WO2009072434A1 - 圧電ポンプ - Google Patents

圧電ポンプ Download PDF

Info

Publication number
WO2009072434A1
WO2009072434A1 PCT/JP2008/071607 JP2008071607W WO2009072434A1 WO 2009072434 A1 WO2009072434 A1 WO 2009072434A1 JP 2008071607 W JP2008071607 W JP 2008071607W WO 2009072434 A1 WO2009072434 A1 WO 2009072434A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric element
piezoelectric
pump
diaphragm
piezoelectric pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/071607
Other languages
English (en)
French (fr)
Inventor
Shungo Kanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2009511286A priority Critical patent/JP4840505B2/ja
Priority to CN200880001236XA priority patent/CN101622451B/zh
Priority to EP08856266.5A priority patent/EP2241757B1/en
Priority to US12/434,700 priority patent/US8210831B2/en
Publication of WO2009072434A1 publication Critical patent/WO2009072434A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

【課題】バイモルフ構造の圧電素子を用いたダイヤフラム式の圧電ポンプにおいて、圧電素子の変位を阻害する要因を取り除き、効率のよい圧電ポンプを提供する。 【解決手段】ポンプ本体１０との間でポンプ室１２を形成するダイヤフラム２１と、ダイヤフラムの表面に対面接着された圧電素子２２とを備えた圧電ポンプであって、圧電素子２２は複数の圧電体層を積層したバイモルフ型圧電素子であり、圧電素子の厚み方向中間部に自発的に変位しない中性層２２ｂが設けられている。圧電素子を含むダイヤフラム全体の中立面Ｆｄが圧電素子の中性層２２ｂ内に位置しているため、圧電素子２２が効率よく変位できる。
PCT/JP2008/071607 2007-12-03 2008-11-28 圧電ポンプ Ceased WO2009072434A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009511286A JP4840505B2 (ja) 2007-12-03 2008-11-28 圧電ポンプ
CN200880001236XA CN101622451B (zh) 2007-12-03 2008-11-28 压电泵
EP08856266.5A EP2241757B1 (en) 2007-12-03 2008-11-28 Piezoelectric pump
US12/434,700 US8210831B2 (en) 2007-12-03 2009-05-04 Piezoelectric pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007311905 2007-12-03
JP2007-311905 2007-12-03

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/434,700 Continuation US8210831B2 (en) 2007-12-03 2009-05-04 Piezoelectric pump

Publications (1)

Publication Number Publication Date
WO2009072434A1 true WO2009072434A1 (ja) 2009-06-11

Family

ID=40717616

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071607 Ceased WO2009072434A1 (ja) 2007-12-03 2008-11-28 圧電ポンプ

Country Status (5)

Country Link
US (1) US8210831B2 (ja)
EP (1) EP2241757B1 (ja)
JP (1) JP4840505B2 (ja)
CN (1) CN101622451B (ja)
WO (1) WO2009072434A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012117831A1 (ja) * 2011-03-01 2012-09-07 株式会社村田製作所 圧電素子およびこれを用いた圧電装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5505559B2 (ja) * 2011-10-11 2014-05-28 株式会社村田製作所 流体制御装置、流体制御装置の調整方法
US9051931B2 (en) * 2012-02-10 2015-06-09 Kci Licensing, Inc. Systems and methods for regulating the temperature of a disc pump system
CN103321881A (zh) * 2013-06-19 2013-09-25 重庆中镭科技有限公司 一种采用多轴向纤维增强树脂垫片的压电泵振子
US9437802B2 (en) * 2013-08-21 2016-09-06 Fujifilm Dimatix, Inc. Multi-layered thin film piezoelectric devices and methods of making the same
US9525119B2 (en) 2013-12-11 2016-12-20 Fujifilm Dimatix, Inc. Flexible micromachined transducer device and method for fabricating same
FR3077162B1 (fr) * 2018-01-22 2020-02-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Transducteur piezoelectrique
CN111694455A (zh) * 2019-03-15 2020-09-22 陕西坤同半导体科技有限公司 显示面板及其显示装置
CN113710896A (zh) * 2019-06-03 2021-11-26 索尼集团公司 流体控制装置及电子设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03134271A (ja) * 1989-10-17 1991-06-07 Seiko Epson Corp 微量吐出装置
JPH08293632A (ja) * 1995-04-21 1996-11-05 Matsushita Electric Ind Co Ltd バイモルフ圧電素子とその製造方法
JP2006220056A (ja) * 2005-02-10 2006-08-24 Nec Tokin Corp 流体搬送装置
WO2008007634A1 (en) * 2006-07-11 2008-01-17 Murata Manufacturing Co., Ltd. Piezoelectric pump
JP2008223754A (ja) * 2007-02-16 2008-09-25 Alps Electric Co Ltd 圧電ポンプ

