WO2009017068A1 - 石英ガラスルツボの製造方法および製造装置 - Google Patents

石英ガラスルツボの製造方法および製造装置 Download PDF

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Publication number
WO2009017068A1
WO2009017068A1 PCT/JP2008/063439 JP2008063439W WO2009017068A1 WO 2009017068 A1 WO2009017068 A1 WO 2009017068A1 JP 2008063439 W JP2008063439 W JP 2008063439W WO 2009017068 A1 WO2009017068 A1 WO 2009017068A1
Authority
WO
WIPO (PCT)
Prior art keywords
melting
producing
quartz glass
glass crucible
melting space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/063439
Other languages
English (en)
French (fr)
Inventor
Takeshi Fujita
Minoru Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Super Quartz Corp
Original Assignee
Japan Super Quartz Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Super Quartz Corp filed Critical Japan Super Quartz Corp
Priority to JP2009525377A priority Critical patent/JP5398074B2/ja
Priority to EP08791683.9A priority patent/EP2172432A4/en
Priority to KR1020087029171A priority patent/KR101312999B1/ko
Priority to US12/303,134 priority patent/US8196429B2/en
Publication of WO2009017068A1 publication Critical patent/WO2009017068A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Compositions (AREA)

Abstract

アーク溶融中に異物の混入が少なく、かつアークが安定な石英ガラスルツボの製造方法および製造装置を提供するために、アーク電極の側方からモールドの溶融空間に向かって空気を吹き出す手段と、加熱炉内の空気を排出する手段とを有し、溶融中に溶融空間に押し込み給気を行って溶融空間の気圧を溶融空間外部よりも高くし、好ましくは、溶融空間と周囲との間に１００pa以上の気圧差を形成して溶融する石英ガラスルツボの製造方法とその製造装置。
PCT/JP2008/063439 2007-07-28 2008-07-25 石英ガラスルツボの製造方法および製造装置 Ceased WO2009017068A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009525377A JP5398074B2 (ja) 2007-07-28 2008-07-25 石英ガラスルツボの製造方法および製造装置
EP08791683.9A EP2172432A4 (en) 2007-07-28 2008-07-25 METHOD FOR PRODUCING A QUARTZ GLASS TAIL AND DEVICE FOR PRODUCING THE QUARTZ GLASS TIEGEL
KR1020087029171A KR101312999B1 (ko) 2007-07-28 2008-07-25 석영 유리 도가니 제조 방법 및 제조 장치
US12/303,134 US8196429B2 (en) 2007-07-28 2008-07-25 Method and apparatus for manufacturing vitreous silica crucible

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007196814 2007-07-28
JP2007-196814 2007-07-28

Publications (1)

Publication Number Publication Date
WO2009017068A1 true WO2009017068A1 (ja) 2009-02-05

Family

ID=40304299

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/063439 Ceased WO2009017068A1 (ja) 2007-07-28 2008-07-25 石英ガラスルツボの製造方法および製造装置

Country Status (6)

Country Link
US (1) US8196429B2 (ja)
EP (1) EP2172432A4 (ja)
JP (1) JP5398074B2 (ja)
KR (1) KR101312999B1 (ja)
TW (1) TW200918471A (ja)
WO (1) WO2009017068A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012116717A (ja) * 2010-12-02 2012-06-21 Japan Siper Quarts Corp シリカガラスルツボ製造装置
US8281620B1 (en) * 2011-04-27 2012-10-09 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
WO2013099430A1 (ja) * 2011-12-29 2013-07-04 ジャパンスーパークォーツ株式会社 シリカガラスルツボ製造装置
EP2325146A3 (en) * 2009-11-20 2015-04-29 Heraeus Quarzglas GmbH & Co. KG Method of making a silica crucible in a controlled atmosphere
JP2019137564A (ja) * 2018-02-07 2019-08-22 株式会社Sumco シリカガラスルツボの製造装置およびシリカガラスルツボ
JP2019156703A (ja) * 2018-03-16 2019-09-19 株式会社Sumco アーク電極の位置調整方法及びこれを用いた石英ガラスルツボの製造方法及び製造装置

