WO2016019755A1 - 声表面波谐振器型振动传感器以及振动检测系统 - Google Patents

声表面波谐振器型振动传感器以及振动检测系统 Download PDF

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Publication number
WO2016019755A1
WO2016019755A1 PCT/CN2015/081118 CN2015081118W WO2016019755A1 WO 2016019755 A1 WO2016019755 A1 WO 2016019755A1 CN 2015081118 W CN2015081118 W CN 2015081118W WO 2016019755 A1 WO2016019755 A1 WO 2016019755A1
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Prior art keywords
acoustic wave
matching network
wave resonator
surface acoustic
vibration sensor
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English (en)
French (fr)
Inventor
董兰飞
滕学志
陈海军
韦江波
孙培峰
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Mesnac Co Ltd
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Mesnac Co Ltd
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Priority to EP15829643.4A priority Critical patent/EP3176550B1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Definitions

  • the present invention relates to a surface acoustic wave sensor, and more particularly to a surface acoustic wave resonator type vibration sensor.
  • SAW sensors are classified into a resonator type and a delay line type according to the function of the chip device.
  • a single-port surface acoustic wave resonator is one of the types of surface acoustic wave sensors, including a central interdigital transducer (IDT) and a reflective grating on both sides of a symmetrically distributed interdigital transducer, a central interdigital transducer The reflection grids on both sides of the distribution are used to form an acoustic cavity, and the interdigital transducer is used for mutual conversion of sound and electricity.
  • IDT central interdigital transducer
  • the reflection grids on both sides of the distribution are used to form an acoustic cavity, and the interdigital transducer is used for mutual conversion of sound and electricity.
  • Radio Frequency Identification is a technology that uses contactless tags to automatically identify target objects and acquire relevant data through RF signals.
  • Surface acoustic wave radio frequency identification technology is a delay line type surface acoustic wave sensor.
  • vibrations which can cause damage or failure of the goods when the vibration is too severe.
  • the vibration conditions during the transportation of these goods require real-time monitoring. In particular, it is necessary to record whether vibrations exceeding the threshold have occurred during the transportation process. Once the vibration acceleration exceeds the set threshold, record the occurrence of the super-vibration of the corresponding cargo, or send an alarm signal to the monitoring system to take remedial measures.
  • the vibration sensor comprises a surface acoustic wave device and a reader, and the surface acoustic wave device comprises a first antenna 301, a piezoelectric substrate 1, an interdigital transducer 2, a reflective grating and an elastic component.
  • the first antenna 301, the interdigital transducer 2 and the reflective grid are all disposed on the piezoelectric substrate 1, and the first antenna 301 is connected to the interdigital transducer 2.
  • the elastic element is connected to the measuring reflector and forms a normally open circuit.
  • the measuring reflection grid and the elastic element and the matching network together form a closed loop.
  • RFID radio frequency tag
  • the piezoelectric substrate of the area is used for mounting the reflective grid, which increases the manufacturing cost of the sensor on the one hand, and increases the volume of the sensor on the other hand, and is not suitable for the miniaturization of the product in the market.
  • the surface acoustic wave delay line structure has bidirectional energy loss. When the surface acoustic wave propagates energy to both sides of the interdigital transducer, the surface acoustic wave energy on one side is lost due to the surface of the surface acoustic wave RFID delay line structure, and the surface acoustic wave energy on the other side is reflected.
  • the grid is farther and farther away from the interdigital transducer, and the energy cannot be efficiently reflected back to the interdigital transducer. This brings about a problem of high insertion loss, and the corresponding sensitivity and reliability are reduced. The distance will also be shortened accordingly.
  • the present invention provides a surface acoustic wave resonator type vibration sensor.
  • a surface acoustic wave resonator type vibration sensor including a first antenna, a matching network, a reflective grid, and an interdigital transducer, the at least reflective grid and the interdigital transducer being disposed on a piezoelectric substrate,
  • the matching network includes a best matching network consisting of at least one capacitor and at least one inductor, the best matching network also having an acceleration detecting circuit in parallel, the acceleration detecting circuit comprising a plurality of parallel branches, at different accelerations The number of branches incorporated into the best matching network is different.
  • the best matching network is composed of a first capacitor (C1) and a first inductor (L1) connected in series, and the acceleration detecting circuit is connected in parallel at both ends of the series branch composed of the best matching network.
  • the best matching network is composed of a first capacitor (C1) and a first inductor (L1) connected in series, and the acceleration detecting circuit is connected in parallel at both ends of the first capacitor (C1).
  • the best matching network is composed of a first capacitor (C1) and a first inductor (L1) connected in series, and the acceleration detecting circuit is connected in parallel at both ends of the first inductor (L1).
  • the piezoelectric substrate and a surface acoustic wave resonator composed of a reflective grating and an interdigital transducer disposed on the piezoelectric substrate are connected in parallel at both ends of the first capacitor (C1).
