WO2008081921A1 - 水素センサ及びその製造方法 - Google Patents

水素センサ及びその製造方法 Download PDF

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Publication number
WO2008081921A1
WO2008081921A1 PCT/JP2007/075261 JP2007075261W WO2008081921A1 WO 2008081921 A1 WO2008081921 A1 WO 2008081921A1 JP 2007075261 W JP2007075261 W JP 2007075261W WO 2008081921 A1 WO2008081921 A1 WO 2008081921A1
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WIPO (PCT)
Prior art keywords
ceramic
manufacturing
same
hydrogen sensor
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/075261
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English (en)
French (fr)
Inventor
Katsuhiko Fukui
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Mikuni Corp
Original Assignee
Mikuni Corp
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Filing date
Publication date
Application filed by Mikuni Corp filed Critical Mikuni Corp
Priority to EP07860464.2A priority Critical patent/EP2098855B1/en
Priority to US12/521,234 priority patent/US8205482B2/en
Priority to JP2008552176A priority patent/JP5184375B2/ja
Publication of WO2008081921A1 publication Critical patent/WO2008081921A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

　　本発明により、基板（２）と、該基板（２）上に形成されてなる検知膜（４）と、該検知膜（４）上に形成されてなる水素透過性保護膜（１０）とを有し、前記検知膜（４）は第１のセラミックス（６）と前記第１のセラミックス（６）に分散した希土類金属粒子（８）とからなり、前記保護膜（１０）は第２のセラミックス（１２）と前記第２のセラミックス（１２）中に分散した水素透過性金属粒子（１４）とからなる、水素センサ（１００）が開示される。検知膜（４）の厚みは５～１０００ｎｍ、水素透過性保護膜（１０）の厚みは５～４０ｎｍが好ましい。
PCT/JP2007/075261 2006-12-28 2007-12-28 水素センサ及びその製造方法 Ceased WO2008081921A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP07860464.2A EP2098855B1 (en) 2006-12-28 2007-12-28 Hydrogen sensor and method for manufacturing the same
US12/521,234 US8205482B2 (en) 2006-12-28 2007-12-28 Hydrogen sensor with detection film comprised of rare earth metal particles dispersed in a ceramic
JP2008552176A JP5184375B2 (ja) 2006-12-28 2007-12-28 水素センサ及びその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-356334 2006-12-28
JP2006356334 2006-12-28

Publications (1)

Publication Number Publication Date
WO2008081921A1 true WO2008081921A1 (ja) 2008-07-10

Family

ID=39588601

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/075261 Ceased WO2008081921A1 (ja) 2006-12-28 2007-12-28 水素センサ及びその製造方法

Country Status (4)

Country Link
US (1) US8205482B2 (ja)
EP (1) EP2098855B1 (ja)
JP (1) JP5184375B2 (ja)
WO (1) WO2008081921A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210468A (ja) * 2009-03-11 2010-09-24 Mikuni Corp 水素センサ及びその製造方法
JP2015197343A (ja) * 2014-03-31 2015-11-09 国立大学法人岩手大学 水素センサ
JP2017075802A (ja) * 2015-10-13 2017-04-20 株式会社ミクニ 水素センサおよびその製造方法
JP2023048378A (ja) * 2021-09-28 2023-04-07 パナソニックホールディングス株式会社 ガスセンサ装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5452140B2 (ja) * 2009-09-03 2014-03-26 日本航空電子工業株式会社 水素検出用表面プラズモン共鳴素子、表面プラズモン共鳴式光学水素検出器及び表面プラズモン共鳴を利用して光学的に水素を検出する方法
DE102010032075A1 (de) * 2010-07-23 2012-01-26 Eads Deutschland Gmbh Wasserstofferzeugung mittels hydrierten Polysilanen zum Betrieb von Brennstoffzellen
CN104902859A (zh) * 2012-10-04 2015-09-09 金童圭 用于幼儿及重病患者的大小便自动通知监控系统
EP3455613A4 (en) * 2016-05-12 2019-12-18 Maxwellian Inc. FIBER OPTICAL SENSOR
JP7017994B2 (ja) * 2017-08-08 2022-02-09 日東電工株式会社 ガス検知エレメント

