WO2016082571A1 - 三轴微机电陀螺仪 - Google Patents

三轴微机电陀螺仪 Download PDF

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Publication number
WO2016082571A1
WO2016082571A1 PCT/CN2015/084973 CN2015084973W WO2016082571A1 WO 2016082571 A1 WO2016082571 A1 WO 2016082571A1 CN 2015084973 W CN2015084973 W CN 2015084973W WO 2016082571 A1 WO2016082571 A1 WO 2016082571A1
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WIPO (PCT)
Prior art keywords
axis
linkage
beams
frame
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/CN2015/084973
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English (en)
French (fr)
Inventor
张廷凯
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Goertek Inc
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Goertek Inc
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Publication date
Priority claimed from CN201410710065.5A external-priority patent/CN104457726B/zh
Priority claimed from CN201420732602.1U external-priority patent/CN204188168U/zh
Priority claimed from CN201420731958.3U external-priority patent/CN204188170U/zh
Priority claimed from CN201420734425.0U external-priority patent/CN204188169U/zh
Priority claimed from CN201410706276.1A external-priority patent/CN104406579B/zh
Priority to EP19180147.1A priority Critical patent/EP3561451B1/en
Priority to EP15863686.0A priority patent/EP3217146B1/en
Priority to KR1020177014294A priority patent/KR101927647B1/ko
Application filed by Goertek Inc filed Critical Goertek Inc
Priority to US15/529,491 priority patent/US10330471B2/en
Priority to JP2017528429A priority patent/JP6448793B2/ja
Publication of WO2016082571A1 publication Critical patent/WO2016082571A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/02—Rotary gyroscopes
    • G01C19/04—Details
    • G01C19/06—Rotors
    • G01C19/08—Rotors electrically driven
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/02—Rotary gyroscopes
    • G01C19/04—Details
    • G01C19/26—Caging, i.e. immobilising moving parts, e.g. for transport
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional [3D] vibrators, e.g. wine glass-type vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/0003—MEMS mechanisms for assembling automatically hinged components, self-assembly devices

Definitions

  • the invention relates to a microelectromechanical gyroscope, in particular to a single structure three-axis microelectromechanical gyroscope.
  • Micro Electro Mechanical System is an emerging science and technology that integrates micro-mechanics, micro-sensors, micro-actuators, signal processing and intelligent control.
  • the MEMS gyroscope is an inertial device based on MEMS technology for measuring the angular velocity of an object's motion. It has the characteristics of small size, high reliability, low cost and suitable for mass production, so it has broad market prospects and can be applied to a wide range of fields including consumer electronics, aerospace, automotive, medical equipment and weapons.
  • Microelectromechanical gyroscope systems typically include a drive section and a detection section that are designed with some complexity, especially when it comes to microelectromechanical gyroscopes that measure three axes simultaneously.
  • the three-axis gyroscope is mainly realized by designing three single-axis gyroscopes or orthogonally configuring one Z-axis gyroscope and one plane detecting gyroscope, but this combination is not conducive to miniaturization of the device. Therefore, the development of a single-structure three-axis gyroscope has become an important direction in the design and development of today's MEMS gyroscopes.
  • the object of the present invention is to provide a three-axis microelectromechanical gyroscope with a single structure design with good performance. To achieve the above object, the present invention adopts the following technical solutions:
  • a three-axis microelectromechanical gyro includes: a substrate; a ring detecting capacitor at a central position of the substrate, the center of which is an origin; the ring detecting capacitor includes four lower plates fixed on the substrate and facing the four a lower plate and an annular upper plate suspended above the lower plate; the four lower plates are divided into two groups: the first group of lower plates are symmetrically distributed along the x-axis on both sides of the origin, The first set of lower plates cooperate with the corresponding upper annular plates to form a set of first detecting capacitors; the second set of lower plates are symmetrically distributed along the y axis on both sides of the origin, the second set of lower plates and The annular upper plate of the corresponding portion cooperates to form another set of first detecting capacitors; the annular upper plate is fixed on the substrate through the first anchor point at the origin; two sets of driving capacitors are located outside the ring detecting capacitor And symmetrically distributed along the y-axis on both sides of the origin; each set of the
  • the movable driving electrode and the fixed driving electrode are comb-shaped electrodes
  • the movable detecting electrode and the fixed detecting electrode are comb-shaped electrodes.
  • the annular upper plate has a ring shape or a square ring shape.
  • the two lower plates in the first set of lower plates are identical in shape, and the two lower plates in the second set of lower plates are identical in shape.
  • the linkage portion includes a rectangular outer frame and a first linkage portion located inside the rectangular outer frame; the rectangular outer frame surrounds the annular detection capacitor, and the rectangular outer frame passes through the first linkage portion and the An outer edge connection of the annular upper plate; two sets of the driving capacitances are symmetrically distributed on two sides of the rectangular outer frame parallel to the x-axis, and the movable driving electrode and the rectangular outer frame are parallel to the side of the x-axis Connecting; the two sets of the second detecting capacitances are symmetrically distributed on two sides of the rectangular outer frame parallel to the y-axis, and the movable detecting electrodes are connected to the side edges of the rectangular outer frame parallel to the y-axis;
  • the driving capacitor drives the rectangular outer frame to move in a line along the y-axis direction, and the rectangular outer frame that moves in the y-axis direction drives the annular upper plate around the first anchor point through the first linkage portion. Rotate the movement.
  • the first linkage portion includes a first linkage beam, two lever beams, two second linkage beams, and a third linkage beam; the first linkage beam and the second linkage beam are parallel to the y-axis The lever beam and the third linkage beam are both parallel to the x-axis; two of the lever beams are respectively associated with the first
  • the moving beams are connected to form a block structure with an open end, the annular detecting capacitance being located between the two lever beams; two of the second linked beams being symmetric about the x-axis and located between the lever beam and the rectangular outer frame One end of the second linkage beam is connected to an adjacent one of the lever beams, and the other end is connected to the rectangular outer frame; one end of the third linkage beam is connected to the middle of the first linkage beam, and the other end is connected to the ring The outer edge of the upper plate is connected.
  • the first linkage further includes two support beams, both of which are parallel to the y-axis; two of the support beams are symmetric about the x-axis and are located in the block structure and the ring detection Between the capacitors, one end is connected to an adjacent one of the lever beams, and the other end is fixed to the substrate by a third anchor point c.
  • one end of the lever beam not connected to the first linkage beam is a support end, and the support ends of the two lever beams are respectively fixed on the substrate by a second anchor point; the second linkage
  • the connection position of the beam and the lever beam is located between the support end of the lever beam and the connection point of the lever beam and the support beam.
  • the first linkage portion further includes a rectangular inner frame and a second linkage portion;
  • the rectangular inner frame is located in the rectangular outer frame and surrounds the square structure, and the rectangular outer frame passes through the second linkage portion Connecting with the rectangular inner frame;
  • the second linkage beam is located between the lever beam and the rectangular inner frame, and the second linkage beam is connected to the rectangular outer frame by the rectangular inner frame; wherein
  • the rectangular outer frame that moves in the y-axis direction drives the rectangular inner frame to move in the y-axis direction by the second linkage.
  • the second linkage portion is a Z-type decoupling beam, one end of the Z-shaped decoupling beam is connected to a side of the rectangular inner frame parallel to the y-axis, and the other end is connected to the rectangular outer frame parallel to y The side of the shaft.
  • the linkage portion comprises a three-layer rectangular frame centered on the origin on the substrate, and an inner frame, an intermediate frame surrounding the inner frame, and an outer frame surrounding the intermediate frame, from the inside to the outside.
  • the inner frame, the intermediate frame, and the outer frame each have two sides parallel to the x-axis and the other two sides parallel to the y-axis; two sets of the driving capacitances are symmetrically distributed in the outer frame parallel to the x-axis a side, the movable driving electrode is connected to a side of the outer frame parallel to the x-axis; two sets of the second detecting capacitances are symmetrically distributed on two sides of the outer frame parallel to the y-axis, the movable detecting An electrode is connected to the side of the outer frame parallel to the y-axis; the outer frame and the The intermediate frames are connected by a first decoupling beam, the first decoupling beam is disposed on two sides of the intermediate frame parallel to the y-axis; and the second decoupling
  • the first decoupling beam comprises four Z-shaped decoupling beams symmetric about the y-axis, one end of the Z-shaped decoupling beam is perpendicularly connected to the side of the intermediate frame parallel to the y-axis, and the other end is perpendicular Connecting the outer frame to a side parallel to the y-axis; or the first decoupling beam includes four L-shaped decoupling beams symmetric about the y-axis, one end of the L-shaped decoupling beam being vertically connected to the middle
  • the frame is parallel to the sides of the y-axis, the other end is perpendicularly connected to the side of the outer frame parallel to the x-axis;
  • the second decoupling beam comprises four Z-shaped decoupling beams symmetric about the x-axis, the Z-shape One end of the decoupling beam is perpendicularly connected to the side of the inner frame parallel to the x-axis, and the other end is perpendicularly connected to the side
  • the third linkage further includes two support beams, both of which are parallel to the y-axis; two of the support beams are symmetric about the x-axis and are located in the block structure and the ring detection Between the capacitors, one end is connected to an adjacent one of the lever beams, and the other end is fixed to the substrate by a third anchor point c.
  • one end of the lever beam not connected to the first linkage beam is a support end, and the support ends of the two lever beams are respectively fixed on the substrate by a second anchor point; the second linkage
  • the connection position of the beam and the lever beam is located between the support end of the lever beam and the connection point of the lever beam and the support beam.