  • the piezoelectric substrate and a surface acoustic wave resonator composed of a reflective grating and an interdigital transducer provided on the piezoelectric substrate are connected in parallel at both ends of the first inductor (L1).
  • an elastic switching element is disposed on each branch of the acceleration detecting circuit.
  • the elastic switching element is a spring or a reed, and when the acceleration in the deformation direction of the spring or the reed reaches a threshold, the spring or the reed deforms to conduct the branch in which it is located.
  • each of the branches of the acceleration detecting circuit has a plurality of capacitors and/or inductors connected in series.
  • the present invention also provides a surface acoustic wave resonator type vibration detecting system including a reader, a signal processing module, and a vibration sensor, and the reader is provided with
  • the second antenna further includes a surface acoustic wave resonator type vibration sensor as described above.
  • a monitoring platform for monitoring the vibration sensor feedback signal is received, and the monitoring platform receives information sent by the signal processing module.
  • an alarm device coupled to the monitoring platform shown is also included.
  • the advantages and positive effects of the present invention are: the surface acoustic wave resonator type vibration sensor of the present invention, by setting an acceleration detecting circuit in the matching network, the circuit structure is simple, the space is small, and the piezoelectric is not required to be added. The area of the substrate is conducive to cost savings.
  • FIG. 1 is a schematic structural view of a vibration sensor in the prior art
  • FIG. 2 is a schematic structural view of an embodiment of a surface acoustic wave resonator type vibration sensor according to the present invention
  • FIG. 3 is a circuit block diagram of the vibration sensor of Figure 2;
  • FIG. 4 is a schematic structural view showing an embodiment of a flexible switching element in a surface acoustic wave resonator type vibration sensor according to the present invention
  • Figure 5 is a circuit schematic diagram of an embodiment of the matching network of Figure 3;
  • FIG. 6 is a diagram showing an equivalent circuit model of the matching network circuit of FIG. 5;
  • Fig. 8 is a system block diagram showing an embodiment of a surface acoustic wave resonator type vibration detecting system proposed by the present invention.
  • Embodiment 1 as shown in FIG. 2, the present embodiment provides a surface acoustic wave resonator type vibration sensor, including a first antenna 101, a matching network 102, a reflection grating 103, and an interdigital transducer 104, which at least reflect The gate 103, and the interdigital transducer 104 are disposed on the piezoelectric substrate 105.
  • the matching network 102 includes a best matching network composed of at least one capacitor and at least one inductor, the best matching network also An acceleration detecting circuit is connected in parallel, and the acceleration detecting circuit includes a plurality of parallel branches, and the number of branches incorporated into the best matching network is different under different accelerations.
  • the working principle of the surface acoustic wave resonator type vibration sensor of the present embodiment is that the first antenna 101 receives the excitation signal, and by adding an acceleration detecting circuit on the matching network, when the acceleration of the measured object in a certain direction reaches a threshold, the acceleration The detection circuit incorporates a specific branch corresponding to the acceleration, so the number of branches incorporated into the network by the acceleration detection circuit at different accelerations is different, thereby changing the center frequency of the matching network to the interdigital transducer signal.
  • the center frequency of the signal emitted by the interdigital transducer after the signal is reflected by the reflective grid changes accordingly, and the branch that is incorporated by the acceleration detecting circuit at a certain acceleration is determined, and the amount of change in the center frequency of the signal can be determined. It is also determined accordingly, and the acceleration value can be analyzed by detecting the center frequency of the signal sent by the vibration sensor.
  • the surface acoustic wave resonator type vibration sensor of the present embodiment is provided with an acceleration detecting circuit in the matching network, and has a simple circuit structure and a small occupied space, and does not need to increase the area of the piezoelectric substrate, thereby contributing to cost saving.
  • the role of the matching network 102 in the circuit is that, in the sensor passive wireless measurement of the embodiment, for example, the reflective gate 103 and the interdigital transducer 104 constitute a resonator, and the resonator needs to be coupled to the first antenna 101. Perform impedance matching to transmit the excitation signal received by the first antenna 101 to the resonator, otherwise it will cause great energy loss, seriously affecting transmission efficiency and signal quality, and thus the first antenna A matching network is required between the resonator and the resonator.
  • the matching network is generally composed of an inductor and a capacitor in parallel.
  • the resonator receives the matched excitation signal sent by the matching network, and the interdigital transducer performs electro-acoustic conversion, and the surface acoustic wave is generated to propagate to both sides.
  • the surface acoustic wave encounters the reflection grating, the reflection is generated and superimposed, and the resonance is performed.
  • a standing wave is formed in the cavity.
  • the resonator stores energy when the external signal is excited.
  • the interdigital transducer performs acoustic-electrical conversion to release the resonator response signal.
  • the composition of the resonator is simple, and only one fork finger transducer and one side of the interdigital transducer are respectively provided with a reflection grid, and the space occupied by the piezoelectric substrate is small.
  • Embodiment 2 provides a circuit schematic diagram of a surface acoustic wave resonator type vibration sensor.
  • the best matching network is composed of a first capacitor C0 and a first inductor L0 connected in parallel.
