WO2007087295A3 - Scara-type robotic system - Google Patents

Scara-type robotic system Download PDF

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Publication number
WO2007087295A3
WO2007087295A3 PCT/US2007/001752 US2007001752W WO2007087295A3 WO 2007087295 A3 WO2007087295 A3 WO 2007087295A3 US 2007001752 W US2007001752 W US 2007001752W WO 2007087295 A3 WO2007087295 A3 WO 2007087295A3
Authority
WO
WIPO (PCT)
Prior art keywords
turntable
axis
rotation
arm
robotic system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/001752
Other languages
French (fr)
Other versions
WO2007087295A2 (en
Inventor
Peter Massaro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Protedyne Corp
Original Assignee
Protedyne Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Protedyne Corp filed Critical Protedyne Corp
Priority to DE602007003446T priority Critical patent/DE602007003446D1/en
Priority to EP07716928A priority patent/EP1984151B1/en
Priority to DK07716928.2T priority patent/DK1984151T3/en
Priority to JP2008552361A priority patent/JP2009524529A/en
Priority to AT07716928T priority patent/ATE449671T1/en
Publication of WO2007087295A2 publication Critical patent/WO2007087295A2/en
Publication of WO2007087295A3 publication Critical patent/WO2007087295A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S483/00—Tool changing
    • Y10S483/901—Robot end effectors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T483/00—Tool changing
    • Y10T483/17—Tool changing including machine tool or component

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)

Abstract

A robotic system including a rotatable turntable that has an arm pivotally mounted on the turntable for rotation about an axis displaced from the turntable's rotational axis. The arm's axis of rotation may be positioned nearer the turntable's axis of rotation than a bearing that supports the turntable on a base. The arm may have a portion that extends in a direction transverse to the arm's axis of rotation located below the turntable. The turntable may be supported on the base by a single bearing having portions located in a common plane.
PCT/US2007/001752 2006-01-25 2007-01-23 Scara-type robotic system Ceased WO2007087295A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE602007003446T DE602007003446D1 (en) 2006-01-25 2007-01-23 ROBOT SYSTEM OF THE SCARA TYPE
EP07716928A EP1984151B1 (en) 2006-01-25 2007-01-23 Scara-type robotic system
DK07716928.2T DK1984151T3 (en) 2006-01-25 2007-01-23 Scara robot system
JP2008552361A JP2009524529A (en) 2006-01-25 2007-01-23 Robot system
AT07716928T ATE449671T1 (en) 2006-01-25 2007-01-23 SCARA TYPE ROBOT SYSTEM

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/339,036 2006-01-25
US11/339,036 US7374525B2 (en) 2006-01-25 2006-01-25 SCARA-type robotic system

Publications (2)

Publication Number Publication Date
WO2007087295A2 WO2007087295A2 (en) 2007-08-02
WO2007087295A3 true WO2007087295A3 (en) 2007-09-27

Family

ID=38042496

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/001752 Ceased WO2007087295A2 (en) 2006-01-25 2007-01-23 Scara-type robotic system

Country Status (7)

Country Link
US (1) US7374525B2 (en)
EP (1) EP1984151B1 (en)
JP (2) JP2009524529A (en)
AT (1) ATE449671T1 (en)
DE (1) DE602007003446D1 (en)
DK (1) DK1984151T3 (en)
WO (1) WO2007087295A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9879760B2 (en) 2002-11-25 2018-01-30 Delbert Tesar Rotary actuator with shortest force path configuration
DE10349452A1 (en) * 2003-10-23 2005-05-25 Bosch Rexroth Ag Scara-type robot
US20070168081A1 (en) * 2005-05-06 2007-07-19 Sung-Ho Shin Analytic integration of tolerances in designing precision interfaces for modular robotics
US9555407B2 (en) 2013-03-14 2017-01-31 Protedyne Corporation Laser triangulation for pipette tip position
US10109517B1 (en) 2018-01-10 2018-10-23 Lam Research Corporation Rotational indexer with additional rotational axes

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JPH01199780A (en) * 1988-02-03 1989-08-11 Mitsubishi Electric Corp Industrial robot
JPH0413595A (en) * 1990-05-01 1992-01-17 Mitsubishi Electric Corp Clean robot
JPH05104462A (en) * 1991-10-14 1993-04-27 Canon Inc Orthogonal 2-axis moving device
JPH1170487A (en) * 1997-08-29 1999-03-16 Kawasaki Heavy Ind Ltd robot
EP0913236A2 (en) * 1997-10-30 1999-05-06 Sankyo Seiki Mfg. Co. Ltd. Articulated robot
JP2003266252A (en) * 2002-03-19 2003-09-24 Ricoh Co Ltd Automatic assembly and disassembly equipment
JP2004304102A (en) * 2003-04-01 2004-10-28 Tokyo Electron Ltd Connection structure for rotating body in airtight container, rotation drive mechanism, and transport device
JP2005150575A (en) * 2003-11-19 2005-06-09 Nachi Fujikoshi Corp Double arm robot