  • the method further includes a support beam set located in the annular hole of the annular detecting capacitor;
  • the support beam set includes a concentric inner ring and an outer ring, two inner ring support beams, and two inner and outer ring connecting beams, And four outer ring connecting beams; one ends of the four outer ring connecting beams are respectively connected with the outer ring, and the other ends are respectively connected with the inner edges of the annular upper plate;
  • the outer ring connecting beams are divided into two groups, One set is distributed along the x-axis and the other set is distributed along the y-axis; one end of each of the inner ring support beams is respectively connected to the inner ring, and the other end is fixed to the substrate by the first anchor point at the origin
  • One end of each of the two inner and outer ring connecting beams is respectively connected to the inner ring, and the other end is respectively connected with the outer ring;
  • the inner ring supporting beam is distributed along the y axis and the inner and outer ring connecting beams are
  • the three-axis micro electromechanical gyroscope of the invention adopts a single structure design, capacitive electrostatic driving and differential capacitance detection, has simple driving mode and compact structure, is favorable for reducing the volume of the gyroscope, is suitable for mass production in the process, and can achieve good performance. Measurement accuracy and sensitivity.
  • FIG. 1 and 2 are schematic perspective views of a first embodiment of a three-axis microelectromechanical gyroscope according to the present invention.
  • 3 and 4 are schematic plan views showing a first embodiment of a three-axis microelectromechanical gyroscope according to the present invention.
  • FIG. 5 is a schematic structural view of a support beam set of a first embodiment of a three-axis microelectromechanical gyroscope according to the present invention.
  • FIG. 6 is a schematic structural view of a linkage portion of a first embodiment of a three-axis microelectromechanical gyroscope according to the present invention.
  • Figure 7 is a plan view showing a second embodiment of the three-axis microelectromechanical gyroscope of the present invention.
  • Figure 8 is a plan view showing a third embodiment of the three-axis microelectromechanical gyroscope of the present invention.
  • Figure 9 is a plan view showing a fourth embodiment of the three-axis microelectromechanical gyroscope of the present invention.
  • FIGS. 10 and 11 are perspective views of a fifth embodiment of a three-axis microelectromechanical gyroscope according to the present invention.
  • FIGS. 12 and 13 are schematic plan views showing a fifth embodiment of a three-axis microelectromechanical gyroscope according to the present invention.
  • Figure 14 is a plan view showing a sixth embodiment of a three-axis microelectromechanical gyro according to the present invention.
  • Figure 15 is a plan view showing a seventh embodiment of a three-axis microelectromechanical gyro according to the present invention.
  • Figure 16 is a simplified schematic diagram of the x and y axis detection systems of the fifth, sixth and seventh embodiments of the three-axis microelectromechanical gyroscope of the present invention.
  • Figure 17 is a frequency response curve of the detection mass M2 in the driving and detecting directions of the x, y and y axis detections of the fifth, sixth and seventh embodiments of the three-axis MEMS gyroscope of the present invention.
  • 18(a) and 18(b) are simplified schematic views of the z-axis detecting system of the fifth, sixth and seventh embodiments of the triaxial MEMS gyroscope of the present invention.
  • Figure 19 is a frequency response curve of the detection mass M4 in the driving and detecting directions during z-axis detection of the fifth, sixth and seventh embodiments of the three-axis MEMS gyroscope of the present invention.
  • 20 is a schematic structural view of a second embodiment of a support beam set of a three-axis microelectromechanical gyroscope of the present invention.
  • Figure 21 is a schematic view showing the structure of a third embodiment of a support beam set of a three-axis microelectromechanical gyroscope of the present invention.
  • An annular detection capacitor is defined at a central position of the substrate 1, and the center of the ring detection capacitor is defined as an origin O.
  • the plane where the substrate 1 is located is a space rectangular coordinate system of the xy plane, and the z-axis of the space rectangular coordinate system is perpendicular to the substrate 1, as shown in FIG. Show.
  • the ring detecting capacitor comprises four lower plates fixed on the substrate and an annular upper plate 8 facing the four lower plates and suspended above the lower plate, and the lower plates are arranged.
  • the shape matches the shape of the annular upper plate 8.
  • the four lower plates can be divided into two groups: the first set of lower plates 6a are symmetrically distributed along the x-axis on both sides of the origin and the two lower plates in the group have the same shape, and the first set of lower plates 6a and their corresponding portions
  • the annular upper plate 8 cooperates to form a set of first detecting capacitors A;
  • the second set of lower plates 6b are symmetrically distributed along the y axis on both sides of the origin and the two lower plates in the group have the same shape, the second group
  • the plate 6b cooperates with the corresponding upper annular plate 8 to form a first detection capacitor B.
  • the annular upper plate 8 is suspended above the lower plate by a support structure, the support structure is located in the ring hole of the annular detecting capacitor and is connected with the inner edge of the annular upper plate 8, and the supporting structure passes the first anchor point 5a at the origin. Fixed on the substrate, since the support structure is only fixed at the center, the annular upper plate 8 can be angularly vibrated around any axis of the xyz under the action of an external force.
  • the support structure is a support beam set 18, including a concentric inner ring 19 and an outer ring 20, two inner ring support beams 21, and two inner and outer ring connections.
  • One set, one set is distributed along the x-axis, and the other set is distributed along the y-axis.
  • the four outer ring connecting beams 23 evenly divide the outer circumference of the outer ring 20; one ends of the two inner ring support beams 21 are respectively connected to the inner ring 19, The other end is fixed to the substrate 1 through the first anchor point 5a; one end of the two inner and outer ring connecting beams 22 are respectively connected with the inner ring 19, and the other ends are respectively connected with the outer ring 20; the inner ring supports
  • the beams 21 are distributed along the y-axis and the inner and outer ring connecting beams 22 are distributed along the x-axis.
  • the inner ring support beams 21 may also be disposed along the x-axis and the inner and outer ring link beams 22 may be distributed along the y-axis.
  • the inner edge of the annular upper plate 8 is connected to the support beam set 18 in the ring hole, and the support beam set 18 is fixed to the substrate 1 at the origin by the first anchor point 5a, on the ring shape.
  • the plate 8 is suspended above the lower plate by the support of the first anchor point 5a. Since the support beam group is only fixed at the center and has a certain elasticity, the annular upper plate 8 can be angularly vibrated around any axis of the xyz under the action of an external force.
  • the annular upper plate 8 has a circular ring shape, but it should be noted that the present invention is not limited to the annular shape.
  • annular refers to a structure in which a hole is provided in the center.
  • the inner edge of the inner edge is a circular ring shape
  • the outer edge of the inner edge is a square square ring shape
  • the outer edge is circular
  • the inner edge is The square shape
  • the outer edge is a square shape
  • the inner edge is a circular shape
  • the central opening has a cross shape, and the like, and these are equivalent embodiments within the scope of the present invention.
  • annular upper plate 8 and the support structure may be directly integrated, for example, formed by etching after integral patterning.
  • the annular variable capacitor composed of the ring detecting capacitor and the supporting structure can measure the deformation in two directions, and also has the advantages of small resistance and large deformation space during deformation, and can achieve good measurement accuracy and sensitivity.
  • the annular variable capacitor structure of the invention is simple and compact, is advantageous for reducing the volume of the MEMS system, and is suitable for mass production in process.
  • it can also be used for manufacturing a planar double-axis gyroscope.
  • the linkage portion of the first embodiment is a microelectromechanical deformable structure, comprising: a rectangular inner frame 13, a rectangular outer frame 14, four Z-shaped decoupling beams 15, a first linkage beam 9, and two lever beams. 10. Two second linkage beams 11, two support beams 12, and a third linkage beam 24.
  • the rectangular outer frame 14 encloses the rectangular inner frame 13, the center of the rectangular outer frame 14 and the center of the rectangular inner frame 13 facing the origin,
  • the rectangular inner frame 13 is connected to the rectangular outer frame 14 by four Z-shaped decoupling beams 15, which are respectively distributed around the four corners of the rectangular inner frame 13 and symmetrically distributed in the rectangular inner frame 13 parallel to the y-axis
  • Both sides of the Z-shaped decoupling beam 15 are connected to the side of the rectangular inner frame 13 parallel to the y-axis, and the other end is connected to the side of the rectangular outer frame 14 parallel to the y-axis.
  • the Z-type decoupling beam 15 may be of other numbers, and only one end of the Z-type decoupling beam 15 is connected to the side of the rectangular inner frame 13 parallel to the y-axis, and the other end is connected to the rectangular outer frame 14 in parallel with The side of the y-axis can be.
  • the Z-shaped decoupling beams are divided into two groups, symmetrically distributed on the sides of the rectangular inner frame 13 parallel to the y-axis.
  • the first linkage beam 9, the second linkage beam 11, and the support beam 12 are all disposed parallel to the y-axis, and the lever beam 10 and the third linkage beam 24 are disposed parallel to the x-axis.
  • the two lever beams 10 are symmetric about the x-axis, respectively connected to the first linkage beam 9 to form a block structure with one end open, the frame structure is located inside the rectangular inner frame 13, and the annular detection capacitance is located between the two lever beams 10;
  • the two interlocking beams 11 are symmetric about the x-axis and are located between the lever beam 10 and the rectangular inner frame 13, one end of the second interlocking beam 11 is connected to the adjacent one of the lever beams 10, and the other end is connected to the rectangular inner frame 13 so as to pass through the rectangular inner frame 13 is connected to the rectangular outer frame 14; one end of the third interlocking beam 24 is connected to the middle of the first interlocking beam 9, and the other end is connected to the outer edge of the annular upper plate 8.
  • the two support beams 12 are symmetric about the x-axis and are located between the block structure and the annular detection capacitor, one end is connected to an adjacent one of the lever beams 10, and the other end is fixed to the substrate 1 through a third anchor point 5c.
  • the end of the lever beam 10 that is not connected to the first linkage beam 9 is a support end, and the support ends of the two lever beams 10 are respectively fixed to the substrate 1 through a second anchor point 5b.
  • the connection position of the second linkage beam 11 and the lever beam 10 is located between the support end of the lever beam 10 and the connection point of the lever beam 10 and the support beam 12.
  • the two second anchor points 5b are symmetrically arranged with respect to the x-axis
  • the two third anchor points 5c are symmetrically arranged with respect to the x-axis. This symmetrically fixed arrangement makes the inner and outer frames of the rectangular shape more uniformly.
  • each set of driving capacitors includes a movable driving electrode 16 and a fixed driving electrode 4, a movable driving electrode 16 and a rectangular outer frame 14
  • the fixed drive electrodes 4 are fixed to the substrate 1 in parallel with the side connections of the x-axis.
