WO2012009437A3 - High resolution autofocus inspection system - Google Patents

High resolution autofocus inspection system Download PDF

Info

Publication number
WO2012009437A3
WO2012009437A3 PCT/US2011/043851 US2011043851W WO2012009437A3 WO 2012009437 A3 WO2012009437 A3 WO 2012009437A3 US 2011043851 W US2011043851 W US 2011043851W WO 2012009437 A3 WO2012009437 A3 WO 2012009437A3
Authority
WO
WIPO (PCT)
Prior art keywords
objective lens
actual distance
focal point
control
camera assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2011/043851
Other languages
French (fr)
Other versions
WO2012009437A2 (en
Inventor
Yi Qiao
Jack W. Lai
Jeffrey J. Fontaine
Steven C. Reed
Catherine P. Tarnowski
David L. Hofeldt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Priority to KR1020137003729A priority Critical patent/KR20130036331A/en
Priority to US13/809,440 priority patent/US20130113919A1/en
Priority to CN2011800345196A priority patent/CN103026211A/en
Priority to EP11807454.1A priority patent/EP2593773A2/en
Priority to BR112013000874A priority patent/BR112013000874A2/en
Publication of WO2012009437A2 publication Critical patent/WO2012009437A2/en
Publication of WO2012009437A3 publication Critical patent/WO2012009437A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/54—Auxiliary process performed during handling process for managing processing of handled material
    • B65H2301/542—Quality control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/42—Cameras

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Textile Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Automatic Focus Adjustment (AREA)
  • Studio Devices (AREA)

Abstract

An inspection device comprises a camera assembly including an objective lens that captures and collimates light associated with an object being inspected, an image forming lens that forms an image of the object based on the collimated light, and a camera that renders the image. The camera assembly defines a focal point distance from the objective lens that defines a focal point of the camera assembly. The inspection device comprises an optical sensor positioned to detect an actual distance between the objective lens and the object, an actuator that controls positioning of the objective lens to control the actual distance between the objective lens and the object, and a control unit that receives signals from the optical sensor indicative of the actual distance. Control signals from the control unit can control the actuator to adjust the actual distance such that the actual distance substantially equals the focal point distance.
PCT/US2011/043851 2010-07-16 2011-07-13 High resolution autofocus inspection system Ceased WO2012009437A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020137003729A KR20130036331A (en) 2010-07-16 2011-07-13 High resolution autofocus inspection system
US13/809,440 US20130113919A1 (en) 2010-07-16 2011-07-13 High resolution autofocus inspection system
CN2011800345196A CN103026211A (en) 2010-07-16 2011-07-13 High resolution autofocus inspection system
EP11807454.1A EP2593773A2 (en) 2010-07-16 2011-07-13 High resolution autofocus inspection system
BR112013000874A BR112013000874A2 (en) 2010-07-16 2011-07-13 high resolution autofocus inspection system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36498410P 2010-07-16 2010-07-16
US61/364,984 2010-07-16

Publications (2)

Publication Number Publication Date
WO2012009437A2 WO2012009437A2 (en) 2012-01-19
WO2012009437A3 true WO2012009437A3 (en) 2012-04-26

Family

ID=45470056

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/043851 Ceased WO2012009437A2 (en) 2010-07-16 2011-07-13 High resolution autofocus inspection system

Country Status (6)

