WO2009015984A3 - Waferfügeverfahren mit senterschritt, waferverbund sowie chip - Google Patents

Waferfügeverfahren mit senterschritt, waferverbund sowie chip Download PDF

Info

Publication number
WO2009015984A3
WO2009015984A3 PCT/EP2008/058652 EP2008058652W WO2009015984A3 WO 2009015984 A3 WO2009015984 A3 WO 2009015984A3 EP 2008058652 W EP2008058652 W EP 2008058652W WO 2009015984 A3 WO2009015984 A3 WO 2009015984A3
Authority
WO
WIPO (PCT)
Prior art keywords
wafer
chip
assemblage
joining method
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/058652
Other languages
English (en)
French (fr)
Other versions
WO2009015984A2 (de
Inventor
Dieter Donis
Jens Koenig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to EP08774763.0A priority Critical patent/EP2183185B1/de
Priority to JP2010518592A priority patent/JP5091318B2/ja
Priority to US12/600,415 priority patent/US20100148282A1/en
Publication of WO2009015984A2 publication Critical patent/WO2009015984A2/de
Publication of WO2009015984A3 publication Critical patent/WO2009015984A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00269—Bonding of solid lids or wafers to the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H10P90/1914—Preparing SOI wafers using bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/032—Gluing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/013—Manufacture or treatment of die-attach connectors
    • H10W72/01321—Manufacture or treatment of die-attach connectors using local deposition
    • H10W72/01323—Manufacture or treatment of die-attach connectors using local deposition in liquid form, e.g. by dispensing droplets or by screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/013—Manufacture or treatment of die-attach connectors
    • H10W72/01331—Manufacture or treatment of die-attach connectors using blanket deposition
    • H10W72/01333—Manufacture or treatment of die-attach connectors using blanket deposition in liquid form, e.g. spin coating, spray coating or immersion coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07331—Connecting techniques
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07331—Connecting techniques
    • H10W72/07332—Compression bonding, e.g. thermocompression bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07331—Connecting techniques
    • H10W72/07335—Applying EM radiation, e.g. induction heating or using a laser
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07331—Connecting techniques
    • H10W72/07336—Soldering or alloying
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07341—Controlling the bonding environment, e.g. atmosphere composition or temperature
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/321—Structures or relative sizes of die-attach connectors
    • H10W72/324—Die-attach connectors having multiple side-by-side cores
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/321—Structures or relative sizes of die-attach connectors
    • H10W72/325—Die-attach connectors having a filler embedded in a matrix
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/331—Shapes of die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/331—Shapes of die-attach connectors
    • H10W72/332—Plan-view shape, i.e. in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/351—Materials of die-attach connectors
    • H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/351—Materials of die-attach connectors
    • H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/59—Bond pads specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/921—Structures or relative sizes of bond pads
    • H10W72/923—Bond pads having multiple stacked layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/951—Materials of bond pads
    • H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/60—Seals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/20—Configurations of stacked chips
    • H10W90/297—Configurations of stacked chips characterised by the through-semiconductor vias [TSVs] in the stacked chips
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W95/00—Packaging processes not covered by the other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Die Bonding (AREA)
  • Wire Bonding (AREA)
  • Micromachines (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zum Fügen eines ersten Wafers (1) mit mindestens einem zweiten Wafer (2). Das Verfahren ist gekennzeichnet durch die Schritte: Aufbringen eines sinterfähigen Bondingmaterials (7) auf zumindest einen der Wafer (1, 2, 14) und Zusammenführen der Wafer (1, 2, 14) und Sintern des Bondingmaterials (7) durch Erhitzen. Ferner betrifft die Erfindung einen Waferverbund (10) sowie einen Chip.
PCT/EP2008/058652 2007-07-31 2008-07-04 Waferfügeverfahren mit senterschritt, waferverbund sowie chip Ceased WO2009015984A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08774763.0A EP2183185B1 (de) 2007-07-31 2008-07-04 Waferfügeverfahren mit sinterschritt, waferverbund sowie chip
JP2010518592A JP5091318B2 (ja) 2007-07-31 2008-07-04 ウェハ接合方法、ウェハ複合体並びにチップ
US12/600,415 US20100148282A1 (en) 2007-07-31 2008-07-04 Wafer joining method, wafer composite, and chip

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007035788.7 2007-07-31
DE102007035788A DE102007035788A1 (de) 2007-07-31 2007-07-31 Waferfügeverfahren, Waferverbund sowie Chip