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4625137A (en) * 1983-12-09 1986-11-25 Nippon Telegraph & Telephone Public Corp. Piezoelectric actuator using bimorph element
US4648807A (en) * 1985-05-14 1987-03-10 The Garrett Corporation Compact piezoelectric fluidic air supply pump
JPH01174278A (ja) * 1987-12-28 1989-07-10 Misuzu Erii:Kk インバータ
JPH0354383A (ja) * 1989-07-20 1991-03-08 Olympus Optical Co Ltd 圧電式ポンプ
JP2855846B2 (ja) * 1990-11-22 1999-02-10 ブラザー工業株式会社 圧電ポンプ
GB9122739D0 (en) * 1991-10-25 1991-12-11 The Technology Partnership Ltd System for controlling fluid flow
US6262519B1 (en) * 1998-06-19 2001-07-17 Eastman Kodak Company Method of controlling fluid flow in a microfluidic process
US6505919B1 (en) * 1999-02-18 2003-01-14 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus incorporating the same
JP3725390B2 (ja) 1999-02-18 2005-12-07 セイコーエプソン株式会社 インクジェット式記録ヘッド及びインクジェット式記録装置
US7198250B2 (en) * 2000-09-18 2007-04-03 Par Technologies, Llc Piezoelectric actuator and pump using same
CN1269637C (zh) * 2000-09-18 2006-08-16 帕尔技术有限责任公司 一种压电致动器和使用压电致动器的泵
JP3642026B2 (ja) * 2001-01-12 2005-04-27 株式会社村田製作所 加速度センサおよびその製造方法
JP3700616B2 (ja) * 2001-06-26 2005-09-28 株式会社村田製作所 圧電型電気音響変換器およびその製造方法
JP2005201235A (ja) * 2003-12-15 2005-07-28 Alps Electric Co Ltd 圧電ポンプ
JP4279662B2 (ja) * 2003-12-26 2009-06-17 アルプス電気株式会社 小型ポンプ
JP2006093463A (ja) * 2004-09-24 2006-04-06 Toshiba Corp 圧電ｍｅｍｓ素子及びチューナブルフィルタ
US20060232166A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
JP2006304021A (ja) 2005-04-22 2006-11-02 Murata Mfg Co Ltd 圧電型電気音響変換器
WO2007097077A1 (ja) 2006-02-21 2007-08-30 Murata Manufacturing Co., Ltd. 圧電発音体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03134271A (ja) * 1989-10-17 1991-06-07 Seiko Epson Corp 微量吐出装置
JPH08293632A (ja) * 1995-04-21 1996-11-05 Matsushita Electric Ind Co Ltd バイモルフ圧電素子とその製造方法
JP2006220056A (ja) * 2005-02-10 2006-08-24 Nec Tokin Corp 流体搬送装置
WO2008007634A1 (en) * 2006-07-11 2008-01-17 Murata Manufacturing Co., Ltd. Piezoelectric pump
JP2008223754A (ja) * 2007-02-16 2008-09-25 Alps Electric Co Ltd 圧電ポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2241757A4 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012117831A1 (ja) * 2011-03-01 2012-09-07 株式会社村田製作所 圧電素子およびこれを用いた圧電装置
JP5500308B2 (ja) * 2011-03-01 2014-05-21 株式会社村田製作所 圧電素子およびこれを用いた圧電装置
US9406861B2 (en) 2011-03-01 2016-08-02 Murata Manufacturing Co., Ltd. Piezoelectric element and piezoelectric device using the same

Also Published As

Publication number Publication date
JP4840505B2 (ja) 2011-12-21
JPWO2009072434A1 (ja) 2011-04-21
EP2241757A4 (en) 2016-08-24
CN101622451A (zh) 2010-01-06
US20090214362A1 (en) 2009-08-27
EP2241757A1 (en) 2010-10-20
US8210831B2 (en) 2012-07-03
CN101622451B (zh) 2011-05-11
EP2241757B1 (en) 2018-01-03

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