A2 (en) 2003-12-05 2005-06-23 University Of Pittsburgh Metallic nano-optic lenses and beam shaping devices
DE102004050543A1 (en) * 2004-10-16 2006-04-20 Bruker Axs Gmbh Analyzer with variably illuminated strip detector

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
US5202939A (en) * 1992-07-21 1993-04-13 Institut National D'optique Fabry-perot optical sensing device for measuring a physical parameter
US5666195A (en) * 1995-05-01 1997-09-09 Electro-Optical Sciences, Inc. Efficient fiber coupling of light to interferometric instrumentation
US6151114A (en) * 1998-03-31 2000-11-21 The Boeing Company Coherent laser warning system
US20030123125A1 (en) * 2000-03-20 2003-07-03 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
US20050175939A1 (en) * 2002-12-20 2005-08-11 Piero Perlo Percolated metal structure with electrochromic and photochromic properties
US20060039009A1 (en) * 2004-08-23 2006-02-23 Palo Alto Research Center Incorporated Chip-size wavelength detector

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
LI PIRA N. ET AL.: "Modelling and experimental evidence of quantum phenomena in metallic non-continuous films (metal quantum wire network - MQWN)", PROCEEDINGS OF THE EUSPEN. INTERNATIONAL CONFERENCE, vol. 1, 31 May 2001 (2001-05-31), pages 212 - 215, XP008014567 *

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