WO2007116000A3 - Vorrichtung und verfahren zur mikrostrukturierung eines speichermediums sowie speichermedium mit einem mikrostrukturierten bereich - Google Patents

Vorrichtung und verfahren zur mikrostrukturierung eines speichermediums sowie speichermedium mit einem mikrostrukturierten bereich Download PDF

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Publication number
WO2007116000A3
WO2007116000A3 PCT/EP2007/053328 EP2007053328W WO2007116000A3 WO 2007116000 A3 WO2007116000 A3 WO 2007116000A3 EP 2007053328 W EP2007053328 W EP 2007053328W WO 2007116000 A3 WO2007116000 A3 WO 2007116000A3
Authority
WO
WIPO (PCT)
Prior art keywords
storage medium
modulator
optical element
microstructuring
reducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/053328
Other languages
English (en)
French (fr)
Other versions
WO2007116000A2 (de
Inventor
Steffen Noehte
Robert Thomann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Scribos GmbH
Original Assignee
Tesa Scribos GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesa Scribos GmbH filed Critical Tesa Scribos GmbH
Priority to US12/295,695 priority Critical patent/US8120996B2/en
Priority to JP2009503587A priority patent/JP5166397B2/ja
Priority to CN2007800119343A priority patent/CN101416114B/zh
Priority to EP07727797A priority patent/EP2005251B1/de
Priority to AT07727797T priority patent/ATE532104T1/de
Publication of WO2007116000A2 publication Critical patent/WO2007116000A2/de
Publication of WO2007116000A3 publication Critical patent/WO2007116000A3/de
Anticipated expiration legal-status Critical
Priority to US12/275,952 priority patent/US20090154318A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0891—Processes or apparatus adapted to convert digital holographic data into a hologram
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H2001/0208—Individual components other than the hologram
    • G03H2001/0224—Active addressable light modulator, i.e. Spatial Light Modulator [SLM]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0476—Holographic printer
    • G03H2001/048—Parallel printer, i.e. a fringe pattern is reproduced

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Holo Graphy (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

Die Erfindung betrifft eine Vorrichtung zur Mikrostrukturierung eines Speichermediums (2), mit einer Strahlungsquelle (4) zum Erzeugen eines zumindest teilweise kohärenten Strahls aus elektromagnetischer Strahlung, mit einem Modulator (6) mit einer Mehrzahl von einzeln schaltbaren Modulatorelementen, mit einer Strahlformungsoptik (8) zum Ausleuchten des Modulators (6), mit einer Verkleinerungsoptik (10) zum Verkleinern des vom Modulator (6) abgestrahlten Strahls und mit einem Transporttisch (12) zum Bewegen des Speichermediums (2) relativ zur Verkleinerungsoptik (10), bei der das technische Problem, Mikrostrukturierungen und individuelle dif fraktive optische Elemente (DOE), insbesondere computergenerierte Hologramme mit hoher Geschwindigkeit und mit hoher Schreibenergie schreiben zu können, dadurch gelöst ist, dass die Verkleinerungsoptik (10) beugungsbegrenzt ausgebildet ist und dass die Verkleinerungsoptik (10) ausgehend von der Fläche der einzelnen Modulatorelemente eine Flächenverkleinerung von mindestens 25 erzeugt. Die Erfindung betrifft auch ein Verfahren zur Steuerung der Vorrichtung und ein damit beschriebenes Speichermedium.
PCT/EP2007/053328 2006-04-04 2007-04-04 Vorrichtung und verfahren zur mikrostrukturierung eines speichermediums sowie speichermedium mit einem mikrostrukturierten bereich Ceased WO2007116000A2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US12/295,695 US8120996B2 (en) 2006-04-04 2007-04-04 Device and method for microstructuring a storage medium and storage medium comprising a microstructured region
JP2009503587A JP5166397B2 (ja) 2006-04-04 2007-04-04 ストレージ媒体を微細構造化するためのデバイスおよび方法ならびに微細構造領域を含むストレージ媒体
CN2007800119343A CN101416114B (zh) 2006-04-04 2007-04-04 用于微构造存储介质的设备和方法以及包括微构造区域的存储介质
EP07727797A EP2005251B1 (de) 2006-04-04 2007-04-04 Vorrichtung und verfahren zur steuerung einer vorrichtung zur mikrostrukturierung eines speichermediums
AT07727797T ATE532104T1 (de) 2006-04-04 2007-04-04 Vorrichtung und verfahren zur steuerung einer vorrichtung zur mikrostrukturierung eines speichermediums
US12/275,952 US20090154318A1 (en) 2006-04-04 2008-11-21 Device and method for microstructuring a storage medium and storage medium comprising a microstructured region

