WO2007115812A3 - Optoelectronic device for determining relative movements or relative positions of two objects - Google Patents

Optoelectronic device for determining relative movements or relative positions of two objects Download PDF

Info

Publication number
WO2007115812A3
WO2007115812A3 PCT/EP2007/003149 EP2007003149W WO2007115812A3 WO 2007115812 A3 WO2007115812 A3 WO 2007115812A3 EP 2007003149 W EP2007003149 W EP 2007003149W WO 2007115812 A3 WO2007115812 A3 WO 2007115812A3
Authority
WO
WIPO (PCT)
Prior art keywords
light
optoelectronic device
relative
objects
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/003149
Other languages
French (fr)
Other versions
WO2007115812A2 (en
Inventor
Volker Senft
Antonio Pascucci
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3DConnexion Holding SA
Original Assignee
3DConnexion Holding SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3DConnexion Holding SA filed Critical 3DConnexion Holding SA
Priority to US12/294,816 priority Critical patent/US8243024B2/en
Priority to JP2009503499A priority patent/JP5155996B2/en
Priority to CN2007800111074A priority patent/CN101410776B/en
Priority to EP07724090A priority patent/EP2005278B1/en
Publication of WO2007115812A2 publication Critical patent/WO2007115812A2/en
Publication of WO2007115812A3 publication Critical patent/WO2007115812A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/033Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor
    • G06F3/0354Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor with detection of two-dimensional [2D] relative movements between the device, or an operating part thereof, and a plane or surface, e.g. 2D mice, trackballs, pens or pucks
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/042Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
    • G06F3/0421Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means by interrupting or reflecting a light beam, e.g. optical touch-screen
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/166Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using photoelectric means
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/033Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor
    • G06F3/0338Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor with detection of limited linear or angular displacement of an operating part of the device from a neutral position, e.g. isotonic or isometric joysticks
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/042Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/95Three-dimensional encoders, i.e. having codes extending in three directions

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)

Abstract

The present invention relates to an optoelectronic device (100) for determining relative movements or relative positions of two objects, comprising a first object (10) fixed relative to a frame (1) of the device; a second object (20) mounted in spaced relation to the first object (10) and adapted for movement relative thereto; and a plurality of measuring cells for determining movement or displacement of the second object (20) relative to the first object (10). Each measuring cell comprises a light- emitting element (13) and a detector (23) for detecting light from the light-emitting element (13). The invention provides a light shield (30) for the optoelectronic device (100), the light shield comprising a plurality of channels (31) which together define a non-planar or three-dimensional array of light beam paths between the first and second objects (10, 20) of the optoelectronic device. Each channel (31) forms a path for a light beam between a light-emitting element (13) and a detector (23) of the optoelectronic device, and at least two of said channels (31) define light paths which converge with one another from the light-emitting elements (13).
PCT/EP2007/003149 2006-04-05 2007-04-05 Optoelectronic device for determining relative movements or relative positions of two objects Ceased WO2007115812A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/294,816 US8243024B2 (en) 2006-04-05 2007-04-05 Optoelectronic device for determining relative movements or relative positions of two objects
JP2009503499A JP5155996B2 (en) 2006-04-05 2007-04-05 Light shield, optoelectronic device, force and / or moment sensor, keyboard for personal computer
CN2007800111074A CN101410776B (en) 2006-04-05 2007-04-05 An optoelectronic device for determining the relative motion or relative position of two objects
EP07724090A EP2005278B1 (en) 2006-04-05 2007-04-05 Optoelectronic device for determining relative movements or relative positions of two objects

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06007195A EP1843243B1 (en) 2006-04-05 2006-04-05 Opto-electronic device for determining relative movements or relative positions of two objects
EP06007195.8 2006-04-05

Publications (2)

Publication Number Publication Date
WO2007115812A2 WO2007115812A2 (en) 2007-10-18
WO2007115812A3 true WO2007115812A3 (en) 2007-11-29