Country Link
US (1) US20130113919A1 (en)
EP (1) EP2593773A2 (en)
KR (1) KR20130036331A (en)
CN (1) CN103026211A (en)
BR (1) BR112013000874A2 (en)
WO (1) WO2012009437A2 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103033919B (en) * 2012-11-16 2015-04-29 麦克奥迪实业集团有限公司 System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof
US10574944B2 (en) * 2013-03-08 2020-02-25 Gelsight, Inc. Continuous contact-based three-dimensional measurement
CN103698879B (en) * 2013-12-18 2016-02-24 宁波江丰生物信息技术有限公司 A kind of device and method of real-time focusing
KR101700109B1 (en) * 2015-02-03 2017-02-13 연세대학교 산학협력단 3 dimensional optical measurement of defect distribution
KR101707990B1 (en) * 2015-03-06 2017-02-17 (주) 인텍플러스 auto focusing apparatus using slitbeam and auto focusing method using thereof
CN105866131B (en) * 2016-05-27 2018-03-27 中国铁道科学研究院 Communication leakage cable outward appearance detecting system and method in a kind of vehicle-mounted tunnel
CN105866132B (en) * 2016-05-27 2018-08-24 中国铁道科学研究院 A kind of cab signal machine appearance detecting system and method
JP7090068B2 (en) * 2016-07-28 2022-06-23 レニショウ パブリック リミテッド カンパニー Non-contact probe and method of operation
CN106767529B (en) * 2016-12-14 2019-11-05 深圳奥比中光科技有限公司 The automatic focusing method and system of laser facula identification and laser-projector
CN108569582B (en) * 2017-03-13 2021-12-14 深圳迅泰德自动化科技有限公司 Diaphragm Feeding Equipment
US10438340B2 (en) * 2017-03-21 2019-10-08 Test Research, Inc. Automatic optical inspection system and operating method thereof
US11045089B2 (en) * 2017-05-19 2021-06-29 Alcon Inc. Automatic lens to cornea standoff control for non-contact visualization
EP3502637A1 (en) * 2017-12-23 2019-06-26 ABB Schweiz AG Method and system for real-time web manufacturing supervision
US11460411B2 (en) 2018-06-18 2022-10-04 Kindeva Drug Delivery L.P. Process and apparatus for inspecting microneedle arrays
CN110987959A (en) * 2019-12-16 2020-04-10 广州量子激光智能装备有限公司 Online burr detection method
CN110907470A (en) * 2019-12-23 2020-03-24 浙江水晶光电科技股份有限公司 Filter testing equipment and filter testing method
DE102020109928B3 (en) 2020-04-09 2020-12-31 Sick Ag Camera and method for capturing image data
WO2022025953A1 (en) * 2020-07-30 2022-02-03 Kla Corporation Adaptive focusing system for a scanning metrology tool
US11333616B2 (en) 2020-07-30 2022-05-17 Kla Corporation Adaptive focusing system for a scanning metrology tool
CN112752021B (en) * 2020-11-27 2022-09-13 乐金显示光电科技(中国)有限公司 Automatic focusing method of camera system and automatic focusing camera system
EP4012475A1 (en) * 2020-12-14 2022-06-15 BST eltromat International GmbH Device for detecting images of a surface
US11350024B1 (en) * 2021-03-04 2022-05-31 Amazon Technologies, Inc. High speed continuously adaptive focus and deblur
CN114384091B (en) * 2021-12-16 2024-06-18 苏州镁伽科技有限公司 Automatic focusing device, panel detection equipment and method thereof
EP4636454A4 (en) * 2022-12-19 2026-01-21 Boe Technology Group Co Ltd FOCUSING CONTROL METHOD, DEVICE AND SYSTEM AND STORAGE MEDIUM
CN118033885A (en) * 2024-03-29 2024-05-14 杭州海康威视数字技术股份有限公司 Microscope system and microscope

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395027A (en) * 1991-09-14 1995-03-07 Man Roland Druckmaschinen Ag Printing system having optical supervision apparatus of a substrate running web, particulary a paper web
US5442167A (en) * 1993-04-16 1995-08-15 Intermec Corporation Method and apparatus for automatic image focusing
KR20060061881A (en) * 2004-12-02 2006-06-08 우시오덴키 가부시키가이샤 Pattern inspection device of film work
US20070262232A1 (en) * 2006-05-15 2007-11-15 Leica Microsystems (Schweiz) Ag Autofocus system and method for autofocusing
US7301133B2 (en) * 2005-01-21 2007-11-27 Photon Dynamics, Inc. Tracking auto focus system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4913049A (en) * 1989-04-19 1990-04-03 Quad/Tech, Inc. Bernoulli-effect web stabilizer
JPH0769162B2 (en) * 1990-04-23 1995-07-26 大日本スクリーン製造株式会社 Automatic focusing device for optical inspection system
US6107637A (en) * 1997-08-11 2000-08-22 Hitachi, Ltd. Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
US6355931B1 (en) * 1998-10-02 2002-03-12 The Regents Of The University Of California System and method for 100% moisture and basis weight measurement of moving paper
US8878923B2 (en) * 2007-08-23 2014-11-04 General Electric Company System and method for enhanced predictive autofocusing
US7787112B2 (en) * 2007-10-22 2010-08-31 Visiongate, Inc. Depth of field extension for optical tomography
JP4533444B2 (en) * 2008-03-31 2010-09-01 株式会社日立製作所 Aberration corrector for transmission electron microscope
US9977154B2 (en) * 2010-04-01 2018-05-22 3M Innovative Properties Company Precision control of web material having micro-replicated lens array

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395027A (en) * 1991-09-14 1995-03-07 Man Roland Druckmaschinen Ag Printing system having optical supervision apparatus of a substrate running web, particulary a paper web
US5442167A (en) * 1993-04-16 1995-08-15 Intermec Corporation Method and apparatus for automatic image focusing
KR20060061881A (en) * 2004-12-02 2006-06-08 우시오덴키 가부시키가이샤 Pattern inspection device of film work
US7301133B2 (en) * 2005-01-21 2007-11-27 Photon Dynamics, Inc. Tracking auto focus system
US20070262232A1 (en) * 2006-05-15 2007-11-15 Leica Microsystems (Schweiz) Ag Autofocus system and method for autofocusing

Also Published As

Publication number Publication date
US20130113919A1 (en) 2013-05-09
KR20130036331A (en) 2013-04-11
EP2593773A2 (en) 2013-05-22
WO2012009437A2 (en) 2012-01-19
BR112013000874A2 (en) 2016-05-17
CN103026211A (en) 2013-04-03

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