WO2016008352A1 - 采用单个运算放大器的超导量子干涉器磁传感器 - Google Patents
采用单个运算放大器的超导量子干涉器磁传感器 Download PDFInfo
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- WO2016008352A1 WO2016008352A1 PCT/CN2015/082289 CN2015082289W WO2016008352A1 WO 2016008352 A1 WO2016008352 A1 WO 2016008352A1 CN 2015082289 W CN2015082289 W CN 2015082289W WO 2016008352 A1 WO2016008352 A1 WO 2016008352A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/035—Measuring direction or magnitude of magnetic fields or magnetic flux using superconductive devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/035—Measuring direction or magnitude of magnetic fields or magnetic flux using superconductive devices
- G01R33/0354—SQUIDS
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- the invention relates to a superconducting quantum interference device magnetic sensor using a single operational amplifier, and more particularly to a superconducting quantum interference device readout circuit, belonging to the technical field of circuits.
- a magnetic sensor constructed using a Superconducting Quantum Interference Device is currently the most sensitive magnetic sensor. It is widely used in the field of weak magnetic field detection such as biological magnetic field, earth magnetic field anomaly, and extremely low field nuclear magnetic resonance. Its magnetic field detection sensitivity has reached the level of Feite (10 -15 Tesla). It is an important magnetic sensor for the detection and research of extremely weak magnetic fields.
- SQUID Superconducting Quantum Interference Device
- the DC superconducting quantum interference device (referred to as dc SQUID) is a superconducting ring formed by two superconducting Josephson junctions connected in parallel. The wires are led out at both ends of the Josephson junction to form a two-terminal component.
- dc SQUID The DC superconducting quantum interference device
- the voltage generated across the SQUID will vary with the magnitude of the external flux induced by the superconducting ring. Since the SQUID output voltage is nonlinearly related to its sensed flux, the magnitude of the detected flux cannot be obtained directly by measuring the voltage across the SQUID. Therefore, the practical SQUID magnetic sensor is realized by a Flux-Locked Loop (FLL) formed by a SQUID device and an amplifying circuit. This flux lock loop is called a SQUID readout circuit.
- FLL Flux-Locked Loop
- the current state of the bias current I b , the bias voltage V b , and the loaded magnetic flux ⁇ a of the SQUID is referred to as an operating point.
- the preamplifier output is integrated into the integrator for integration.
- the output of the integrator drives the feedback resistor to inject a feedback current into the feedback coil, which is coupled to the SQUID by the feedback coil and the mutual inductance of the SQUID.
- the working principle of the flux lock loop is: when the flux lock loop keeps the SQUID operating point stable, when the measured magnetic flux changes by ⁇ , the SQUID end generates a voltage change ⁇ v from the operating point, and the preamplifier After amplification, send it to the integrator for integration and adjust the output voltage of the integrator.
- the feedback resistance and the feedback coil adjust the feedback magnetic flux to cancel the magnetic flux variation of the external input, so that the voltage input to the integrator of the SQUID at the working point is zero, the integrator stops integrating, and the loop returns to stability.
- the steady state of the operating point is called the readout circuit lock.
- the traditional SQUID flux lock loop usually uses a preamplifier to perform low noise amplification on the SQUID weak voltage signal, and then the amplified signal is connected to the integrator for integral feedback. Therefore, the conventional SQUID flux lock loop is constructed by using at least one preamplifier circuit and an integrator cascade circuit to connect the feedback resistor and the feedback coil. In practical applications, the SQUID flux lock loop using the integrator has the following problems:
- the slew rate is limited: the output of the integration circuit is the result of integrating the input signal with time. When the detection signal is abrupt, the integrator cannot respond quickly, so the slew rate of the sensor voltage output is limited. It is difficult to meet the requirements of high slew rate magnetic field detection.
- At least two or more operational amplifiers and peripheral circuits are used, and the circuit is complicated and consumes a large amount of power.
- the signal response of SQUID devices can range from DC to GHz with high speed and high bandwidth.
- the above described readout circuit using an integrator limits the performance of the SQUID magnetic sensor in response bandwidth and slew rate characteristics.