Family

ID=36968913

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/EP2007/003149 Ceased WO2007115812A2 (en) 2006-04-05 2007-04-05 Optoelectronic device for determining relative movements or relative positions of two objects
PCT/EP2007/003146 Ceased WO2007115809A2 (en) 2006-04-05 2007-04-05 Optoelectronic device for determining relative movements or relative positions of two objects

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/003146 Ceased WO2007115809A2 (en) 2006-04-05 2007-04-05 Optoelectronic device for determining relative movements or relative positions of two objects

Country Status (6)

Country Link
US (2) US8243024B2 (en)
EP (4) EP1843243B1 (en)
JP (1) JP5155996B2 (en)
KR (1) KR20090006072A (en)
CN (1) CN101410776B (en)
WO (2) WO2007115812A2 (en)

Families Citing this family (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1998243A1 (en) 2007-05-25 2008-12-03 3Dconnexion Holding SA Optoelectronic device and resilient member therefor
GB2462081A (en) * 2008-07-21 2010-01-27 Eigenlabs Ltd A programmable sound creation interface
EP2255935B1 (en) * 2009-05-28 2012-06-20 Max Co., Ltd. Electric stapler
JP2011065409A (en) * 2009-09-17 2011-03-31 Seiko Epson Corp Optical position detection device and display device with position detection function
JP5493674B2 (en) * 2009-10-13 2014-05-14 セイコーエプソン株式会社 Photodetector, optical position detection device, and display device with position detection function
TW201139997A (en) * 2010-05-05 2011-11-16 Edison Opto Corp Partition type optical sensing device
JP2014052664A (en) * 2010-12-22 2014-03-20 Sony Computer Entertainment Inc Operator and operation device
US8785012B2 (en) 2011-06-09 2014-07-22 Bloom Energy Corporation Fuel cell bypass diode structures and attachment methods
WO2014164207A1 (en) 2013-03-12 2014-10-09 Stryker Corporation Sensor assembly and method for measuring forces and torques
KR102095013B1 (en) * 2013-04-11 2020-03-31 삼성디스플레이 주식회사 Flexible device
JP6402719B2 (en) * 2013-11-05 2018-10-10 日本精工株式会社 Force sensor
JP2015197357A (en) * 2014-04-01 2015-11-09 キヤノン株式会社 Optical force angle sensor and device using the same
DE102014216389A1 (en) * 2014-08-19 2016-02-25 BSH Hausgeräte GmbH Operating device for a household appliance with stably positioned annular control element front part and household appliance with such an operating device
US11397108B2 (en) * 2015-06-16 2022-07-26 Marquardt Gmbh Multi-function controller and method of using same
US10239213B1 (en) * 2015-11-24 2019-03-26 X Development Llc Flexure assembly for force/torque sensing
JP6575334B2 (en) * 2015-12-01 2019-09-18 日本精工株式会社 Force sensor
US10274386B2 (en) 2016-06-20 2019-04-30 X Development Llc Retroreflective multi-axis force torque sensor
US10732061B2 (en) 2017-09-07 2020-08-04 X Development Llc Unibody flexure design for displacement-based force/torque sensing
US11428589B2 (en) * 2017-10-16 2022-08-30 Saf-Holland, Inc. Displacement sensor utilizing ronchi grating interference
US10637470B2 (en) * 2018-01-05 2020-04-28 Darfon Electronics Corp. Optical keyswitch
CN108490630B (en) * 2018-03-12 2019-10-22 Oppo广东移动通信有限公司 Laser projection module, depth camera and electronic device
WO2019165862A1 (en) 2018-02-27 2019-09-06 Oppo广东移动通信有限公司 Laser projection module, depth camera, and electronic device
CN108508687B (en) * 2018-03-12 2021-06-18 Oppo广东移动通信有限公司 Laser Projection Modules, Depth Cameras and Electronics
CN108490572B (en) * 2018-03-12 2021-04-23 Oppo广东移动通信有限公司 Laser projection modules, depth cameras and electronic devices
US11559298B2 (en) 2018-07-16 2023-01-24 Cilag Gmbh International Surgical visualization of multiple targets
US10732060B2 (en) 2018-08-15 2020-08-04 X Development Llc Force/torque sensor with hardstops to limit overloading a flexure
US11213361B2 (en) 2019-03-15 2022-01-04 Cilag Gmbh International Robotic surgical systems with mechanisms for scaling surgical tool motion according to tissue proximity
US11284957B2 (en) 2019-03-15 2022-03-29 Cilag Gmbh International Robotic surgical controls with force feedback
US11490981B2 (en) 2019-03-15 2022-11-08 Cilag Gmbh International Robotic surgical controls having feedback capabilities
US11471229B2 (en) 2019-03-15 2022-10-18 Cilag Gmbh International Robotic surgical systems with selectively lockable end effectors
