WO2008111291A1 - 加速度センサ - Google Patents

加速度センサ Download PDF

Info

Publication number
WO2008111291A1
WO2008111291A1 PCT/JP2008/000458 JP2008000458W WO2008111291A1 WO 2008111291 A1 WO2008111291 A1 WO 2008111291A1 JP 2008000458 W JP2008000458 W JP 2008000458W WO 2008111291 A1 WO2008111291 A1 WO 2008111291A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
section
facing
acceleration sensor
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/000458
Other languages
English (en)
French (fr)
Inventor
Takeshi Uemura
Toshiyuki Nozoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to US12/529,675 priority Critical patent/US8413510B2/en
Priority to EP08720344A priority patent/EP2110672B1/en
Publication of WO2008111291A1 publication Critical patent/WO2008111291A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)

Abstract

　加速度センサは、被検出物に固定されるよう構成された固定部と、固定部に接続された可撓部と、可撓部を介して固定部と連結した錘部と、第１の対向電極部と、第２の対向電極部とを備える。第１の対向電極部は、錘部上に設けられた第１の電極と、第１の電極から離れて第１の電極と対向する第２の電極とを含み第１の静電容量を形成する。第２の対向電極部は、錘部上に設けられた第３の電極と、第３の電極から離れて第３の電極と対向する第４の電極とを含み、第２の静電容量を形成する。第１の電極と第３の電極とは第１の方向に配列される。第２の電極と第４の電極は第１の電極と第３の電極から離れて第１の電極と第３の電極と第１の方向に直角の第２の方向でそれぞれ対向する。第１と第２の静電容量とに基づいて被検出物の加速度の第１の方向の成分を検出する。第１と第２の対向電極部とに制御電圧が印加される。第１と第２の静電容量が共に小さくなった場合と、第１と第２の静電容量が共に大きくなった場合には、制御電圧を変える。この加速度センサは、加速度を高精度で検出できる。
PCT/JP2008/000458 2007-03-09 2008-03-06 加速度センサ Ceased WO2008111291A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/529,675 US8413510B2 (en) 2007-03-09 2008-03-06 Acceleration sensor
EP08720344A EP2110672B1 (en) 2007-03-09 2008-03-06 Acceleration sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-059449 2007-03-09
JP2007059449A JP5631529B2 (ja) 2007-03-09 2007-03-09 加速度センサ

Publications (1)

Publication Number Publication Date
WO2008111291A1 true WO2008111291A1 (ja) 2008-09-18

Family

ID=39759235

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000458 Ceased WO2008111291A1 (ja) 2007-03-09 2008-03-06 加速度センサ

Country Status (4)

Country Link
US (1) US8413510B2 (ja)
EP (1) EP2110672B1 (ja)
JP (1) JP5631529B2 (ja)
WO (1) WO2008111291A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008059757A1 (en) * 2006-11-14 2008-05-22 Panasonic Corporation Sensor
US8117914B2 (en) * 2007-02-20 2012-02-21 Panasonic Corporation Inertia force sensor and composite sensor for detecting inertia force
DE102009001847B4 (de) 2009-03-25 2022-07-28 Robert Bosch Gmbh Mikromechanisches Bauteil, Sensorvorrichtung mit einem mikromechanischen Bauteil und Verfahren zum Betreiben eines mikromechanischen Bauteils
WO2017160899A1 (en) 2016-03-15 2017-09-21 The Procter & Gamble Company Method and apparatus for manufacturing an absorbent article including an ultra short pulse laser source

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04278464A (ja) * 1991-03-05 1992-10-05 Nec Corp 半導体加速度センサ
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JPH10177034A (ja) 1996-12-17 1998-06-30 Sumitomo Precision Prod Co Ltd 静電容量型加速度センサとその製造方法
JPH11248741A (ja) * 1998-02-26 1999-09-17 Omron Corp 静電容量型多軸加速度センサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3124710B2 (ja) 1995-07-28 2001-01-15 住友精密工業株式会社 静電容量の変化を利用したセンサ用信号処理回路
US5806365A (en) * 1996-04-30 1998-09-15 Motorola, Inc. Acceleration sensing device on a support substrate and method of operation
WO2002018875A1 (en) * 2000-08-30 2002-03-07 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
US20030033850A1 (en) * 2001-08-09 2003-02-20 Challoner A. Dorian Cloverleaf microgyroscope with electrostatic alignment and tuning
US6910379B2 (en) * 2003-10-29 2005-06-28 Honeywell International, Inc. Out-of-plane compensation suspension for an accelerometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04278464A (ja) * 1991-03-05 1992-10-05 Nec Corp 半導体加速度センサ
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JPH10177034A (ja) 1996-12-17 1998-06-30 Sumitomo Precision Prod Co Ltd 静電容量型加速度センサとその製造方法
JPH11248741A (ja) * 1998-02-26 1999-09-17 Omron Corp 静電容量型多軸加速度センサ

Also Published As

Publication number Publication date
EP2110672A1 (en) 2009-10-21
JP5631529B2 (ja) 2014-11-26
US8413510B2 (en) 2013-04-09
EP2110672B1 (en) 2013-02-27
JP2008224262A (ja) 2008-09-25
US20100107764A1 (en) 2010-05-06
EP2110672A4 (en) 2012-04-04

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