- the SQUID chip is fabricated using microelectronic technology and has the advantages of small size and integration. It is widely used in multi-channel, high-resolution detection systems such as SQUID's 64-channel magnetocardiograph and 200-channel magnetoencephalograph. application. Multi-channel systems place higher demands on the miniaturization of SQUID magnetic sensors. Therefore, simplifying the SQUID readout circuit design is of great significance and practical value for SQUID multi-channel applications.
- the present invention seeks to create technological work in solving this problem.
- the present invention is directed to a multi-channel highly integrated SQUID system, and a more simplified readout circuit is constructed to construct a SQUID magnetic sensor.
- SQUID has a higher response speed than a semiconductor amplifier, and it can achieve a stable negative feedback loop with the amplifier. It is therefore contemplated that only a low noise operational amplifier is used to amplify the SQUID voltage signal in an open loop manner and the feedback resistor and feedback coil are directly driven by a single operational amplifier open loop output. This replaces the preamplifier and integrator in the traditional flux lock loop, enabling the construction of a simpler SQUID flux lock loop.
- SQUID flux lock loops with a single op amp are available in two ways:
- the positive input wiring method has one of three modes of implementations 1, 3, and 5 (ie, A, B, and C) (see the detailed description for details).
- Negative input wiring method as shown in Figure 3.
- the bias current I b provided by the bias current source is loaded into the SQUID, the SQUID voltage signal is connected to the negative input of the operational amplifier, and the offset voltage V b is connected to the positive input of the operational amplifier.
- One end of the output end of the operational amplifier feedback resistor of R f, and the other end is connected to a feedback resistor feedback coil, and feedback coil SQUID via mutual inductance coupling, driving the operational amplifier output voltage generating a current feedback resistor R f, and the feedback coil by mutual inductance M f SQUID
- a feedback flux is generated to form a flux lock loop.
- the negative input wiring method has any one of the implementation modes 2, 4 and 6 (ie D, E and F) (see the detailed description for details).
- the present invention uses only one operational amplifier to implement a SQUID flux lock loop, and the circuit is simple.
- the use of the integrator circuit in the conventional loop is avoided, the loop delay is reduced, and the flux lock loop achieves a higher bandwidth.
- the op amp directly outputs the feedback feedback resistor and feedback coil to avoid the effects of the integrated capacitor.
- the flux lock loop allows for higher slew rates.
- the above circuit is composed of a single operational amplifier and a small number of peripheral circuits. The circuit is small in size and low in power consumption, which greatly reduces the overall volume and power consumption of the multi-channel SQUID sensor integration, and is of great significance in SQUID multi-channel applications.
- Figure 2 Schematic diagram of a single op amp flux-lock loop for the SQUID positive input.
- Figure 3 Schematic of a single op amp flux-lock loop for the SQUID negative input.
- Embodiment 1; B1, B2 are bias current or bias voltage regulation circuits, respectively.
- Power supply +Vs and -Vs The whole circuit is powered by a bipolar power supply, that is, the positive power supply terminal +Vs is connected to the positive voltage power supply and the negative power supply terminal -Vs is connected to the negative voltage power supply.
- the positive power supply +Vs supply range is from +5V to +15V, and the corresponding negative power supply -Vs supply range is between -5V and -15V.
- SQUID Bias Current Regulation Circuit B1 Its function is to load the SQUID with a bias current flowing to the two Josephson junctions of the SQUID. The current can be adjusted. By adjusting the magnitude of the bias current applied to the SQUID, the SQUID achieves the best flux voltage conversion characteristics.
- the specific example of the adjustable bias current circuit is shown in the B1 module of FIG. 3: the adjustable potentiometer R A1 is a three-terminal adjustable resistor, wherein the ends of the potentiometers 1 and 2 are a fixed resistance resistor. Its resistance value is optimal between 10k ohms and 100k ohms. The 3 end of the potentiometer is an adjustable resistance tap.
- Both ends 1 and 2 of the potentiometer R A1 are connected to the positive power supply +Vs and the negative power supply -Vs, respectively.
- the 3-terminal output potentiometer resistor of the potentiometer R A1 is divided, and an adjustable voltage is generated by adjusting the position of the potentiometer tap.
- the voltage output is connected to the resistor R 1 , and the other end of the resistor R 1 is used as a bias current source in series with the SQUID.
- the value of the resistor R 1 is between 50 k ohms and 200 k ohms.
- a dc bias current in the range of ⁇ 100uA can be produced by adjusting the adjustable potentiometer R A1 .