  • each set of second detecting capacitors includes a movable detecting electrode 17 and a fixed detecting electrode 3, and the movable detecting electrode 17
  • the rectangular outer frame 14 is connected in parallel to the side of the y-axis, and the fixed detecting electrode 3 is fixed to the substrate 1.
  • the movable driving electrode 16 and the fixed driving electrode 4 in the present embodiment, and the movable detecting electrode 17 and the fixed detecting electrode 3 are both comb-shaped electrodes.
  • the driving capacitor is used to provide a driving force along the y-axis direction.
  • the rectangular outer frame 14, the movable driving electrode 16, and the movable detecting electrode 17 move in the y-axis direction, and the Z-shaped decoupling beam 15 drives
  • the rectangular inner frame 13 is linearly moved in the y-axis direction, and the second interlocking beam 11 drags the lever beam 10 to perform linear motion along the y-axis direction.
  • the lever beam 10 is equivalent to the lever, so that the first linkage beam 9 is driven in the y-axis direction.
  • a line motion is performed in which the direction of movement of the first linkage beam 9 is opposite to that of the second linkage beam 11.
  • the annular upper plate 8 is rotated about the first anchor point 5a under the drag of the first linkage beam 9, i.e., angular vibration about the z-axis.
  • the driving motion thus includes the linear motion of the rectangular inner and outer frames in the y-axis direction and the angular vibration of the annular upper plate 8 about the z-axis.
  • the annular upper plate 8 When the gyroscope rotates around the x-axis, the annular upper plate 8 will angularly vibrate around the y-axis due to the Coriolis force, thereby causing a change in the spacing between the first set of lower plates 6a and the annular upper plate 8. This results in a change in the first sense capacitance A, which is proportional to the angular velocity of the gyroscope about the x-axis rotation and can therefore be used to measure the x-axis angular velocity. At this time, the first detecting capacitor B and the second detecting capacitor are not affected, or the influence is small and can be ignored.
  • the annular upper plate 8 When the gyroscope rotates around the y-axis, the annular upper plate 8 will angularly vibrate around the x-axis due to the Coriolis force, thereby causing a change in the spacing between the second set of lower plates 6b and the annular upper plate 8. This results in a change in the first detection capacitance B, which is proportional to the angular velocity of the gyroscope about the y-axis, and thus can be used to measure the y-axis angular velocity. At this time, the first detection capacitor A and the second detection capacitor are not affected, or the influence is small and can be ignored.
  • the annular upper plate 8 which is angularly vibrated around the z-axis is not affected by itself. Due to the effect of the Coriolis force, the rectangular outer frame 14 and the rectangular inner frame 13 are subjected to the force in the x-axis direction, but since the lever beam 10 is rigid and one end is fixed, the movement of the rectangular inner frame 13 in the x-axis direction is affected by The limit does not affect the upper plate 8 of the ring, so the ring detection capacitance is not affected.
  • the Z-shaped decoupling beam 15 connecting the rectangular inner and outer frames does not limit the movement of the rectangular outer frame 14 in the x-axis, and therefore, the rectangular outer frame 14 will follow the x-axis direction.
  • the line motion causes a change in the second detecting capacitance (composed of the movable detecting electrode 17 and the fixed detecting electrode 3), which reflects the angular velocity of the gyroscope around the z-axis, thus Can be used to detect the z-axis angular velocity.
  • the lever beam 10 is connected to the first linkage beam 9, the second linkage beam 11 and the support beam 12, and is also fixed on the substrate 1 through the support end (ie, at the second anchor point 5b), and second.
  • the connection position of the linkage beam 11 and the lever beam 10 is located between the support end of the lever beam 10 and the connection point of the lever beam 10 and the support beam 12, which is advantageous for the movement of the rectangular inner and outer frames because: the lever is After the original free end of the beam 10 is fixed as the support end, the lever beam 10 between the second anchor point 5b and the support beam 12 is equivalent to the support beam at both ends, and the deformation mode of the lever beam 10 is fixed at both ends of the intermediate drum.
  • the outer frame, the inner frame, and the frame structure when subjected to an external force, can all have the effect of deformation and distortion, and also have the advantages of small deformation resistance and large deformation space, thereby realizing Good measurement accuracy and sensitivity.
  • the microelectromechanical deformable structure of the invention is simple and compact, is beneficial to reduce the volume of the microelectromechanical system, and is technically suitable for mass production.
  • the micro-displacement amplification can be realized on the mechanical structure level, which is advantageous for improving the detection sensitivity and the signal-to-noise ratio of the sensor, and reducing the requirements of the sensitive structure on the circuit system.
  • FIG. 7 a second embodiment of the triaxial microelectromechanical gyroscope of the present invention is shown:
  • the difference from the first embodiment is mainly in the difference of the interlocking portion, and specifically the second embodiment omits the rectangular inner frame.
  • FIG. 8 is a third embodiment of the triaxial microelectromechanical gyroscope of the present invention:
  • the difference from the second embodiment is mainly that the structure of the driving capacitor and the second detecting capacitor are different: in the second embodiment, the driving capacitor and the second detecting capacitor are comb-shaped capacitors, based on the plate The variation of the overlap length is detected. In the third embodiment, the driving capacitor and the second detecting capacitor are shaped flat-shaped capacitors, and are detected based on the change in the gap between the plates.
  • FIG. 9 a fourth embodiment of the triaxial MEMS gyroscope of the present invention is shown:
  • the difference from the third embodiment is mainly in the structure of the linkage portion: in the third embodiment, the driving capacitor transmits the driving force to the second detecting capacitor by means of the rectangular outer frame, and the driving in the fourth embodiment The capacitor relies on the octagonal outer frame to transmit the driving force to the second detecting capacitor.
  • the driving capacitor and the second detecting capacitor of the present invention are not limited to comb-shaped capacitors, and the structure of the interlocking portion is not limited to the specific structure in the embodiment.
  • the linkage portion when the driving capacitor is driven in the y-axis direction, as long as the linear detection of the movable detecting electrode in the y-axis direction and the rotation of the annular upper plate around the first anchor point can be achieved by the linkage portion, Yes, the linkage design that can achieve this function should fall within the scope of the present invention.
  • the ring detecting capacitor, the supporting beam group of the ring detecting capacitor, the driving capacitor, and the second detecting capacitor of the fifth embodiment are similar to those of the first embodiment, and the main difference is the linkage of the ring detecting capacitor, the driving capacitor and the second detecting capacitor.
  • the structure of the department is different.
  • the linkage of the fifth embodiment is a microelectromechanical deformable structure, comprising:
  • a three-layer rectangular frame centered on the origin is an inner frame 13 from the inside to the outside, an intermediate frame 1314 surrounding the inner frame 13, and an outer frame 14 surrounding the intermediate frame 1314.
  • the centers of the inner frame 13, the intermediate frame 1314, and the outer frame 14 are all facing the origin.
  • the inner frame 13, the intermediate frame 1314, and the outer frame 14 each have two sides parallel to the x-axis and the other two sides parallel to the y-axis.
  • the outer frame 14 and the intermediate frame 1314 are connected by four first decoupling beams 151 which are disposed on both sides of the intermediate frame 1314 parallel to the y-axis and are symmetrical about the y-axis.
  • the first decoupling beam 151 is a Z-shaped decoupling beam, one end is perpendicularly connected to the side of the intermediate frame 1314 parallel to the y-axis, and the other end is perpendicularly connected to the side of the outer frame 14 parallel to the y-axis.
  • the intermediate frame 1314 and the inner frame 13 are connected by four second decoupling beams 152 disposed on both sides of the inner frame 13 parallel to the x-axis and symmetric about the x-axis.
  • the second decoupling beam 152 is a Z-shaped decoupling beam, one end of which is perpendicularly connected to the side of the inner frame 13 parallel to the x-axis, and the other end of which is perpendicularly connected to the side of the intermediate frame 1314 parallel to the x-axis.
  • a third linkage portion located inside the inner frame 13 includes a first linkage beam 9, two lever beams 10, two second linkage beams 11, two support beams 12, and a third linkage beam 24.
  • the first linkage beam 9, the second linkage beam 11, and the support beam 12 are all disposed parallel to the y-axis, and the lever beam 10 and the third linkage beam 24 are disposed parallel to the x-axis.
  • the two lever beams 10 are symmetric about the x-axis and are respectively connected with the first linkage beam 9 to form a block structure with one end open, the frame structure is located inside the inner frame 13, and the annular detection capacitance is located between the two lever beams 10;
  • the linkage beam 11 is symmetric about the x-axis and is located between the lever beam 10 and the inner frame 13, one end of the second linkage beam 11 is connected to an adjacent one of the lever beams 10, and the other end is connected to the inner frame 13 so as to pass through the inner frame 13 and the intermediate frame 1314 is connected to realize the connection with the outer frame 14;
  • one end of the third linkage beam 24 is connected to the middle of the first linkage beam 9, and the other end is connected to the outer edge of the annular upper plate 8.
  • the two support beams 12 are symmetric about the x-axis and are located between the block structure and the annular detection capacitor, one end is connected to an adjacent one of the lever beams 10, and the other end is fixed to the substrate 1 through a third anchor point 5c.
  • the end of the lever beam 10 that is not connected to the first linkage beam 9 is a support end, and the support ends of the two lever beams 10 are respectively fixed to the substrate 1 through a second anchor point 5b.
  • the connection position of the second linkage beam 11 and the lever beam 10 is located between the support end of the lever beam 10 and the connection point of the lever beam 10 and the support beam 12.
  • the two second anchor points 5b are symmetrically arranged with respect to the x-axis
  • the two third anchor points 5c are symmetrically arranged with respect to the x-axis. This symmetrically fixed arrangement makes the ring-shaped detecting capacitance more uniform.
  • the outer frame, the intermediate frame, the inner frame, and the frame structure when subjected to an external force, can all have the effect of deformation and distortion, and also have the advantages of small deformation resistance and large deformation space. Thereby achieving good measurement accuracy and sensitivity.
