WO2012174890A1 - 一种等离子体微波谐振腔 - Google Patents

一种等离子体微波谐振腔 Download PDF

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Publication number
WO2012174890A1
WO2012174890A1 PCT/CN2012/072226 CN2012072226W WO2012174890A1 WO 2012174890 A1 WO2012174890 A1 WO 2012174890A1 CN 2012072226 W CN2012072226 W CN 2012072226W WO 2012174890 A1 WO2012174890 A1 WO 2012174890A1
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WIPO (PCT)
Prior art keywords
glass
cavity
straight cylinder
stop ring
housing
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Ceased
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PCT/CN2012/072226
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English (en)
French (fr)
Inventor
张金燕
王瑞春
夏先辉
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Yangtze Optical Fibre and Cable Co Ltd
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Yangtze Optical Fibre and Cable Co Ltd
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Publication date
Application filed by Yangtze Optical Fibre and Cable Co Ltd filed Critical Yangtze Optical Fibre and Cable Co Ltd
Priority to EP12801846.2A priority Critical patent/EP2725603B1/en
Priority to US14/116,889 priority patent/US8807078B2/en
Publication of WO2012174890A1 publication Critical patent/WO2012174890A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32247—Resonators
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma- or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the invention relates to a plasma microwave cavity for a PCVD fiber preform processing machine, which is an improvement of the existing plasma microwave cavity.
  • PCVD or plasma chemical vapor deposition is one of the main processes for optical fiber preform processing.
  • the plasma microwave cavity is the core part of PCVD processing equipment.
  • the plasma microwave resonant cavity is mainly composed of a resonant cavity shell and a waveguide device connected thereto, and a through hole of a coaxial line is opened in the axial direction of the resonant cavity at both ends of the resonant cavity shell, and is provided through the through holes at both ends
  • a glass inner bushing penetrating the cavity and the through holes at both ends is provided with a glass stop ring at both ends of the glass inner bushing for axial positioning of the glass inner bushing.
  • the glass stop ring at one end of the existing glass inner liner is integrally formed with the glass straight cylinder of the glass inner liner at the time of manufacture, and the glass stop ring at the other end needs to be installed after the glass inner liner is mounted on the cavity housing.
  • the glass stop ring is attached to the end of the glass straight cylinder, and then the end of the straight glass is melted and burnt out by burning hydrogen and oxygen, and the glass stop ring is pressed.
  • Such a glass inner bushing structure has the following problems: 1.
  • the metal at the end of the resonant cavity is very It easily diffuses into the inner liner of quartz glass, and then diffuses into the deposition tube during the deposition of PCVD, which increases the attenuation of the optical fiber preform, thus affecting the processing quality of the optical fiber preform; 2. After the glass is cooled after the melting There is a certain stress, which is prone to breakage and breakage of glass in the future use. In severe cases, the product will be scrapped or even damaged. 3. If the glass ring installed during the process is loose, further tightening is required.
  • the secondary fastening effect of the glass is not good, it is difficult to meet certain requirements, which in turn affects the processing performance of the equipment and the stability of the product quality. 4. Because the quartz glass inner bushing and the glass stop ring are bonded at high temperature, maintenance Or to inspect the quartz glass inner bushing and the stop ring when checking the cavity state Demolition, not only need to be replaced in the new glass liner, and it is easy to broken glass fragments fall into the cavity resonator damage.
  • the technical problem to be solved by the present invention is to provide a plasma microwave resonant cavity which is easy to install and disassemble, has good installation quality, and is stable in use performance in view of the above-mentioned deficiencies of the prior art.
  • the technical solution adopted by the present invention to solve the above-mentioned problems is to include a resonant cavity housing and
  • the associated waveguide device has a coaxial hole through a coaxial hole at both ends of the cavity of the cavity, and a through-hole through the cavity of the cavity and the through hole at both ends a bushing
  • the glass inner bushing comprises a glass straight cylinder and a glass stop ring disposed at two ends of the glass straight cylinder, wherein an external thread is provided at one end or both ends of the glass straight cylinder, and the glass stop ring is disposed through the sleeve
  • the screw holes are connected to the ends of the glass straight cylinders.
  • one end of the glass straight cylinder is provided with a fixed glass stop ring integrally connected thereto, and the other end end of the glass straight cylinder is provided with an external thread, and is connected with a glass stop ring provided with a screw hole, and is configured A glass stop ring with a threaded connection at one end.
  • the glass straight cylinder and the glass stop ring are both made of quartz glass.
  • the glass straight cylinder has a diameter of 30 to 80 mm, and the external thread provided at the end is a fine thread, the pitch is 3 to 0.85 mm, and the axial length of the entire external thread is 10 to 20 mm.
  • the glass stop ring is annular, and the screw hole is arranged with the glass straight outer thread.
  • the axial thickness of the glass stop ring is 3 ⁇ 15 mm, and the radial width of the ring body is 10 ⁇ . 35 mm.
  • a movable glass retaining ring is provided on the inner side of the glass stop ring at one end or both ends of the glass straight cylinder.
  • the resonator housing is a cylindrical resonator housing or a coaxial resonator housing.
  • the beneficial effects of the invention are as follows: 1. When installing, insert the glass inner bushing into the resonant cavity and the through holes at both ends, screw the glass stop ring on the external thread of the end, and tighten the glass stop ring to complete the glass.
  • the installation and positioning of the bushing not only makes installation and adjustment convenient, but also greatly reduces the difficulty of on-site installation operation, and does not use high-temperature combustion of hydrogen and oxygen at all, effectively avoiding the diffusion of metal elements in the cavity due to high temperature, and ensuring the production.
  • the performance and quality of the optical fiber preform are stable; 2.
  • the inner bushing of the glass adopts the threaded locking structure, which effectively avoids the disadvantage that the quartz glass is easy to generate stress after being cooled by the eversion, and there is no glass cracking or damage during use. , improve the service life of the glass inner bushing; 3, when the glass inner bushing is loose during use, simply tighten the glass stop ring to a certain distance, it is easy to pass the glass stop ring during maintenance and inspection.
  • the inner liner of the glass is removed, and the removed inner glass bushing can be easily reinstalled and positioned to check the maintenance of the equipment. Greatly reduced; removal installation and do not form glass fragments, further improves the stability of the plasma performance of the microwave cavity.
  • Figure 1 is a front cross-sectional structural view showing an embodiment of the present invention.
  • 2 is a front cross-sectional structural view showing another embodiment of the present invention.
  • Figure 3 is a front cross-sectional structural view of a glass inner liner in one embodiment of the present invention.
  • the first embodiment is a cylindrical resonator including a resonator housing 5 and a waveguide device 10 connected to one side thereof, and a left end is provided at both ends of the resonator housing.
  • the right end cover 4, 6, the left and right end caps are provided with coaxial through holes in the axial direction of the resonant cavity, and the through holes of the left and right ends are provided through the glass cavity through the cavity of the resonant cavity and the through holes at both ends
  • the bushing 7, the glass inner bushing comprises a glass straight cylinder 1, the outer diameter of the glass straight cylinder is 60 mm, one end of the glass straight cylinder is provided with a fixed glass stop ring integrally connected thereto, and the glass straight cylinder is another One end is provided with external thread 3, the external thread is fine thread, the pitch is 1.5 mm, the entire external thread has an axial length of 15 mm, and the external thread is connected with the glass stop ring 2 provided with the screw hole, forming one end of the thread
  • the second embodiment is a coaxial type resonant cavity, which is mainly different from the previous embodiment in that two coaxial sleeves 9 are disposed in the resonant cavity of the coaxial resonant cavity housing 8 .
  • a waveguide antenna 12 is mounted in the waveguide.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

