WO2008129932A1 - 放電ランプ、接続用ケーブル、光源装置、及び露光装置 - Google Patents

放電ランプ、接続用ケーブル、光源装置、及び露光装置 Download PDF

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Publication number
WO2008129932A1
WO2008129932A1 PCT/JP2008/056719 JP2008056719W WO2008129932A1 WO 2008129932 A1 WO2008129932 A1 WO 2008129932A1 JP 2008056719 W JP2008056719 W JP 2008056719W WO 2008129932 A1 WO2008129932 A1 WO 2008129932A1
Authority
WO
WIPO (PCT)
Prior art keywords
cable
ferrule
discharge lamp
light source
connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/056719
Other languages
English (en)
French (fr)
Inventor
Takayuki Kikuchi
Hiroshi Kitano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR1020197025023A priority Critical patent/KR102331533B1/ko
Priority to KR1020157011013A priority patent/KR101643515B1/ko
Priority to KR1020167019854A priority patent/KR101844459B1/ko
Priority to KR1020217038120A priority patent/KR20210147092A/ko
Priority to EP15165878.8A priority patent/EP2985526B1/en
Priority to EP19186528.6A priority patent/EP3617588B1/en
Priority to EP08739826.9A priority patent/EP2143995B1/en
Priority to KR1020187008662A priority patent/KR102016673B1/ko
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to CN2008800009117A priority patent/CN101548132B/zh
Priority to KR1020147030352A priority patent/KR20140141695A/ko
Publication of WO2008129932A1 publication Critical patent/WO2008129932A1/ja
Priority to US12/576,921 priority patent/US8334654B2/en
Anticipated expiration legal-status Critical
Priority to US13/652,449 priority patent/US9165738B2/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/62—Connection of wires protruding from the vessel to connectors carried by the separate part
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/56—Cooling arrangements using liquid coolants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)

Abstract

　放電ランプの口金部材に対する冷却作用が大きい光源装置である。電源（３２）及び送風装置（３４）側のコネクタ（４１）と放電ランプ（１）の口金側コネクタ（５２）とを、電力ケーブル（３３Ａ）内に送風用配管（３５Ａ）が収納された連結ケーブル（５７）によって連結する。電源（３２）からの電力を連結ケーブル（５７）の電力ケーブル（３３Ａ）、口金側コネクタ（５２）、及び流路折り曲げ部材（５１）を介して口金部（２８）に供給し、送風装置（３４）からの冷風を連結ケーブル（５７）の送風用配管（３５Ａ）と、口金側コネクタ（５２）及び流路折り曲げ部材（５１）内の送風路とを介して口金部（２８）の溝部（２８ｂ）に供給する。
PCT/JP2008/056719 2007-04-12 2008-04-03 放電ランプ、接続用ケーブル、光源装置、及び露光装置 Ceased WO2008129932A1 (ja)

Priority Applications (12)

Application Number Priority Date Filing Date Title
EP08739826.9A EP2143995B1 (en) 2007-04-12 2008-04-03 Discharge lamp, cable for connection, light source device, and exposure device
KR1020167019854A KR101844459B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020217038120A KR20210147092A (ko) 2007-04-12 2008-04-03 방전램프
EP15165878.8A EP2985526B1 (en) 2007-04-12 2008-04-03 Discharge lamp, light source apparatus, and exposure apparatus
EP19186528.6A EP3617588B1 (en) 2007-04-12 2008-04-03 Discharge lamp, connecting cable. light source apparatus, and exposure apparatus
KR1020187008662A KR102016673B1 (ko) 2007-04-12 2008-04-03 방전램프
CN2008800009117A CN101548132B (zh) 2007-04-12 2008-04-03 放电灯、连接用线缆、光源装置及曝光装置
KR1020197025023A KR102331533B1 (ko) 2007-04-12 2008-04-03 방전램프
KR1020157011013A KR101643515B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020147030352A KR20140141695A (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
US12/576,921 US8334654B2 (en) 2007-04-12 2009-10-09 Discharge lamp, connecting cable, light source apparatus, and exposure apparatus
US13/652,449 US9165738B2 (en) 2007-04-12 2012-10-15 Discharge lamp, connecting cable, light source apparatus, and exposure apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US90765607P 2007-04-12 2007-04-12
US60/907,656 2007-04-12