  • the acceleration detecting circuit is connected in parallel at both ends of the parallel circuit composed of the best matching network.
  • each branch of the acceleration detecting circuit is provided with a resilient switching element.
  • the elastic switching element is a spring or a reed
  • the acceleration in the deformation direction of the spring or the reed reaches a threshold value
  • the spring or the reed deforms to turn on the branch in which it is located.
  • the acceleration threshold of the spring or the reed to enable the branch to be turned on is fixed, and the threshold values of the elastic switching elements on the respective branches are different.
  • a plurality of capacitors and/or inductors capable of changing the center frequency of the signal are connected in series on each branch of the acceleration detecting circuit.
  • the combination of capacitors or inductors and the number of capacitors can be set according to the reader's ability to accurately read the resonator center frequency change requirements.
  • Embodiment 3 provides a circuit schematic diagram of a surface acoustic wave resonator type vibration sensor.
  • the best matching network is composed of a first capacitor C1 and a first inductor L1 connected in parallel.
  • the acceleration detecting circuit is connected in parallel at both ends of the first inductor L1.
  • the acceleration detecting circuit includes a plurality of parallel branches, wherein a left-to-right first branch routes an elastic switching element K1 and a capacitor C2 in series, and a second branch routes an elastic switching element K2.
  • the third branch is connected in series with an elastic switching element K3 and a capacitor C3 and an inductor L3.
  • the elastic switching elements K1-K3 each select a spring in the passive acceleration sensor.
  • the elastic switching elements K1-K3 are connected to the reactive element and constitute a normally open circuit.
  • the elastic switching element When the induced vibration acceleration reaches a set threshold of a certain elastic switching element, the elastic switching element is The reactive component and the matching network together form a closable loop.
  • the vibration acceleration when the measured object is in the horizontal direction
  • K1, K2, and K3 are all in the off state, and the measured resonance center frequency does not change.
  • the vibration acceleration of the measured object in the horizontal direction is greater than 3g and less than 4g, the corresponding K1 is in a closed state, forming a closed loop, and K2 and K3 are in an off state, which is caused by a change in the value of the reactance component in the matching network.
  • the resonant center frequency changes by ⁇ f1; when the vibration acceleration of the measured object in the horizontal direction is greater than 4g and less than 5g, the corresponding K1 and K2 are in a closed state, forming a closed loop, and the spring K3 is in an open state.
  • the resonant center frequency will change by ⁇ f2; when the vibration acceleration of the measured object in the horizontal direction is greater than 5g, the corresponding K1, K2, and K3 are all in a closed state, forming a closed loop, and the measured resonant center frequency will change. ⁇ f3.
  • the matching network is composed of C' and L' in series, and the surface acoustic wave resonator is connected in parallel with L1.
  • the equivalent circuit model of the universal near resonator of the resonator is shown in Fig. 7.
  • C and L are the dynamic capacitance and inductance respectively due to the elasticity and inertia of the piezoelectric substrate, and R is the dynamic resistance caused by the damping, C0 is The static capacitance of the interdigital transducer, R0 is the lead resistance.
  • the equivalent circuit parameters of the resonator include five parameters R0, R, L, C, and C0.
  • Zeq2 is the impedance value of the resonator Zeq1 in parallel with L1, so
  • the total impedance value of the entire structure, Zeq is the value of Zeq2 in series with capacitor C1.
  • the characteristic impedance of a common transmission line is 50 ⁇
  • the matching point corresponds to the center frequency of S11, that is, the frequency with the smallest amplitude
  • the reflection coefficient is:
  • the relationship between S11 and frequency f can be obtained from the formula (1 ⁇ 5), and the frequency corresponding to the minimum reflection coefficient That is, f takes f0 corresponding to the center frequency of the resonator.
  • the incorporation of the capacitance or inductance of the reactance component will cause the equivalent value of C1 or L1 to change, and finally affect the graph of S11.
  • the frequency f0 with the smallest amplitude is the corresponding center frequency of the entire resonator structure. change.
  • the acceleration detecting circuit is connected in parallel at both ends of the first capacitor C1.
  • the equivalent value of C1 is changed, thereby changing the center frequency of the entire resonator structure.
  • Embodiment 4 provides a surface acoustic wave resonator type vibration detecting system based on a surface acoustic wave resonator type vibration sensor in Embodiment 3.
  • a reader and a signal processing are provided.
  • a module, and a vibration sensor the reader is provided with a second antenna 201, and the vibration sensor is provided with a first antenna 101, and the two communicate through the antenna.
  • the vibration sensor further includes a matching network 102 and a reflection.
  • a gate 103, and an interdigital transducer 104, at least a reflective gate 103, and an interdigital transducer 104 are disposed on the piezoelectric substrate 105. As shown in FIG.
  • the matching network 102 includes at least one capacitor and at least one inductor. a best matching network, the best matching network is also connected with an acceleration detecting circuit, and the acceleration detecting circuit comprises a plurality of parallel branches, and the number of branches incorporated into the best matching network is different under different accelerations .