一种用于等离子化学气相沉积（PCVD）设备的等离子体微波谐振腔，包括谐振腔壳体（5）和与其相联的波导装置（10），在谐振腔壳体（5）的两端沿谐振腔轴向开设有同轴线的通孔，通过两端通孔安设有贯穿谐振腔腔体和两端通孔的玻璃内衬套（7），玻璃内衬套（7）包括玻璃直筒体（1）和设置在玻璃直筒体（1）两端的玻璃止挡环（2），在玻璃直筒体（1）的一端或两端设置外螺紋（3），玻璃止挡环（2）通过其设置的螺孔与玻璃直筒体（1）的端头相联。所述等离子体微波谐振腔安装调整方便，而且完全不使用氢、氧气的高温燃烧，有效避免因高温造成谐振腔金属元素的扩散，保证了生产出的光纤预制棒性能和质量稳定，提高了等离子体微波谐振腔的使用性能的稳定性和有效使用寿命。

Description

一种等离子体微波谐振腔 技术领域
本发明涉及一种用于 PCVD光纤预制棒加工机床的等离子体微波谐振腔， 是对现有等离子体微波谐振腔的改进。
背景技术
PCVD即等离子化学气相沉积法是光纤预制棒加工的主要工艺之一，等离子 体微波谐振腔是 PCVD加工设备的核心部分。 等离子体微波谐振腔主要由谐振 腔壳体和与其相联的波导装置组成，在谐振腔壳体的两端沿谐振腔轴向开设有同 轴线的通孔， 通过两端通孔安设有贯穿谐振腔和两端通孔的玻璃内衬套， 在玻璃 内衬套的两端设置有玻璃止挡环， 用于玻璃内衬套的轴向定位。现有的玻璃内衬 套一端的玻璃止挡环在制作时与玻璃内衬套的玻璃直筒体制作成一体，另一端的 玻璃止挡环需要在玻璃内衬套安装到谐振腔壳体上后将玻璃止挡环安装到玻璃 直筒体的末端， 然后用燃烧氢、氧气将直筒玻璃最末端熔化后外翻， 压住玻璃止 挡环。 这样的玻璃内衬套结构存在以下几方面的问题： 1、 不仅现场安装复杂， 操作难度大， 而且由于熔化石英玻璃需要 200CTC以上的温度， 在这种高温环境 下， 谐振腔端部的金属很容易扩散到石英玻璃内衬套中， 进而在 PCVD 的沉积 过程中扩散到沉积管中， 使光纤预制棒的衰减增加， 从而影响光纤预制棒的加工 质量； 2、 熔化后外翻的玻璃冷却后存在一定的应力， 在以后使用过程中容易发 生玻璃碎裂和破损现象， 严重情况下将引起产品报废甚至设备损坏； 3、 如果使 用过程中安装的玻璃环发生松动现象， 需要进一步紧固， 而玻璃的二次紧固效果 不好， 很难达到一定要求， 进而影响设备的加工性能和产品质量的稳定性； 4、 由于石英玻璃内衬套与玻璃止挡环是高温粘接在一起，维修或检查谐振腔状态时 需要对石英玻璃内衬套及止挡环进行破坏性拆除，这样不仅需要更换新的玻璃内 衬套， 而且其断裂的玻璃碎片易掉入谐振腔造成谐振腔的损坏。
发明内容
本发明所要解决的技术问题是针对上述现有技术存在的不足而提供一种便 于安装和拆卸、 安装质量好和使用性能稳定的等离子体微波谐振腔。
本发明为解决上述提出的问题所采用的技术方案为：包括有谐振腔壳体和与 其相联的波导装置， 在谐振腔壳体的两端沿谐振腔轴向开设有同轴线的通孔， 通 过两端通孔安设有贯穿谐振腔腔体和两端通孔的玻璃内衬套，所述的玻璃内衬套 包括玻璃直筒体和设置在玻璃直筒体两端的玻璃止挡环，其特征在于在玻璃直筒 体的一端或两端设置外螺纹，玻璃止挡环通过其设置的螺孔与玻璃直筒体的端头 相联。