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/576,921 Continuation US8334654B2 (en) 2007-04-12 2009-10-09 Discharge lamp, connecting cable, light source apparatus, and exposure apparatus

Publications (1)

Publication Number Publication Date
WO2008129932A1 true WO2008129932A1 (ja) 2008-10-30

Family

ID=39875460

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/056719 Ceased WO2008129932A1 (ja) 2007-04-12 2008-04-03 放電ランプ、接続用ケーブル、光源装置、及び露光装置

Country Status (7)

Country Link
US (1) US8334654B2 (ja)
EP (3) EP2143995B1 (ja)
JP (2) JP5327423B2 (ja)
KR (7) KR102331533B1 (ja)
CN (4) CN102522316B (ja)
TW (1) TWI417932B (ja)
WO (1) WO2008129932A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014199938A (ja) * 2014-06-09 2014-10-23 株式会社ニコン メンテナンス方法
JP2016170430A (ja) * 2016-05-12 2016-09-23 株式会社ニコン メンテナンス方法
JP2018146967A (ja) * 2018-04-11 2018-09-20 株式会社ニコン 光源装置、露光装置、ランプ、メンテナンス方法およびデバイス製造方法
JP2020060798A (ja) * 2020-01-09 2020-04-16 株式会社ニコン 光源装置、露光装置、ランプ、メンテナンス方法およびデバイス製造方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5287204B2 (ja) * 2008-12-12 2013-09-11 株式会社ニコン 光源装置、露光装置、及びデバイス製造方法
JP6332438B2 (ja) * 2014-03-28 2018-05-30 株式会社ニコン 放電ランプ、放電ランプの製造方法、放電ランプの交換方法及び点灯方法、光源装置、露光装置、並びにデバイス製造方法
JP6362095B2 (ja) * 2014-06-17 2018-07-25 キヤノン株式会社 照明装置、露光装置、調整方法、及び、物品の製造方法
JP2016111268A (ja) * 2014-12-09 2016-06-20 キヤノン株式会社 冷却装置、照明光学系、露光装置、並びに物品の製造方法
JP6494339B2 (ja) * 2015-03-10 2019-04-03 キヤノン株式会社 照明光学系、露光装置、及び物品の製造方法
JP7481115B2 (ja) 2017-01-05 2024-05-10 ラジウス ファーマシューティカルズ，インコーポレイテッド Ｒａｄ１９０１－２ｈｃｌの多形性形態
JP7178240B2 (ja) * 2018-11-14 2022-11-25 東京エレクトロン株式会社 光照射装置
EP3924328A1 (en) 2019-02-12 2021-12-22 Radius Pharmaceuticals, Inc. Processes and compounds
WO2021053945A1 (ja) * 2019-09-17 2021-03-25 ウシオ電機株式会社 ショートアーク型放電ランプおよび光照射装置
JP7394661B2 (ja) * 2020-03-09 2023-12-08 東京エレクトロン株式会社 基板処理装置
JP7427527B2 (ja) * 2020-05-25 2024-02-05 キヤノン株式会社 露光装置及び物品の製造方法
JP7520675B2 (ja) * 2020-10-02 2024-07-23 キヤノン株式会社 光源装置、露光装置および物品製造方法