  • the micro electromechanical deformable structure of the invention is simple and compact, is beneficial to reduce the volume of the micro electro mechanical system, is suitable for mass production in the process, and is less affected by temperature and processing error, and is beneficial to the measurement scheme to achieve good measurement precision and sensitivity.
  • each set of driving capacitors includes a movable movable driving electrode 16 and a fixed driving electrode 4, and the movable driving electrode 16 and the outer frame 14 are parallel to the x
  • the sides of the shaft are connected, and the fixed drive electrode 4 is fixed to the substrate 1.
  • the two sets of second detection capacitors are symmetrically distributed on both sides of the outer frame 14 parallel to the y-axis; each group
  • the second detecting capacitors include a movable detecting electrode 17 and a fixed detecting electrode 3 which are coupled to each other.
  • the movable detecting electrode 17 is connected to the side of the outer frame 14 parallel to the y-axis, and the fixed detecting electrode 3 is fixed to the substrate 1.
  • the movable driving electrode 16 and the fixed driving electrode 4 in the present embodiment, and the movable detecting electrode 17 and the fixed detecting electrode 3 are all comb-shaped electrodes, and are detected based on the change in the overlap length between the plates.
  • the present invention is not limited thereto, and the driving capacitor and the second detecting capacitor may be flat-plate capacitors and detected based on changes in the gap between the plates.
  • the driving capacitor is used to provide a driving force in the y-axis direction.
  • the outer frame 14, the movable driving electrode 16, and the movable detecting electrode 17 are linearly moved in the y-axis direction to drive the intermediate frame 1314 and the inner frame 13.
  • the linear motion is performed along the y-axis direction, and the second interlocking beam 11 drags the lever beam 10 to perform linear motion along the y-axis direction.
  • the lever beam 10 is equivalent to the lever, so that the first linkage beam 9 is caused to move in the y-axis direction.
  • the direction of movement of the first linkage beam 9 is opposite to that of the second linkage beam 11.
  • the annular upper plate 8 Since the first linkage beam 9 is connected to the outer edge of the annular upper plate 8 through the third linkage beam 24, and the annular upper plate 8 is fixed to the substrate 1 through the support beam group 18 at the origin via the first anchor point 5a, The annular upper plate 8 is rotated about the first anchor point 5a under the drag of the first linkage beam 9, i.e., angular vibration about the z-axis.
  • the drive motion thus includes the linear motion of the three-layer frame in the y-axis direction and the angular vibration of the annular upper plate 8 about the z-axis.
  • the annular upper plate 8 When the gyroscope rotates around the x-axis, the annular upper plate 8 will angularly vibrate around the y-axis due to the Coriolis force, thereby causing a change in the spacing between the first set of lower plates 6a and the annular upper plate 8. This results in a change in the first sense capacitance A, which is proportional to the angular velocity of the gyroscope about the x-axis rotation and can therefore be used to measure the x-axis angular velocity. At this time, the first detecting capacitor B and the second detecting capacitor are not affected, or the influence is small and can be ignored.
  • the annular upper plate 8 When the gyroscope rotates around the y-axis, the annular upper plate 8 will angularly vibrate around the x-axis due to the Coriolis force, thereby causing a change in the spacing between the second set of lower plates 6b and the annular upper plate 8. This results in a change in the first detection capacitance B, which is proportional to the angular velocity of the gyroscope about the y-axis, and thus can be used to measure the y-axis angular velocity. At this time, the first detection capacitor A and the second detection capacitor are not affected, or the influence is small and can be ignored.
  • the annular upper plate 8 that makes angular vibration about the z-axis is not affected by itself. ring. Due to the effect of the Coriolis force, the outer frame 14, the intermediate frame 1314, and the inner frame 13 are subjected to the force in the x-axis direction, but since the lever beam 10 is rigid and one end is fixed, the movement of the inner frame 13 in the x-axis direction is Restricted, it will not affect the annular upper plate 8, so the ring detection capacitance is not affected.
  • the movement of the outer frame 14 in the x-axis direction is not limited, and therefore, the outer frame 14 moves along the x-axis direction, resulting in the second detecting capacitance (by the movable detecting electrode 17 and the fixed detection electrode 3 composition), the capacitance change reflects the angular velocity of the gyroscope around the z-axis, and thus can be used to detect the z-axis angular velocity.
  • the lever beam 10 is connected to the first linkage beam 9, the second linkage beam 11 and the support beam 12, and is also fixed on the substrate 1 through the support end (ie, at the second anchor point 5b), and second.
  • the connection position of the linkage beam 11 and the lever beam 10 is located between the support end of the lever beam 10 and the connection point of the lever beam 10 and the support beam 12, which is advantageous for the movement of the three-layer frame because: the lever is After the original free end of the beam 10 is fixed as the support end, the lever beam 10 between the second anchor point 5b and the support beam 12 is equivalent to the support beam at both ends, and the deformation mode of the lever beam 10 is fixed at both ends of the intermediate drum.
  • FIG. 14 a sixth embodiment of the triaxial MEMS gyroscope of the present invention is shown:
  • the principle of the three-axis detection of the sixth embodiment is the same as that of the fifth embodiment, and the difference from the fifth embodiment is mainly that the shape and connection manner of the first decoupling beam 151 are different.
  • the outer frame 14 and the intermediate frame 1314 are connected by four first decoupling beams 151, and the first decoupling beam 151 is disposed on the two sides of the intermediate frame 1314 parallel to the y axis and symmetric about the y axis;
  • the first decoupling beam 151 is an L-shaped decoupling beam, one end is perpendicularly connected to the side of the intermediate frame 1314 parallel to the y-axis, and the other end is perpendicularly connected to the side of the outer frame 14 parallel to the x-axis.
  • FIG. 15 a seventh embodiment of the triaxial MEMS gyroscope of the present invention is shown:
  • the three-axis detection principle of the seventh embodiment and the fifth embodiment are the same as the sixth embodiment mainly in that the shape and connection manner of the second decoupling beam 152 are different.
  • the middle frame The frame 1314 and the inner frame 13 are connected by four second decoupling beams 152 disposed on both sides of the inner frame 13 parallel to the x-axis and symmetric about the x-axis; the second decoupling beam 152 is The L-shaped decoupling beam has one end perpendicularly connected to the side of the inner frame 13 parallel to the x-axis, and the other end perpendicularly connecting the intermediate frame 1314 parallel to the side of the y-axis.
  • the fifth, sixth and seventh embodiments of the gyroscope of the invention are specially designed with a three-layer rectangular frame structure, and the inner frame and the intermediate frame are connected by a Z-shaped or L-shaped second decoupling beam, the intermediate frame and the outer frame.
  • the connection is made by a first decoupling beam of Z or L type, wherein the first decoupling beam limits the relative movement of the outer frame 14 and the intermediate frame 1314 in the y-axis direction, and the second decoupling beam limits the intermediate frame
  • this special design can enhance the robustness of the gyroscope, and the beneficial effects are described with particular reference to FIG. 16-19:
  • FIG. 16 is a simplified schematic diagram of the x and y axis detection systems of the fifth, sixth, and seventh embodiments of the gyroscope of the present invention
  • FIG. 17 is a diagram showing the detection mass M2 of the fifth and sixth embodiments of the fifth and sixth embodiments. The frequency response curve of the direction of detection.
  • the combination of the outer frame 14 and the intermediate frame 1314 can be simplified as the mass M1, the inner frame The combination of the 13 and the annular upper plate 8 and the respective tie beams connecting the two can be simplified to the proof mass M2.
  • the mass M1 when the mass M1 is subjected to the driving force, the detecting mass M2 is moved in the driving direction, wherein the mass M1 can only move in the driving direction, and the detecting mass M2 can be simultaneously moved in the driving and detecting directions.
  • the whole system realizes power amplification, that is, the mass amplitude of the mass M1 is minimized, and the detecting mass is The amplitude of motion of M2 is maximized.
  • the change of the resonant frequency caused by the temperature and the processing error has little influence on the frequency response of the driving straight section, so the gyro driving motion changes little, thereby improving the stability of the gyro driving operation.
  • the natural frequency of the detection mode of the detection mass M2 in the detection direction is designed to be a straight segment between the two peaks of the driving frequency response, so that the matching between the driving and the detection frequency can be realized, and the detection accuracy of the gyroscope is improved. And sensitivity and other properties.
  • FIGS. 18(a) and 18(b) are simplified schematic views of a z-axis detecting system of the fifth, sixth and seventh embodiments of the gyroscope of the present invention
  • FIG. 19 is a z-axis detecting mass detecting block of the fifth, sixth and seventh embodiments.
  • the driving motion power amplification principle of the z-axis detecting system is the same as that of Fig. 16 because it is the same driving motion.
  • FIG. 18(b) when the gyroscope structure is rotated about the z-axis, the inner frame 13 is driven by the x-axis Coriolis force, and the second decoupling beam 152 limits the inner frame 13 and the intermediate frame 1314 in the x-axis direction.
  • the relative movement on the upper frame 13 and the outer frame 14 are equivalent to two fixed masses, which can be simplified as the mass M3, and the connection of the outer frame 14 and the intermediate frame 1314 is equivalent to a spring connection in the x-axis, which can be externally
  • the frame 14 is simplified to the proof mass M4.
  • the mass M3 is moved by the Coriolis force detection mass M4 in the detection direction.
  • the motion displacement of the detection mass M4 is the largest.
  • the mass M3 has the smallest motion displacement, that is, the power amplification is realized.
  • the structure is also characterized by small influence of temperature and processing error, which is beneficial to improve the stability of the driving and detecting motion of the system and the accuracy and sensitivity of the gyroscope detection.
  • the three-axis micro electromechanical gyroscope of the invention adopts a single structure design, capacitive electrostatic driving and differential capacitance detection, has simple driving mode and compact structure, is favorable for reducing the volume of the gyroscope, is suitable for mass production in the process, and is subjected to temperature and processing.
  • the influence of process error is small, and good measurement accuracy and sensitivity can be achieved.