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US4392776A (en) * 1981-05-15 1983-07-12 Westinghouse Electric Corp. Robotic manipulator structure
US5017083A (en) * 1982-04-16 1991-05-21 Sahlin International, Inc. Apparatus for loading and/or unloading industrial presses
US4921395A (en) * 1982-04-16 1990-05-01 Sahlin International, Inc. Apparatus for loading and/or unloading industrial presses
DE3224703A1 (en) * 1982-07-02 1984-01-05 Deutsche Gesellschaft für Wiederaufarbeitung von Kernbrennstoffen mbH, 3000 Hannover REMOTE-CONTROLLED MANIPULATOR CARRIER SYSTEM FOR PROCESS TECHNICAL LARGE CELLS
JPH0326480A (en) * 1989-06-21 1991-02-05 Mitsubishi Electric Corp Industrial robot device and robot teaching method therefor
JP2831820B2 (en) * 1990-07-30 1998-12-02 株式会社プラズマシステム Substrate transfer device
JPH04254351A (en) * 1991-02-06 1992-09-09 Ishikawajima Harima Heavy Ind Co Ltd Handling robot
US5178512A (en) * 1991-04-01 1993-01-12 Equipe Technologies Precision robot apparatus
US5538373A (en) * 1992-02-20 1996-07-23 Giddings & Lewis, Inc. Machine tool vibration isolation system
JPH0679661A (en) * 1992-09-01 1994-03-22 Matsushita Electric Ind Co Ltd Ceiling-mounted horizontal articulated robot
US5492443A (en) * 1993-10-14 1996-02-20 Leland D. Blatt Apparatus for handling a workpiece between work stations
JPH08108381A (en) * 1994-10-06 1996-04-30 Rootsue Kk Travel guide device of traveling robot
US5830272A (en) * 1995-11-07 1998-11-03 Sputtered Films, Inc. System for and method of providing a controlled deposition on wafers
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JPH10291177A (en) * 1997-04-16 1998-11-04 Sankyo Seiki Mfg Co Ltd Articulated robot
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DE19806832A1 (en) * 1998-02-18 1999-08-26 Fraunhofer Ges Forschung Electrical linear actuator with cased carrier for use in e.g. framed hexapod machine tools offering six degrees of freedom
JP2000077499A (en) * 1998-09-03 2000-03-14 Dainippon Screen Mfg Co Ltd Wafer treatment device
JP2001113478A (en) * 1999-10-18 2001-04-24 Matsushita Electric Ind Co Ltd Industrial horizontal articulated robot
CN1092092C (en) * 2000-04-21 2002-10-09 清华大学 Spatial triaxial parallel machine tool structure with two-dimensional shift and one-dimensional rotation
JP2001358196A (en) * 2000-06-16 2001-12-26 Tokyo Electron Ltd Substrate transfer device
US6354167B1 (en) * 2000-06-26 2002-03-12 The United States Of America As Represented By The Secretary Of The Navy Scara type robot with counterbalanced arms
EP1560681A1 (en) * 2002-11-06 2005-08-10 McGILL UNIVERSITY Four-degree-of-freedom parallel manipulator for producing schönflies motions
DE10261592B3 (en) * 2002-12-24 2004-10-28 Reis Gmbh & Co. Maschinenfabrik articulated robot
JP2003340754A (en) * 2003-04-30 2003-12-02 Sankyo Seiki Mfg Co Ltd Articulated robot
NL1023776C2 (en) * 2003-06-30 2005-01-03 Roboxis B V Robot.
JP2005044981A (en) * 2003-07-28 2005-02-17 Tokyo Electron Ltd Transport device
DE112005000166B4 (en) * 2004-01-08 2015-09-24 Technische Universität Berlin Robot and method for positioning by means of a null space movement
US8160205B2 (en) * 2004-04-06 2012-04-17 Accuray Incorporated Robotic arm for patient positioning assembly
US8376685B2 (en) * 2004-06-09 2013-02-19 Brooks Automation, Inc. Dual scara arm
JP2006224218A (en) * 2005-02-16 2006-08-31 Kohnan Electronic Corp Multi-articulated robot

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01199780A (en) * 1988-02-03 1989-08-11 Mitsubishi Electric Corp Industrial robot
JPH0413595A (en) * 1990-05-01 1992-01-17 Mitsubishi Electric Corp Clean robot
JPH05104462A (en) * 1991-10-14 1993-04-27 Canon Inc Orthogonal 2-axis moving device
JPH1170487A (en) * 1997-08-29 1999-03-16 Kawasaki Heavy Ind Ltd robot
EP0913236A2 (en) * 1997-10-30 1999-05-06 Sankyo Seiki Mfg. Co. Ltd. Articulated robot
JP2003266252A (en) * 2002-03-19 2003-09-24 Ricoh Co Ltd Automatic assembly and disassembly equipment
JP2004304102A (en) * 2003-04-01 2004-10-28 Tokyo Electron Ltd Connection structure for rotating body in airtight container, rotation drive mechanism, and transport device
JP2005150575A (en) * 2003-11-19 2005-06-09 Nachi Fujikoshi Corp Double arm robot

Also Published As

Publication number Publication date
JP2009524529A (en) 2009-07-02
ATE449671T1 (en) 2009-12-15
US20070173393A1 (en) 2007-07-26
EP1984151B1 (en) 2009-11-25
DE602007003446D1 (en) 2010-01-07
EP1984151A2 (en) 2008-10-29
DK1984151T3 (en) 2010-04-06
US7374525B2 (en) 2008-05-20
JP2013208705A (en) 2013-10-10
WO2007087295A2 (en) 2007-08-02

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