  • the working principle of the surface acoustic wave resonator type vibration detecting system of this embodiment is that the reader transmits an excitation signal to the vibration sensor through the second antenna 201, and the vibration sensor receives the excitation signal through the first antenna 101, and the vibration sensor is added on the matching network.
  • the acceleration detecting circuit when the acceleration of the measured object in a certain direction reaches a threshold, the acceleration detecting circuit incorporates a specific branch corresponding to the acceleration, so the number of branches incorporated into the matching network is different under different accelerations, and further Changing the center frequency of the matching network access to the interdigital transducer signal, therefore, the center frequency of the signal transmitted by the interdigital transducer after the signal is reflected by the reflective grid changes correspondingly, and the interdigital transducer 104 will resonate the signal. Sended to the reader, the signal is sent to the signal processing center for processing by the reader.
  • the signal processing center performs temperature compensation according to the ambient temperature (the temperature change of the external environment will bring the frequency drift of the SAW resonator sensor), and finally The resulting resonant frequency changes due to the acceleration detection circuit being incorporated at a specific acceleration Path is determined, it is possible to change the amount of the signal corresponding to the center frequency are determined, the center frequency of the signal emitted by the vibration detecting sensor, to analyze the vibration acceleration sensor.
  • a monitoring platform for monitoring the vibration sensor feedback signal is also included, and the monitoring platform receives information sent by the signal processing module.
  • the monitoring platform also packs Includes an alarm device connected to the monitoring platform shown. When the acceleration of the vibration sensor exceeds the set threshold, an alarm is given.
  • the vibration sensor in the third embodiment will be described below as an example.
  • the optimal matching network of the vibration sensor in this embodiment is composed of a first capacitor C1 and a first inductor L1 connected in series, and the acceleration detecting circuit is connected in parallel at both ends of the first inductor L1, and the acceleration
  • the detecting circuit comprises a plurality of parallel branches, wherein a left-to-right first branch routes an elastic switching element K1 and a capacitor C2 are connected in series, and the second branch routes an elastic switching element K2 and an inductor L2 in series.
  • the third branch routes a flexible switching element K3 and a capacitor C3 and an inductor L3 in series.
  • the elastic switching elements K1-K3 each select a spring in the passive acceleration sensor.
  • the elastic switching element is The reactive component and the matching network together form a closable loop. For example, when the vibration acceleration of the measured object in the horizontal direction is less than 3g, K1, K2, and K3 are all in an off state, and the measured resonance center frequency does not change.
  • the monitoring platform considers that the vibration condition of the measured object is within an acceptable normal range; when the vibration acceleration of the measured object in the horizontal direction is greater than 4g and less than 5g, the corresponding K1 K2 is in a closed state, forming a closed loop, and the spring K3 is in an open state.
  • the measured resonance center frequency changes ⁇ f2
  • the monitoring platform still considers that the vibration state of the measured object is still within an acceptable normal range.
  • the vibration acceleration of the measured object in the horizontal direction is greater than 5g
  • the corresponding K1, K2, K3 are in a closed state, forming a closed loop
  • the measured resonant center frequency will change ⁇ f3
  • the signal processing center according to the external environment
  • Temperature after temperature compensation (temperature changes in the external environment will bring frequency drift to the SAW resonator sensor), and finally
  • the obtained resonance frequency changes compares with the frequency value information corresponding to the stored acceleration, and feeds the processing result back to the monitoring platform.
  • the monitoring platform monitors the vibration acceleration of the feedback result.
  • the horizontal acceleration exceeds 5g, and the acceleration has abnormal changes.
