WO2008133324A1 - 真空吸着ノズル - Google Patents

真空吸着ノズル Download PDF

Info

Publication number
WO2008133324A1
WO2008133324A1 PCT/JP2008/058042 JP2008058042W WO2008133324A1 WO 2008133324 A1 WO2008133324 A1 WO 2008133324A1 JP 2008058042 W JP2008058042 W JP 2008058042W WO 2008133324 A1 WO2008133324 A1 WO 2008133324A1
Authority
WO
WIPO (PCT)
Prior art keywords
suction nozzle
vacuum suction
electronic component
vacuum
rear end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/058042
Other languages
English (en)
French (fr)
Inventor
Hiroshi Hamashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2009511915A priority Critical patent/JP4852645B2/ja
Priority to EP08752116.7A priority patent/EP2154941A4/en
Publication of WO2008133324A1 publication Critical patent/WO2008133324A1/ja
Priority to US12/603,884 priority patent/US8112875B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool
    • H05K13/0409—Sucking devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/5313—Means to assemble electrical device
    • Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/5313—Means to assemble electrical device
    • Y10T29/53191—Means to apply vacuum directly to position or hold work part

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Manipulator (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

　電子部品を運搬するための真空吸着ノズルが高速で移動すると、空気との摩擦により静電気が発生する。帯電した真空吸着ノズルが電子部品に近づくと、静電気の反発力により、電子部品が吹き飛ぶことがあった。また、放電により電子部品が破壊する可能性があった。本発明の真空吸着ノズル１は、吸着物を真空吸着する吸着面２と、吸着面２と対向する後端面８と、吸着面２から後端面８に貫通した吸引孔３と、を備えたセラミックスから成る真空吸着ノズル１であって、真空吸着ノズル１は、吸着面２と後端面８との間の抵抗値が１０３～１０１１Ωであることを特徴とする。本発明の真空吸着ノズル１は、適当な抵抗値を有するので、発生した静電気を外部に除電でき、また放電が起こりにくい。
PCT/JP2008/058042 2007-04-25 2008-04-25 真空吸着ノズル Ceased WO2008133324A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009511915A JP4852645B2 (ja) 2007-04-25 2008-04-25 真空吸着ノズル
EP08752116.7A EP2154941A4 (en) 2007-04-25 2008-04-25 Vacuum suction nozzle
US12/603,884 US8112875B2 (en) 2007-04-25 2009-10-22 Vacuum suction nozzle for component mounting apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-115441 2007-04-25
JP2007115441 2007-04-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/603,884 Continuation-In-Part US8112875B2 (en) 2007-04-25 2009-10-22 Vacuum suction nozzle for component mounting apparatus

Publications (1)

Publication Number Publication Date
WO2008133324A1 true WO2008133324A1 (ja) 2008-11-06

Family

ID=39925770

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058042 Ceased WO2008133324A1 (ja) 2007-04-25 2008-04-25 真空吸着ノズル

Country Status (4)

Country Link
US (1) US8112875B2 (ja)
EP (1) EP2154941A4 (ja)
JP (1) JP4852645B2 (ja)
WO (1) WO2008133324A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010153421A (ja) * 2008-12-24 2010-07-08 Kyocera Corp 真空吸着ノズル
JP2010238754A (ja) * 2009-03-30 2010-10-21 Kyocera Corp マウントノズルおよびマウント装置
JPWO2013147037A1 (ja) * 2012-03-29 2015-12-14 京セラ株式会社 流路部材およびこれを備える熱交換器ならびに半導体製造装置
JP2016021542A (ja) * 2014-07-11 2016-02-04 株式会社長峰製作所 セラミックス製黒色ノズル
JP2016056037A (ja) * 2014-09-05 2016-04-21 国立大学法人 香川大学 複合酸化物セラミックスおよび半導体製造装置の構成部材
WO2019111384A1 (ja) * 2017-12-07 2019-06-13 株式会社Ｆｕｊｉ 部品実装用ノズル

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4852645B2 (ja) * 2007-04-25 2012-01-11 京セラ株式会社 真空吸着ノズル
DE102010055087A1 (de) * 2010-12-18 2012-01-19 Robert Bosch Gmbh Vorrichtung zum Anbringen von elektronischen Bauelementen an Bauelementeträgern
EP3560667B1 (en) * 2016-12-26 2021-08-11 Kyocera Corporation Knife
CN113387725B (zh) * 2021-06-30 2022-07-19 江西省萍乡市湘东石油化工填料厂 一种用于蜂窝陶瓷蓄热体表面改性锆刚玉料浆及其制浆方法、用途