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009017071A1 (ja) * 2007-07-27 2009-02-05 Japan Super Quartz Corporation 石英ガラスルツボの製造方法
JP4922355B2 (ja) * 2009-07-15 2012-04-25 信越石英株式会社 シリカ容器及びその製造方法
JP5453679B2 (ja) 2009-10-02 2014-03-26 株式会社Ｓｕｍｃｏ シリカガラスルツボの製造装置及びシリカガラスルツボの製造方法
JP5397857B2 (ja) * 2009-10-20 2014-01-22 株式会社Ｓｕｍｃｏ 石英ガラスルツボの製造方法および製造装置
JP5500686B2 (ja) * 2010-11-30 2014-05-21 株式会社Ｓｕｍｃｏ シリカガラスルツボ
JP5605902B2 (ja) 2010-12-01 2014-10-15 株式会社Ｓｕｍｃｏ シリカガラスルツボの製造方法、シリカガラスルツボ
JP5749147B2 (ja) * 2010-12-31 2015-07-15 株式会社Sumco シリカガラスルツボの製造方法
JP5777881B2 (ja) * 2010-12-31 2015-09-09 株式会社Sumco シリカガラスルツボの製造方法
KR101293501B1 (ko) 2011-01-28 2013-08-06 쟈판 스파 쿼츠 가부시키가이샤 석영 유리 도가니의 제조 장치 및 석영 유리 도가니의 제조 방법
US9193620B2 (en) 2011-03-31 2015-11-24 Raytheon Company Fused silica body with vitreous silica inner layer, and method for making same
US9221709B2 (en) * 2011-03-31 2015-12-29 Raytheon Company Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same
KR101670295B1 (ko) * 2013-02-05 2016-10-28 (주) 쿼츠테크 석영 도가니 제조장치
KR101657969B1 (ko) * 2013-02-05 2016-09-20 (주) 쿼츠테크 석영 도가니 제조방법
WO2018141071A1 (en) * 2017-02-06 2018-08-09 Gosselin Mathilde Physical deposition of siliceous particles on plastic support to enhance surface properties
CN114671599B (zh) * 2022-03-29 2022-11-22 锦州佑鑫石英科技有限公司 大外径直拉单晶用石英坩埚的制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01157427A (ja) * 1987-12-15 1989-06-20 Toshiba Ceramics Co Ltd 石英ガラスルツボの製造方法
JPH0920586A (ja) * 1995-06-30 1997-01-21 Toshiba Ceramics Co Ltd シリコン単結晶引上げ用石英ガラスルツボの製造方法
JP2000344536A (ja) * 1999-06-01 2000-12-12 Toshiba Ceramics Co Ltd 石英ガラスルツボおよびその製造方法
JP2001233629A (ja) * 1999-04-06 2001-08-28 Nanwa Kuorutsu:Kk 石英ガラスるつぼの製造方法
JP2004002082A (ja) * 2002-05-30 2004-01-08 Japan Siper Quarts Corp 石英ガラスルツボとその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3014311C2 (de) * 1980-04-15 1982-06-16 Heraeus Quarzschmelze Gmbh, 6450 Hanau Verfahren zur Herstellung von Quarzglastiegeln und Vorrichtung zur Durchführung dieses Verfahrens
JPS5934659A (ja) 1982-08-20 1984-02-25 Toshiba Corp 固体撮像装置
JP2830987B2 (ja) * 1994-07-19 1998-12-02 信越石英株式会社 石英ガラスルツボ及びその製造方法
JP3625636B2 (ja) * 1998-01-08 2005-03-02 東芝セラミックス株式会社 シリコン単結晶引上げ用石英ガラスルツボの製造方法
KR100383796B1 (ko) * 1999-04-06 2003-05-14 가부시키가이샤 난와쿼츠 석영유리도가니의 제조방법
US6502422B1 (en) * 2000-10-27 2003-01-07 General Electric Company Method for quartz crucible fabrication
JP4092722B2 (ja) * 2002-04-23 2008-05-28 ジャパンスーパークォーツ株式会社 石英ルツボ製造用加熱炉

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01157427A (ja) * 1987-12-15 1989-06-20 Toshiba Ceramics Co Ltd 石英ガラスルツボの製造方法
JPH0920586A (ja) * 1995-06-30 1997-01-21 Toshiba Ceramics Co Ltd シリコン単結晶引上げ用石英ガラスルツボの製造方法
JP2001233629A (ja) * 1999-04-06 2001-08-28 Nanwa Kuorutsu:Kk 石英ガラスるつぼの製造方法
JP2000344536A (ja) * 1999-06-01 2000-12-12 Toshiba Ceramics Co Ltd 石英ガラスルツボおよびその製造方法
JP2004002082A (ja) * 2002-05-30 2004-01-08 Japan Siper Quarts Corp 石英ガラスルツボとその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2172432A4 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2325146A3 (en) * 2009-11-20 2015-04-29 Heraeus Quarzglas GmbH & Co. KG Method of making a silica crucible in a controlled atmosphere
JP2012116717A (ja) * 2010-12-02 2012-06-21 Japan Siper Quarts Corp シリカガラスルツボ製造装置
US8281620B1 (en) * 2011-04-27 2012-10-09 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
US20120272682A1 (en) * 2011-04-27 2012-11-01 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
WO2013099430A1 (ja) * 2011-12-29 2013-07-04 ジャパンスーパークォーツ株式会社 シリカガラスルツボ製造装置
JP2019137564A (ja) * 2018-02-07 2019-08-22 株式会社Sumco シリカガラスルツボの製造装置およびシリカガラスルツボ
JP7094487B2 (ja) 2018-02-07 2022-07-04 株式会社Sumco シリカガラスルツボの製造装置およびシリカガラスルツボの製造方法
JP2019156703A (ja) * 2018-03-16 2019-09-19 株式会社Sumco アーク電極の位置調整方法及びこれを用いた石英ガラスルツボの製造方法及び製造装置

Also Published As

Publication number Publication date
EP2172432A1 (en) 2010-04-07
US8196429B2 (en) 2012-06-12
KR101312999B1 (ko) 2013-10-01
KR20100051764A (ko) 2010-05-18
EP2172432A4 (en) 2014-04-16
US20100229599A1 (en) 2010-09-16
JPWO2009017068A1 (ja) 2010-10-21
TW200918471A (en) 2009-05-01
JP5398074B2 (ja) 2014-01-29

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