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5780550A (en) * 1980-11-06 1982-05-20 Matsushita Electric Ind Co Ltd Detecting element for combustible gas and manufacture thereof
JPS62222153A (ja) * 1984-09-29 1987-09-30 Hiroshi Komiyama 金属と誘電体とを含むガス感応性複合体とその製造方法
JP2002535651A (ja) 1999-01-15 2002-10-22 アドバンスド．テクノロジー．マテリアルス．インコーポレイテッド 微細加工薄膜水素ガスセンサーおよびその製造方法および使用方法
EP1568991A1 (en) 2004-02-27 2005-08-31 Mikuni Corporation Hydrogen sensor and process for production thereof
JP2005274559A (ja) 2004-02-27 2005-10-06 Mikuni Corp 水素センサー及びその製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189553A (ja) * 1988-01-25 1989-07-28 Riken Corp ガスセンサー用酸化スズ半導体およびその製造方法
US6344271B1 (en) * 1998-11-06 2002-02-05 Nanoenergy Corporation Materials and products using nanostructured non-stoichiometric substances
US6006582A (en) * 1998-03-17 1999-12-28 Advanced Technology Materials, Inc. Hydrogen sensor utilizing rare earth metal thin film detection element
US6596236B2 (en) * 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
DE10011562C2 (de) * 2000-03-09 2003-05-22 Daimler Chrysler Ag Gassensor
US6555159B2 (en) * 2000-12-18 2003-04-29 Delphi Technologies, Inc. Coating for gas sensors
US6562747B2 (en) * 2000-12-19 2003-05-13 Delphi Technologies, Inc. Gas sensor electrolyte
US7361386B2 (en) * 2002-07-22 2008-04-22 The Regents Of The University Of California Functional coatings for the reduction of oxygen permeation and stress and method of forming the same
US20040093928A1 (en) * 2002-11-20 2004-05-20 Dimeo Frank Rare earth metal sensor
US7393392B2 (en) * 2004-02-27 2008-07-01 Mikuni Corporation Hydrogen-permeable membrane and process for production thereof
US20050214170A1 (en) * 2004-03-23 2005-09-29 Webasto Ag Gas sensor and process for producing a gas sensor
JP4056987B2 (ja) * 2004-04-28 2008-03-05 アルプス電気株式会社 水素センサ及び水素の検知方法
US9011778B2 (en) * 2006-10-12 2015-04-21 Nextech Materials, Ltd. Hydrogen sensitive composite material, hydrogen gas sensor, and sensor for detecting hydrogen and other gases with improved baseline resistance

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5780550A (en) * 1980-11-06 1982-05-20 Matsushita Electric Ind Co Ltd Detecting element for combustible gas and manufacture thereof
JPS62222153A (ja) * 1984-09-29 1987-09-30 Hiroshi Komiyama 金属と誘電体とを含むガス感応性複合体とその製造方法
JP2002535651A (ja) 1999-01-15 2002-10-22 アドバンスド．テクノロジー．マテリアルス．インコーポレイテッド 微細加工薄膜水素ガスセンサーおよびその製造方法および使用方法
EP1568991A1 (en) 2004-02-27 2005-08-31 Mikuni Corporation Hydrogen sensor and process for production thereof
JP2005274559A (ja) 2004-02-27 2005-10-06 Mikuni Corp 水素センサー及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2098855A4 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210468A (ja) * 2009-03-11 2010-09-24 Mikuni Corp 水素センサ及びその製造方法
JP2015197343A (ja) * 2014-03-31 2015-11-09 国立大学法人岩手大学 水素センサ
JP2017075802A (ja) * 2015-10-13 2017-04-20 株式会社ミクニ 水素センサおよびその製造方法
WO2017065205A1 (ja) * 2015-10-13 2017-04-20 株式会社ミクニ 水素センサおよびその製造方法
JP2023048378A (ja) * 2021-09-28 2023-04-07 パナソニックホールディングス株式会社 ガスセンサ装置

Also Published As

Publication number Publication date
US20100089123A1 (en) 2010-04-15
JP5184375B2 (ja) 2013-04-17
US8205482B2 (en) 2012-06-26
EP2098855A1 (en) 2009-09-09
EP2098855B1 (en) 2015-12-09
EP2098855A4 (en) 2013-01-09
JPWO2008081921A1 (ja) 2010-04-30

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