WO2013011805A1 - Dispositif d'adsorption et dispositif de traitement - Google Patents

Dispositif d'adsorption et dispositif de traitement Download PDF

Info

Publication number
WO2013011805A1
WO2013011805A1 PCT/JP2012/066133 JP2012066133W WO2013011805A1 WO 2013011805 A1 WO2013011805 A1 WO 2013011805A1 JP 2012066133 W JP2012066133 W JP 2012066133W WO 2013011805 A1 WO2013011805 A1 WO 2013011805A1
Authority
WO
WIPO (PCT)
Prior art keywords
adsorption
suction
film material
adsorbed
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2012/066133
Other languages
English (en)
Japanese (ja)
Inventor
達郎 松島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Steel Works Ltd
Original Assignee
Japan Steel Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Steel Works Ltd filed Critical Japan Steel Works Ltd
Priority to CN201280035359.1A priority Critical patent/CN103717349B/zh
Priority to KR1020197014999A priority patent/KR20190064657A/ko
Priority to KR1020137034905A priority patent/KR20140034874A/ko
Publication of WO2013011805A1 publication Critical patent/WO2013011805A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/24—Registering, tensioning, smoothing or guiding webs longitudinally by fluid action, e.g. to retard the running web
    • B65H23/245—Suction retarders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/17—Nature of material
    • B65H2701/175—Plastic
    • B65H2701/1752—Polymer film

Definitions

  • the present invention relates to an adsorption device that adsorbs an adsorbed body and a processing apparatus that performs a predetermined process on the adsorbed body adsorbed on the adsorbing apparatus.
  • the object to be processed is adsorbed and fixed on a sample stage by differential pressure (for example, Patent Documents 1 to 4). 4).
  • a sample stage can be changed to a size that matches the size of the object to be treated, or the largest size of the workpieces of different sizes can be used.
  • a sample stage having a size suitable for a processing object is used, and an unused suction region is covered with a sealing material or the like according to the size of the object to be processed (see, for example, Patent Document 1).
  • FIG. 3 is a schematic diagram showing the suction area variable device described in Patent Document 1.
  • the drawing table 101 on which the drawing object 110 is arranged has a large number of through holes (not shown).
  • a roll screen 102 in the width direction (X-axis direction) that covers all the many through holes formed in the drawing table 101 is provided.
  • the roll screen 102 is wound with a non-breathable sealing material, and a fixed bar 103 for pulling out the sealing material is attached to the outlet.
  • a fixing pin 104 for hooking the fixing bar 103 is provided in a projecting manner in order to stop the sealing material pulled out from the roll screen 102.
  • the lower part of the drawing table 101 is a box formed so as not to leak air.
  • the inside of the box is divided into two chambers by a seal plate 105 that slides in the X-axis direction.
  • a transparent window 111 is formed on the side of the drawing table 101 so that the seal plate 105 in the box can be seen.
  • the seal plate 105 is configured to be movable in the X-axis direction by rotating a handle 106 provided in the box.
  • An exhaust port 107 for sucking out air inside the box is provided below the drawing object 110 on the drawing table 101.
  • An adsorption device 108 is connected to the exhaust port 107 via a hose 109.
  • the drawing object 110 is fixed on the drawing table 101 as follows. First, the drawing object 110 is placed on the drawing table 101. Further, the fixing bar 103 is hooked on the fixing pin 104 so that the roll screen 102 covers a through hole that cannot be completely covered with the drawing object 110, and the through hole is covered with the roll screen 102. On the other hand, the seal plate 105 is visually observed from the transparent window 111 provided on the drawing table 101, and the seal plate 105 is moved by the handle 106 so that the seal plate 105 is disposed on the end surface portion of the drawing object 110. Next, the air inside the drawing table 101 on the opposite side of the handle 106 is exhausted by the suction device 108 with the seal plate 105 interposed therebetween.
  • the drawing object 110 is fixed by the differential pressure between the atmospheric pressure and the negative pressure inside the drawing table 101.
  • the drawing object 110 is fixed by covering the through hole that cannot be covered by the drawing object 110 in the above procedure.
  • the present invention has been made in order to solve the above-described conventional problems, and includes an adsorption device capable of easily adsorbing and fixing adsorbents having different sizes with high work efficiency, and the adsorption device.
  • An object of the present invention is to provide a processing apparatus.
  • the first invention of the present invention is provided with an adsorbing part for adsorbing an object to be adsorbed by differential pressure, and the adsorbing part is partitioned into a plurality of adsorbing regions that can independently perform an adsorbing operation. It is characterized by.
  • an evacuation line and a gas supply line are connected to each of the adsorption regions so as to communicate with each other.
  • Each line is provided with an on-off valve.
  • the adsorbing device is characterized in that, in the second aspect of the present invention, the adsorbing portion is provided with a plurality of adsorbing air holes in each adsorbing region.
  • a compartment portion communicating with the plurality of vent holes is provided for each adsorption region, and the vacuum exhaust line, the gas supply line, Is connected to the adsorption region through the plurality of vent holes and the compartment portion.
  • the suction device is characterized in that, in any one of the first to fourth aspects of the present invention, the suction portion is provided on a suction base that is detachably installed on a base. .
  • the adsorbing device of the sixth aspect of the present invention is characterized in that, in the fifth aspect of the present invention, the base includes an adsorbing stand adsorbing portion that adsorbs and installs the adsorbing stand with a differential pressure.
  • the adsorbing device of the seventh aspect of the present invention is characterized in that, in any of the first to sixth aspects of the present invention, the adsorbed body is a film material.
  • the suction device is the suction device according to the seventh aspect of the present invention, wherein the film material has a long strip shape and is intermittently conveyed along the long direction.
  • the suction and the release thereof are performed above, and the plurality of suction regions are arranged in a direction orthogonal to the transport direction and arranged along the transport direction.
  • a processing apparatus includes any one of the adsorption apparatuses according to the first to eighth aspects of the present invention, And a processing unit that performs a predetermined process on the adsorbed body adsorbed by the adsorption unit.
  • the processing apparatus is characterized in that, in the ninth aspect of the present invention, the processing section is a laser processing section that performs laser processing on the object to be adsorbed.
  • the adsorption portion that adsorbs the adsorbent by the differential pressure is partitioned into a plurality of adsorption regions that can independently perform the adsorbing operation, according to the size of the adsorbent, Of the plurality of adsorption regions, only the adsorption region necessary for the adsorption of the adsorbent can be adsorbed.
  • the adsorbent to be adsorbed is changed to one with a different size, it is easy to change the size of the adsorbent by appropriately changing the adsorption area to be adsorbed according to the size of the adsorbent. It can correspond to.
  • the adsorption device of the present invention it is not necessary to separately cover a region unnecessary for adsorption of the object to be adsorbed in the adsorption portion with a sealing material or the like.
  • suction part should just be two or more, and the number is not limited as this invention.
  • the size and shape of the suction area are not particularly limited, and the size and shape may be different in each suction area.
  • one suction region where the suction operation is performed may be one that is continuous in the surface direction, or may be separated from another suction region.
  • the adsorbent has a long shape as described later, the adsorbing region extends in the long direction in which the adsorbing member is arranged, and adjacent adsorbing regions are aligned in a direction perpendicular to the long direction. What is installed and arranged can be illustrated. According to this arrangement form, even when the width of the elongated object to be adsorbed is different, it can be easily handled by changing the number of adsorption regions where the adsorption operation is performed.
  • a configuration for adsorbing the object to be adsorbed by the adsorbing unit a configuration in which an evacuation line provided with an on-off valve is connected to each of the plurality of adsorption regions so as to communicate with each other can be used. Since the plurality of evacuation lines are each provided with an on-off valve, they can be connected to a common vacuum pump. In this case, it is only necessary to open the open / close valve of the vacuum exhaust line connected to the suction region necessary for suction of the object to be adsorbed and close the open / close valves of the other vacuum exhaust lines. It should be noted that at least the gas supply line opening / closing valve described below connected to the adsorption region where adsorption is performed is closed.
  • the evacuation line in which the on-off valve is opened only the adsorption region necessary for the adsorption of the adsorbent can be evacuated to generate a differential pressure and adsorb the adsorbent. Further, in the adsorption region where no adsorption is performed, it is possible to open the gas supply line on-off valve to release gas for the atmosphere.
  • the degree of the degree of vacuum when evacuating can be set as appropriate according to the adsorption force required for adsorption of the adsorbent.
  • the opening / closing valve of the evacuation line may be manually opened or closed by an operator or automatically by the control unit according to the size of the object to be adsorbed.
  • a configuration for releasing the adsorption of the adsorbed body adsorbed by the adsorption unit a configuration in which a gas supply line provided with an opening / closing valve is connected to each of the plurality of adsorption regions so as to communicate with each other is used. It can. Since the plurality of gas supply lines are each provided with an on-off valve, a common gas supply source can be connected. In this case, the on-off valve of the evacuation line is closed, the on-off valve of the gas supply line connected to the adsorption region where the adsorbent is adsorbed is opened, and the on-off valves of the other gas supply lines are closed. To do.
  • the gas can be supplied only to the adsorption region where the adsorbed object is adsorbed through the gas supply line in which the on-off valve is opened to eliminate the differential pressure, and the adsorption of the adsorbed object can be released.
  • the gas supplied to release the adsorption should not affect the object to be adsorbed.
  • an inert gas such as nitrogen gas or argon gas, or air such as clean dry air is used. Can do.
  • the opening / closing valve of the gas supply line may be manually opened or closed by the operator or automatically by the control unit according to the size of the object to be adsorbed.
  • the adsorbing part may be provided with a plurality of adsorbing air holes in each adsorbing region.
  • any form of vent can be used as long as it can generate a differential pressure for adsorbing the adsorbent.
  • the support itself on which the adsorbent is supported can be made of a porous material, and the pores of the porous material can be used as the ventilation holes for adsorption. By using the pores of the porous material as the suction vents, it is not necessary to separately provide a plurality of through-holes that penetrate the support portion as the suction vents.
  • the shape of the adsorbed object can be easily maintained, such as the flatness of the adsorbed film material can be maintained.
  • a plurality of through holes penetrating the support on which the object to be adsorbed is supported can also be used as the suction air holes.
  • the hole diameter of the through hole can be appropriately set according to the size, rigidity, etc. of the adsorbent.
  • a compartment portion communicating with the vent hole can be provided for each adsorption region, and the vacuum exhaust line and the gas supply line are adsorbed via the plurality of vent holes and the compartment portion. It can be connected to the area so that it can communicate.
  • the evacuation of the adsorption region through the evacuation line is performed through the compartment and the plurality of vent holes.
  • the gas is supplied to the adsorption region through the gas supply line through the compartment and the plurality of vent holes.
  • the suction part may be provided on a suction stand that is detachably installed on the base. Since the suction table provided with the suction part is detachably installed on the base, the suction table can be easily replaced. Therefore, in the case of an adsorbent with a size that cannot be accommodated by changing the adsorbing area to be adsorbed by preparing a plurality of adsorbers with different adsorber sizes, the size that can correspond to the size of the adsorbent Replace the suction table with the suction part. As a result, it is possible to easily cope with an object to be adsorbed having a size that cannot be dealt with by changing the adsorption region to be adsorbed.
  • the base on which the suction table is detachably installed may be provided with a suction table suction part that sucks and fixes the suction table by differential pressure.
  • An evacuation line and a gas supply line can be connected to the adsorption stand adsorption unit so as to communicate with each other, and an open / close valve can be provided in each line.
  • a differential pressure is generated to suck the suction table.
  • the open / close valve of the vacuum exhaust line is closed, the open / close valve of the gas supply line is opened, and gas is supplied to the adsorption table adsorption unit through the gas supply line. Release the pressure and release the suction stand.
  • the object to be adsorbed by the adsorption apparatus of the present invention is not particularly limited as long as it can be adsorbed by a differential pressure.
  • a to-be-adsorbed body a film form, a sheet form, a plate-shaped thing etc.
  • a film material can be mentioned as a suitable to-be-adsorbed body especially.
  • the film material as the adsorbed body is not particularly limited in its shape and other forms.
  • the film material has a long belt-like shape, and intermittently along the long direction. What is conveyed can be mentioned.
  • the film material conveyed intermittently can be sucked and released on the suction portion.
  • the plurality of suction regions can be partitioned so as to be arranged in the direction orthogonal to the transport direction of the film material and arranged along the transport direction.
  • the adsorption apparatus of the present invention can constitute a processing apparatus together with a processing unit that performs a predetermined process on an object to be adsorbed by the adsorption apparatus.
  • the processing content in the processing unit is not particularly limited as the present invention.
  • the subject to be adsorbed may be subjected to laser processing such as drawing, cutting, and drilling with a laser beam. it can.
  • the adsorption unit that adsorbs the object to be adsorbed by the differential pressure is provided, and the adsorption unit is divided into a plurality of adsorption regions that can perform the adsorption operation independently. Different objects to be adsorbed can be easily adsorbed and fixed with high work efficiency.
  • FIG. 1 is a plan view showing the suction device of the present embodiment
  • FIG. 2 is a front view showing a laser processing apparatus including the suction device of the present embodiment.
  • the suction device 3 of the present embodiment is provided in the laser processing device 1 that performs laser processing on the film material 2, and sucks and fixes the film material that is subjected to laser processing.
  • the laser processing apparatus 1 is also an embodiment of the processing apparatus of the present invention. As shown in FIG. 2, the laser processing apparatus 1 includes an adsorption device 3 that adsorbs and fixes the film material 2 and a laser processing unit 4 that performs laser processing on the film material 2 that is adsorbed and fixed to the adsorption device 3. ing.
  • the suction device 3 has a flat base 5 and a rectangular parallelepiped suction base 6 that is detachably installed on the base 5.
  • the base 5 has a cavity 51 inside, and one end of a vacuum exhaust line 7 penetrating from the outside one side of the base 5 to the inside is connected to the cavity 51.
  • the vacuum exhaust line 7 is provided with an on-off valve 8 and a vacuum pump 9 is connected to the other end.
  • the cavity 51 is connected to one end of a gas supply line 10 penetrating from the outside of the base 5 to the inside.
  • the gas supply line 10 is provided with an on-off valve 11 and a gas supply source 12 is connected to the other end.
  • the suction table suction part 52 is provided with a plurality of suction ventilation holes (not shown) that open to the upper surface of the suction table suction part 52 and penetrate the cavity table 51 so as to communicate therewith.
  • the plurality of air holes of the suction stand suction part 52 are preferably arranged evenly in the surface direction.
  • suction part 52 in the upper surface part of the base 5 is provided is comprised with a porous material, and the several ventilation hole of the adsorption stand adsorption
  • An adsorption part 61 that adsorbs the film material 2 by differential pressure is provided on the upper layer part of the adsorption stage 6 so as to be exposed on the surface of the adsorption stage 6. It is divided into two adsorption regions 62a, 62b, 62c, 62d.
  • the adsorbing part 61 has a rectangular shape, and its upper surface is flat.
  • the suction areas 62 a, 62 b, 62 c, and 62 d are obtained by dividing the suction part 61 into a plurality in the short side direction, and the suction areas 62 a, 62 b, 62 c, and 62 d are suctioned along the long side direction of the suction part 61.
  • the adsorption regions 62a, 62b, 62c, and 62d have the same shape. However, according to the present invention, it is not necessary that each suction region has the same shape.
  • the suction stand 6 has compartments 63a, 63b, 63c, 63d inside corresponding to the suction regions 62a, 62b, 62c, 62d.
  • Each of the suction regions 62a to 62d is provided with a plurality of suction holes (not shown) that open to the outside of the suction regions 62a to 62d and communicate with the compartments 63a to 63d.
  • the adsorption region 62a communicates only with the compartment portion 63a through the vent hole
  • the adsorption region 62b communicates only with the compartment portion 63b through the vent hole
  • the adsorption region 62c communicates with the compartment portion through the vent hole.
  • the suction region 62d communicates only with the compartment portion 63d through the vent hole.
  • the adsorbing part 61 is made of a porous material, and the air holes are constituted by pores of the porous material. Since the adsorbing portion 61 is made of a porous material, the film material 2 is adsorbed while having good flatness, and laser processing can be performed with higher accuracy. Note that the adsorbing portion 61 may not be composed of a porous material, but may be composed of a plurality of through holes in which a plurality of vent holes in each of the adsorbing regions 62a to 62d are evenly arranged in the surface direction.
  • vacuum exhaust lines 13a to 13d penetrating into the suction portion 61 from outside the short side outer wall of the suction portion 61 are connected to the compartment portions 63a to 63d, respectively. That is, the vacuum exhaust line 13a is connected to the compartment 63a, the vacuum exhaust line 13b is connected to the compartment 63b, the vacuum exhaust line 13c is connected to the compartment 63c, and the vacuum exhaust line 13d is connected to the compartment 63d. Is connected.
  • the vacuum exhaust lines 13a to 13d are respectively provided with on-off valves 14a to 14d, and a common vacuum pump 15 is connected to the other end.
  • a common vacuum pump may be used as the vacuum pump 15 and the vacuum pump 9.
  • gas supply lines 16a to 16d penetrating into the adsorbing portion 61 from the outside of the short side outer wall of the adsorbing portion 61 are connected to the compartment portions 63a to 63d, respectively. That is, the gas supply line 16a is connected to the compartment 63a, the gas supply line 16b is connected to the compartment 63b, the gas supply line 16c is connected to the compartment 63c, and the gas supply line 16d is connected to the compartment 63d. Is connected.
  • the gas supply lines 16a to 16d are provided with on-off valves 17a to 17d, respectively, and a common gas supply source 18 is connected to the other end.
  • a common gas supply source may be used as the gas supply source 18 and the gas supply source 12.
  • the film material 2 has a long belt-like shape, and on both sides of the suction table 6, a transport roller 19a and a transport roller 19b that transport the film material 2 intermittently along its longitudinal direction are respectively arranged. Yes.
  • the transport rollers 19a and 19b can transport the film material 2 from the transport roller 19a side to the transport roller 19b side so as to pass over the adsorption unit 61.
  • An unwinder (not shown) for unwinding the film material 2 to be subjected to laser processing is provided on the upstream side of the transport roller 19a.
  • a winder (not shown) for winding the film material 2 that has been subjected to laser processing is provided on the downstream side of the conveying roller 19b.
  • a laser processing unit 4 is disposed above the suction table 6.
  • the laser processing unit 4 includes a laser light source 42 that outputs a laser beam 41 for processing, and an optical system 43 that irradiates the film material 2 that is attracted and fixed to the suction device 3 with the laser light 41 output from the laser light source 42.
  • a CO 2 laser can be used as the laser light source 42, but the type of laser is not particularly limited in the present invention.
  • the optical system 43 includes a mirror 43 a that reflects and guides the laser beam 41 to the film material 2 on the suction table 6.
  • the optical system 43 can have an appropriate optical system member such as a homogenizer or a cylindrical lens.
  • the optical system 43 can relatively change the irradiation position of the laser light 41 on the film material 2, and can perform laser processing such as drawing on the film material 2 by the laser light 41.
  • the suction table adsorption unit 52 is evacuated through the plurality of vent holes and the cavity 51 provided in the adsorption table adsorption unit 52, and the adsorption table 6 is adsorbed on the base 5 by the differential pressure. Fixed.
  • the film material 2 is transported on the suction portion 61 by the transport rollers 19a and 19b, the portion of the film material 2 to be laser processed is positioned on the suction portion 61, and the transport of the film material 2 is stopped.
  • the relative positions of the film material 2 and the suction device 3 are set in advance so that the film material 2 having a width corresponding to two of the suction regions 62a to 62d overlaps, for example, two regions of the suction regions 62b and 62c. Set it.
  • the on-off valves 14b and 14c of the vacuum exhaust lines 13b and 13c connected to the compartments 63b and 63c corresponding to the adsorption regions 62b and 62c where the film material 2 overlaps are opened, and the other vacuum exhaust lines 13a and 13c are opened.
  • the on-off valves 14a and 14d of 13d are closed. Note that all the on-off valves 17a to 17d of the gas supply lines 16a to 16d are closed.
  • the vacuum chamber 15 evacuates the compartments 63b and 63c through the evacuation lines 13b and 13c.
  • a differential pressure arises through the several ventilation hole provided in the adsorption
  • the laser light 41 is output from the laser light source 42.
  • the laser beam 41 is applied to the film material 2 on the suction table 6 by the optical system 43 while drawing a predetermined locus according to the contents of the laser processing.
  • the laser processing is performed on the film material 2 by the laser beam 41.
  • the open / close valves 14b and 14c of the vacuum exhaust lines 13b and 13c connected to the compartments 63b and 63c are closed, and the gas supply lines 16b and 16c connected to the compartments 63b and 63c are opened and closed.
  • the valves 17b and 17c are opened. Note that the open / close valves 17a and 17d of the other gas supply lines 16a and 16d are kept closed.
  • gas is supplied from the gas supply source 18 to the compartments 63b and 63c through the gas supply lines 16b and 16c.
  • the gas supplied from the gas supply source 18 for example, an inert gas such as nitrogen gas or argon gas, or air such as clean dry air is used.
  • an inert gas such as nitrogen gas or argon gas, or air such as clean dry air is used.
  • gas is supplied to the adsorption regions 62b and 62c to which the film material 2 is adsorbed through the plurality of air holes provided in the adsorption regions 62b and 62c, and the above-described differential pressure is eliminated and the film material 2 Adsorption is released.
  • suction part 61 depending on the supply amount of gas is also acquired.
  • the on-off valves 17b and 17c are closed.
  • the film material 2 that has been released from suction is transported by the transport rollers 19a and 19b, and the part to be processed next is positioned on the suction unit 61, and the same processing is performed. Thereafter, in the same manner as described above, the film material 2 adsorption, laser processing, release of the film material 2 adsorption, and film material 2 conveyance are sequentially repeated to perform laser processing on each part of the long belt-like film material 2. Can be applied.
  • the film material 2 to be subjected to laser processing is changed to one having a width corresponding to three of the adsorption regions 62a to 62d.
  • the wide film material 2 is transported by the transport rollers 19a and 19b, and the portion of the film material 2 to be laser processed is positioned on the suction portion 61. Thereafter, the conveyance of the film material 2 is stopped.
  • the relative positions of the film material 2 and the suction device 3 so that the film material 2 having a width corresponding to three of the suction regions 62a to 62d overlaps, for example, the three regions of the suction regions 62a, 62b, and 62c. Is set in advance.
  • the open / close valves 14a, 14b, 14c of the vacuum exhaust lines 13a, 13b, 13c connected to the compartments 63a-63c corresponding to the adsorption regions 62a, 62b, 62c on which the film material 2 is overlapped are opened.
  • the on-off valve 14d of the vacuum exhaust line 13d is closed. Note that all the on-off valves 17a to 17d of the gas supply lines 16a to 16d are closed.
  • the evacuation of the compartments 63a, 63b, 63c is performed by the vacuum pump 15 through the evacuation lines 13a, 13b, 13c.
  • a differential pressure arises through the several ventilation hole provided in adsorption
  • the laser light 41 is output from the laser light source 42.
  • the laser beam 41 is applied to the film material 2 on the suction table 6 by the optical system 43 while drawing a predetermined locus according to the contents of the laser processing.
  • the laser processing is performed on the film material 2 by the laser beam 41.
  • the on-off valves 14a, 14b, 14c of the vacuum exhaust lines 13a, 13b, 13c connected to the compartments 63a, 63b, 63c are closed and connected to the compartments 63a, 63b, 63c.
  • the on-off valves 17a, 17b and 17c of the gas supply lines 16a, 16b and 16c are opened. Note that the open / close valve 17d of the other gas supply line 16d is kept closed.
  • gas is supplied from the gas supply source 18 to the compartments 63a, 63b, and 63c through the gas supply lines 16a, 16b, and 16c.
  • gas is supplied to the adsorption regions 62a, 62b, and 62c where the film material 2 is adsorbed through the plurality of vent holes provided in the adsorption regions 62a, 62b, and 62c, and the above-described differential pressure is eliminated.
  • the adsorption of the film material 2 is released.
  • suction part 61 by the supply of gas is also acquired.
  • the on-off valves 17a, 17b, and 17c are closed.
  • the film material 2 that has been released from suction is transported by the transport rollers 19a and 19b, and the part to be processed next is positioned on the suction unit 61, and the same processing is performed. Thereafter, in the same manner as described above, the film material 2 adsorption, laser processing, release of the film material 2 adsorption, and film material 2 conveyance are sequentially repeated to perform laser processing on each part of the long belt-like film material 2. Can be applied.
  • the suction table 6 is This can be dealt with by replacing the width of the region with one that matches the width of the film material 2.
  • the suction table 6 installed and fixed on the base 5 is removed as follows, and then a new suction table is installed and fixed on the base 5.
  • the open / close valve 8 of the vacuum exhaust line 7 is closed, and the open / close valve 11 of the gas supply line 10 is opened.
  • gas is supplied from a gas supply source 12 connected to the other end of the gas supply line 10.
  • the gas is supplied to the adsorption table adsorption unit 52 through the gas supply line 10, the cavity 51, and the plurality of vent holes provided in the adsorption table adsorption unit 52.
  • the differential pressure that adsorbs the adsorption table 6 is eliminated, and the adsorption of the adsorption table 6 is released. Thereafter, the suction table 6 whose suction has been released is removed from the base 5.
  • a new suction stand (not shown) having a suction region having a size corresponding to the size of the film material 2 to be subjected to laser processing is installed on the base 5.
  • the on-off valve 11 of the gas supply line 10 is closed, and the on-off valve 8 of the vacuum exhaust line 7 is opened.
  • the vacuum pump 9 connected to the other end of the vacuum exhaust line 7 is evacuated.
  • the suction table suction part 52 is evacuated through the plurality of vent holes and the cavity 51 provided in the suction table suction part 52.
  • a new suction stand is sucked and fixed on the base 5 by the differential pressure.
  • the suction table can be easily replaced, it is possible to easily cope with the film material 2 having a size that cannot be dealt with by changing the suction regions 62a to 62d to be sucked. Further, in the changed suction stand, laser processing can be performed on the film material 2 having a different size as long as the width of the suction region is matched.
  • the film material 2 is not limited to what has a shape of a long strip
  • the said embodiment demonstrated what adsorb
  • the suction part 61 is divided into four suction areas 62a to 62d.
  • the number of the suction areas and the mode of the suction part are not limited to the above contents. However, it can be appropriately changed according to the size, shape, etc. of the adsorbent to be adsorbed.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Jigs For Machine Tools (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)

Abstract

L'invention a pour but de proposer un dispositif d'adsorption qui puisse facilement adsorber et fixer des objets à adsorber qui ont différentes dimensions avec une haute efficacité de travail, et un dispositif de traitement équipé du dispositif d'adsorption. A cet effet, selon l'invention, le dispositif d'adsorption comporte une partie d'adsorption (61) qui adsorbe une matière en film (2) en utilisant une pression différentielle. La partie d'adsorption (61) est divisée en de multiples régions d'adsorption (62a-62d) dont chacune est apte à exécuter des actions d'adsorption indépendantes. Des conduites d'évacuation de vide (13a-13d) et des conduites d'amenée de gaz (16a-16d) sont raccordées pour la communication à chacune des régions d'adsorption (62a-62d). Des soupapes respectives (14a-14d, 17a-17d) sont montées sur les conduites d'évacuation de vide (13a-13d) et sur les conduites d'amenée de gaz (16a-16d)
PCT/JP2012/066133 2011-07-19 2012-06-25 Dispositif d'adsorption et dispositif de traitement Ceased WO2013011805A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201280035359.1A CN103717349B (zh) 2011-07-19 2012-06-25 吸附装置及处理装置
KR1020197014999A KR20190064657A (ko) 2011-07-19 2012-06-25 흡착 장치 및 처리 장치
KR1020137034905A KR20140034874A (ko) 2011-07-19 2012-06-25 흡착 장치 및 처리 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-158318 2011-07-19
JP2011158318A JP5201642B2 (ja) 2011-07-19 2011-07-19 吸着装置および処理装置

Publications (1)

Publication Number Publication Date
WO2013011805A1 true WO2013011805A1 (fr) 2013-01-24

Family

ID=47557986

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2012/066133 Ceased WO2013011805A1 (fr) 2011-07-19 2012-06-25 Dispositif d'adsorption et dispositif de traitement

Country Status (4)

Country Link
JP (1) JP5201642B2 (fr)
KR (2) KR20140034874A (fr)
CN (1) CN103717349B (fr)
WO (1) WO2013011805A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106170359A (zh) * 2014-03-07 2016-11-30 Ｊｄｃ株式会社 负压片材构造
CH713920A1 (de) * 2017-06-26 2018-12-28 Swissqprint Ag Tisch für einen Flachbettprinter oder einen Flachbett-Schneidplotter.

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105127806A (zh) * 2015-09-15 2015-12-09 常熟理工学院 一种组合式多功能真空夹具
JP6912801B2 (ja) * 2017-04-28 2021-08-04 株式会社日本設計工業 フィルム状ワーク吸着装置
CN110064856B (zh) * 2019-04-18 2022-04-19 大族激光科技产业集团股份有限公司 一种真空吸附治具
CN111390603B (zh) * 2020-03-25 2022-01-04 成都飞机工业（集团）有限责任公司 薄板类零件真空吸附工装及薄板类零件数控加工装夹方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5066723U (fr) * 1973-10-19 1975-06-16
JPS5111350B1 (fr) * 1970-02-12 1976-04-10
JPS60134527U (ja) * 1984-02-15 1985-09-07 ナショナル住宅産業株式会社 ワ−ク固定装置
JPS6413200U (fr) * 1987-07-03 1989-01-24
JPH06339829A (ja) * 1993-05-31 1994-12-13 Hirata Kiko Kk 真空吸着テーブル
JP2000143052A (ja) * 1998-11-05 2000-05-23 Sony Corp フィルム状の被加工物の供給装置及び供給方法
JP2003191088A (ja) * 2001-12-26 2003-07-08 Toppan Forms Co Ltd ビーム光加工方法およびビーム光加工システム
JP2010269373A (ja) * 2009-05-19 2010-12-02 Taiyo Tec Co 真空吸着装置及び吸着具構成具

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2720331B2 (ja) 1995-09-16 1998-03-04 日本ピラー工業株式会社 加工物吸着板
JPH1126912A (ja) 1997-06-27 1999-01-29 Toyo Electric Mfg Co Ltd 吸着エリア可変装置
JP2001199574A (ja) 2000-01-20 2001-07-24 Fuji Photo Film Co Ltd シート材の吸着部構造
JP2005189365A (ja) 2003-12-25 2005-07-14 Fuji Photo Film Co Ltd 吸着固定装置、画像形成装置
CN201455699U (zh) * 2009-08-04 2010-05-12 武汉高能数控机械有限公司 高效真空夹具

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5111350B1 (fr) * 1970-02-12 1976-04-10
JPS5066723U (fr) * 1973-10-19 1975-06-16
JPS60134527U (ja) * 1984-02-15 1985-09-07 ナショナル住宅産業株式会社 ワ−ク固定装置
JPS6413200U (fr) * 1987-07-03 1989-01-24
JPH06339829A (ja) * 1993-05-31 1994-12-13 Hirata Kiko Kk 真空吸着テーブル
JP2000143052A (ja) * 1998-11-05 2000-05-23 Sony Corp フィルム状の被加工物の供給装置及び供給方法
JP2003191088A (ja) * 2001-12-26 2003-07-08 Toppan Forms Co Ltd ビーム光加工方法およびビーム光加工システム
JP2010269373A (ja) * 2009-05-19 2010-12-02 Taiyo Tec Co 真空吸着装置及び吸着具構成具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106170359A (zh) * 2014-03-07 2016-11-30 Ｊｄｃ株式会社 负压片材构造
CH713920A1 (de) * 2017-06-26 2018-12-28 Swissqprint Ag Tisch für einen Flachbettprinter oder einen Flachbett-Schneidplotter.

Also Published As

Publication number Publication date
JP2013022669A (ja) 2013-02-04
CN103717349B (zh) 2015-11-25
JP5201642B2 (ja) 2013-06-05
CN103717349A (zh) 2014-04-09
KR20140034874A (ko) 2014-03-20
KR20190064657A (ko) 2019-06-10

Similar Documents

Publication Publication Date Title
JP5201642B2 (ja) 吸着装置および処理装置
TWI469899B (zh) Plate glass packaging device
JP5733700B2 (ja) 真空チャック
JP6004000B2 (ja) 搬送装置
TW201330086A (zh) 蝕刻裝置
WO2012086119A1 (fr) Appareil de formation de film en continu de type à enroulage
JP2012000765A (ja) ロールフィルム切断システムのロールフィルム吸着装置
JP6984206B2 (ja) 光照射装置
WO2018168360A1 (fr) Procédé de fabrication de plaque de verre et dispositif de séparation de feuille de protection
JP2014201449A (ja) ガラス板搬送装置及びガラス板搬送方法
US20150239096A1 (en) Method and System for Manufacturing a Grinding Tool
TW201538265A (zh) 雷射加工機及雷射加工方法
JP2019172451A (ja) シール部材の分離装置及びシール部材の分離方法
JP7003431B2 (ja) 光照射装置
JP2010260318A (ja) 吸着ステージ
JP4710880B2 (ja) レーザ加工装置
JP2024157059A (ja) シートの折り装置および吸着切替ユニット
KR20180044547A (ko) 진공 흡착 부재 및 이를 포함하는 레이저 절단 장치
JP6212512B2 (ja) フィルム搬送装置およびフィルム延伸機
JP2015166249A (ja) 袋の口部シール機における袋内の脱気装置
KR102329091B1 (ko) 이차전지 극판 레이저 노칭 이물질 배기 장치 및 이물질 배기 방법
WO2022107459A1 (fr) Dispositif de traitement laser et procédé de fabrication d'article traité
JP5451539B2 (ja) ワーク貼合装置、およびワーク貼合方法
KR101274379B1 (ko) 포장지 제조장치
KR20190036582A (ko) 시트 이송 장치 및 이를 이용한 시트 이송 방법

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12815380

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20137034905

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12815380

Country of ref document: EP

Kind code of ref document: A1