WO2009008282A1 - 超音波探触子及び超音波診断装置 - Google Patents

超音波探触子及び超音波診断装置 Download PDF

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Publication number
WO2009008282A1
WO2009008282A1 PCT/JP2008/061874 JP2008061874W WO2009008282A1 WO 2009008282 A1 WO2009008282 A1 WO 2009008282A1 JP 2008061874 W JP2008061874 W JP 2008061874W WO 2009008282 A1 WO2009008282 A1 WO 2009008282A1
Authority
WO
WIPO (PCT)
Prior art keywords
ultrasonic
cmut chip
diagnosing device
ultrasonic probe
lower electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/061874
Other languages
English (en)
French (fr)
Inventor
Katsunori Asafusa
Makoto Fukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Healthcare Manufacturing Ltd
Original Assignee
Hitachi Medical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Medical Corp filed Critical Hitachi Medical Corp
Priority to EP08777725.6A priority Critical patent/EP2168493A4/en
Priority to JP2009522584A priority patent/JP5329408B2/ja
Priority to US12/668,478 priority patent/US9089873B2/en
Priority to CN200880023913.8A priority patent/CN101686826B/zh
Publication of WO2009008282A1 publication Critical patent/WO2009008282A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

　上部電極又は下部電極に生じる寄生インピーダンスを低減させ、クロストークを低減させる超音波探触子及び超音波診断装置を提供する。 　複数の振動要素を有するcMUTチップ20と、cMUTチップ20の超音波照射側に音響レンズ26と、cMUTチップ20の背面にバッキング層22と、cMUTチップ20に接続される配線とを備える超音波探触子において、cMUTチップ20は複数の上部電極46と複数の下部電極48とを有し、下部電極48は2つ以上の箇所で配線に接続される。
PCT/JP2008/061874 2007-07-11 2008-07-01 超音波探触子及び超音波診断装置 Ceased WO2009008282A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP08777725.6A EP2168493A4 (en) 2007-07-11 2008-07-01 Ultrasonic probe, and ultrasonic diagnosing device
JP2009522584A JP5329408B2 (ja) 2007-07-11 2008-07-01 超音波探触子及び超音波診断装置
US12/668,478 US9089873B2 (en) 2007-07-11 2008-07-01 Ultrasonic probe and ultrasonic diagnostic apparatus
CN200880023913.8A CN101686826B (zh) 2007-07-11 2008-07-01 超声波探头及超声波诊断装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007181570 2007-07-11
JP2007-181570 2007-07-11

Publications (1)

Publication Number Publication Date
WO2009008282A1 true WO2009008282A1 (ja) 2009-01-15

Family

ID=40228460

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061874 Ceased WO2009008282A1 (ja) 2007-07-11 2008-07-01 超音波探触子及び超音波診断装置

Country Status (5)

Country Link
US (1) US9089873B2 (ja)
EP (1) EP2168493A4 (ja)
JP (1) JP5329408B2 (ja)
CN (1) CN101686826B (ja)
WO (1) WO2009008282A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010278582A (ja) * 2009-05-27 2010-12-09 Canon Inc 容量型機械電気変換素子
WO2012127737A1 (ja) * 2011-03-24 2012-09-27 オリンパスメディカルシステムズ株式会社 超音波振動子および超音波診断装置
WO2013027614A1 (ja) * 2011-08-19 2013-02-28 オリンパスメディカルシステムズ株式会社 超音波発生装置の製造方法、超音波処置装置の製造方法、超音波発生装置及び超音波処置装置
JP2013172799A (ja) * 2012-02-24 2013-09-05 Seiko Epson Corp 超音波装置、プローブ、電子機器、診断装置及び処理装置
EP2823897A2 (en) 2013-07-10 2015-01-14 Canon Kabushiki Kaisha Transducer and subject information acquisition apparatus
JP2016076985A (ja) * 2015-12-10 2016-05-12 キヤノン株式会社 トランスデューサ、被検体情報取得装置
JP2016208537A (ja) * 2016-07-27 2016-12-08 セイコーエプソン株式会社 超音波装置、プローブ、電子機器、診断装置及び処理装置

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JP2938630B2 (ja) 1991-09-18 1999-08-23 富士通株式会社 複数の処理方法を有するシステムにおける負荷制御方式
CN102770078A (zh) * 2010-02-26 2012-11-07 株式会社日立医疗器械 超声波探针和使用超声波探针的超声波摄像装置
JP5831000B2 (ja) * 2011-07-21 2015-12-09 ソニー株式会社 信号処理装置、制御方法、並びに信号処理システムおよび方法
EP2679167B1 (en) * 2012-02-01 2018-04-18 Olympus Corporation Ultrasonograph
JP5988786B2 (ja) 2012-09-07 2016-09-07 オリンパス株式会社 超音波ユニット及び超音波内視鏡
JP6234073B2 (ja) * 2013-06-07 2017-11-22 キヤノン株式会社 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置
JP6221582B2 (ja) * 2013-09-30 2017-11-01 セイコーエプソン株式会社 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置
JP2016535655A (ja) * 2013-11-12 2016-11-17 サバンチ ユニヴァーシティ 高密度焦点式超音波を使用して熱角膜形成術を行うための装置及び方法
CN105828962B (zh) 2013-12-12 2019-07-23 皇家飞利浦有限公司 单片集成的三电极cmut设备
US10549316B2 (en) 2014-12-11 2020-02-04 Koninklijke Philips N.V. Two-terminal CMUT device
RU2691926C2 (ru) * 2014-12-11 2019-06-18 Конинклейке Филипс Н.В. Катетер-преобразователь с расположенными в шахматном порядке рядами микромашинных ультразвуковых преобразователей
EP4516237A3 (en) 2020-05-19 2025-04-16 Coravie Medical, Inc. Injectable hemodynamic monitoring systems
US11504093B2 (en) * 2021-01-22 2022-11-22 Exo Imaging, Inc. Equalization for matrix based line imagers for ultrasound imaging systems
US12053330B2 (en) 2021-06-23 2024-08-06 Exo Imaging, Inc. Systems and methods for testing MEMS arrays and associated ASICs
US12650511B2 (en) 2022-01-06 2026-06-09 Exo Imaging, Inc. Full-array digital 3D ultrasound imaging system integrated with a matrix array transducer