EP3937818A1 (en) 2019-03-15 2022-01-19 Cilag GmbH International Input controls for robotic surgery
US11992282B2 (en) 2019-03-15 2024-05-28 Cilag Gmbh International Motion capture controls for robotic surgery
US11666401B2 (en) 2019-03-15 2023-06-06 Cilag Gmbh International Input controls for robotic surgery
WO2020188391A1 (en) 2019-03-15 2020-09-24 Ethicon Llc Robotic surgical controls having feedback capabilities
US11690690B2 (en) 2019-03-15 2023-07-04 Cilag Gmbh International Segmented control inputs for surgical robotic systems
US12257013B2 (en) 2019-03-15 2025-03-25 Cilag Gmbh International Robotic surgical systems with mechanisms for scaling camera magnification according to proximity of surgical tool to tissue
US11583350B2 (en) 2019-03-15 2023-02-21 Cilag Gmbh International Jaw coordination of robotic surgical controls
US11219501B2 (en) 2019-12-30 2022-01-11 Cilag Gmbh International Visualization systems using structured light
US12207881B2 (en) 2019-12-30 2025-01-28 Cilag Gmbh International Surgical systems correlating visualization data and powered surgical instrument data
US11744667B2 (en) 2019-12-30 2023-09-05 Cilag Gmbh International Adaptive visualization by a surgical system
US11832996B2 (en) 2019-12-30 2023-12-05 Cilag Gmbh International Analyzing surgical trends by a surgical system
US11648060B2 (en) 2019-12-30 2023-05-16 Cilag Gmbh International Surgical system for overlaying surgical instrument data onto a virtual three dimensional construct of an organ
US11759283B2 (en) 2019-12-30 2023-09-19 Cilag Gmbh International Surgical systems for generating three dimensional constructs of anatomical organs and coupling identified anatomical structures thereto
US12053223B2 (en) 2019-12-30 2024-08-06 Cilag Gmbh International Adaptive surgical system control according to surgical smoke particulate characteristics
US12453592B2 (en) 2019-12-30 2025-10-28 Cilag Gmbh International Adaptive surgical system control according to surgical smoke cloud characteristics
US11284963B2 (en) 2019-12-30 2022-03-29 Cilag Gmbh International Method of using imaging devices in surgery
US12002571B2 (en) 2019-12-30 2024-06-04 Cilag Gmbh International Dynamic surgical visualization systems
US11776144B2 (en) 2019-12-30 2023-10-03 Cilag Gmbh International System and method for determining, adjusting, and managing resection margin about a subject tissue
US11896442B2 (en) 2019-12-30 2024-02-13 Cilag Gmbh International Surgical systems for proposing and corroborating organ portion removals
US11073920B1 (en) 2020-10-20 2021-07-27 Cirque Corporation Multi-touch input system
US12239404B2 (en) 2020-12-30 2025-03-04 Cilag Gmbh International Torque-based transition between operating gears
US11813746B2 (en) 2020-12-30 2023-11-14 Cilag Gmbh International Dual driving pinion crosscheck
US12070287B2 (en) 2020-12-30 2024-08-27 Cilag Gmbh International Robotic surgical tools having dual articulation drives
US12059170B2 (en) 2020-12-30 2024-08-13 Cilag Gmbh International Surgical tool with tool-based translation and lock for the same
CN113188705B (en) * 2021-04-30 2022-11-25 华力创科学(深圳)有限公司 Small force sensor based on light path blocking method and six-axis force sensor
CN113834527B (en) * 2021-09-18 2024-09-27 重庆大学 A press-fit power semiconductor structure and an online measurement method for its internal pressure
WO2023073664A1 (en) 2021-11-01 2023-05-04 Cilag Gmbh International Devices, systems, and methods for detecting tissue and foreign objects during a surgical operation
US11957342B2 (en) 2021-11-01 2024-04-16 Cilag Gmbh International Devices, systems, and methods for detecting tissue and foreign objects during a surgical operation
KR102677450B1 (en) 2022-03-25 2024-06-20 삼성전자주식회사 Apparatus and method for estimating optical-based force
KR102675600B1 (en) * 2022-06-14 2024-06-17 한국과학기술원 6-axis force/torque sensor
US12137904B2 (en) 2022-06-15 2024-11-12 Cilag Gmbh International Impact mechanism for grasp clamp fire
JP2024034164A (en) * 2022-08-31 2024-03-13 国立大学法人大阪大学 End effector, end effector control device, and gripper control method
NL1044835B1 (en) 2024-03-07 2025-09-19 Naya B V Manual user input device
DE202024002566U1 (en) 2024-08-01 2025-11-10 Neura Robotics GmbH Device for measuring force and/or torque