  • the alarm device will send an alarm response, and the alarm mode can be a regular alarm. For example, an audible and visual alarm can be used.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

一种声表面波谐振器型振动传感器，该传感器包括第一天线（101）、匹配网络（102）、反射栅（103）、以及叉指换能器（104），至少反射栅（103）以及叉指换能器（104）设置在压电基片（105）上，该匹配网络（102）包括由至少一个电容（C1）和至少一个电感（L1）组成的最佳匹配网络，该最佳匹配网络还并联有加速度检测电路，该加速度检测电路包括若干个相并联的支路，在不同的加速度下并入最佳匹配网络的支路个数不同。通过在匹配网络中设置加速度检测电路，无需增加压电基片的面积，电路结构简单，占用空间小，节省成本。还提供了一种振动检测系统，其包括阅读器、信号处理模块以及振动传感器。

Description

声表面波谐振器型振动传感器以及振动检测系统 技术领域
本发明涉及一种声表面波传感器，具体地说，是涉及一种声表面波谐振器型振动传感器。
背景技术
声表面波(SAW)传感器按芯片器件的功能可分为谐振器型和延迟线型。单端口声表面波谐振器即属于声表面波传感器类型中的一种，包含一个中心叉指换能器(IDT)以及对称分布叉指换能器两侧的反射栅，中心叉指换能器和分布两侧的反射栅用于构成一个声学谐振腔，叉指换能器用于进行声-电的相互转换。
声表面波射频识别(RFID，Radio Frequency Identification)技术是一种应用非接触式标签的技术，它通过射频信号自动识别目标对象并获取相关数据。声表面波射频识别技术属于延迟线型声表面波传感器。
在现代物流中，一些货物如陶瓷、玻璃制品、药品等，往往对振动较为敏感，当振动过于剧烈时会导致货物的损坏或失效。对这些货物进行运输过程中的振动状况需要实时监测。尤其需要记录在输运过程中是否发生了超过闽值的振动。一旦振动加速度超过了设定的闽值，记录相应货物发生超振动的发生时刻，或者向监控系统发出报警信号以便采取补救措施。
专利公布号为CN102889923A的中国专利申请，公开了一种基于声表面波射频识别技术的振动传感器及其应用，其采用的是声表面波射频标签(RFID)延迟线结构，进行振动加速度的测量。参见图1所示，所述的振动传感器包括声表面波器件和阅读器，声表面波器件包括第一天线301、压电基片1、叉指换能器2、反射栅和弹性元件，所述的第一天线301、叉指换能器2和反射栅均设置在压电基片1上，所述的第一天线301与叉指换能器2连接。弹性元件与测量反射栅连接并构成常开回路。当所感应的振动加速度超过所设定阈值，则测量反射栅与弹性元件及匹配网络共同构成闭合回路。该专利采用声表面波 射频标签(RFID)延迟线结构，反射栅位于叉指换能器的一侧。该种结构的缺点是：1、通过将弹性元件设置在反射栅上，一个反射栅只能监测一个加速度值，当需要监测多个加速度值时，需要设置多个反射栅，相应的需要较大面积的压电基片用于安装反射栅，一方面提高了传感器的制造成本，另外一方面增加了传感器的体积，不适合市场对产品的小型化需求。2、声表面波延迟线结构具有双向能量损耗。声表面波向叉指换能器两侧传播能量时，由于声表面波RFID延迟线结构一侧没有反射栅，一侧的声表面波能量被损耗掉，另一侧声表面波能量随着反射栅距离叉指换能器越来越远，能量也不能高效地反射回叉指换能器，这样就带来插入损耗高的问题，相应的灵敏度和可靠性均会降低，其阅读器无线询问距离也会相应缩短。
发明内容
本发明为了解决现有声表面波传感器占用体积大的技术问题，提供了一种声表面波谐振器型振动传感器。
为了解决上述技术问题，本发明采用以下技术方案予以实现：
一种声表面波谐振器型振动传感器，包括第一天线、匹配网络、反射栅、以及叉指换能器，所述至少反射栅、以及叉指换能器设置在压电基片上，所述匹配网络包括由至少一个电容和至少一个电感组成的最佳匹配网络，所述最佳匹配网络还并联有加速度检测电路，所述加速度检测电路包括若干个相并联的支路，在不同的加速度下并入所述最佳匹配网络的支路个数不同。
进一步的，所述最佳匹配网络由第一电容(C1)和第一电感(L1)相串联组成，所述加速度检测电路并联在所述最佳匹配网络组成的串联支路的两端。
或者，所述最佳匹配网络由第一电容(C1)和第一电感(L1)相串联组成，所述加速度检测电路并联在所述第一电容(C1)的两端。
或者，所述最佳匹配网络由第一电容(C1)和第一电感(L1)相串联组成，所述加速度检测电路并联在所述第一电感(L1)的两端。
进一步的，所述压电基片以及在所述压电基片上设置的反射栅和叉指换能器组成的声表面波谐振器并联在所述第一电容(C1)的两端。
或者，所述压电基片以及在所述压电基片上设置的反射栅和叉指换能器组成的声表面波谐振器并联在所述第一电感(L1)的两端。