- SQUID Bias Voltage Regulation Circuit B2 Its function is to generate an adjustable DC voltage that is connected to the negative input of the op amp. The operating point is zeroed by adjusting the voltage to the same DC voltage at the SQUID operating point.
- the specific example of the adjustable bias voltage circuit is shown in the B2 module in Fig. 3: the adjustable potentiometer R A2 is a three-terminal adjustable resistor, wherein the ends of the potentiometers 1 and 2 are a fixed resistance resistor. Its resistance value is optimal between 10k ohms and 100k ohms.
- the two ends of the potentiometer R A1 are connected to the positive power supply +Vs and the negative power supply -Vs respectively, and the variable resistor leads to the output end of the 3-terminal output resistor of the tap terminal.
- the voltage is connected to one end of the resistor R 3 and the other end of the R 3 and the R 2 in series, the other end of R 2 is grounded.
- the resulting resistor divider is taken at the junction of R 2 and R 3 as a bias voltage signal V b .
- the bias voltage is adjustable within ⁇ 100uV.
- the resistance value R 3 is typically between 1 ohm to 10 ohms, which is incorporated to reduce thermal noise in the input of the operational amplifier.
- the resistance R 2 ranges from 10 k ohms to 100 k ohms.
- SQ1 uses a low temperature DC superconducting quantum interference device (operating at a liquid helium temperature of 4.2K) or a high temperature DC superconducting quantum interference device (laid at a liquid nitrogen temperature of 77K), which is a two Terminal device. One end of the SQ1 is connected to the positive input terminal of the operational amplifier, and is connected to the current output terminal of the bias current circuit B1. The other end of SQ1 is grounded.
- Feedback coil L1 It is a coil with mutual inductance coupling with SQUID, and the mutual inductance is M f .
- the feedback coil converts the current generated by the feedback loop into a feedback flux coupled into the SQUID to form a cancellation flux.
- One end of the feedback coil L1 is connected to the feedback resistor R f and the other end is grounded.
- Operational amplifier U1 A low-noise operational amplifier with bipolar supply, with two voltage signal inputs at the positive input and the negative input, and a voltage signal amplification output.
- the positive input of the operational amplifier is connected to the SQUID voltage output
- the negative input is connected to the bias voltage output
- the output of the amplifier acts as the output of the flux lock loop as the output of the entire sensor.
- the feedback resistor R f is connected.
- the operational amplifier of the present invention preferably has low input voltage noise and high bandwidth, high open loop gain characteristics: the amplifier voltage noise is around 1 nV/ ⁇ Hz, The open loop gain is greater than 120 dB and the bandwidth gain product is greater than 10 MHz.
- Commonly used low-noise operational amplifiers are the AD797 from Analog Devices, Inc. and the LT1028 from Linear Technology.
- Feedback resistor R f The feedback resistor R f is connected to the output of the operational amplifier U1 at one end and the feedback coil L1 at the other end.
- the feedback resistor R f converts the amplifier output voltage into a feedback current input feedback coil that produces a feedback flux.
- R f is between 100 ohms and 10 k ohms.
- the SQUID voltage signal in Embodiment 1 is connected to the negative input terminal of the operational amplifier U1, and the bias voltage signal is connected to the positive input terminal of the operational amplifier, and the remaining wiring is the same as Embodiment 1.
- Embodiment 3 as shown in Figure 6, that is, the positive input wiring mode B;
- a reset switch K1 is added to realize a reset function.
- One end of K1 is connected to the negative input terminal of operational amplifier U1, and the other end of K1 is connected to the output end of operational amplifier U1.
- the reset switch is closed, the output of operational amplifier U1 is equipotential to the negative input.
- the op amp is amplified from open-loop high gain amplification to unity gain, the output is rapidly reduced, and the circuit is reset.
- the reset switch K1 is turned off, the circuit is relocked.
- Embodiment 4 as shown in Figure 7, that is, the positive input wiring mode E;
- the SQUID voltage signal in Embodiment 3 is connected to the negative input terminal of the operational amplifier U1, and the bias voltage signal is connected to the positive input terminal of the operational amplifier, and the remaining wiring is the same as Embodiment 3.
- a feedback resistor R g and a single-pole double-throw switch SW1 are added to enable the magnetic flux lock loop to have a working point debugging function.