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6353217B1 (en) * 1998-02-04 2002-03-05 Alps Electric Co., Ltd. Transmitter receiver
US20030102422A1 (en) * 2001-11-30 2003-06-05 3Dconnexion Gmbh Arrangement for the detection of relative movements or relative positions of two objects

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3409359B2 (en) * 1993-04-16 2003-05-26 ソニー株式会社 3D input device
US5940180A (en) * 1994-10-11 1999-08-17 Giddings & Lewis Laser interferometer measurement system for use with machine tools
JPH0949728A (en) * 1995-08-04 1997-02-18 Omron Corp Distance measuring device
JPH10267603A (en) * 1996-11-22 1998-10-09 Eizou Nishimura Position and attitude detector
KR100291557B1 (en) * 1997-08-30 2001-06-01 윤종용 Optical pickup compatible with cd-r and dvd using round shield surface
DE19937307A1 (en) * 1998-08-10 2000-02-17 Deutsch Zentr Luft & Raumfahrt Method for technical control operations using control wheel, where pressure and turning actions are converted into translational and rotational movements of objects being controlled with wheel
DE10034569B4 (en) * 2000-07-14 2004-02-12 Deutsches Zentrum für Luft- und Raumfahrt e.V. Device for detecting relative movements of an object
DE10143489C2 (en) * 2001-09-05 2003-07-17 Deutsch Zentr Luft & Raumfahrt Arrangement for detecting relative movements of two objects
DE10158775B4 (en) * 2001-11-30 2004-05-06 3Dconnexion Gmbh Arrangement for detecting relative movements or relative positions of two objects
DE10158777B4 (en) * 2001-11-30 2004-05-06 3Dconnexion Gmbh Arrangement for detecting relative movements or relative positions of two objects
CN1692401B (en) * 2002-04-12 2011-11-16 雷斯里·R·奥柏梅尔 Multi-axis input converter unit and joystick
US6876453B2 (en) * 2002-06-04 2005-04-05 Zygo Corporation Metrology system for precision 3D motion
DE10225418A1 (en) * 2002-06-07 2004-01-08 3Dconnexion Gmbh Measuring device for measuring positions or movements
DE10246031A1 (en) * 2002-10-02 2004-04-15 3Dconnexion Gmbh Position-and/or movement-sensor for relative positions of two objects, includes protective spring device which elastically joins first module with first object
JP4312192B2 (en) * 2005-11-02 2009-08-12 ミネベア株式会社 Optical displacement sensor and external force detection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6353217B1 (en) * 1998-02-04 2002-03-05 Alps Electric Co., Ltd. Transmitter receiver
US20030102422A1 (en) * 2001-11-30 2003-06-05 3Dconnexion Gmbh Arrangement for the detection of relative movements or relative positions of two objects