  • FIG 20 there is shown a second embodiment of a support structure comprising a ring 103, three connecting beams 101, and a support beam 102; wherein the two connecting beams 101 are distributed along the y-axis, and the third connecting beam 101 Distributed along the x-axis and in the positive direction of the x-axis, one end of the connecting beam 101 is connected to the ring 103, and the other end is connected to the inner edge of the annular upper plate 8; the support beam 102 is distributed along the x-axis and in the negative direction of the x-axis One end is connected to the ring 103, and the other end is fixed on the substrate by the first anchor point 5a at the origin.
  • the third connecting beam 101 is in the negative direction of the x-axis and the supporting beam 102 is in the positive direction of the x-axis.
  • a third embodiment of the support structure includes a ring 103, two connecting beams 101, and two support beams 102.
  • the two connecting beams 101 are distributed along the y-axis, and the connecting beams 101 are connected.
  • One end is connected to the ring 103, and the other end is connected to the inner edge of the annular upper plate 8;
  • the two support beams 102 are distributed along the x-axis, one end is connected to the ring 103, and the other end is fixed to the substrate at the origin by the first anchor point 5a. on.

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Abstract

一种三轴微机电陀螺仪，包括：位于基板(1)中央位置的环形检测电容，所述环形检测电容包括四个下极板以及环形上极板(8)；第一组下极板(6a)与其对应部分的环形上极板(8)相配合构成一组第一检测电容；第二组下极板(6b)与其对应部分的环形上极板(8)相配合构成另一组第一检测电容；所述环形上极板(8)在原点处通过第一锚点(5a)固定于基板(1)上；两组驱动电容位于所述环形检测电容的外侧，包括可动驱动电极(16)和固定驱动电极(4)；两组第二检测电容位于所述环形检测电容的外侧，包括可动检测电极(17)和固定检测电极(3)；联动部，分别与所述可动驱动电极(16)、所述可动检测电极(17)、以及所述环形上极板(8)的外沿连接。该三轴微机电陀螺仪驱动方式简单，结构紧凑，并且能够实现良好的测量精度和灵敏度。

Description

三轴微机电陀螺仪 技术领域
本发明涉及一种微机电陀螺仪，具体涉及单结构的三轴微机电陀螺仪。
背景技术
微电子机械系统(Micro Electro Mechanical System)，简称MEMS，是在微电子技术基础上发展起来的集微型机械、微传感器、微执行器、信号处理、智能控制于一体的一项新兴科学技术。
微机电陀螺仪是基于MEMS技术的惯性器件，用于测量物体运动的角速度。它具有体积小、可靠性高、成本低廉、适合大批量生产的特点，因此具有广阔的市场前景，可应用于包括消费电子、航空航天、汽车、医疗设备和武器在内的广泛领域。
微机电陀螺仪系统通常包括驱动部分和检测部分，其设计具有一定的复杂性，尤其是涉及三轴同时测量的微机电陀螺仪时。目前三轴陀螺仪主要通过将三个单轴陀螺仪或者将一个Z轴陀螺仪和一个平面检测陀螺仪进行正交配置的设计方式来实现，但是这种组合的方式不利于器件的小型化，因此开发单结构的三轴陀螺仪已经成为现今微机电陀螺仪设计研发的重要方向。
发明内容
本发明的目的在于提供一种性能良好的单结构设计的三轴微机电陀螺仪，为实现上述目的，本发明采用如下技术方案：
一种三轴微机电陀螺仪，包括：基板；位于基板中央位置的环形检测电容，其中心为原点；所述环形检测电容包括固定在基板上的四个下极板以及正对所述四个下极板并且悬置于所述下极板上方的环形上极板；所述四个下极板分为两组：第一组下极板沿x轴在原点的两侧对称分布，所述 第一组下极板与其对应部分的环形上极板相配合构成一组第一检测电容；第二组下极板沿y轴在原点的两侧对称分布，所述第二组下极板与其对应部分的环形上极板相配合构成另一组第一检测电容；所述环形上极板在原点处通过第一锚点固定于基板上；两组驱动电容，位于所述环形检测电容的外侧且沿y轴在原点的两侧对称分布；每组所述驱动电容都包括互相配合的可动驱动电极和固定驱动电极；两组第二检测电容，位于所述环形检测电容的外侧且沿x轴在原点的两侧对称分布；每组所述第二检测电容都包括互相配合的可动检测电极和固定检测电极；联动部，分别与所述可动驱动电极、所述可动检测电极、以及所述环形上极板的外沿连接；其中，所述驱动电容用于提供沿y轴方向的驱动力，并且通过所述联动部带动所述可动检测电极沿y轴方向做线运动以及带动所述环形上极板绕所述第一锚点做转动运动。
优选的，所述可动驱动电极和固定驱动电极为梳齿状电极，所述可动检测电极和固定检测电极为梳齿状电极。
优选的，所述环形上极板为圆环形状或者方环形状。
优选的，所述第一组下极板组内的两个下极板形状相同，所述第二组下极板组内的两个下极板形状相同。
优选的，所述联动部包括矩形外框架和位于所述矩形外框架内部的第一联动部；所述矩形外框架包围所述环形检测电容，所述矩形外框架通过第一联动部与所述环形上极板的外沿连接；两组所述驱动电容对称分布在所述矩形外框架平行于x轴的两侧，所述可动驱动电极与所述矩形外框架平行于x轴的侧边连接；两组所述第二检测电容对称分布在所述矩形外框架平行于y轴的两侧，所述可动检测电极与所述矩形外框架平行于y轴的侧边连接；其中，所述驱动电容驱动所述矩形外框架沿y轴方向做线运动，沿y轴方向做线运动的矩形外框架通过所述第一联动部带动所述环形上极板绕所述第一锚点做转动运动。
优选的，所述第一联动部包括第一联动梁，两条杠杆梁、两条第二联动梁、第三联动梁；所述第一联动梁和所述第二联动梁均平行于y轴，所述杠杆梁和第三联动梁均平行于x轴；两条所述杠杆梁分别与所述第一联 动梁连接以形成一端开口的方框结构，所述环形检测电容位于两条杠杆梁之间；两条所述第二联动梁关于x轴对称且位于所述杠杆梁和所述矩形外框架之间，所述第二联动梁的一端连接邻近的一条杠杆梁，另一端连接所述矩形外框架；所述第三联动梁的一端连接所述第一联动梁的中部，另一端与所述环形上极板的外沿连接。
优选的，所述第一联动部还包括两条支撑梁，两条所述支撑梁均平行于y轴；两条所述支撑梁关于x轴对称且位于所述方框结构和所述环形检测电容之间，一端连接邻近的一条杠杆梁，另一端各通过一第三锚点c固定于所述基板上。
优选的，所述杠杆梁未与所述第一联动梁连接的一端为支撑端，两条所述杠杆梁的支撑端各通过一第二锚点固定于所述基板上；所述第二联动梁与杠杆梁的连接位置位于杠杆梁的支撑端和杠杆梁与支撑梁的连接点中间。
优选的，所述第一联动部还包括矩形内框架和第二联动部；所述矩形内框架位于所述矩形外框架内并且包围所述方框结构，所述矩形外框架通过第二联动部与所述矩形内框架连接；所述第二联动梁位于所述杠杆梁和所述矩形内框架之间，所述第二联动梁通过所述矩形内框架与所述矩形外框架连接；其中，沿y轴方向做线运动的矩形外框架通过第二联动部带动所述矩形内框架沿y轴方向做线运动。
优选的，所述第二联动部为Z型解耦梁，所述Z型解耦梁的一端连接所述矩形内框架平行于y轴的侧边，另一端连接所述矩形外框架平行于y轴的侧边。
