WO2008117608A1 - プラズマ処理装置 - Google Patents

プラズマ処理装置 Download PDF

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Publication number
WO2008117608A1
WO2008117608A1 PCT/JP2008/053219 JP2008053219W WO2008117608A1 WO 2008117608 A1 WO2008117608 A1 WO 2008117608A1 JP 2008053219 W JP2008053219 W JP 2008053219W WO 2008117608 A1 WO2008117608 A1 WO 2008117608A1
Authority
WO
WIPO (PCT)
Prior art keywords
cooling
processing chamber
unit
space
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/053219
Other languages
English (en)
French (fr)
Inventor
Toshihiro Hayami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Precision Products Co Ltd
Original Assignee
Sumitomo Precision Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Precision Products Co Ltd filed Critical Sumitomo Precision Products Co Ltd
Priority to US12/593,526 priority Critical patent/US8852388B2/en
Priority to KR1020097015654A priority patent/KR101412543B1/ko
Priority to EP08711948A priority patent/EP2131390A4/en
Publication of WO2008117608A1 publication Critical patent/WO2008117608A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H10P50/244—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials comprising alternated and repeated etching and passivation steps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4411—Cooling of the reaction chamber walls

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

　本発明は、低コストな構成で効率的且つ応答性良く処理チャンバの内面を温度制御することができるプラズマ処理装置に関する。プラズマ処理装置１は、処理チャンバ１１、処理ガス供給装置２０、排気装置４０、コイル２３、高周波電源２４、ヒータ２６、冷却装置３０、制御装置５０を備える。冷却装置３０は、処理チャンバ１１と間隔を隔てて対向する冷却部材３２と、冷却部材３２の冷却流路３２ａ内に冷却流体を供給，循環させる冷却流体供給部３１と、冷却部材３２と処理チャンバ１１との間に設けられた環状のシール部材３５，３６とから構成され、排気装置４０は、シール部材３５，３６、冷却部材３２、処理チャンバ１１に囲まれた空間Ｓ内を減圧する。制御装置５０は、排気装置４０を制御して、コイル２３に高周波電力を印加していないときには空間Ｓ内を減圧し、コイル２３に高周波電力を印加しているときには空間Ｓ内を大気圧とする。 　
PCT/JP2008/053219 2007-03-28 2008-02-26 プラズマ処理装置 Ceased WO2008117608A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/593,526 US8852388B2 (en) 2007-03-28 2008-02-26 Plasma processor
KR1020097015654A KR101412543B1 (ko) 2007-03-28 2008-02-26 플라즈마 처리 장치
EP08711948A EP2131390A4 (en) 2007-03-28 2008-02-26 PLASMA PROCESSOR

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007083966A JP2008244224A (ja) 2007-03-28 2007-03-28 プラズマ処理装置
JP2007-083966 2007-03-28

Publications (1)

Publication Number Publication Date
WO2008117608A1 true WO2008117608A1 (ja) 2008-10-02

Family

ID=39788347

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053219 Ceased WO2008117608A1 (ja) 2007-03-28 2008-02-26 プラズマ処理装置

Country Status (7)

Country Link
US (1) US8852388B2 (ja)
EP (1) EP2131390A4 (ja)
JP (1) JP2008244224A (ja)
KR (1) KR101412543B1 (ja)
CN (1) CN101647100A (ja)
TW (1) TW200845194A (ja)
WO (1) WO2008117608A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI686841B (zh) * 2017-12-20 2020-03-01 美商應用材料股份有限公司 雙通道餘弦角線圈組件

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008244224A (ja) * 2007-03-28 2008-10-09 Sumitomo Precision Prod Co Ltd プラズマ処理装置
JP5430192B2 (ja) * 2009-03-19 2014-02-26 東京エレクトロン株式会社 温度調節装置、温度調節方法、基板処理装置及び対向電極
US20110061810A1 (en) * 2009-09-11 2011-03-17 Applied Materials, Inc. Apparatus and Methods for Cyclical Oxidation and Etching
US20110065276A1 (en) * 2009-09-11 2011-03-17 Applied Materials, Inc. Apparatus and Methods for Cyclical Oxidation and Etching
US20110061812A1 (en) * 2009-09-11 2011-03-17 Applied Materials, Inc. Apparatus and Methods for Cyclical Oxidation and Etching
JP5026549B2 (ja) * 2010-04-08 2012-09-12 シャープ株式会社 加熱制御システム、それを備えた成膜装置、および温度制御方法
US9279722B2 (en) 2012-04-30 2016-03-08 Agilent Technologies, Inc. Optical emission system including dichroic beam combiner
CN105719965A (zh) * 2014-12-04 2016-06-29 北京北方微电子基地设备工艺研究中心有限责任公司 二氧化硅基片的刻蚀方法和刻蚀设备
CN104979189B (zh) * 2015-06-29 2017-12-08 北京工业大学 一种基于基底晶向调控制备规则图形的等离子体刻蚀方法
JP6077147B2 (ja) * 2016-01-21 2017-02-08 Ｓｐｐテクノロジーズ株式会社 プラズマ基板処理装置、その制御プログラム、これを記録したコンピュータ読み取り可能な記録媒体
JP6869034B2 (ja) * 2017-01-17 2021-05-12 東京エレクトロン株式会社 プラズマ処理装置
SG11202002510YA (en) * 2017-09-20 2020-04-29 Kokusai Electric Corp Substrate processing apparatus, method of manufacturing semiconductor device, and program
KR102812192B1 (ko) * 2018-05-21 2025-05-26 도쿄엘렉트론가부시키가이샤 기판 처리 장치
US11488808B2 (en) * 2018-11-30 2022-11-01 Tokyo Electron Limited Plasma processing apparatus, calculation method, and calculation program
KR102120494B1 (ko) * 2019-07-15 2020-06-09 주식회사 테스 기판처리장치
CN112663028B (zh) * 2020-02-10 2023-04-14 拉普拉斯新能源科技股份有限公司 一种pecvd镀膜机
CN119905397A (zh) * 2023-10-27 2025-04-29 中微半导体设备(上海)股份有限公司 一种等离子体工艺方法及等离子体处理设备
US20250380339A1 (en) * 2024-06-07 2025-12-11 Applied Materials, Inc. Baffle arrangement for lamp cooling

