WO2008066569A3 - Hermetic chamber with electrical feedthroughs - Google Patents

Hermetic chamber with electrical feedthroughs Download PDF

Info

Publication number
WO2008066569A3
WO2008066569A3 PCT/US2007/011612 US2007011612W WO2008066569A3 WO 2008066569 A3 WO2008066569 A3 WO 2008066569A3 US 2007011612 W US2007011612 W US 2007011612W WO 2008066569 A3 WO2008066569 A3 WO 2008066569A3
Authority
WO
WIPO (PCT)
Prior art keywords
pressure cavity
sensor
sensors
hermetically
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/011612
Other languages
French (fr)
Other versions
WO2008066569A2 (en
Inventor
David O'brien
Christophe Courcimault
Liang You
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CardioMEMS LLC
Original Assignee
CardioMEMS LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CardioMEMS LLC filed Critical CardioMEMS LLC
Priority to AT07867119T priority Critical patent/ATE504818T1/en
Priority to EP07867119A priority patent/EP2021757B1/en
Priority to AU2007326005A priority patent/AU2007326005A1/en
Priority to DE602007013745T priority patent/DE602007013745D1/en
Priority to CA002652060A priority patent/CA2652060A1/en
Publication of WO2008066569A2 publication Critical patent/WO2008066569A2/en
Publication of WO2008066569A3 publication Critical patent/WO2008066569A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
  • Prostheses (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Discharge Heating (AREA)

Abstract

A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the ambient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.
PCT/US2007/011612 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs Ceased WO2008066569A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT07867119T ATE504818T1 (en) 2006-05-17 2007-05-15 HERMETIC CHAMBER WITH ELECTRICAL FEEDTHROUGHS
EP07867119A EP2021757B1 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs
AU2007326005A AU2007326005A1 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs
DE602007013745T DE602007013745D1 (en) 2006-05-17 2007-05-15 HERMETIC CHAMBER WITH ELECTRIC IMPLEMENTS
CA002652060A CA2652060A1 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80113406P 2006-05-17 2006-05-17
US60/801,134 2006-05-17

Publications (2)

Publication Number Publication Date
WO2008066569A2 WO2008066569A2 (en) 2008-06-05
WO2008066569A3 true WO2008066569A3 (en) 2008-10-02

Family

ID=39468402

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/011612 Ceased WO2008066569A2 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs

Country Status (6)

Country Link
EP (1) EP2021757B1 (en)
AT (1) ATE504818T1 (en)
AU (1) AU2007326005A1 (en)
CA (1) CA2652060A1 (en)
DE (1) DE602007013745D1 (en)
WO (1) WO2008066569A2 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2947629B1 (en) * 2009-07-06 2012-03-30 Tronic S Microsystems PRESSURE MEASURING DEVICE AND METHOD FOR MANUFACTURING THE SAME
US20150250386A1 (en) 2012-09-28 2015-09-10 Csem Centre Suisse D'electronique Et De Microtechnique Sa -Recherche Et Developpement Implantable devices
US9464950B2 (en) * 2013-11-15 2016-10-11 Rosemount Aerospace Inc. Capacitive pressure sensors for high temperature applications
AU2016219018B2 (en) 2015-02-12 2020-10-29 Foundry Innovation & Research 1, Ltd. Implantable devices and related methods for heart failure monitoring
US12465324B2 (en) 2015-02-12 2025-11-11 Foundry Innovation & Research 1, Ltd. Patient fluid management systems and methods employing integrated fluid status sensing
WO2018031714A1 (en) 2016-08-11 2018-02-15 Foundry Innovation & Research 1, Ltd. Systems and methods for patient fluid management
WO2017024051A1 (en) 2015-08-03 2017-02-09 Foundry Innovation & Research 1, Ltd. Devices and methods for measurement of vena cava dimensions, pressure, and oxygen saturation
US11701018B2 (en) 2016-08-11 2023-07-18 Foundry Innovation & Research 1, Ltd. Wireless resonant circuit and variable inductance vascular monitoring implants and anchoring structures therefore
US11206992B2 (en) 2016-08-11 2021-12-28 Foundry Innovation & Research 1, Ltd. Wireless resonant circuit and variable inductance vascular monitoring implants and anchoring structures therefore
EP3705031B1 (en) 2016-11-29 2025-12-10 Foundry Innovation & Research 1, Ltd. Wireless resonant circuit and variable inductance vascular implants for monitoring patient vasculature system
EP3629937B1 (en) 2017-05-31 2026-01-14 Foundry Innovation & Research 1, Ltd. Implantable ultrasonic vascular sensor
WO2018220146A1 (en) 2017-05-31 2018-12-06 Foundry Innovation & Research 1, Ltd. Implantable sensors for vascular monitoring
EP4561673A1 (en) 2022-07-29 2025-06-04 Foundry Innovation & Research 1, Ltd. Multistranded conductors adapted to dynamic in vivo environments