优选的，所述联动部包括位于所述基板上的以原点为中心的三层矩形框架，从内向外依次为内框架、包围所述内框架的中间框架、以及包围所述中间框架的外框架，所述内框架、中间框架、以及外框架各有两条边平行于x轴，另外两条边平行于y轴；两组所述驱动电容对称分布在所述外框架平行于x轴的两侧，所述可动驱动电极与所述外框架平行于x轴的侧边连接；两组所述第二检测电容对称分布在所述外框架平行于y轴的两侧，所述可动检测电极与所述外框架平行于y轴的侧边连接；所述外框架和所 述中间框架之间通过第一解耦梁连接，所述第一解耦梁设置于所述中间框架平行于y轴的两侧；所述中间框架和所述内框架之间通过第二解耦梁连接，所述第二解耦梁设置于所述内框架平行于x轴的两侧；位于所述内框架内部的第三联动部，所述第三联动部包括第一联动梁，两条杠杆梁、两条第二联动梁、第三联动梁；所述第一联动梁和所述第二联动梁均平行于y轴，所述杠杆梁和第三联动梁均平行于x轴；两条所述杠杆梁关于x轴对称，分别与所述第一联动梁连接以形成一端开口的方框结构，所述环形检测电容位于两条杠杆梁之间；两条所述第二联动梁关于x轴对称且位于所述杠杆梁和所述内框架之间，所述第二联动梁的一端连接邻近的一条杠杆梁，另一端连接所述内框架；所述第三联动梁的一端连接所述第一联动梁的中部，另一端与所述环形上极板的外沿连接。
优选的，所述第一解耦梁包括关于y轴对称的四个Z型解耦梁，所述Z型解耦梁的一端垂直连接所述中间框架平行于y轴的侧边，另一端垂直连接所述外框架平行于y轴的侧边；或者，所述第一解耦梁包括关于y轴对称的四个L型解耦梁，所述L型解耦梁的一端垂直连接所述中间框架平行于y轴的侧边，另一端垂直连接所述外框架平行于x轴的侧边；所述第二解耦梁包括关于x轴对称的四个Z型解耦梁，所述Z型解耦梁的一端垂直连接所述内框架平行于x轴的侧边，另一端垂直连接所述中间框架平行于x轴的侧边；或者，所述第二解耦梁包括关于x轴对称的四个L型解耦梁，所述L型解耦梁的一端垂直连接所述内框架平行于x轴的侧边，另一端垂直连接所述中间框架平行于y轴的侧边。
优选的，所述第三联动部还包括两条支撑梁，两条所述支撑梁均平行于y轴；两条所述支撑梁关于x轴对称且位于所述方框结构和所述环形检测电容之间，一端连接邻近的一条杠杆梁，另一端各通过一第三锚点c固定于所述基板上。
优选的，所述杠杆梁未与所述第一联动梁连接的一端为支撑端，两条所述杠杆梁的支撑端各通过一第二锚点固定于所述基板上；所述第二联动梁与杠杆梁的连接位置位于杠杆梁的支撑端和杠杆梁与支撑梁的连接点中间。
优选的，还包括位于所述环形检测电容的环孔内的支撑梁组；所述支撑梁组包括同心的内圆环和外圆环、两条内环支撑梁、两条内外环连接梁、以及四条外环连接梁；所述四条外环连接梁的一端分别与外圆环连接，另一端分别与所述环形上极板的内沿连接；所述外环连接梁分成两个一组，其中一组沿x轴分布，另一组沿y轴分布；两条所述内环支撑梁的一端分别与内圆环连接，另一端在原点处通过所述第一锚点固定于所述基板上；两条所述内外环连接梁的一端分别与内圆环连接，另一端分别与外圆环连接；所述内环支撑梁沿y轴分布且所述内外环连接梁沿x轴分布，或者，所述内环支撑梁沿x轴分布且所述内外环连接梁沿y轴分布。
本发明的三轴微机电陀螺仪采用单结构设计，电容式静电驱动和差动电容检测，驱动方式简单，结构紧凑，有利于减小陀螺仪体积，工艺上适合批量生产，并且能够实现良好的测量精度和灵敏度。
通过以下参照附图对本发明的示例性实施例的详细描述，本发明的其它特征及其优点将会变得清楚。
附图说明
被结合在说明书中并构成说明书的一部分的附图示出了本发明的实施例，并且连同其说明一起用于解释本发明的原理。
图1、2为本发明三轴微机电陀螺仪第一实施例的立体示意图。
图3、4为本发明三轴微机电陀螺仪第一实施例的平面示意图。
图5为本发明三轴微机电陀螺仪第一实施例的支撑梁组的结构示意图。
图6为本发明三轴微机电陀螺仪第一实施例的联动部的结构示意图。
图7为本发明三轴微机电陀螺仪第二实施例的平面示意图。
图8为本发明三轴微机电陀螺仪第三实施例的平面示意图。
图9为本发明三轴微机电陀螺仪第四实施例的平面示意图。
图10、11为本发明三轴微机电陀螺仪第五实施例的立体示意图。
图12、13为本发明三轴微机电陀螺仪第五实施例的平面示意图。
图14为本发明三轴微机电陀螺仪第六实施例的平面示意图。
图15为本发明三轴微机电陀螺仪第七实施例的平面示意图。
图16为本发明三轴微机电陀螺仪第五、六、七实施例的x和y轴检测系统的简化示意图。
图17为本发明三轴微机电陀螺仪第五、六、七实施例的x和y轴检测时检测质量块M2在驱动和检测方向的频响曲线。
图18(a)、18(b)为本发明三轴微机电陀螺仪第五、六、七实施例的z轴检测系统的简化示意图。
图19为本发明三轴微机电陀螺仪第五、六、七实施例的z轴检测时检测质量块M4在驱动和检测方向的频响曲线。
图20为本发明三轴微机电陀螺仪的支撑梁组的第二实施例的结构示意图。
图21为本发明三轴微机电陀螺仪的支撑梁组的第三实施例的结构示意图。
附图标记说明
1基板；8环形上极板、6a第一组下极板、6b第二组下极板；16可动驱动电极、4固定驱动电极；17可动检测电极、3固定检测电极；13矩形内框架、14矩形外框架；131内框架、1314中间框架、141外框架；15Z型解耦梁、151第一解耦梁、152第二解耦梁；9第一联动梁、10杠杆梁、11第二联动梁、12支撑梁、24第三联动梁；18支撑梁组、19内圆环、20外圆环、21内环支撑梁、22内外环连接梁、23外环连接梁；101连接梁、102支撑梁、103圆环；5a第一锚点、5b第二锚点、5c第三锚点。
具体实施方式
现在将参照附图来详细描述本发明的各种示例性实施例。应注意到：除非另外具体说明，否则在这些实施例中阐述的部件和步骤的相对布置、数字表达式和数值不限制本发明的范围。
以下对至少一个示例性实施例的描述实际上仅仅是说明性的，决不作为对本发明及其应用或使用的任何限制。对于相关领域普通技术人员已知的技术、方法和设备可能不作详细讨论，但在适当情况下，所述技术、方法和设备应当被视为说明书的一部分。在这里示出和讨论的所有例子中， 任何具体值应被解释为仅仅是示例性的，而不是作为限制。因此，示例性实施例的其它例子可以具有不同的值。应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步讨论。
(一)、参考图1-6所示为本发明三轴微机电陀螺仪的第一实施例：
基板1中央位置处有一环形检测电容，定义以环形检测电容的中心为原点O，基板1所在平面为xy平面的空间直角坐标系，空间直角坐标系的z轴垂直于基板1，如图1所示。
参考图3所示，环形检测电容包括固定在基板上的四个下极板以及正对四个下极板并且悬置于下极板上方的环形上极板8，下极板排布组成的形状与环形上极板8的形状相匹配。
四个下极板可分为两组：第一组下极板6a沿x轴在原点的两侧对称分布且组内的两个下极板形状相同，第一组下极板6a与其对应部分的环形上极板8相配合构成一组第一检测电容A；第二组下极板6b沿y轴在原点的两侧对称分布且组内的两个下极板形状相同，第二组下极板6b与其对应部分的环形上极板8相配合构成第一检测电容B。
环形上极板8通过支撑结构悬置于下极板的上方，支撑结构位于环形检测电容的环孔内并且与环形上极板8的内沿连接，支撑结构在原点处通过第一锚点5a固定于基板上，由于支撑结构仅中心固定，因此环形上极板8在外力作用下可以绕xyz任意一轴做角振动。
参考图5所示为本实施例的支撑结构的结构示意图，支撑结构为支撑梁组18，包括同心的内圆环19和外圆环20、两条内环支撑梁21、两条内外环连接梁22、以及四条外环连接梁23；四条外环连接梁23的一端分别与外圆环20连接，另一端分别与环形上极板8的内沿连接；外环连接梁23分成两个一组，其中一组沿x轴分布，另一组沿y轴分布，四条外环连接梁23均匀分割外圆环20的外周；两条内环支撑梁21的一端分别与内圆环19连接，另一端通过第一锚点5a固定于基板1上；两条内外环连接梁22的一端分别与内圆环19连接，另一端分别与外圆环20连接；内环支撑 梁21沿y轴分布且内外环连接梁22沿x轴分布。在其它实施例中，也可以设置内环支撑梁21沿x轴分布而内外环连接梁22沿y轴分布。
从图2的剖面部分能够看出，环形上极板8的内沿与环孔内的支撑梁组18连接，支撑梁组18在原点处通过第一锚点5a固定于基板1上，环形上极板8凭借第一锚点5a的支撑悬置于下极板上方。由于支撑梁组仅中心固定且纤细具有一定弹性，因此环形上极板8在外力作用下可以绕xyz任意一轴做角振动。
其中，环形上级板8为圆环形状，但需要注意的是，本发明并不限定于圆环形状。本发明中“环形”是指中心设有孔洞的结构，例如内沿外沿皆是圆形的圆环形状，内沿外沿皆是方形的方环形状、外沿为圆形而内沿为方形的形状、外沿为方形而内沿为圆形的形状、中心开孔的十字形形状等等，这些都属于等同的实施例在本发明的保护范围内。
其中，环形上极板8和支撑结构可以直接为一体结构，例如为一体构图后蚀刻形成。
其中，由环形检测电容和支撑结构组成的环形可变电容能够测量两个方向上的变形，同时还具有变形时阻力小且变形空间大的优点，能够实现良好的测量精度和灵敏度。本发明的环形可变电容结构简单紧凑，有利于减小微机电系统的体积，工艺上适合批量生产，除了应用于本发明的三轴陀螺仪上，还可以用于制作平面双轴陀螺仪，z轴陀螺仪以及微致动器件，如微型开关等。
参考图6所示，第一实施例的联动部是微机电可变形结构，包括：矩形内框架13、矩形外框架14、四条Z型解耦梁15、第一联动梁9、两条杠杆梁10、两条第二联动梁11、两条支撑梁12、第三联动梁24。
矩形外框架14包围矩形内框架13，矩形外框架14的中心和矩形内框架13的中心正对原点，
矩形内框架13通过4个Z型解耦梁15与矩形外框架14连接，Z型解耦梁15分别分布在矩形内框架13的四个角周围并且对称分布在矩形内框架13平行于y轴的两侧；Z型解耦梁15的一端连接矩形内框架13平行于y轴的侧边，另一端连接矩形外框架14平行于y轴的侧边。