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JPH01283898A (ja) 1988-05-11 1989-11-15 Yagi Antenna Co Ltd チップ型部品の塔載方法
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JPH0432154A (ja) * 1990-05-25 1992-02-04 Iwasaki Electric Co Ltd メタルハライドランプ装置
US5493168A (en) 1992-05-11 1996-02-20 Patent-Treuhand-Gesellschaft F. Elektrische Gluehlampen Mbh Electric lamp subject to high operating temperatures
JPH09213129A (ja) 1996-02-05 1997-08-15 Ushio Inc 光源装置
WO1999049504A1 (fr) 1998-03-26 1999-09-30 Nikon Corporation Procede et systeme d'exposition par projection
WO2004019128A2 (en) 2002-08-23 2004-03-04 Nikon Corporation Projection optical system and method for photolithography and exposure apparatus and method using same
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JPS63160192A (ja) * 1986-12-23 1988-07-02 株式会社明電舎 高周波加熱装置の接続導体
JPH01283898A (ja) 1988-05-11 1989-11-15 Yagi Antenna Co Ltd チップ型部品の塔載方法
JPH0364811A (ja) * 1989-07-31 1991-03-20 Okazaki Seisakusho:Kk 中空心線ｍｉケーブルと中空心線ｍｉケーブルの製造方法
JPH0432154A (ja) * 1990-05-25 1992-02-04 Iwasaki Electric Co Ltd メタルハライドランプ装置
US5493168A (en) 1992-05-11 1996-02-20 Patent-Treuhand-Gesellschaft F. Elektrische Gluehlampen Mbh Electric lamp subject to high operating temperatures
JPH09213129A (ja) 1996-02-05 1997-08-15 Ushio Inc 光源装置
WO1999049504A1 (fr) 1998-03-26 1999-09-30 Nikon Corporation Procede et systeme d'exposition par projection
US6778257B2 (en) 2001-07-24 2004-08-17 Asml Netherlands B.V. Imaging apparatus
WO2004019128A2 (en) 2002-08-23 2004-03-04 Nikon Corporation Projection optical system and method for photolithography and exposure apparatus and method using same

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014199938A (ja) * 2014-06-09 2014-10-23 株式会社ニコン メンテナンス方法
JP2016170430A (ja) * 2016-05-12 2016-09-23 株式会社ニコン メンテナンス方法
JP2018146967A (ja) * 2018-04-11 2018-09-20 株式会社ニコン 光源装置、露光装置、ランプ、メンテナンス方法およびデバイス製造方法
JP2020060798A (ja) * 2020-01-09 2020-04-16 株式会社ニコン 光源装置、露光装置、ランプ、メンテナンス方法およびデバイス製造方法

Also Published As

Publication number Publication date
CN101548132A (zh) 2009-09-30
KR101844459B1 (ko) 2018-04-03
US20100118287A1 (en) 2010-05-13
KR101643515B1 (ko) 2016-07-27
KR20150056865A (ko) 2015-05-27
TWI417932B (zh) 2013-12-01
JP5605666B2 (ja) 2014-10-15
CN102522316B (zh) 2016-08-03
KR20160090912A (ko) 2016-08-01
CN103489746A (zh) 2014-01-01
KR20190102306A (ko) 2019-09-03
KR101580333B1 (ko) 2015-12-23
EP2985526B1 (en) 2019-07-24
KR20140141695A (ko) 2014-12-10
CN102446669A (zh) 2012-05-09
KR102016673B1 (ko) 2019-08-30
KR20100014217A (ko) 2010-02-10
EP3617588B1 (en) 2021-03-24
CN102446669B (zh) 2015-06-24
JP5327423B2 (ja) 2013-10-30
KR20210147092A (ko) 2021-12-06
EP2143995B1 (en) 2015-07-01
CN101548132B (zh) 2013-09-11
EP2143995A4 (en) 2011-05-11
TW200905720A (en) 2009-02-01
CN102522316A (zh) 2012-06-27
JP2013258152A (ja) 2013-12-26
KR20180033609A (ko) 2018-04-03
EP2143995A1 (en) 2010-01-13
EP2985526A1 (en) 2016-02-17
US8334654B2 (en) 2012-12-18
CN103489746B (zh) 2016-08-17
EP3617588A1 (en) 2020-03-04
JP2008262911A (ja) 2008-10-30
KR102331533B1 (ko) 2021-11-26

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