Publications (2)

Publication Number Publication Date
WO2009015984A2 WO2009015984A2 (de) 2009-02-05
WO2009015984A3 true WO2009015984A3 (de) 2009-05-22

Family

ID=40175702

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/058652 Ceased WO2009015984A2 (de) 2007-07-31 2008-07-04 Waferfügeverfahren mit senterschritt, waferverbund sowie chip

Country Status (6)

Country Link
US (1) US20100148282A1 (de)
EP (1) EP2183185B1 (de)
JP (1) JP5091318B2 (de)
KR (1) KR101576443B1 (de)
DE (1) DE102007035788A1 (de)
WO (1) WO2009015984A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009008926B4 (de) 2009-02-13 2022-06-15 Danfoss Silicon Power Gmbh Verfahren zur Schaffung einer hochtemperatur- und temperaturwechselfesten Verbindung eines Halbleiterbausteins mit einem Verbindungspartner und einer Kontaktlasche unter Verwendung eines temperaturbeaufschlagenden Verfahrens
DE102009018977A1 (de) * 2009-04-25 2010-11-04 Ev Group Gmbh Vorrichtung zur Ausrichtung und Vorfixierung eines Wafers
US8393526B2 (en) * 2010-10-21 2013-03-12 Raytheon Company System and method for packaging electronic devices
JP6230381B2 (ja) * 2013-11-15 2017-11-15 株式会社ディスコ 加工方法
DE102019120844A1 (de) * 2019-08-01 2021-02-04 Horst Siedle Gmbh & Co. Kg Verfahren zur Herstellung von abgedichteten Funktionselementen
DE102019126505B4 (de) 2019-10-01 2023-10-19 Infineon Technologies Ag Verfahren zum herstellen einer mehrchipvorrichtung
DE102020129205A1 (de) 2020-11-05 2022-05-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren zur herstellung eines elektronischen bauelements und elektronisches bauelement
DE102021208780A1 (de) * 2021-08-11 2023-02-16 Zf Friedrichshafen Ag Verbindung eines Sensorchips mit einem Messobjekt

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3613215A1 (de) * 1985-04-19 1986-10-23 Nippon Telegraph And Telephone Corp., Tokio/Tokyo Verfahren zur herstellung eines halbleitersubstrats

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3772957B2 (ja) * 2000-02-18 2006-05-10 株式会社荏原製作所 金属の接合方法
US6785052B2 (en) * 2001-05-21 2004-08-31 Jds Uniphase Corporation Stress free and thermally stabilized dielectric fiber
US6762072B2 (en) * 2002-03-06 2004-07-13 Robert Bosch Gmbh SI wafer-cap wafer bonding method using local laser energy, device produced by the method, and system used in the method
CA2485022A1 (en) * 2002-04-15 2003-10-23 Schott Ag Method for connecting substrates and composite element
WO2004026526A1 (en) * 2002-09-18 2004-04-01 Ebara Corporation Bonding material and bonding method
JP4240994B2 (ja) * 2002-10-22 2009-03-18 富士電機デバイステクノロジー株式会社 はんだ接合方法
JP2004172206A (ja) * 2002-11-18 2004-06-17 Teitsu Engineering Co Ltd 電子部品パッケージへのリッド溶接方法
US6774327B1 (en) 2003-09-24 2004-08-10 Agilent Technologies, Inc. Hermetic seals for electronic components
JP2005317793A (ja) 2004-04-28 2005-11-10 Kyocera Kinseki Corp 電子部品容器及びその封止方法
JP4815800B2 (ja) * 2004-12-28 2011-11-16 株式会社大真空 圧電振動デバイス
JP4923486B2 (ja) * 2005-09-01 2012-04-25 大日本印刷株式会社 電子デバイス、電子デバイスの製造方法
TWI285419B (en) * 2005-10-26 2007-08-11 Ind Tech Res Inst Wafer-to-wafer stacking with supporting pedestals
EP2006906A4 (de) * 2006-04-07 2011-11-16 Murata Manufacturing Co Elektronische komponente und verfahren zu ihrer herstellung
JP5119866B2 (ja) * 2007-03-22 2013-01-16 セイコーエプソン株式会社 水晶デバイス及びその封止方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3613215A1 (de) * 1985-04-19 1986-10-23 Nippon Telegraph And Telephone Corp., Tokio/Tokyo Verfahren zur herstellung eines halbleitersubstrats