又进一步的，所述加速度检测电路的各支路上设置有弹性开关元件。
再进一步的，所述弹性开关元件为弹簧或者簧片，所述弹簧或者簧片的形变方向上的加速度达到阈值时，所述弹簧或者簧片产生形变将其所在的支路导通。
优选的，所述的加速度检测电路的各支路上串联有若干个电容和/或电感。
基于上述的一种声表面波谐振器型振动传感器，本发明同时提供了一种声表面波谐振器型振动检测系统，包括阅读器、信号处理模块、以及振动传感器，所述阅读器上设置有第二天线，还包括如前面所述的声表面波谐振器型振动传感器。
进一步的，还包括用于监控振动传感器反馈信号的监控平台，所示监控平台接收信号处理模块发送的信息。
又进一步的，还包括与所示监控平台连接的报警装置。
与现有技术相比，本发明的优点和积极效果是：本发明的声表面波谐振器型振动传感器，通过在匹配网络中设置加速度检测电路，电路结构简单，占用空间小，无需增加压电基片的面积，有利于节省成本。
结合附图阅读本发明实施方式的详细描述后，本发明的其他特点和优点将变得更加清楚。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是现有技术中的一种振动传感器结构示意图；
图2是本发明所提出的声表面波谐振器型振动传感器一种实施例结构示意图；
图3是图2中振动传感器的电路原理方框图；
图4是本发明所提出的声表面波谐振器型振动传感器中弹性开关元件的一种实施例结构示意图；
图5是图3中匹配网络的一种实施例电路原理图；
图6是图5中匹配网络电路的等效电路模型图；
图7是实施例三中谐振器等效电路模型图；
图8是本发明所提出的声表面波谐振器型振动检测系统的一种实施例系统方框图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
实施例一，参见图2所示，本实施例提供了一种声表面波谐振器型振动传感器，包括第一天线101、匹配网络102、反射栅103、以及叉指换能器104，至少反射栅103、以及叉指换能器104设置在压电基片105上，参见图3所示，匹配网络102包括由至少一个电容和至少一个电感组成的最佳匹配网络，该最佳匹配网络还并联有加速度检测电路，加速度检测电路包括若干个相并联的支路，在不同的加速度下并入所述最佳匹配网络的支路个数不同。本实施例的声表面波谐振器型振动传感器的工作原理是：第一天线101接收激励信号，通过在匹配网络上增设加速度检测电路，当被测对象在某一方向上的加速度达到阈值时，加速度检测电路并入特定的该加速度相对应的支路，因此通过加速度检测电路在不同的加速度下并入网络的支路数不同，进而改变匹配网络接入至叉指换能器信号的中心频率，因此，信号经反射栅反射后由叉指换能器发射出去的信号中心频率相应改变，由于加速度检测电路在特定加速度下并入的支路是确定的，其所能够对信号中心频率的改变量也是相应确定的，通过检测振动传感器发出信号的中心频率，即可分析出加速度值。本实施例的声表面波谐振器型振动传感器，通过在匹配网络中设置加速度检测电路，电路结构简单，占用空间小，无需增加压电基片的面积，有利于节省成本。
需要说明的是，匹配网络102在电路中的作用是，在例如本实施例的传感器无源无线测量中,反射栅103以及叉指换能器104组成谐振器，谐振器需要与第一天线101进行阻抗匹配,将第一天线101接收的激励信号发送至谐振器，否则会造成极大的能量损耗,严重影响传输效率和信号的品质，因此在第一天线 和谐振器间需要匹配网络，匹配网络一般由电感和电容并联组成。谐振器接收匹配网络发送的经过匹配的激励信号，叉指换能器进行电-声转换，产生声表面波向两边传播，声表面波遇到反射栅时产生反射，并进行叠加，会在谐振腔内形成驻波。谐振器在外部信号激励时存储能量，当外部激励信号撤出后，叉指换能器进行声-电转换，将谐振器响应信号释放出去。谐振器的组成结构简单，只需采用一个叉指换能器以及叉指换能器的两侧分别设置一个反射栅即可，占用压电基片的空间小。
实施例二，本实施例给出了一种声表面波谐振器型振动传感器的一种电路原理图，参见图3所示，最佳匹配网络由第一电容C0和第一电感L0相并联组成，加速度检测电路并联在所述最佳匹配网络组成的并联电路的两端。
作为一个优选实施例，所述加速度检测电路的各支路上设置有弹性开关元件。参见图4所示，弹性开关元件为弹簧或者簧片，弹簧或者簧片的形变方向上的加速度达到阈值时，该弹簧或者簧片产生形变将其所在的支路导通。当然，弹簧或者簧片所能使其所在支路导通的加速度阈值是固定的，而且，各支路上的弹性开关元件的阈值各不相同。
加速度检测电路的各支路上串联有若干个能够使得信号中心频率发生变化的电容和/或电感。电容或电感的组合方式以及个数可以根据阅读器能准确读取谐振器中心频率变化需求设定。
实施例三，本实施例给出了一种声表面波谐振器型振动传感器的一种电路原理图，参见图5所示，最佳匹配网络由第一电容C1和第一电感L1相并联组成，所述加速度检测电路并联在所述第一电感L1的两端。