其中，需要说明的是，Z型解耦梁15可以为其它数量，只需要Z型解耦梁15的一端连接矩形内框架13平行于y轴的侧边，另一端连接矩形外框架14平行于y轴的侧边即可。优选的，Z型解耦梁分为两组，对称分布在矩形内框架13平行于y轴的两侧。
第一联动梁9、第二联动梁11、支撑梁12均平行于y轴设置，杠杆梁10和第三联动梁24平行于x轴设置。两条杠杆梁10关于x轴对称，分别与第一联动梁9连接以形成一端开口的方框结构，方框结构位于矩形内框架13内部，环形检测电容位于两条杠杆梁10之间；第二联动梁11关于x轴对称且位于杠杆梁10和矩形内框架13之间，第二联动梁11的一端连接邻近的一条杠杆梁10，另一端连接至矩形内框架13，从而通过矩形内框架13与矩形外框架14连接；第三联动梁24的一端连接第一联动梁9的中部，另一端与环形上极板8的外沿连接。两条支撑梁12关于x轴对称且位于方框结构和环形检测电容之间，一端连接邻近的一条杠杆梁10，另一端各通过一第三锚点5c固定于基板1上。其中，杠杆梁10未与第一联动梁9连接的一端为支撑端，两条杠杆梁10的支撑端各通过一第二锚点5b固定于基板1上。其中，第二联动梁11与杠杆梁10的连接位置位于杠杆梁10的支撑端和杠杆梁10与支撑梁12的连接点中间。其中，两个第二锚点5b关于x轴对称设置，两个第三锚点5c关于x轴对称设置，这种对称固定的设置使矩形内外框架受力更加均匀。
两组驱动电容，对称分布在矩形外框架14平行于x轴的两侧；每组驱动电容都包括互相配合的可动驱动电极16和固定驱动电极4，可动驱动电极16与矩形外框架14平行于x轴的侧边连接，固定驱动电极4固定于基板1上。
两组第二检测电容，对称分布在矩形外框架14平行于y轴的两侧；每组第二检测电容都包括互相配合的可动检测电极17和固定检测电极3，可动检测电极17与矩形外框架14平行于y轴的侧边连接，固定检测电极3固定于基板1上。
其中，本实施例中的可动驱动电极16和固定驱动电极4，以及可动检测电极17和固定检测电极3均为梳齿状电极。
本发明三轴微机电陀螺仪第一实施例的工作原理如下：
驱动电容用于提供沿y轴方向的驱动力，当受到外界驱动时，矩形外框架14、可动驱动电极16以及可动检测电极17沿y轴方向做线运动，Z形解耦梁15带动矩形内框架13沿y轴方向做线运动，同时第二联动梁11拖动杠杆梁10沿y轴方向做线运动，杠杆梁10相当于杠杆，因此会带动第一联动梁9在y轴方向做线运动，其中第一联动梁9的运动方向与第二联动梁11相反。由于第一联动梁9通过第三联动梁24和环形上极板8的外沿相连，且环形上极板8通过支撑梁组18在原点处经第一锚点5a固定于基板1上，因此环形上极板8会在第一联动梁9的拖动下绕第一锚点5a转动，即绕z轴做角振动。因此驱动运动包括矩形内外框架沿y轴方向的线运动和环形上极板8绕z轴的角振动。
当陀螺仪绕x轴转动时，由于哥氏力的作用，环形上极板8会绕y轴做角振动，由此引起第一组下极板6a与环形上极板8的间距的变化，导致第一检测电容A的变化，该电容变化与陀螺仪绕x轴转动的角速度成正比，因此可用于测量x轴角速度。此时第一检测电容B和第二检测电容不受影响，或影响很小可以忽略。
当陀螺仪绕y轴转动时，由于哥氏力的作用，环形上极板8会绕x轴做角振动，由此引起第二组下极板6b与环形上极板8的间距的变化，导致第一检测电容B的变化，该电容变化与陀螺仪绕y轴转动的角速度成正比，因此可用于测量y轴角速度。此时第一检测电容A和第二检测电容不受影响，或影响很小可以忽略。
当陀螺仪绕z轴转动时，绕z轴做角振动的环形上极板8本身不受影响。由于哥氏力的作用，矩形外框架14和矩形内框架13受到x轴方向的作用力，但由于杠杆梁10是刚性且一端固定住的，所以矩形内框架13在x轴方向的运动是受限的，也不会影响到环形上极板8，因此环形检测电容不受影响。由于Z形解耦梁15的解耦作用，连接矩形内外框架的Z形解耦梁15不会对矩形外框架14在x轴向的运动造成限制，因此，矩形外框架14会沿x轴方向线运动，导致第二检测电容(由可动检测电极17和固定检测电极3组成)的变化，该电容变化即反映了陀螺仪绕z轴的角速度，因此 可以用于检测z轴角速度。
本实施例中，杠杆梁10除了和第一联动梁9、第二联动梁11和支撑梁12相连外，还通过支撑端固定在基板1上(即第二锚点5b处)，并且第二联动梁11与杠杆梁10的连接位置位于杠杆梁10的支撑端和杠杆梁10与支撑梁12的连接点中间，这种情况对矩形内外框架的运动是有好处的，这是因为：将杠杆梁10原本的自由端固定为支撑端后，在第二锚点5b与支撑梁12之间的杠杆梁10相当于两端支撑梁，这段杠杆梁10的变形模式为中间鼓两端固定的形式，其垂直于y轴的状态不会变，这时第二联动梁11如果处于其中间位置，则第二联动梁11不会受到扭矩进而导致转动，因此能进一步保证矩形内框架13仅做y轴线运动，而如果偏离中间位置，杠杆梁10垂直于y轴的状态则会发生变化，这种偏转会影响矩形内外框架的运动模态。
第一实施例的微机电可变形结构，在受到外力作用时，外框架、内框架、以及方框结构均能产生变形扭曲的效果，同时还具有变形阻力小变形空间大的优点，从而能够实现良好的测量精度和灵敏度。本发明的微机电可变形结构简单紧凑，有利于减小微机电系统的体积，工艺上适合批量生产。除了应用于本发明的三轴陀螺仪上，还可以在机械结构层面上实现微小位移的放大，有利于提高传感器的检测灵敏度和信噪比，而且降低了敏感结构对电路系统的要求。
(二)、参考图7所示为本发明三轴微机电陀螺仪的第二实施例：
从图7中可以看出，和第一实施例的区别主要在于联动部的不同，具体来说第二实施例省略了矩形内框架。
(三)、参考图8所示为本发明三轴微机电陀螺仪的第三实施例：
从图8中可以看出，和第二实施例的区别主要在于驱动电容和第二检测电容的结构不同：第二实施例中驱动电容和第二检测电容为梳齿状电容，基于极板之间交叠长度的变化进行检测，第三实施例中驱动电容和第二检测电容为异形的平板状电容，基于极板之间间隙的变化进行检测。
(四)、参考图9所示为本发明三轴微机电陀螺仪的第四实施例：
从图9中可以看出，和第三实施例的区别主要在于联动部的结构不同：第三实施例中驱动电容依靠矩形外框架将驱动力传递给第二检测电容，第四实施例中驱动电容依靠八边形外框架将驱动力传递给第二检测电容。
从第二、三、四实施例中可以看出，本发明的驱动电容和第二检测电容并不限于梳齿状电容，联动部的结构也不限定于实施例中的具体结构。对于本发明来说，当驱动电容沿y轴方向进行驱动时，只要能够实现通过联动部带动可动检测电极沿y轴方向做线运动以及带动环形上极板绕第一锚点做转动运动即可，能够实现这一功能的联动部设计都应当属于本发明的保护范围内。
(五)、参考图10-13本发明三轴微机电陀螺仪的第五实施例：
第五实施例的环形检测电容、环形检测电容的支撑梁组、驱动电容、第二检测电容，都和第一实施例类似，主要区别在于连接环形检测电容、驱动电容、第二检测电容的联动部的结构不同。
第五实施例的联动部是微机电可变形结构，包括：
以原点为中心的三层矩形框架，从内向外依次为内框架13、包围内框架13的中间框架1314、以及包围中间框架1314的外框架14。内框架13、中间框架1314以及外框架14的中心都正对原点。内框架13、中间框架1314、以及外框架14各有两条边平行于x轴，另外两条边平行于y轴。
外框架14和中间框架1314之间通过4个第一解耦梁151连接，第一解耦梁151设置于中间框架1314平行于y轴的两侧并且关于y轴对称。第一解耦梁151为Z型解耦梁，一端垂直连接中间框架1314平行于y轴的侧边，另一端垂直连接外框架14平行于y轴的侧边。
中间框架1314和内框架13之间通过4个第二解耦梁152连接，第二解耦梁152设置于内框架13平行于x轴的两侧并且关于x轴对称。第二解耦梁152为Z型解耦梁，一端垂直连接内框架13平行于x轴的侧边，另一端垂直连接中间框架1314平行于x轴的侧边。
位于内框架13内部的第三联动部，第三联动部包括第一联动梁9、两条杠杆梁10、两条第二联动梁11、两条支撑梁12、第三联动梁24。第一联动梁9、第二联动梁11、支撑梁12均平行于y轴设置，杠杆梁10和第三联动梁24平行于x轴设置。两条杠杆梁10关于x轴对称，分别与第一联动梁9连接以形成一端开口的方框结构，方框结构位于内框架13内部，环形检测电容位于两条杠杆梁10之间；第二联动梁11关于x轴对称且位于杠杆梁10和内框架13之间，第二联动梁11的一端连接邻近的一条杠杆梁10，另一端连接至内框架13，从而通过内框架13与中间框架1314连接，进而实现与外框架14的连接；第三联动梁24的一端连接第一联动梁9的中部，另一端与环形上极板8的外沿连接。两条支撑梁12关于x轴对称且位于方框结构和环形检测电容之间，一端连接邻近的一条杠杆梁10，另一端各通过一第三锚点5c固定于基板1上。其中，杠杆梁10未与第一联动梁9连接的一端为支撑端，两条杠杆梁10的支撑端各通过一第二锚点5b固定于基板1上。其中，第二联动梁11与杠杆梁10的连接位置位于杠杆梁10的支撑端和杠杆梁10与支撑梁12的连接点中间。其中，两个第二锚点5b关于x轴对称设置，两个第三锚点5c关于x轴对称设置，这种对称固定的设置使环形检测电容受力更加均匀。
第五实施例的微机电可变形结构，在受到外力作用时，外框架、中间框架、内框架、以及方框结构均能产生变形扭曲的效果，同时还具有变形阻力小变形空间大的优点，从而能够实现良好的测量精度和灵敏度。本发明的微机电可变形结构简单紧凑，有利于减小微机电系统的体积，工艺上适合批量生产，并且受温度及加工工艺误差影响小，有利于测量方案实现良好的测量精度和灵敏度。除了应用于本发明的三轴陀螺仪上，还可以在机械结构层面上实现微小位移的放大，有利于提高传感器的检测灵敏度和信噪比，并且降低了敏感结构对电路系统的要求。