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
GUO-QUAN LU ET AL: "A lead-free, low-temperature sintering die-attach technique for high-performance and high-temperature packaging", HIGH DENSITY MICROSYSTEM DESIGN AND PACKAGING AND COMPONENT FAILURE AN ALYSIS, 2004. HDP '04. PROCEEDING OF THE SIXTH IEEE CPMT CONFERENCE ON SHANGHAI, CHINA 30 JUNE-3 JULY 2004, PISCATAWAY, NJ, USA,IEEE, US, 30 June 2004 (2004-06-30), pages 42 - 46, XP010733589, ISBN: 978-0-7803-8620-4 *
JIN Y ET AL: "MEMS vacuum packaging technology and applications", ELECTRONICS PACKAGING TECHNOLOGY, 2003 5TH CONFERENCE (EPTC 2003) DEC. 10-12, 2003, PISCATAWAY, NJ, USA,IEEE, 10 December 2003 (2003-12-10), pages 301 - 306, XP010687486, ISBN: 978-0-7803-8205-3 *
PEI-I WANG ET AL: "Low temperature copper-nanorod bonding for 3D integration", ENABLING TECHNOLOGIES FOR 3-D INTEGRATION SYMPOSIUM MATERIALS RESEARCH SOCIETY USA, 2007, pages 225 - 230, XP007907550 *

Also Published As

Publication number Publication date
EP2183185B1 (de) 2016-02-10
EP2183185A2 (de) 2010-05-12
US20100148282A1 (en) 2010-06-17
KR20100043057A (ko) 2010-04-27
JP2010534948A (ja) 2010-11-11
JP5091318B2 (ja) 2012-12-05
DE102007035788A1 (de) 2009-02-05
KR101576443B1 (ko) 2015-12-10
WO2009015984A2 (de) 2009-02-05

Similar Documents

Publication Publication Date Title
WO2009015984A3 (de) Waferfügeverfahren mit senterschritt, waferverbund sowie chip
WO2004001800A3 (en) Chip package sealing method
TW200709360A (en) Semiconductor die package and method for making the same
WO2007142802A3 (en) Method of wafer-to-wafer bonding
SG11201906510PA (en) Method and device for bonding chips
SG163530A1 (en) Copper wire bonding on organic solderability preservative materials
WO2006116030A3 (en) Bonded intermediate substrate and method of making same
WO2009001564A1 (ja) 半導体素子の実装構造体及びその製造方法、半導体素子の実装方法、並びに加圧ツール
WO2007075727A3 (en) Microelectronic packages and methods therefor
EP1498456A4 (de) Organische halbleiterzusammensetzung, organisches halbleiterelement und herstellungsverfahren dafür
EP1816112A3 (de) Verfahren zur Bildung einer Keramik-Keramik-Verbindung
GB0913887D0 (en) A method of joining components
WO2012057517A3 (ko) 화합물 반도체 장치 및 화합물 반도체 제조방법
WO2009086289A3 (en) Solar cell package for solar concentrator
EP4130308A4 (de) Lötmaterial, verfahren zur herstellung davon und verfahren zur herstellung eines metall-keramik-verbundsubstrats
WO2007117829A3 (en) Method for bonding a semiconductor substrate to a metal substrate
TW200639914A (en) Semiconductor device and fabrication method thereof
IL191756A0 (en) Process for manufacturing micromechanical devices containing a getter material and devices so manufactured
EP1498959A3 (de) Herstellungsverfahren eines Halbleiterbauelementes
WO2007103870A3 (en) Bypass thermal adjuster for vacuum semiconductor processing
WO2006115649A3 (en) Multi-chip module and method of manufacture
TW200507193A (en) Adhesive sheet for dicing and die bonding and method of manufacturing semiconductor device
WO2009116744A3 (ko) 발광다이오드 리드프레임과 그 리드프레임을 이용한 발광다이오드 패키지 및 그 제조방법
WO2007133935A3 (en) Method and materials to control doping profile in integrated circuit substrate material
WO2008013806A3 (en) Process for joining materials using a metallic heat source within a controlled atmosphere

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08774763

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 2008774763

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 12600415

Country of ref document: US

ENP Entry into the national phase

Ref document number: 20107002116

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 2010518592

Country of ref document: JP

WWE Wipo information: entry into national phase

Ref document number: 945/CHENP/2010

Country of ref document: IN