在本实施例中，加速度检测电路包括若干个并联的支路，其中，由左至右第一个支路由一弹性开关元件K1和一电容C2相串联，第二个支路由一弹性开关元件K2和一电感L2相串联，第三个支路由一弹性开关元件K3和电容C3以及电感L3相串联。本实施例中，弹性开关元件K1-K3均选取无源加速度传感器中的弹簧。弹性开关元件K1-K3与电抗性元件连接并构成常开回路。且三个弹性开关元件K1-K3水平方向临界加速度分别是a1＝3g,a2＝4g,a3＝5g，当所感应的振动加速度达到某一弹性开关元件的设定阈值时，则该弹性开关元件与电抗性元件及匹配网络共同构成可闭合回路。比如当被测对象在水平方向 上的振动加速度小于3g时，K1、K2、K3都处于断开的状态，测量的谐振中心频率不会发生变化。当被测对象在水平方向上的振动加速度大于3g并小于4g时，对应的K1处于闭合状态，形成闭合回路，K2、K3处于断开状态，由于匹配网络中的电抗元件值发生变化，导致测量的谐振中心频率发生了变化Δf1；当被测对象在水平方向上的振动加速度大于4g并小于5g时，对应的K1、K2处于闭合状态，形成闭合回路，弹簧K3处于断开状态，此时测量的谐振中心频率会发生变化Δf2；当被测对象在水平方向上的振动加速度大于5g时，对应的K1、K2、K3都处于闭合状态，形成闭合回路，此时测量的谐振中心频率会发生变化Δf3。
参见图6所示，为该匹配网络组成结构为C′与L′串联，声表面波谐振器与L1并联。
谐振器的通用近谐振器等效电路模型如图7所示，图7中C与L分别为由于压电基片弹性和惯性引起的动态电容和电感，R为阻尼引起的动态电阻，C0为叉指换能器的静态电容，R0为引线电阻。谐振器的等效电路参数包括R0，R，L，C，C0五个参数。
谐振器的阻抗为Zeq1的计算方法为：
Figure PCTCN2015081118-appb-000001
w＝2πf   (2)
Zeq2为谐振器Zeq1与L1并联的阻抗值，因此
Figure PCTCN2015081118-appb-000002
整个结构的总阻抗值Zeq为Zeq2与电容C1串联值
Figure PCTCN2015081118-appb-000003
一般情况下，常用传输线的特性阻抗为50Ω，匹配点对应S11的中心频率，即幅度最小的频率，反射系数为：
Figure PCTCN2015081118-appb-000004
由公式(1～5)可得到S11与频率f的关系图，反射系数最小对应的频率 即f取f0对应谐振器的中心频率。匹配网络中，电抗元件电容或电感的并入网络，会导致C1或L1的等效值改变，最终影响S11的曲线图，幅度最小的频率f0即为整个谐振器结构的中心频率会发生相应的改变。
同样道理的，若所述最佳匹配网络由第一电容C1和第一电感L1相串联组成，所述加速度检测电路并联在所述第一电容C1的两端。通过设置不同的加速度检测电路支路，改变C1的等效值，进而改变整个谐振器结构的中心频率。
实施例四，本实施例基于实施例三中的一种声表面波谐振器型振动传感器，提供了一种声表面波谐振器型振动检测系统，参见图8所示，包括阅读器、信号处理模块、以及振动传感器，所述阅读器上设置有第二天线201，振动传感器上设置有第一天线101，两者通过天线进行通信，参见图2所示，振动传感器还包括匹配网络102、反射栅103、以及叉指换能器104，至少反射栅103、以及叉指换能器104设置在压电基片105上，参见图3所示，匹配网络102包括由至少一个电容和至少一个电感组成的最佳匹配网络，该最佳匹配网络还并联有加速度检测电路，加速度检测电路包括若干个相并联的支路，在不同的加速度下并入所述最佳匹配网络的支路个数不同。本实施例的声表面波谐振器型振动检测系统的工作原理是：阅读器通过第二天线201向振动传感器发送激励信号，振动传感器通过第一天线101接收激励信号，振动传感器在匹配网络上增设加速度检测电路，当被测对象在某一方向上的加速度达到阈值时，加速度检测电路并入特定的该加速度相对应的支路，因此在不同的加速度下并入匹配网络的支路数不同，进而改变匹配网络接入至叉指换能器信号的中心频率，因此，信号经反射栅反射后由叉指换能器发射出去的信号中心频率相应改变，叉指换能器104将谐振后的信号发送至阅读器，由阅读器将该信号发送至信号处理中心处理，信号处理中心根据外界环境温度，进行温度补偿后(外界环境的温度变化会对SAW谐振器传感器带来频率漂移)，最终测得的谐振频率变化，由于加速度检测电路在特定加速度下并入的支路是确定的，其所能够对信号中心频率的改变量也是相应确定的，通过检测振动传感器发出信号的中心频率，即可分析出振动传感器的加速度值。
为了实现对振动传感器的加速度进行监测，还包括用于监控振动传感器反馈信号的监控平台，所示监控平台接收信号处理模块发送的信息。此外，还包 括与所示监控平台连接的报警装置。当振动传感器的加速度超过设定阈值时，进行报警提示。
下面仍以实施例三中的振动传感器为例进行说明。