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
US5740594A (en) * 1996-07-22 1998-04-21 Texas Instruments Incorporated Method for making a fluid pressure transducer
US5974894A (en) * 1997-07-14 1999-11-02 Panex Incorporated Fused silica high pressure sensor
DE10052053A1 (en) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Pressure measurement cell has contact pin fed through base body to electrode for capacitance measurement; contact pin, jointing solder and membrane bed form smooth surface
US6812404B1 (en) * 2003-10-14 2004-11-02 Medtronic, Inc. Feedthrough device having electrochemical corrosion protection
WO2005019785A2 (en) * 2003-08-11 2005-03-03 Analog Devices, Inc. Capacitive sensor
WO2006086113A2 (en) * 2005-02-10 2006-08-17 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
WO2007047794A2 (en) * 2005-10-19 2007-04-26 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
WO2007047571A2 (en) * 2005-10-14 2007-04-26 Cardiomems, Inc. Integrated cmos-mems technology for wired implantable sensors

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
US5740594A (en) * 1996-07-22 1998-04-21 Texas Instruments Incorporated Method for making a fluid pressure transducer
US5974894A (en) * 1997-07-14 1999-11-02 Panex Incorporated Fused silica high pressure sensor
DE10052053A1 (en) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Pressure measurement cell has contact pin fed through base body to electrode for capacitance measurement; contact pin, jointing solder and membrane bed form smooth surface
WO2005019785A2 (en) * 2003-08-11 2005-03-03 Analog Devices, Inc. Capacitive sensor
US6812404B1 (en) * 2003-10-14 2004-11-02 Medtronic, Inc. Feedthrough device having electrochemical corrosion protection
WO2006086113A2 (en) * 2005-02-10 2006-08-17 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
WO2007047571A2 (en) * 2005-10-14 2007-04-26 Cardiomems, Inc. Integrated cmos-mems technology for wired implantable sensors
WO2007047794A2 (en) * 2005-10-19 2007-04-26 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs

Also Published As

Publication number Publication date
CA2652060A1 (en) 2008-06-05
EP2021757A2 (en) 2009-02-11
AU2007326005A1 (en) 2008-06-05
WO2008066569A2 (en) 2008-06-05
ATE504818T1 (en) 2011-04-15
DE602007013745D1 (en) 2011-05-19
EP2021757B1 (en) 2011-04-06

Similar Documents

Publication Publication Date Title
WO2006086113A3 (en) Hermetic chamber with electrical feedthroughs
WO2008066569A3 (en) Hermetic chamber with electrical feedthroughs
WO2007047794A3 (en) Hermetic chamber with electrical feedthroughs
WO2006110798A3 (en) Electromagnetically coupled hermetic chamber
WO2013170105A3 (en) Microactuator
EP2022396A3 (en) Implantable device for recording intracranial pressure
EP2008966A3 (en) MEMS device formed inside hermetic chamber having getter film
WO2012059885A3 (en) Hearing prosthesis having an implantable actuator system
WO2009071558A3 (en) Electrical device
IN2012DN02060A (en)
WO2004074879A3 (en) Internal support member in a hermetically sealed data storage device
WO2007002225A3 (en) Implantable wireless sensor for in vivo pressure measurement
WO2006081361A3 (en) Implantable medical device
EP1702641A3 (en) Pressure sensing devices
AU2003282964A1 (en) Manufacturing methods and vacuum or hermetically packaged micromachined or mems devices formed thereby having substantially vertical feedthroughs
EP2508860A3 (en) Monitoring and recording implantable silicon active pressure transducer
WO2012015756A3 (en) Hybrid housing for implantable medical device
WO2015123697A3 (en) Wireless enabled cap for a data-capable device
WO2001092117A3 (en) Moisture resistant package for storing sterile items
WO2005019785A3 (en) Capacitive sensor
EP2280249A3 (en) An implantable sensor and a method for calibrating the same
JP2016109692A5 (en)
WO2014088768A3 (en) Multi purpose electrode
EP3575548A3 (en) Sonde with integral pressure sensor and method
CA2943599C (en) An implantable dual sensor bio-pressure transponder and method of calibration

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07867119

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 2652060

Country of ref document: CA

WWE Wipo information: entry into national phase

Ref document number: 2007326005

Country of ref document: AU

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2007867119

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 2007326005

Country of ref document: AU

Date of ref document: 20070515

Kind code of ref document: A