- the single pole double throw switch has three terminals, wherein terminal 3 is defined as a single pole fixed terminal, terminal 1 is defined as a first contact terminal, and terminal 2 is defined as a second contact terminal.
- the single-pole fixed terminal of SW1 is connected to the output of operational amplifier U1.
- the terminal 1 terminal of SW1 is connected to one end of the resistor Rg, and the other end of R g is connected to the negative input terminal of the operational amplifier U1.
- the terminal 2 terminal of SW1 is connected to one end of the feedback resistor R f , and the other end of the feedback resistor Rf is connected to the feedback coil L1.
- the resistor R g is connected to the output terminal of the operational amplifier U1.
- the flux lock loop is opened in an open loop, and the operational amplifier U1 operates in a proportional amplification mode to achieve proportional amplification of the SQUID voltage signal.
- the SQUID voltage signal in Embodiment 5 is connected to the negative input terminal of the operational amplifier U1, and the bias voltage signal is connected to the positive input terminal of the operational amplifier, and the remaining wiring is the same as Embodiment 5.
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Abstract
Description
Claims (5)
- 一种采用单个运算放大器的超导量子干涉器磁传感器,其特征在于只使用一个低噪声的运算放大器,以开环的方式对SQUID电压信号进行放大,并由单个运算放大器开环输出直接驱动反馈电阻及反馈线圈,从而取代了传统磁通锁定环路中的前置放大器和积分器。
- 按权利要求1所述的传感器,其特征在于采用单个运算放大器的SQUID磁通锁定环路有以下两种接线方式:1)正端输入接线方式:偏置电流源提供的偏置电流Ib加载到SQUID中,SQUID电压信号接入运算放大器的正输入端;偏移电压Vb接入运算放大器的负输入端,运算放大器的输出端接反馈电阻Rf的一端,反馈电阻的另一端接反馈线圈,反馈线圈与SQUID通过互感耦合,运算放大器输出电压驱动反馈电阻Rf产生电流,通过反馈线圈与SQUID互感Mf产生反馈磁通,构成磁通锁定环路;2)负端输入接线方式:偏置电流源提供的偏置电流Ib加载到SQUID中,SQUID电压信号接运算放大器的负输入端,偏移电压Vb接运算放大器的正输入端,运算放大器的输出端接反馈电阻Rf的一端,反馈电阻的另一端连接反馈线圈,反馈线圈与SQUID通过互感耦合,运算放大器输出电压驱动反馈电阻Rf产生电流,通过反馈线圈与SQUID互感Mf产生反馈磁通,构成磁通锁定环路。
- 按权利要求2所述的传感器,其特征在于:(一)正端输入接线方式有以下A、B和C三种中的任一种:A:①供电电源+Vs和-Vs:整个电路采用双极性电源供电,即正电源端+Vs接入正电压电源和负电源端-Vs接入负电压电源;②SQUID偏置电流调节电路B1:其功能是给SQUID加载一个流向SQUID的两个约瑟夫森结的偏置电流,通过调节加载到SQUID偏置电流的大小,使得SQUID获得最佳的磁通电压转换特性;可调偏置电流电路中可调电位器RA1是一个三端子的可调电阻,其中电位器的1和2的两端为一个固定阻 值的电阻,电位器的3端为可调电阻抽头,电位器RA1的1和2两端分别接到正电源+Vs和负电源-Vs;电位器RA1的3端输出电位器电阻分压,通过调节电位器抽头位置产生可调电压;该电压输出接电阻R1,电阻R1的另一端与SQUID串联;③SQUID偏置电压调节电路B2:其功能是产生一个可调节的直流电压,接入运算放大器的负输入端;通过调节使该电压与SQUID工作点处的直流电压相同,实现工作点调零,可调偏置电压电路中的可调电位器RA2是一个三端子的可调电阻器,其中电位器的1和2两端为一个固定端,其电阻值在10k欧姆到100k欧姆之间,电位器RA1的1和2两端分别接正电源+Vs和负电源-Vs,可变电阻引出抽头端3端输出电阻分压,该电压接电阻R3的一端,R3另一端与R2串联,R2另一端接地;R2与R3的连接端将产生的电阻分压引出作为偏置电压信号Vb;④SQUID器件SQ1:SQ1使用放置在4.2K的液氦温度下工作的低温直流超导量子干涉器件或放置在77K的液氮温度下工作的高温直流超导量子干涉器件,是一个两端子器件,SQ1的一端接入运算放大器正输入端,同时与偏置电流电路B1的电流输出端相连,SQ1的另一端接地;⑤反馈线圈L1:是一个与SQUID具有互感耦合的线圈,反馈线圈将反馈回路产生的电流转变成反馈磁通耦合到SQUID中,形成抵消磁通;反馈线圈L1一端接反馈电阻Rf,另一端接地;⑥运算放大器U1:采用双极性供电的低噪声运算放大器,具有正输入端和负输入端两个电压信号输入端,一个电压信号放大输出端;运算放大器正输入端接SQUID电压输出,负输入端接偏置电压输出,放大器输出作为整个传感器的输出,同时接反馈电阻Rf;⑦反馈电阻Rf:反馈电阻Rf一端接运算放大器U1的输出,另一端接反馈线圈L1。反馈电阻Rf将放大器输出电压转换为反馈电流输入反馈线圈,产生反馈磁通;B:在A的基础上,增加一个复位开关K1实现复位;K1的一端接运算放大器U1的负输入端,K1的另一端接运算放大器U1的输出端,当复位开关闭合时,运算放大器U1的输出端与负输入端等电位,运算放大器由开环高增益放大变为单位增益的放大,输出迅速减小,电路实现复位;当复位开关K1断 开时,电路重新锁定。C:在B的基础上,再增加一个反馈电阻Rg和一个单刀双掷开关SW1,使得磁通锁定环路具备工作点调试功能,其中,单刀双掷开关具有三个接线端子,其中端子3定义为为单刀固定接线端,端子1定义为第一触点接线端,端子2定义为第二触点接线端;单刀双掷开关的SW1的单刀固定接线端与运算放大器U1的输出端相连,SW1的端子1与电阻Rg一端连接,Rg的另一端接运算放大器U1的负输入端;SW1的端子2与反馈电阻Rf的一端相连,反馈电阻Rf的另一端接反馈线圈L1;当SW1单刀开关与第二触点断开,与第一触点接通,电阻Rg与运算放大器U1输出端连接;此时,磁通锁定环路开环运行,运算放器U1工作在比例放大模式,实现SQUID电压信号的比例放大,监测运算放大器的输出电压Vf,观测磁通电压传输特性曲线,辅助SQUID工作点,偏置电流和偏置电压的调节;在完成最佳的偏置电压、偏置电压调节后,将SW1单刀开关与第一触点断开,与第二触点接通,运算放大器U1输出端与反馈电阻Rf连接,此时磁通锁定环路闭环实现锁定输出。(二)负端输入接线方式有以下D、E和F中的任一种:①D为(一)中A方式的SQUID电压信号接入运算放大器U1的负输入端,偏置电压信号接入运算放大器的正输入端,其余特征同A;②E为(一)中B方式的SQUID电压信号接入运算放大器U1的负输入端,偏置电压信号接入运算放大器的正输入端,其余特征同B;③F为(一)中C方式的SQUID电压信号接入运算放大器U1的负输入端,偏置电压信号接入运算放大器的正输入端,其余特征同C。
- 按权利要求3所述的传感器,其特征在于:(1)正端或负端输入接线方式中,正电源+Vs供电范围从+5V到+15V,相应的负电源-Vs供电范围在-5V到-15V之间;(2)SQUID偏置电流调节电路B1中电位器1和2的电阻值在10k欧姆到100k欧姆之间;电阻R1的取值在50k欧姆到200k欧姆之间;通过可调电位器RA1可产生160μA范围的直流偏置电流;(3)SQUID偏置电压的调节电路B2中偏置电压Vb的调节范围为±100μV,电阻R3取值在1-10Ω之间,R2的取值范围在10k-100k之间;(4)运算放大器电压噪声为1nV/√Hz,开环增益>120dB,带宽增益积大于10MHz;(5)反馈电阻Rf取值在100Ω-10kΩ之间。
- 按权利要求4所述的传感器,其特征在于运算放大器的型号为美国ADI公司的AD797或凌特公司的LT1028。
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/327,100 US10551446B2 (en) | 2014-07-18 | 2015-06-25 | Magnetic sensor for superconducting quantum interference device using single operational amplifier |
| JP2016576033A JP6577496B2 (ja) | 2014-07-18 | 2015-06-25 | シングルオペアンプを用いるsquid磁気センサ |
| EP15822841.1A EP3171188B1 (de) | 2014-07-18 | 2015-06-25 | Superleitende quanteninterferenzvorrichtung mit einem einzigen betriebsverstärkermagnetsensor |
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| CN201410344300.1A CN104198961B (zh) | 2014-07-18 | 2014-07-18 | 采用单个运算放大器的超导量子干涉器磁传感器 |
| CN201410344300.1 | 2014-07-18 |
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| CN112786773A (zh) * | 2020-12-30 | 2021-05-11 | 北京无线电计量测试研究所 | 一种减少约瑟夫森结冻结磁通的方法及量子电压生成方法 |
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| CN104198961B (zh) * | 2014-07-18 | 2017-06-13 | 中国科学院上海微系统与信息技术研究所 | 采用单个运算放大器的超导量子干涉器磁传感器 |
| CN104569868B (zh) * | 2015-02-11 | 2017-06-27 | 中国科学院上海微系统与信息技术研究所 | 一种超导量子干涉装置 |
| CN106199464B (zh) * | 2015-05-05 | 2019-06-25 | 中国科学院上海微系统与信息技术研究所 | 双级超导量子干涉器磁通-电压转换装置、方法及其应用 |
| CN106199465B (zh) * | 2015-05-05 | 2018-12-14 | 中国科学院上海微系统与信息技术研究所 | 一种双级超导量子干涉器放大装置、方法及squid磁传感器 |
| CN104808156B (zh) * | 2015-05-05 | 2018-02-13 | 中国科学院上海微系统与信息技术研究所 | Squid磁传感器及最佳工作点锁定方法 |
| GB2560196A (en) * | 2017-03-03 | 2018-09-05 | The Royal Holloway And Bedford New College | Superconducting device |
| JP6969142B2 (ja) * | 2017-04-12 | 2021-11-24 | Tdk株式会社 | 磁気センサ |
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| CN111208453B (zh) * | 2019-11-07 | 2022-03-29 | 中国计量大学 | 一种基于磁电效应的多轴磁梯度计 |
| CN111413652A (zh) * | 2019-11-22 | 2020-07-14 | 中国计量大学上虞高等研究院有限公司 | 一种基于负反馈结构的宽工作区间多铁性磁传感器 |
| CN111426993B (zh) * | 2019-11-22 | 2023-07-28 | 中国计量大学上虞高等研究院有限公司 | 一种基于磁电效应的磁梯度计 |
| US11630130B2 (en) * | 2021-03-31 | 2023-04-18 | Allegro Microsystems, Llc | Channel sensitivity matching |
| CN113093067B (zh) * | 2021-03-31 | 2022-01-18 | 中国科学院上海微系统与信息技术研究所 | 一种超导量子干涉传感器系统及其抑制输出偏移的方法 |
| CN118339566A (zh) | 2021-06-11 | 2024-07-12 | 西克公司 | 针对超导量子电路的通量偏置的系统和方法 |
| CN114565065B (zh) * | 2022-04-29 | 2022-08-12 | 长江水利委员会水文局 | 一种水文序列数据异常值检测方法 |
| CN118946243B (zh) * | 2024-08-20 | 2025-07-25 | 中国计量科学研究院 | 二阶梯度独立输入反馈型超导量子干涉器件及其制备方法 |
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| CN112786773A (zh) * | 2020-12-30 | 2021-05-11 | 北京无线电计量测试研究所 | 一种减少约瑟夫森结冻结磁通的方法及量子电压生成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104198961A (zh) | 2014-12-10 |
| JP2017527784A (ja) | 2017-09-21 |
| EP3171188A4 (de) | 2018-03-21 |
| US20170184689A1 (en) | 2017-06-29 |
| EP3171188B1 (de) | 2019-04-10 |
| CN104198961B (zh) | 2017-06-13 |
| EP3171188A1 (de) | 2017-05-24 |
| JP6577496B2 (ja) | 2019-09-18 |
| DE102015212825A1 (de) | 2016-01-21 |
| US10551446B2 (en) | 2020-02-04 |
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