参见图5所示，本实施例中的振动传感器的最佳匹配网络由第一电容C1和第一电感L1相串联组成，所述加速度检测电路并联在所述第一电感L1的两端，加速度检测电路包括若干个并联的支路，其中，由左至右第一个支路由一弹性开关元件K1和一电容C2相串联，第二个支路由一弹性开关元件K2和一电感L2相串联，第三个支路由一弹性开关元件K3和电容C3以及电感L3相串联。本实施例中，弹性开关元件K1-K3均选取无源加速度传感器中的弹簧。弹性开关元件K1-K3与电抗性元件连接并构成常开回路。且三个弹性开关元件K1-K3水平方向临界加速度分别是a1＝3g,a2＝4g,a3＝5g，当所感应的振动加速度达到某一弹性开关元件的设定阈值时，则该弹性开关元件与电抗性元件及匹配网络共同构成可闭合回路。比如当被测对象在水平方向上的振动加速度小于3g时，K1、K2、K3都处于断开的状态，测量的谐振中心频率不会发生变化。当被测对象在水平方向上的振动加速度大于3g并小于4g时，对应的K1处于闭合状态，形成闭合回路，K2、K3处于断开状态，由于匹配网络中的电抗元件值发生变化，导致测量的谐振中心频率发生了变化Δf1，这时监控平台认为被测对象的振动状况处在可接受的正常范围内；当被测对象在水平方向上的振动加速度大于4g并小于5g时，对应的K1、K2处于闭合状态，形成闭合回路，弹簧K3处于断开状态，此时测量的谐振中心频率会发生变化Δf2，这时监控平台仍认为被测对象的振动状况仍处在可接受的正常范围内；当被测对象在水平方向上的振动加速度大于5g时，对应的K1、K2、K3都处于闭合状态，形成闭合回路，此时测量的谐振中心频率会发生变化Δf3，信号处理中心根据外界环境温度，进行温度补偿后(外界环境的温度变化会对SAW谐振器传感器带来频率漂移)，最终测得的谐振频率变化，与已储存的加速度所对应的频率值信息进行比较处理，将处理结果反馈到监测平台，监测平台对反馈结果振动加速度进行监测，水平加速度超过了5g，出现加速度有异常变化，则报警装置会发出报警响应，报警方式采取常规的报警即可，比如，可以通过采用声光报警。
当然，上述说明并非是对本发明的限制，本发明也并不仅限于上述举例，本技术领域的普通技术人员在本发明的实质范围内所做出的变化、改型、添加或替换，也应属于本发明的保护范围。

Claims (12)

  1. 一种声表面波谐振器型振动传感器，包括第一天线、匹配网络、反射栅、以及叉指换能器，所述至少反射栅、以及叉指换能器设置在压电基片上，其特征在于，所述匹配网络包括由至少一个电容和至少一个电感组成的最佳匹配网络，所述最佳匹配网络还并联有加速度检测电路，所述加速度检测电路包括若干个相并联的支路，在不同的加速度下并入所述最佳匹配网络的支路个数不同。
  2. 根据权利要求1所述的声表面波谐振器型振动传感器，其特征在于，所述最佳匹配网络由第一电容(C1)和第一电感(L1)相串联组成，所述加速度检测电路并联在所述最佳匹配网络组成的串联支路的两端。
  3. 根据权利要求1所述的声表面波谐振器型振动传感器，其特征在于，所述最佳匹配网络由第一电容(C1)和第一电感(L1)相串联组成，所述加速度检测电路并联在所述第一电容(C1)的两端。
  4. 根据权利要求1所述的声表面波谐振器型振动传感器，其特征在于，所述最佳匹配网络由第一电容(C1)和第一电感(L1)相并联组成，所述加速度检测电路并联在所述第一电感(L1)的两端。
  5. 根据权利要求1-4所述的声表面波谐振器型振动传感器，其特征在于，所述压电基片以及在所述压电基片上设置的反射栅和叉指换能器组成的声表面波谐振器并联在所述第一电容(C1)的两端。
  6. 根据权利要求1-4所述的声表面波谐振器型振动传感器，其特征在于，所述压电基片以及在所述压电基片上设置的反射栅和叉指换能器组成的声表面波谐振器并联在所述第一电感(L1)的两端。
  7. 根据权利要求1-6任一项所述的声表面波谐振器型振动传感器，其特征在于，所述加速度检测电路的各支路上设置有弹性开关元件。
  8. 根据权利要求7所述的声表面波谐振器型振动传感器，其特征在于，所述弹性开关元件为弹簧或者簧片，所述弹簧或者簧片的形变方向上的加速度达到阈值时，所述弹簧或者簧片产生形变将其所在的支路导通。
  9. 根据权利要求8所述的声表面波谐振器型振动传感器，其特征在于， 所述的加速度检测电路的各支路上串联有若干个电容和/或电感。
  10. 一种声表面波谐振器型振动检测系统，其特征在于，包括阅读器、信号处理模块、以及振动传感器，所述阅读器上设置有第二天线，还包括如权利要求1-9任一项权利要求所述的声表面波谐振器型振动传感器。
  11. 根据权利要求10所述的声表面波谐振器型振动检测系统，其特征在于，还包括用于监控振动传感器反馈信号的监控平台，所示监控平台接收信号处理模块发送的信息。
  12. 根据权利要求11所述的声表面波谐振器型振动检测系统，其特征在于，还包括与所示监控平台连接的报警装置。
PCT/CN2015/081118 2014-08-02 2015-06-10 声表面波谐振器型振动传感器以及振动检测系统 Ceased WO2016019755A1 (zh)

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