按上述方案，所述的玻璃直筒体的一端设置与其相联成一体的固定玻璃止挡 环， 玻璃直筒体的另一端端头设置外螺纹， 与设置螺孔的玻璃止挡环相联， 构成 一端为螺纹联接的玻璃止挡环。
按上述方案， 所述的玻璃直筒体和玻璃止挡环均由石英玻璃制成。
按上述方案，所述的玻璃直筒体直径为 30~80毫米，端头设置的外螺纹为细 牙螺纹， 螺距为 3~0.85毫米， 整个外螺纹的轴向长度为 10~20毫米。
按上述方案，所述的玻璃止挡环呈圆环形，螺孔与玻璃直筒体外螺纹相配置， 玻璃止挡环的轴向厚度为 3~15毫米， 环体径向单边宽度为 10~35毫米。
按上述方案，在玻璃直筒体一端或两端玻璃止挡环的内侧套装有活动玻璃挡 圈。
按上述方案， 所述的谐振腔壳体为圆柱型谐振腔壳体或同轴型谐振腔壳体。 本发明的有益效果在于： 1、 使用安装时， 将玻璃内衬套穿入谐振腔和两端 通孔， 在端头的外螺纹旋上玻璃止挡环， 拧紧玻璃止挡环即完成玻璃内衬套的安 装和定位， 这样不仅安装调整方便， 大大降低了现场安装操作的难度， 而且完全 不使用氢、氧气的高温燃烧， 有效避免因高温造成谐振腔金属元素的扩散， 保证 了生产出的光纤预制棒性能和质量稳定； 2、玻璃内衬套采用螺纹安装锁紧结构， 有效避免了石英玻璃熔化外翻冷却后易产生应力的缺点，在使用过程中不会出现 玻璃碎裂、 破损现象， 提高了玻璃内衬套的使用寿命； 3、 使用过程中玻璃内衬 套发生松动时， 只需将玻璃止挡环继续拧紧一定距离即可， 维修和检查时通过玻 璃止挡环很容易将玻璃内衬套拆卸，拆卸后的玻璃内衬套能够方便的重新安装和 定位， 使设备的维修检查成本大大降低； 并且拆卸安装不会形成玻璃碎片， 进一 步提高了等离子体微波谐振腔使用性能的稳定性。
附图说明
图 1为本发明一个实施例的正剖视结构图。 图 2 为本发明另一个实施例的正剖视结构图。
图 3为本发明一个实施例中玻璃内衬套的正剖视结构图。
具体实施方式
以下结合附图进一步说明本发明的实施例。
第一个实施例如图 1、 3所示， 为一种圆柱型谐振腔， 包括有谐振腔壳体 5 和与其一侧相联的波导装置 10， 在谐振腔壳体的两端安设有左、 右端盖 4、 6， 左、右端盖上沿谐振腔轴向开设有同轴线的通孔， 通过左、右两端通孔安设有贯 穿谐振腔腔体和两端通孔的玻璃内衬套 7，所述的玻璃内衬套包括玻璃直筒体 1， 玻璃直筒体的外径为 60毫米， 玻璃直筒体的一端设置与其相联成一体的固定玻 璃止挡环， 玻璃直筒体的另一端端头设置外螺纹 3， 外螺纹为细牙螺纹， 螺距为 1.5毫米， 整个外螺纹的轴向长度为 15毫米， 外螺纹与设置螺孔的玻璃止挡环 2 相联， 构成一端为螺纹联接的玻璃止挡环， 所述的玻璃止挡环呈圆环形， 螺孔与 玻璃直筒体外螺纹相配置， 玻璃止挡环的轴向厚度为 6毫米， 环体径向单边宽度 为 18毫米。 所述的玻璃直筒体和玻璃止挡环均由石英玻璃制成。 其中固定式玻 璃止挡环与玻璃直筒体一体成型。
第二个实施例如图 2所示， 为一种同轴型谐振腔， 它与上一个实施例的主要 不同在于同轴型谐振腔壳体 8的谐振腔中设置有两个同轴套 9， 两同轴套之间存 在有狭缝 11， 玻璃内衬套穿入两同轴套内孔并贯穿谐振腔轴向。 在波导装置内 安设有波导天线 12.。

