WO2008152559A3 - Controller for tunable mems capacitor - Google Patents

Controller for tunable mems capacitor Download PDF

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Publication number
WO2008152559A3
WO2008152559A3 PCT/IB2008/052253 IB2008052253W WO2008152559A3 WO 2008152559 A3 WO2008152559 A3 WO 2008152559A3 IB 2008052253 W IB2008052253 W IB 2008052253W WO 2008152559 A3 WO2008152559 A3 WO 2008152559A3
Authority
WO
WIPO (PCT)
Prior art keywords
capacitor
dielectric material
mems
tunable
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2008/052253
Other languages
French (fr)
Other versions
WO2008152559A2 (en
Inventor
Peter G Steeneken
Klaus Reimann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP BV
Original Assignee
NXP BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NXP BV filed Critical NXP BV
Priority to CN200880019916.4A priority Critical patent/CN101682315B/en
Priority to EP20080763249 priority patent/EP2168239A2/en
Priority to US12/663,829 priority patent/US8890543B2/en
Publication of WO2008152559A2 publication Critical patent/WO2008152559A2/en
Publication of WO2008152559A3 publication Critical patent/WO2008152559A3/en
Anticipated expiration legal-status Critical
Priority to US14/543,146 priority patent/US9576738B2/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01—Details
    • H01G5/013—Dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01—Details
    • H01G5/013—Dielectrics
    • H01G5/0134—Solid dielectrics
    • H01G5/0136—Solid dielectrics with movable electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/06—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03J—TUNING RESONANT CIRCUITS; SELECTING RESONANT CIRCUITS
    • H03J5/00—Discontinuous tuning; Selecting predetermined frequencies; Selecting frequency bands with or without continuous tuning in one or more of the bands, e.g. push-button tuning, turret tuner
    • H03J5/24—Discontinuous tuning; Selecting predetermined frequencies; Selecting frequency bands with or without continuous tuning in one or more of the bands, e.g. push-button tuning, turret tuner with a number of separate pretuned tuning circuits or separate tuning elements selectively brought into circuit, e.g. for waveband selection or for television channel selection
    • H03J5/248—Discontinuous tuning; Selecting predetermined frequencies; Selecting frequency bands with or without continuous tuning in one or more of the bands, e.g. push-button tuning, turret tuner with a number of separate pretuned tuning circuits or separate tuning elements selectively brought into circuit, e.g. for waveband selection or for television channel selection using electromechanical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G2005/02—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture having air, gas, or vacuum as the dielectric

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

A MEMS tunable capacitor comprises first and second opposing capacitor electrodes (10,12), wherein the second capacitor electrode (12) is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material (14) and a non- tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode (20) faces the movable second electrode (12) for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material (14) for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.
PCT/IB2008/052253 2007-06-13 2008-06-09 Controller for tunable mems capacitor Ceased WO2008152559A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN200880019916.4A CN101682315B (en) 2007-06-13 2008-06-09 Controller for Tunable MEMS Capacitors
EP20080763249 EP2168239A2 (en) 2007-06-13 2008-06-09 Tunable mems capacitor
US12/663,829 US8890543B2 (en) 2007-06-13 2008-06-09 Tunable MEMS capacitor
US14/543,146 US9576738B2 (en) 2007-06-13 2014-11-17 Tunable MEMS capacitor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07110209 2007-06-13
EP07110209.9 2007-06-13

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/663,829 A-371-Of-International US8890543B2 (en) 2007-06-13 2008-06-09 Tunable MEMS capacitor
US14/543,146 Continuation US9576738B2 (en) 2007-06-13 2014-11-17 Tunable MEMS capacitor

Publications (2)

Publication Number Publication Date
WO2008152559A2 WO2008152559A2 (en) 2008-12-18
WO2008152559A3 true WO2008152559A3 (en) 2009-02-05

Family

ID=39951510

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2008/052253 Ceased WO2008152559A2 (en) 2007-06-13 2008-06-09 Controller for tunable mems capacitor

Country Status (4)

Country Link
US (2) US8890543B2 (en)
EP (1) EP2168239A2 (en)
CN (1) CN101682315B (en)
WO (1) WO2008152559A2 (en)