Also Published As

Publication number Publication date
WO2007115809A3 (en) 2007-11-29
EP2005278B1 (en) 2012-08-15
CN101410776B (en) 2011-05-18
EP1850210A2 (en) 2007-10-31
EP1850210B1 (en) 2012-02-01
JP5155996B2 (en) 2013-03-06
WO2007115812A2 (en) 2007-10-18
CN101410776A (en) 2009-04-15
US8243024B2 (en) 2012-08-14
US20100164873A1 (en) 2010-07-01
EP1850210A3 (en) 2008-02-27
US20100171704A1 (en) 2010-07-08
KR20090006072A (en) 2009-01-14
JP2009532688A (en) 2009-09-10
EP2005277A2 (en) 2008-12-24
EP2005278A2 (en) 2008-12-24
US8063883B2 (en) 2011-11-22
EP1843243A1 (en) 2007-10-10
WO2007115809A2 (en) 2007-10-18
EP1843243B1 (en) 2012-02-22

Similar Documents

Publication Publication Date Title
WO2007115812A3 (en) Optoelectronic device for determining relative movements or relative positions of two objects
JP2009532688A5 (en)
WO2008020899A3 (en) Arrayed imaging systems and associated methods
WO2006052622A3 (en) Apparatus and methods for two-dimensional ion beam profiling
WO2009054516A1 (en) Sample detector and measurement device equipped with the same
WO2006050229A3 (en) Two-dimensional motion sensor
TW200602632A (en) Semiconductor array tester
WO2011029740A3 (en) Devices and methods for determining positions and measuring surfaces
WO2010057169A3 (en) Device and method for measuring six degrees of freedom
WO2009053905A3 (en) A light angle selecting light detector device
WO2006098772A3 (en) Systems and methods for measurement optimization
EP2367027A3 (en) Radiation detector and method for verifying the position of the radiation detector
FR2884916B1 (en) ULTRASENSITIVE OPTICAL SENSOR WITH HIGH TEMPORAL RESOLUTION USING SURFACE PLASMON
DE502007006292D1 (en) Position measuring device
WO2008100704A3 (en) System and method for tracking the movement of biological materials
TW200604493A (en) Detection device and stage device
WO2010017952A3 (en) Low-contamination optical arrangement
WO2008071251A9 (en) Device for detecting movement and forces
WO2006090386A3 (en) A virtual keyboard device
EP2392904A3 (en) Sensor for measuring an external force applied to said sensor
EP3698110B1 (en) Displacement sensor utilizing ronchi grating interference
SG144163A1 (en) Lithographic apparatus with two-dimensional alignment measurement arrangement and two-dimensional alignment measurement method
TW200606403A (en) Optical type encoder
ATE470132T1 (en) DETECTOR MATRIX FOR OPTICAL ENCODERS
EP1972890A3 (en) Detection sensor to detect receiving position of laser light and level device employing the detection sensor to detect receiving position of laser light

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07724090

Country of ref document: EP

Kind code of ref document: A2

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
WWE Wipo information: entry into national phase

Ref document number: 1020087022986

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 200780011107.4

Country of ref document: CN

Ref document number: 12294816

Country of ref document: US

Ref document number: 2007724090

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2009503499

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE