WO2014170005A3 - Oxidationsschutzschicht auf chrombasis - Google Patents

Oxidationsschutzschicht auf chrombasis Download PDF

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Publication number
WO2014170005A3
WO2014170005A3 PCT/EP2014/000991 EP2014000991W WO2014170005A3 WO 2014170005 A3 WO2014170005 A3 WO 2014170005A3 EP 2014000991 W EP2014000991 W EP 2014000991W WO 2014170005 A3 WO2014170005 A3 WO 2014170005A3
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WO
WIPO (PCT)
Prior art keywords
chromium
layer
individual layers
oxidation protection
based oxidation
Prior art date
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Ceased
Application number
PCT/EP2014/000991
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English (en)
French (fr)
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WO2014170005A2 (de
Inventor
Juergen Ramm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Surface Solutions AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions AG Truebbach filed Critical Oerlikon Surface Solutions AG Truebbach
Priority to CN201480021676.7A priority Critical patent/CN105143498B/zh
Priority to CA2912584A priority patent/CA2912584C/en
Priority to BR112015026344-5A priority patent/BR112015026344B1/pt
Priority to KR1020157032664A priority patent/KR102236892B1/ko
Priority to US14/784,853 priority patent/US10174416B2/en
Priority to EP14722542.9A priority patent/EP2986752B1/de
Priority to JP2016508035A priority patent/JP7002195B2/ja
Priority to MX2015014649A priority patent/MX384092B/es
Publication of WO2014170005A2 publication Critical patent/WO2014170005A2/de
Publication of WO2014170005A3 publication Critical patent/WO2014170005A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Laminated Bodies (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Die vorliegende Erfindung betrifft eine Oxidationsschutzschicht auf Chrombasis für Substrate welche hohen Temperaturen ausgesetzt werden, wobei die Schicht ein Chrom enthaltendes Schichtsystem umfasst welches eine Basisschicht und eine Funktionsschicht umfasst und wobei die Basisschicht sich zwischen dem Substrat und der Funktionsschicht befindet, und wobei die Basisschicht mindestens grösstenteils Chromnitrid enthält und die Funktionsschicht Chromoxid enthält. Ausserdem betrifft die vorliegende Erfindung eine Oxidationsschutzschicht auf Chrombasis für Substrate welche hohen Temperaturen ausgesetzt werden, wobei die Schicht ein Chrom enthaltendes Schichtsystem umfasst welches eine Funktionsschicht umfasst, wobei die Funktionsschicht eine mehrlagige Schichtstruktur aufweist welche alternierend-abgeschiedene Einzelschichten A und B umfasst, wobei die Zusammensetzung der A Einzelschichten sich von der Zusammensetzung der B Einzelschichten unterscheidet, und wobei die A Einzelschichten mindestens grösstenteils Aluminiumchromnitrid oder vorzugsweise Chromnitrid und die B Einzelschichten mindestens grösstenteils Aluminiumchromoxid oder Chromoxid oder vorzugsweise Aluminiumchromoxinitrid oder noch mehr bevorzugt Chromoxinitrid enthalten.
PCT/EP2014/000991 2013-04-16 2014-04-14 Oxidationsschutzschicht auf chrombasis Ceased WO2014170005A2 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
CN201480021676.7A CN105143498B (zh) 2013-04-16 2014-04-14 铬基的氧化保护层
CA2912584A CA2912584C (en) 2013-04-16 2014-04-14 Chromium-based oxidation protection layer
BR112015026344-5A BR112015026344B1 (pt) 2013-04-16 2014-04-14 Camada de proteção contra oxidação baseada em cromo
KR1020157032664A KR102236892B1 (ko) 2013-04-16 2014-04-14 크로뮴-기반 산화 보호층
US14/784,853 US10174416B2 (en) 2013-04-16 2014-04-14 Chromium-based oxidation protection layer
EP14722542.9A EP2986752B1 (de) 2013-04-16 2014-04-14 Oxidationsschutzschicht auf chrombasis
JP2016508035A JP7002195B2 (ja) 2013-04-16 2014-04-14 クロムをベースとする酸化保護層、コーティングされた基板、および方法
MX2015014649A MX384092B (es) 2013-04-16 2014-04-14 Capa de protección contra la oxidación a base de cromo.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361812350P 2013-04-16 2013-04-16
US61/812,350 2013-04-16

Publications (2)

Publication Number Publication Date
WO2014170005A2 WO2014170005A2 (de) 2014-10-23
WO2014170005A3 true WO2014170005A3 (de) 2015-03-12

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PCT/EP2014/000991 Ceased WO2014170005A2 (de) 2013-04-16 2014-04-14 Oxidationsschutzschicht auf chrombasis

Country Status (10)

Country Link
US (1) US10174416B2 (de)
EP (1) EP2986752B1 (de)
JP (1) JP7002195B2 (de)
KR (1) KR102236892B1 (de)
CN (1) CN105143498B (de)
AR (1) AR096030A1 (de)
BR (1) BR112015026344B1 (de)
CA (1) CA2912584C (de)
MX (1) MX384092B (de)
WO (1) WO2014170005A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11560618B2 (en) 2017-11-24 2023-01-24 Oerlikon Surface Solutions Ag, Pfäffikon Al—Cr-based ceramic coatings with increased thermal stability

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107488830A (zh) * 2016-06-13 2017-12-19 沈阳科蓝纳米涂层技术有限公司 一种氮化铬涂层的制备方法
CN106435489B (zh) * 2016-11-30 2019-01-11 西北有色金属研究院 一种铌基表面抗氧化自愈合Cr/NiCr涂层的制备方法
CN107747093B (zh) * 2017-10-10 2019-10-29 岭南师范学院 一种柔性硬质复合涂层及其制备方法和涂层刀具
PL3728695T3 (pl) * 2017-12-22 2023-02-06 Oerlikon Surface Solutions Ag, Pfäffikon Powłoka odporna na korozję i erozję do łopatek turbinowych turbin gazowych
WO2019182967A1 (en) 2018-03-19 2019-09-26 Applied Materials, Inc. Methods for depositing coatings on aerospace components
SG11202008259UA (en) * 2018-03-19 2020-10-29 Applied Materials Inc Methods of protecting metallic components against corrosion using chromium-containing thin films
JP7482863B2 (ja) * 2018-11-14 2024-05-14 エリコン・サーフェス・ソリューションズ・アクチェンゲゼルシャフト，プフェフィコーン プラスチック加工用途において性能および寿命を向上させるためのコーティング
EP3959356A4 (de) 2019-04-26 2023-01-18 Applied Materials, Inc. Verfahren zum schutz von luft- und raumfahrtkomponenten gegen korrosion und oxidation
US11697879B2 (en) 2019-06-14 2023-07-11 Applied Materials, Inc. Methods for depositing sacrificial coatings on aerospace components
JP7871277B2 (ja) * 2021-02-23 2026-06-08 エリコン サーフィス ソリューションズ アーゲー ファフィコン プラスチック加工用途におけるコーティングシステム
KR102619089B1 (ko) * 2022-10-31 2023-12-29 주식회사 미코세라믹스 세라믹 서셉터
CN116145082A (zh) * 2023-03-01 2023-05-23 纳狮新材料有限公司杭州分公司 狭缝涂布模具表面清洗方法及表面结构的制备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999023277A1 (de) * 1997-11-03 1999-05-14 Siemens Aktiengesellschaft Für eine heissgasbeaufschlagung ausgelegtes erzeugnis und verfahren zur herstellung einer beschichtung für ein für dieses erzeugnis

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001179420A (ja) * 1999-10-14 2001-07-03 Olympus Optical Co Ltd ダイカスト用金型およびその製造方法
US9997338B2 (en) * 2005-03-24 2018-06-12 Oerlikon Surface Solutions Ag, Pfäffikon Method for operating a pulsed arc source
WO2006099754A1 (de) * 2005-03-24 2006-09-28 Oerlikon Trading Ag, Trübbach Hartstoffschicht
DE102005061060A1 (de) 2005-12-21 2007-06-28 Mahle International Gmbh Kolben für einen Verbrennungsmotor und Verfahren zu seiner Herstellung
JP5725466B2 (ja) * 2006-10-10 2015-05-27 エーリコン・サーフェス・ソリューションズ・アーゲー・トリューバッハ 少なくとも１つの複酸化物混合結晶皮膜を有する皮膜システム
JP5537782B2 (ja) * 2007-09-14 2014-07-02 スルザー メタプラス ゲーエムベーハー 切削工具及び切削工具の製造方法
CN102015229A (zh) * 2008-04-25 2011-04-13 兼房株式会社 木材用刀具
DE102009010110B4 (de) * 2009-02-21 2014-08-28 MTU Aero Engines AG Erosionsschutz-Beschichtungssystem für Gasturbinenbauteile
JP5345436B2 (ja) 2009-03-26 2013-11-20 Ｄｏｗａサーモテック株式会社 硬質皮膜被覆部材の製造方法
DE102009035841A1 (de) 2009-08-01 2011-02-03 Matthäus Götz Verfahren zur Herstellung einer Oxidationsschutz- und Wärmedämmschicht auf hohen Temperaturen ausgesetzten Substraten
CN102650036A (zh) 2011-02-25 2012-08-29 鸿富锦精密工业（深圳）有限公司 金属外壳上形成乳白色膜层的方法
CN102268637A (zh) * 2011-06-28 2011-12-07 株洲钻石切削刀具股份有限公司 含TiAlN层和CrAlN层的复合涂层刀具及其制备方法
CN102994954A (zh) * 2011-09-09 2013-03-27 鸿富锦精密工业（深圳）有限公司 镀膜件及其制备方法
US9664997B2 (en) * 2012-11-08 2017-05-30 Hoya Corporation Method of manufacturing mask blank and method of manufacturing transfer mask

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999023277A1 (de) * 1997-11-03 1999-05-14 Siemens Aktiengesellschaft Für eine heissgasbeaufschlagung ausgelegtes erzeugnis und verfahren zur herstellung einer beschichtung für ein für dieses erzeugnis

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11560618B2 (en) 2017-11-24 2023-01-24 Oerlikon Surface Solutions Ag, Pfäffikon Al—Cr-based ceramic coatings with increased thermal stability

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CN105143498B (zh) 2018-11-09
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WO2014170005A2 (de) 2014-10-23
MX2015014649A (es) 2016-06-23
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CN105143498A (zh) 2015-12-09
US10174416B2 (en) 2019-01-08
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JP2016520719A (ja) 2016-07-14
BR112015026344B1 (pt) 2022-05-31
EP2986752B1 (de) 2021-04-07
MX384092B (es) 2025-03-14
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CA2912584A1 (en) 2014-10-23
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