WO2009051166A1 - 振動装置および圧電ポンプ - Google Patents

振動装置および圧電ポンプ Download PDF

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Publication number
WO2009051166A1
WO2009051166A1 PCT/JP2008/068724 JP2008068724W WO2009051166A1 WO 2009051166 A1 WO2009051166 A1 WO 2009051166A1 JP 2008068724 W JP2008068724 W JP 2008068724W WO 2009051166 A1 WO2009051166 A1 WO 2009051166A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
piezoelectric element
intermediate plate
pump
pump chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/068724
Other languages
English (en)
French (fr)
Inventor
Atsuhiko Hirata
Gaku Kamitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to EP08838868.1A priority Critical patent/EP2202815B1/en
Priority to JP2009519732A priority patent/JP5029692B2/ja
Publication of WO2009051166A1 publication Critical patent/WO2009051166A1/ja
Priority to US12/761,467 priority patent/US9714651B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/027—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having electric drive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
    • H01M8/04082—Arrangements for control of reactant parameters, e.g. pressure or concentration
    • H01M8/04201—Reactant storage and supply, e.g. means for feeding, pipes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　圧電体層の反りをなくし、振動によって圧電体層に引っ張り応力が作用しても圧電体層が破壊する危険性を低減する。圧電ポンプ（１００）は、圧電体素子（５４）と中間板（５３）と振動板（５１）とを備える。圧電体素子（５４）は、平板状である。中間板（５３）は、圧電体素子（５４）の主面に接合され、圧電体素子（５４）に圧縮方向の残留応力を付与する。振動板（５１）は、圧電体素子（５４）の主面に対向するように中間板（５３）に接合されて中間板（５３）から圧縮方向の残留応力が付与され、且つ、開口穴（３１）を有するポンプ室（４１）の壁面の一部を構成する。圧電ポンプ（１００）には、流体の通路が形成されている。流体の通路は、一端がポンプ室の外部に連通し、他端が開口穴（３１）を介してポンプ室（４１）に連通する
PCT/JP2008/068724 2007-10-16 2008-10-16 振動装置および圧電ポンプ Ceased WO2009051166A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08838868.1A EP2202815B1 (en) 2007-10-16 2008-10-16 Vibration device, and piezoelectric pump
JP2009519732A JP5029692B2 (ja) 2007-10-16 2008-10-16 圧電ポンプ
US12/761,467 US9714651B2 (en) 2007-10-16 2010-04-16 Vibrating device and piezoelectric pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007269328 2007-10-16
JP2007-269328 2007-10-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/761,467 Continuation US9714651B2 (en) 2007-10-16 2010-04-16 Vibrating device and piezoelectric pump

Publications (1)

Publication Number Publication Date
WO2009051166A1 true WO2009051166A1 (ja) 2009-04-23

Family

ID=40567428

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068724 Ceased WO2009051166A1 (ja) 2007-10-16 2008-10-16 振動装置および圧電ポンプ

Country Status (4)

Country Link
US (1) US9714651B2 (ja)
EP (1) EP2202815B1 (ja)
JP (2) JP5029692B2 (ja)
WO (1) WO2009051166A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010527143A (ja) * 2007-05-11 2010-08-05 エプコス アクチエンゲゼルシャフト 圧電積層素子
JP2010287650A (ja) * 2009-06-10 2010-12-24 Juki Corp 電子部品実装装置
WO2012096048A1 (ja) * 2011-01-14 2012-07-19 株式会社村田製作所 圧電振動部品
WO2012147477A1 (ja) * 2011-04-27 2012-11-01 シーケーディ株式会社 複層ダイアフラム

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JP4591521B2 (ja) * 2008-02-18 2010-12-01 ソニー株式会社 圧電ポンプを有する電子機器
DE102011078882A1 (de) * 2011-07-08 2013-01-10 Osram Ag Erzeugung eines Gasstroms mittels Schwingungen
JP5533823B2 (ja) * 2011-09-06 2014-06-25 株式会社村田製作所 流体制御装置
EP2767715B1 (en) * 2011-10-11 2018-04-04 Murata Manufacturing Co., Ltd. Fluid-control device, and method for adjusting fluid-control device
US20130167843A1 (en) * 2011-12-31 2013-07-04 Nellcor Puritan Bennett Llc Piezoelectric blower piloted valve
JP2013222606A (ja) * 2012-04-17 2013-10-28 Panasonic Corp 燃料電池システム
WO2015023015A1 (ko) * 2013-08-16 2015-02-19 (주)시드에너텍 압축력을 이용한 압전 하베스팅 시스템
JP6061054B2 (ja) * 2014-03-07 2017-01-18 株式会社村田製作所 ブロア
CN104100541A (zh) * 2014-07-18 2014-10-15 长春隆美科技发展有限公司 一种微型压电式轴流风机
CN104100542B (zh) * 2014-07-19 2019-10-22 长春隆美科技发展有限公司 一种压电驱动式微型风机
TWI621794B (zh) * 2017-01-05 2018-04-21 研能科技股份有限公司 流體控制裝置
WO2018221287A1 (ja) * 2017-05-31 2018-12-06 株式会社村田製作所 バルブおよび流体制御装置

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DE19732513C2 (de) * 1997-07-29 2002-04-11 Eurocopter Deutschland Verfahren zur Herstellung einer Verbundstruktur
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JP2006100622A (ja) * 2004-09-30 2006-04-13 Canon Inc ユニモルフ型圧電膜素子、液体吐出ヘッド、およびユニモルフ型圧電膜素子の製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010527143A (ja) * 2007-05-11 2010-08-05 エプコス アクチエンゲゼルシャフト 圧電積層素子
JP2010287650A (ja) * 2009-06-10 2010-12-24 Juki Corp 電子部品実装装置
WO2012096048A1 (ja) * 2011-01-14 2012-07-19 株式会社村田製作所 圧電振動部品
JP5534040B2 (ja) * 2011-01-14 2014-06-25 株式会社村田製作所 圧電振動部品
WO2012147477A1 (ja) * 2011-04-27 2012-11-01 シーケーディ株式会社 複層ダイアフラム
JP5189227B2 (ja) * 2011-04-27 2013-04-24 Ｃｋｄ株式会社 複層ダイアフラム
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Also Published As

Publication number Publication date
JP5494739B2 (ja) 2014-05-21
US9714651B2 (en) 2017-07-25
EP2202815B1 (en) 2019-04-10
JP2012235687A (ja) 2012-11-29
EP2202815A4 (en) 2017-03-29
EP2202815A1 (en) 2010-06-30
US20100196177A1 (en) 2010-08-05
JP5029692B2 (ja) 2012-09-19
JPWO2009051166A1 (ja) 2011-03-03

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