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290700A (ja) 1988-09-28 1990-03-30 Sony Corp チップ部品マウント装置
JPH05275513A (ja) * 1992-03-27 1993-10-22 Kyocera Corp 半導体ウェハ保持装置
JP2000151200A (ja) * 1998-11-17 2000-05-30 Tenryuu Technics:Kk 電子部品装着装置
JP2003012368A (ja) * 2001-06-27 2003-01-15 Kyocera Corp 半導電性ジルコニア焼結体
JP2003045139A (ja) * 2001-07-30 2003-02-14 Kyocera Corp 磁気ディスク基板保持用スペーサ
JP2004196589A (ja) 2002-12-18 2004-07-15 Ngk Spark Plug Co Ltd セラミックス焼結体及びその製造方法
WO2005061188A1 (ja) * 2003-12-19 2005-07-07 Matsushita Electric Industrial Co., Ltd. 部品装着ヘッド、吸着ノズル、及び吸着ノズルの製造方法
JP2006108138A (ja) * 2004-09-30 2006-04-20 Matsushita Electric Ind Co Ltd 部品保持部材の照合方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2568623B2 (ja) * 1988-04-12 1997-01-08 松下電器産業株式会社 電子部品の実装方法
JPH10117099A (ja) 1996-10-14 1998-05-06 Kyocera Corp 光学測定用物体保持装置
US7389905B2 (en) * 1999-02-25 2008-06-24 Reiber Steven F Flip chip bonding tool tip
JP2003243718A (ja) * 2002-02-14 2003-08-29 Matsushita Electric Works Ltd 発光装置
US20070085085A1 (en) * 2005-08-08 2007-04-19 Reiber Steven F Dissipative pick and place tools for light wire and LED displays
JP4852645B2 (ja) * 2007-04-25 2012-01-11 京セラ株式会社 真空吸着ノズル

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290700A (ja) 1988-09-28 1990-03-30 Sony Corp チップ部品マウント装置
JPH05275513A (ja) * 1992-03-27 1993-10-22 Kyocera Corp 半導体ウェハ保持装置
JP2000151200A (ja) * 1998-11-17 2000-05-30 Tenryuu Technics:Kk 電子部品装着装置
JP2003012368A (ja) * 2001-06-27 2003-01-15 Kyocera Corp 半導電性ジルコニア焼結体
JP2003045139A (ja) * 2001-07-30 2003-02-14 Kyocera Corp 磁気ディスク基板保持用スペーサ
JP2004196589A (ja) 2002-12-18 2004-07-15 Ngk Spark Plug Co Ltd セラミックス焼結体及びその製造方法
WO2005061188A1 (ja) * 2003-12-19 2005-07-07 Matsushita Electric Industrial Co., Ltd. 部品装着ヘッド、吸着ノズル、及び吸着ノズルの製造方法
JP2006108138A (ja) * 2004-09-30 2006-04-20 Matsushita Electric Ind Co Ltd 部品保持部材の照合方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2154941A4

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010153421A (ja) * 2008-12-24 2010-07-08 Kyocera Corp 真空吸着ノズル
JP2010238754A (ja) * 2009-03-30 2010-10-21 Kyocera Corp マウントノズルおよびマウント装置
JPWO2013147037A1 (ja) * 2012-03-29 2015-12-14 京セラ株式会社 流路部材およびこれを備える熱交換器ならびに半導体製造装置
US10103047B2 (en) 2012-03-29 2018-10-16 Kyocera Corporation Flow path member, heat exchanger including the flow path member, and semiconductor manufacturing apparatus including the flow path member
JP2016021542A (ja) * 2014-07-11 2016-02-04 株式会社長峰製作所 セラミックス製黒色ノズル
JP2016056037A (ja) * 2014-09-05 2016-04-21 国立大学法人 香川大学 複合酸化物セラミックスおよび半導体製造装置の構成部材
WO2019111384A1 (ja) * 2017-12-07 2019-06-13 株式会社Ｆｕｊｉ 部品実装用ノズル
CN111373853A (zh) * 2017-12-07 2020-07-03 株式会社富士 元件安装用吸嘴
JPWO2019111384A1 (ja) * 2017-12-07 2020-11-19 株式会社Ｆｕｊｉ 部品実装用ノズル

Also Published As

Publication number Publication date
US20100037456A1 (en) 2010-02-18
JP4852645B2 (ja) 2012-01-11
EP2154941A1 (en) 2010-02-17
EP2154941A4 (en) 2017-03-15
US8112875B2 (en) 2012-02-14
JPWO2008133324A1 (ja) 2010-07-29

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