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006015609.9 2006-04-04
DE102006015609 2006-04-04

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/275,952 Continuation US20090154318A1 (en) 2006-04-04 2008-11-21 Device and method for microstructuring a storage medium and storage medium comprising a microstructured region

Publications (2)

Publication Number Publication Date
WO2007116000A2 WO2007116000A2 (de) 2007-10-18
WO2007116000A3 true WO2007116000A3 (de) 2008-03-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/053328 Ceased WO2007116000A2 (de) 2006-04-04 2007-04-04 Vorrichtung und verfahren zur mikrostrukturierung eines speichermediums sowie speichermedium mit einem mikrostrukturierten bereich

Country Status (6)

Country Link
US (2) US8120996B2 (de)
EP (2) EP2071401B1 (de)
JP (2) JP5166397B2 (de)
CN (2) CN101416114B (de)
AT (1) ATE532104T1 (de)
WO (1) WO2007116000A2 (de)

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US20090147651A1 (en) * 2007-12-07 2009-06-11 Vitali Prisacar Single beam system for writing data using energy distribution patterns
DE102008027231B4 (de) * 2008-06-06 2016-03-03 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Strahlformung
DE102008051204A1 (de) * 2008-10-14 2010-04-15 Tesa Scribos Gmbh Verfahren zur Herstellung von Mikrostrukturen in einem Speichermedium
US8014427B1 (en) * 2010-05-11 2011-09-06 Ultratech, Inc. Line imaging systems and methods for laser annealing
CN102879908B (zh) * 2012-10-24 2015-01-21 北京凯普林光电科技有限公司 补偿光源系统及列车运行故障动态图像检测设备
JP6014902B2 (ja) * 2012-12-06 2016-10-26 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． 焦点制御装置及びその方法
US9887783B2 (en) 2014-10-24 2018-02-06 Sumitomo Electric Industries, Ltd. Lens system to enhance optical coupling efficiency of collimated beam to optical waveguide
CN105629402B (zh) * 2014-10-28 2018-06-19 住友电气工业株式会社 准直光束与光波导的光耦合增效的透镜系统
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US11244873B2 (en) * 2018-10-31 2022-02-08 Tokyo Electron Limited Systems and methods for manufacturing microelectronic devices
JP7193308B2 (ja) * 2018-11-09 2022-12-20 株式会社キーエンス プロファイル測定装置
CN110487194B (zh) * 2019-07-15 2021-01-05 航天科工防御技术研究试验中心 一种基于单个相机的三维变形光测方法及装置
KR102845457B1 (ko) * 2019-09-18 2025-08-11 삼성전자주식회사 초 해상도 홀로그래픽 현미경
CN111897134B (zh) * 2020-07-31 2022-02-25 西安炬光科技股份有限公司 一种光学模组和医疗激光装置
DE102021203749A1 (de) 2021-04-15 2022-10-20 Scribos Gmbh Sicherheitsetikett, Serie an Sicherheitsetiketten, Authentifizierungssystem mit einer Serie an Sicherheitsetiketten sowie Verfahren zur Herstellung eines Sicherheitsetiketts

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US4826299A (en) * 1987-01-30 1989-05-02 Canadian Patents And Development Limited Linear deiverging lens
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Also Published As

Publication number Publication date
ATE532104T1 (de) 2011-11-15
JP5166397B2 (ja) 2013-03-21
US20090154318A1 (en) 2009-06-18
CN101416114A (zh) 2009-04-22
CN101477313B (zh) 2013-04-17
EP2071401A3 (de) 2010-09-01
JP2010097163A (ja) 2010-04-30
US8120996B2 (en) 2012-02-21
WO2007116000A2 (de) 2007-10-18
US20090180360A1 (en) 2009-07-16
JP2009532730A (ja) 2009-09-10
EP2071401B1 (de) 2012-06-20
EP2071401A2 (de) 2009-06-17
CN101477313A (zh) 2009-07-08
EP2005251A2 (de) 2008-12-24
EP2005251B1 (de) 2011-11-02
CN101416114B (zh) 2011-03-02

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