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09275092A (ja) 1996-04-05 1997-10-21 Sony Corp プラズマ処理装置
JP2001156047A (ja) * 1999-11-30 2001-06-08 Mitsubishi Electric Corp 半導体製造装置
JP2003514390A (ja) * 1999-11-15 2003-04-15 ラム リサーチ コーポレーション プラズマ処理装置用温度制御システム
JP2003249541A (ja) * 2002-02-26 2003-09-05 Hitachi High-Technologies Corp ウエハステージ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2755876B2 (ja) * 1992-07-30 1998-05-25 株式会社東芝 熱処理成膜装置
US5567267A (en) * 1992-11-20 1996-10-22 Tokyo Electron Limited Method of controlling temperature of susceptor
JP3257328B2 (ja) * 1995-03-16 2002-02-18 株式会社日立製作所 プラズマ処理装置及びプラズマ処理方法
JP2001068538A (ja) * 1999-06-21 2001-03-16 Tokyo Electron Ltd 電極構造、載置台構造、プラズマ処理装置及び処理装置
KR20010056330A (ko) * 1999-12-15 2001-07-04 황 철 주 반도체소자 제조장치
AU2002240261A1 (en) * 2001-03-02 2002-09-19 Tokyo Electron Limited Method and apparatus for active temperature control of susceptors
US6646233B2 (en) * 2002-03-05 2003-11-11 Hitachi High-Technologies Corporation Wafer stage for wafer processing apparatus and wafer processing method
JP4186644B2 (ja) * 2003-02-17 2008-11-26 株式会社Ｉｈｉ 真空処理装置の冷却装置
US20040182315A1 (en) * 2003-03-17 2004-09-23 Tokyo Electron Limited Reduced maintenance chemical oxide removal (COR) processing system
US7029536B2 (en) * 2003-03-17 2006-04-18 Tokyo Electron Limited Processing system and method for treating a substrate
US7079760B2 (en) * 2003-03-17 2006-07-18 Tokyo Electron Limited Processing system and method for thermally treating a substrate
US6951821B2 (en) * 2003-03-17 2005-10-04 Tokyo Electron Limited Processing system and method for chemically treating a substrate
US7815740B2 (en) * 2005-03-18 2010-10-19 Tokyo Electron Limited Substrate mounting table, substrate processing apparatus and substrate processing method
US8137465B1 (en) * 2005-04-26 2012-03-20 Novellus Systems, Inc. Single-chamber sequential curing of semiconductor wafers
US20070077354A1 (en) * 2005-09-30 2007-04-05 Applied Materials, Inc. Thermal conditioning plate with gas gap leak
JP2008244224A (ja) * 2007-03-28 2008-10-09 Sumitomo Precision Prod Co Ltd プラズマ処理装置
JP5417338B2 (ja) * 2007-10-31 2014-02-12 ラム リサーチ コーポレーション 冷却液と構成部品本体との間の熱伝導性を制御するためにガス圧を使用する温度制御モジュール及び温度制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09275092A (ja) 1996-04-05 1997-10-21 Sony Corp プラズマ処理装置
JP2003514390A (ja) * 1999-11-15 2003-04-15 ラム リサーチ コーポレーション プラズマ処理装置用温度制御システム
JP2001156047A (ja) * 1999-11-30 2001-06-08 Mitsubishi Electric Corp 半導体製造装置
JP2003249541A (ja) * 2002-02-26 2003-09-05 Hitachi High-Technologies Corp ウエハステージ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2131390A4

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI686841B (zh) * 2017-12-20 2020-03-01 美商應用材料股份有限公司 雙通道餘弦角線圈組件

Also Published As

Publication number Publication date
CN101647100A (zh) 2010-02-10
JP2008244224A (ja) 2008-10-09
KR20090125043A (ko) 2009-12-03
EP2131390A1 (en) 2009-12-09
US20100043973A1 (en) 2010-02-25
US8852388B2 (en) 2014-10-07
KR101412543B1 (ko) 2014-06-26
TW200845194A (en) 2008-11-16
EP2131390A4 (en) 2011-08-24

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