Claims

1、 一种等离子体微波谐振腔， 包括有谐振腔壳体和与其相联的波导装置， 在谐振腔壳体的两端沿谐振腔轴向开设有同轴线的通孔，通过两端通孔安设有贯 穿谐振腔腔体和两端通孔的玻璃内衬套，所述的玻璃内衬套包括玻璃直筒体和设 置在玻璃直筒体两端的玻璃止挡环，其特征在于在玻璃直筒体的一端或两端设置 外螺纹， 玻璃止挡环通过其设置的螺孔与玻璃直筒体的端头相联。
2、 按权利要求 1所述的等离子体微波谐振腔， 其特征在于所述的玻璃直筒 体的一端设置与其相联成一体的固定玻璃止挡环，玻璃直筒体的另一端端头设置 外螺纹， 与设置螺孔的玻璃止挡环相联， 构成一端为螺纹联接的玻璃止挡环。
3、 按权利要求 1或 2所述的等离子体微波谐振腔， 其特征在于所述的玻璃 直筒体和玻璃止挡环均由石英玻璃制成。
4、 按权利要求 1或 2所述的等离子体微波谐振腔， 其特征在于所述的玻璃 直筒体直径为 30~80毫米， 端头设置的外螺纹为细牙螺纹， 螺距为 3~0.85毫米， 整个外螺纹的轴向长度为 10~20毫米。
5、 按权利要求 1或 2所述的等离子体微波谐振腔， 其特征在于所述的玻璃 止档环呈圆环形， 螺孔与玻璃直筒体外螺纹相配置， 玻璃止挡环的轴向厚度为 3~15毫米， 环体径向单边宽度为 10~35毫米。
6、 按权利要求 1或 2所述的等离子体微波谐振腔， 其特征在于在玻璃直筒 体一端或两端玻璃止挡环的内侧套装有活动玻璃挡圈。
7、 按权利要求 1或 2所述的等离子体微波谐振腔， 其特征在于所述的谐振 腔壳体为圆柱型谐振腔壳体或同轴型谐振腔壳体。
PCT/CN2012/072226 2011-06-24 2012-03-13 一种等离子体微波谐振腔 Ceased WO2012174890A1 (zh)

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