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JP2004503313A (ja) * 2000-06-15 2004-02-05 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 容量性マイクロマシン超音波振動子
US20050096546A1 (en) * 2003-03-06 2005-05-05 Hazard Christopher R. Optimized switching configurations for reconfigurable arrays of sensor elements

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US6605043B1 (en) * 1998-11-19 2003-08-12 Acuson Corp. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
US6831394B2 (en) * 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
US7087023B2 (en) * 2003-02-14 2006-08-08 Sensant Corporation Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same
US7530952B2 (en) * 2004-04-01 2009-05-12 The Board Of Trustees Of The Leland Stanford Junior University Capacitive ultrasonic transducers with isolation posts
EP1761104A4 (en) * 2004-06-03 2016-12-28 Olympus Corp ULTRASONIC VIBRATOR OF THE ELECTROSTATIC CAPABILITY TYPE, METHOD OF MANUFACTURE, AND ELECTROSTATIC CAPACITY-TYPE ULTRASONIC PROBE
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CN101536547B (zh) * 2006-11-08 2013-05-22 株式会社日立医药 超声波探头及使用了其的超声波诊断装置
JP5026770B2 (ja) * 2006-11-14 2012-09-19 株式会社日立メディコ 超音波探触子及び超音波診断装置
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US20050096546A1 (en) * 2003-03-06 2005-05-05 Hazard Christopher R. Optimized switching configurations for reconfigurable arrays of sensor elements

Non-Patent Citations (2)

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XUECHENG JIN ET AL.: "Characterization of One-Dimensional Capacitive Micromachined Ultrasonic Immersion Transducer Arrays", IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, vol. 48, no. 3, May 2001 (2001-05-01), pages 750 - 760, XP008127346 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010278582A (ja) * 2009-05-27 2010-12-09 Canon Inc 容量型機械電気変換素子
US8512251B2 (en) 2011-03-24 2013-08-20 Olympus Medical Systems Corp. Ultrasound transducer and ultrasound diagnostic apparatus
WO2012127737A1 (ja) * 2011-03-24 2012-09-27 オリンパスメディカルシステムズ株式会社 超音波振動子および超音波診断装置
JP5153972B2 (ja) * 2011-03-24 2013-02-27 オリンパスメディカルシステムズ株式会社 超音波振動子および超音波診断装置
JP5363682B2 (ja) * 2011-08-19 2013-12-11 オリンパスメディカルシステムズ株式会社 超音波発生装置の製造方法、超音波処置装置の製造方法、超音波発生装置及び超音波処置装置
WO2013027614A1 (ja) * 2011-08-19 2013-02-28 オリンパスメディカルシステムズ株式会社 超音波発生装置の製造方法、超音波処置装置の製造方法、超音波発生装置及び超音波処置装置
US9184373B2 (en) 2011-08-19 2015-11-10 Olympus Corporation Manufacturing method of an ultrasonic generating device, and manufacturing method of an ultrasonic treatment device
JP2013172799A (ja) * 2012-02-24 2013-09-05 Seiko Epson Corp 超音波装置、プローブ、電子機器、診断装置及び処理装置
US9271699B2 (en) 2012-02-24 2016-03-01 Seiko Epson Corporation Ultrasonic device, probe, electronic instrument, diagnostic device, and processing device
US10478155B2 (en) 2012-02-24 2019-11-19 Seiko Epson Corporation Ultrasonic device, probe, electronic instrument, diagnostic device, and processing device
EP2823897A2 (en) 2013-07-10 2015-01-14 Canon Kabushiki Kaisha Transducer and subject information acquisition apparatus
JP2016076985A (ja) * 2015-12-10 2016-05-12 キヤノン株式会社 トランスデューサ、被検体情報取得装置
JP2016208537A (ja) * 2016-07-27 2016-12-08 セイコーエプソン株式会社 超音波装置、プローブ、電子機器、診断装置及び処理装置

Also Published As

Publication number Publication date
EP2168493A4 (en) 2017-05-31
CN101686826B (zh) 2012-10-10
CN101686826A (zh) 2010-03-31
US9089873B2 (en) 2015-07-28
JP5329408B2 (ja) 2013-10-30
US20100198070A1 (en) 2010-08-05
JPWO2009008282A1 (ja) 2010-09-09
EP2168493A1 (en) 2010-03-31

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