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FR2940503B1 (en) * 2008-12-23 2011-03-04 Thales Sa MEMS COMPACT SWITCHING CAPACITOR
CN102341341B (en) * 2009-03-04 2014-04-30 Nxp股份有限公司 MEMS devices
EP2406172A1 (en) * 2009-03-11 2012-01-18 Nxp B.V. Mems electrostatic actuator
CN102176376A (en) * 2010-12-31 2011-09-07 航天时代电子技术股份有限公司 Wide adjustable capacitor based on MEMS (micro electron mechanical systems) relay
CN103732526B (en) * 2011-06-07 2016-04-06 维斯普瑞公司 For optimizing the system and method for current density in the MEMS capacitive device being integrated with CMOS
US9373447B2 (en) * 2011-08-19 2016-06-21 Cavendish Kinetics, Inc. Routing of MEMS variable capacitors for RF applications
WO2013033725A1 (en) 2011-09-02 2013-03-07 Cavendish Kinetics, Inc Mems variable capacitor with enhanced rf performance
US9048023B2 (en) * 2013-03-21 2015-06-02 MCV Technologies, Inc. Tunable capacitor
CN104555882B (en) * 2013-10-10 2016-03-23 原相科技股份有限公司 Microcomputer electric component and micro electronmechanical collocation structure
US9659717B2 (en) * 2014-02-18 2017-05-23 Analog Devices Global MEMS device with constant capacitance
US10164483B2 (en) * 2015-03-17 2018-12-25 Semiconductor Components Industries, Llc Tunable resonant inductive coil systems for wireless power transfer and near field communications
US9809720B2 (en) * 2015-07-06 2017-11-07 University Of Massachusetts Ferroelectric nanocomposite based dielectric inks for reconfigurable RF and microwave applications
CN109119248B (en) * 2017-06-23 2025-02-25 北京北方华创微电子装备有限公司 Adjustable capacitor and impedance matching device
US10497774B2 (en) 2017-10-23 2019-12-03 Blackberry Limited Small-gap coplanar tunable capacitors and methods for manufacturing thereof
US10332687B2 (en) * 2017-10-23 2019-06-25 Blackberry Limited Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof
US10622996B1 (en) * 2019-03-29 2020-04-14 Industrial Technology Research Institute Adjustable sensing capacitance microelectromechanical system (MEMS) apparatus
US10839992B1 (en) 2019-05-17 2020-11-17 Raytheon Company Thick film resistors having customizable resistances and methods of manufacture
WO2021015202A1 (en) * 2019-07-22 2021-01-28 トヨタ自動車株式会社 Actuator
GB2622774B (en) * 2022-09-22 2024-10-30 Africa New Energies Ltd Fractal capacitive sensor and non-invasive voltage measurement apparatus incorporating same

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EP0725408A2 (en) * 1995-02-01 1996-08-07 Murata Manufacturing Co., Ltd. Variable capacitor
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch
EP1383234A1 (en) * 2002-07-16 2004-01-21 Lucent Technologies Inc. Varactor with extended tuning range
US20040124497A1 (en) * 2002-09-16 2004-07-01 Xavier Rottenberg Switchable capacitor and method of making the same
WO2006117709A2 (en) * 2005-05-02 2006-11-09 Nxp B.V. Capacitive rf-mems device with integrated decoupling capacitor

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EP1383234A1 (en) * 2002-07-16 2004-01-21 Lucent Technologies Inc. Varactor with extended tuning range
US20040124497A1 (en) * 2002-09-16 2004-07-01 Xavier Rottenberg Switchable capacitor and method of making the same
WO2006117709A2 (en) * 2005-05-02 2006-11-09 Nxp B.V. Capacitive rf-mems device with integrated decoupling capacitor

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Also Published As

Publication number Publication date
EP2168239A2 (en) 2010-03-31
US8890543B2 (en) 2014-11-18
US20150092315A1 (en) 2015-04-02
CN101682315A (en) 2010-03-24
CN101682315B (en) 2012-08-29
WO2008152559A2 (en) 2008-12-18
US20100182731A1 (en) 2010-07-22
US9576738B2 (en) 2017-02-21

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