WO2009057680A1 - Appareil de formation de film et procédé de formation de film - Google Patents

Appareil de formation de film et procédé de formation de film Download PDF

Info

Publication number
WO2009057680A1
WO2009057680A1 PCT/JP2008/069728 JP2008069728W WO2009057680A1 WO 2009057680 A1 WO2009057680 A1 WO 2009057680A1 JP 2008069728 W JP2008069728 W JP 2008069728W WO 2009057680 A1 WO2009057680 A1 WO 2009057680A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotating
film forming
sub
center
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/069728
Other languages
English (en)
Japanese (ja)
Inventor
Junichiro Yoshioka
Kuniaki Horie
Nobumasa Nambu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JCU Corp
Original Assignee
Ebara Udylite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Udylite Co Ltd filed Critical Ebara Udylite Co Ltd
Publication of WO2009057680A1 publication Critical patent/WO2009057680A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

Une section rotative principale (15) qui tourne avec un arbre principal (13) au centre est équipée d'une pluralité de sous-sections rotatives (16), et chaque sous-section rotative (16) comporte une pluralité de porte-pièces (17). Une pièce (W) supportée par le porte-pièce (17) tourne sur son propre arbre rotatif (46), tout en tournant avec l'arbre principal (13) au centre et en tournant avec un sous-arbre (36) au centre par la rotation de la section rotative principale (15) et des sous-sections rotatives (16). Des films sont formés en faisant en sorte que les surfaces des pièces (W) fassent face à une cible (23) de façon séquentielle.
PCT/JP2008/069728 2007-10-31 2008-10-30 Appareil de formation de film et procédé de formation de film Ceased WO2009057680A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007283475A JP2009108384A (ja) 2007-10-31 2007-10-31 成膜装置
JP2007-283475 2007-10-31

Publications (1)

Publication Number Publication Date
WO2009057680A1 true WO2009057680A1 (fr) 2009-05-07

Family

ID=40591065

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/069728 Ceased WO2009057680A1 (fr) 2007-10-31 2008-10-30 Appareil de formation de film et procédé de formation de film

Country Status (2)

Country Link
JP (1) JP2009108384A (fr)
WO (1) WO2009057680A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113316661A (zh) * 2019-02-14 2021-08-27 东和株式会社 工件保持部旋转单元及真空处理装置
CN116324012A (zh) * 2020-08-05 2023-06-23 芝浦机械株式会社 表面处理装置及表面处理方法
CN119040836A (zh) * 2024-11-01 2024-11-29 苏州文迪光电科技有限公司 一种双面镀膜设备及用于滤光片加工的镀膜方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5036501B2 (ja) * 2007-11-19 2012-09-26 小島プレス工業株式会社 基材の支持装置及びスパッタリング装置
JP6135519B2 (ja) * 2014-01-17 2017-05-31 株式会社デンソー 成膜装置
CN113463056B (zh) * 2021-07-01 2022-06-17 安徽工业大学 一种真空镀膜无遮挡样品翻转装置
KR102895935B1 (ko) * 2023-01-31 2025-12-04 한국원자력연구원 피복관 코팅장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310464U (fr) * 1989-06-20 1991-01-31
JP2006307318A (ja) * 2005-03-31 2006-11-09 Kobe Steel Ltd αアルミナ層形成部材の製法および表面処理法
JP2007039710A (ja) * 2005-08-01 2007-02-15 Optorun Co Ltd 成膜装置及び薄膜形成方法
JP2007100123A (ja) * 2005-09-30 2007-04-19 Kyocera Kinseki Corp 真空蒸着装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310464U (fr) * 1989-06-20 1991-01-31
JP2006307318A (ja) * 2005-03-31 2006-11-09 Kobe Steel Ltd αアルミナ層形成部材の製法および表面処理法
JP2007039710A (ja) * 2005-08-01 2007-02-15 Optorun Co Ltd 成膜装置及び薄膜形成方法
JP2007100123A (ja) * 2005-09-30 2007-04-19 Kyocera Kinseki Corp 真空蒸着装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113316661A (zh) * 2019-02-14 2021-08-27 东和株式会社 工件保持部旋转单元及真空处理装置
CN116324012A (zh) * 2020-08-05 2023-06-23 芝浦机械株式会社 表面处理装置及表面处理方法
CN119040836A (zh) * 2024-11-01 2024-11-29 苏州文迪光电科技有限公司 一种双面镀膜设备及用于滤光片加工的镀膜方法

Also Published As

Publication number Publication date
JP2009108384A (ja) 2009-05-21

Similar Documents

Publication Publication Date Title
WO2009057680A1 (fr) Appareil de formation de film et procédé de formation de film
WO2009041282A1 (fr) Appareil de formation de film, procédé de formation de film, support de stockage et appareil d'alimentation en gaz
EP3881948A4 (fr) Procédé d'usinage par rotation sans noyau pour arbre creux de grande proportion à diamètre multiple variable
GB2428217B (en) Apparatus and method
JP2016036005A5 (fr)
EP1972988B8 (fr) Film transmettant la lumière, son procédé de fabrication et appareil d'affichage
WO2009031232A1 (fr) Procédé et système de pulvérisation cathodique
EP1947489A4 (fr) Composition pour film de photo-alignement, materiau a anisotropie optique et procede de production correspondant
WO2006033061A3 (fr) Systeme et procede permettant de produire des images composites, qui font appel a une ou plusieurs cameras pour fournir des images superposees
DE502007003212D1 (de) Dichtung für Gewindetrieb
NO20052263D0 (no) Fremgangsmate for a danne ferroelektriske tynnfilmer, bruk av fremgangsmaten og minne med ferroelektrisk oligomer som minnemateriale
WO2009057678A1 (fr) Dispositif et procédé de formation de film
GB2461458B (en) Substrate destruction apparatus with shared rotating shaft
WO2018110830A3 (fr) Film de fenêtre, son procédé de fabrication et dispositif d'affichage l'intégrant
WO2009001059A3 (fr) Lentilles
PL2070666T3 (pl) Urządzenie do cięcia pasm
AU2003273058A1 (en) Balancer mechanism for rotating shaft
MY181764A (en) Transportable rotation device and film formation device
ATE446169T1 (de) Vorrichtung zum schneiden von lebensmitteln
AU2003273059A1 (en) Balancer mechanism for rotating shaft
WO2020144520A3 (fr) Procédé, appareil et outils de coupe rotatifs pour profiler les bords d'un panneau
WO2009063789A1 (fr) Procédé permettant de former un film par pulvérisation cathodique sur une pièce tridimensionnelle, et appareil utilisé dans ce procédé
ATE473819T1 (de) Arbeitsverfahren einer zahnradbearbeitungsmaschine
DK1473128T3 (da) Fremgangsmåde og anvendelse af en indretning til fremstilling af flerlagsbetonrør
AU2019902633A0 (en) ice making apparatus with a rotating shaft.

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08844652

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08844652

Country of ref document: EP

Kind code of ref document: A1