两组驱动电容，对称分布在外框架14平行于x轴的两侧；每组驱动电容都包括互相配合的可动驱动电极16和固定驱动电极4，可动驱动电极16与外框架14平行于x轴的侧边连接，固定驱动电极4固定于基板1上。
两组第二检测电容，对称分布在外框架14平行于y轴的两侧；每组 第二检测电容都包括互相配合的可动检测电极17和固定检测电极3，可动检测电极17与外框架14平行于y轴的侧边连接，固定检测电极3固定于基板1上。
其中，本实施例中的可动驱动电极16和固定驱动电极4，以及可动检测电极17和固定检测电极3均为梳齿状电极，基于极板之间交叠长度的变化进行检测。但本发明不限定于此，驱动电容和第二检测电容还可以为平板状电容，基于极板之间间隙的变化进行检测。
本发明三轴多自由度微机电陀螺仪第五实施例的工作原理如下：
驱动电容用于提供沿y轴方向的驱动力，当受到外界驱动时，外框架14、可动驱动电极16以及可动检测电极17沿y轴方向做线运动，带动中间框架1314、内框架13沿y轴方向做线运动，同时第二联动梁11拖动杠杆梁10沿y轴方向做线运动，杠杆梁10相当于杠杆，因此会带动第一联动梁9在y轴方向做线运动，其中第一联动梁9的运动方向与第二联动梁11相反。由于第一联动梁9通过第三联动梁24和环形上极板8的外沿相连，且环形上极板8通过支撑梁组18在原点处经第一锚点5a固定于基板1上，因此环形上极板8会在第一联动梁9的拖动下绕第一锚点5a转动，即绕z轴做角振动。因此驱动运动包括三层框架沿y轴方向的线运动和环形上极板8绕z轴的角振动。
当陀螺仪绕x轴转动时，由于哥氏力的作用，环形上极板8会绕y轴做角振动，由此引起第一组下极板6a与环形上极板8的间距的变化，导致第一检测电容A的变化，该电容变化与陀螺仪绕x轴转动的角速度成正比，因此可用于测量x轴角速度。此时第一检测电容B和第二检测电容不受影响，或影响很小可以忽略。
当陀螺仪绕y轴转动时，由于哥氏力的作用，环形上极板8会绕x轴做角振动，由此引起第二组下极板6b与环形上极板8的间距的变化，导致第一检测电容B的变化，该电容变化与陀螺仪绕y轴转动的角速度成正比，因此可用于测量y轴角速度。此时第一检测电容A和第二检测电容不受影响，或影响很小可以忽略。
当陀螺仪绕z轴转动时，绕z轴做角振动的环形上极板8本身不受影 响。由于哥氏力的作用，外框架14、中间框架1314、内框架13受到x轴方向的作用力，但由于杠杆梁10是刚性且一端固定住的，所以内框架13在x轴方向的运动是受限的，也不会影响到环形上极板8，因此环形检测电容不受影响。由于第一解耦梁151的解耦作用，不会对外框架14在x轴向的运动造成限制，因此，外框架14会沿x轴方向线运动，导致第二检测电容(由可动检测电极17和固定检测电极3组成)的变化，该电容变化即反映了陀螺仪绕z轴的角速度，因此可以用于检测z轴角速度。
本实施例中，杠杆梁10除了和第一联动梁9、第二联动梁11和支撑梁12相连外，还通过支撑端固定在基板1上(即第二锚点5b处)，并且第二联动梁11与杠杆梁10的连接位置位于杠杆梁10的支撑端和杠杆梁10与支撑梁12的连接点中间，这种情况对三层框架的运动是有好处的，这是因为：将杠杆梁10原本的自由端固定为支撑端后，在第二锚点5b与支撑梁12之间的杠杆梁10相当于两端支撑梁，这段杠杆梁10的变形模式为中间鼓两端固定的形式，其垂直于y轴的状态不会变，这时第二联动梁11如果处于其中间位置，则第二联动梁11不会受到扭矩进而导致转动，而如果偏离中间位置，杠杆梁10垂直于y轴的状态则会发生变化，这种偏转会影响三层框架的运动模态。
(六)、参考图14所示为本发明三轴微机电陀螺仪的第六实施例：
第六实施例和第五实施例的三轴检测原理一样，和第五实施例的区别主要在于第一解耦梁151的形状和连接方式不同。第六实施例中：外框架14和中间框架1314之间通过4个第一解耦梁151连接，第一解耦梁151设置于中间框架1314平行于y轴的两侧并且关于y轴对称；第一解耦梁151为L型解耦梁，一端垂直连接中间框架1314平行于y轴的侧边，另一端垂直连接外框架14平行于x轴的侧边。
(七)、参考图15所示为本发明三轴微机电陀螺仪的第七实施例：
第七实施例和第五实施例的三轴检测原理一样，和第六实施例的区别主要在于第二解耦梁152的形状和连接方式不同。第七实施例中：中间框 架1314和内框架13之间通过4个第二解耦梁152连接，第二解耦梁152设置于内框架13平行于x轴的两侧并且关于x轴对称；第二解耦梁152为L型解耦梁，一端垂直连接内框架13平行于x轴的侧边，另一端垂直连接中间框架1314平行于y轴的侧边。
本发明陀螺仪的第五、六、七实施例特别设计了三层矩形框架的结构，内框架与中间框架之间通过Z型或者L型的第二解耦梁进行连接，中间框架与外框架之间通过Z型或者L型的第一解耦梁进行连接，其中第一解耦梁限制了外框架14和中间框架1314在y轴方向上的相对运动，第二解耦梁限制了中间框架1314和内框架13在x轴方向上的相对运动，这种特殊设计能够增强陀螺仪的健壮性，具体参考图16-19介绍其有益效果：
图16为本发明陀螺仪第五、六、七实施例的x和y轴检测系统简化示意图，图17为第五、六、七实施例的x和y轴检测时检测质量块M2在驱动和检测方向的频响曲线。
参考图16所示，由于第一解耦梁151限制了外框架14和中间框架1314在y轴方向上的相对运动，所以外框架14和中间框架1314的组合可以简化为质量块M1，内框架13和环形上极板8以及连接两者的各个连系梁的组合可以简化为检测质量块M2。参考图17所示，质量块M1受到驱动力时带动检测质量块M2在驱动方向运动，其中质量块M1仅能够在驱动方向运动，检测质量块M2能同时在驱动和检测方向运动。在检测质量块M2的驱动运动频响曲线上，当驱动频率在驱动频响曲线两峰值之间平直段时，整个系统实现动力放大，即质量块M1运动幅值达到最小，而检测质量块M2的运动幅值达到最大。而且此时由温度和加工误差造成谐振频率的变化对驱动平直段频响影响很小，因此陀螺驱动运动变化很小，从而提高了陀螺驱动工作的稳定性。进一步的，同时将检测质量块M2在检测方向的检测模态的固有频率设计在驱动频响两峰值之间的平直段，就能够实现驱动和检测频率的匹配，提高了陀螺仪的检测精度和灵敏度等性能。
图18(a)、18(b)为本发明陀螺仪第五、六、七实施例的z轴检测系统简化示意图，图19为第五、六、七实施例的z轴检测时检测质量块M4在驱动和检测方向的频响曲线。
参考图18(a)所示，z轴检测系统的驱动运动动力放大原理与图16相同，因为是同一个驱动运动。参考图18(b)所示，当陀螺仪结构绕z轴转动时，内框架13受x轴向哥氏力驱动，第二解耦梁152限制了内框架13和中间框架1314在x轴方向上的相对运动，因此内框架13和外框架14相当于两个固连质量块，可以简化为质量块M3，外框架14与中间框架1314的连接相当于在x轴向弹簧连接，可以将外框架14简化为检测质量块M4。参考图19所示，质量块M3受到哥氏力带动检测质量块M4在检测方向运动，当哥氏力频率处于检测模态曲线两峰值间平直段时，检测质量块M4的运动位移最大，而质量块M3运动位移最小，即实现了动力放大。同时该结构也具有受温度及加工工艺误差的影响小的特点，从而有利于提高了系统的驱动和检测运动的稳定性以及陀螺仪检测的精度和灵敏度等性能。
本发明的三轴微机电陀螺仪采用单结构设计，电容式静电驱动和差动电容检测，驱动方式简单，结构紧凑，有利于减小陀螺仪体积，工艺上适合批量生产，并且受温度及加工工艺误差影响小，能够实现良好的测量精度和灵敏度。
参考图20所示为支撑结构的第二实施例，支撑结构包括一圆环103、三条连接梁101、以及一条支撑梁102；其中，两条连接梁101沿y轴分布，第三连接梁101沿x轴分布且位于x轴的正方向，连接梁101的一端与圆环103连接，另一端与环形上极板8的内沿连接；支撑梁102沿x轴分布且位于x轴的负方向，一端连接圆环103，另一端在原点处通过第一锚点5a固定在基板上。当然，也可以是第三条连接梁101位于x轴的负方向并且支撑梁102位于x轴的正方向。
参考图21所示为支撑结构的第三实施例，支撑结构包括一圆环103、两连接梁101、以及两条支撑梁102；其中，两条连接梁101沿y轴分布，连接梁101的一端与圆环103连接，另一端与环形上极板8的内沿连接；两条支撑梁102沿x轴分布，一端连接圆环103，另一端在原点处通过第一锚点5a固定在基板上。
虽然已经通过例子对本发明的一些特定实施例进行了详细说明，但是本领域的技术人员应该理解，以上例子仅是为了进行说明，而不是为了限制本发明的范围。本领域的技术人员应该理解，可在不脱离本发明的范围和精神的情况下，对以上实施例进行修改。本发明的范围由所附权利要求来限定。

Claims (15)

  1. 一种三轴微机电陀螺仪，其特征在于，包括：
    基板(1)；
    位于基板(1)中央位置的环形检测电容，其中心为原点；所述环形检测电容包括固定在基板上的四个下极板以及正对所述四个下极板并且悬置于所述下极板上方的环形上极板(8)；所述四个下极板分为两组：第一组下极板(6a)沿x轴在原点的两侧对称分布，所述第一组下极板(6a)与其对应部分的环形上极板(8)相配合构成一组第一检测电容；第二组下极板(6b)沿y轴在原点的两侧对称分布，所述第二组下极板(6b)与其对应部分的环形上极板(8)相配合构成另一组第一检测电容；所述环形上极板(8)在原点处通过第一锚点(5a)固定于基板(1)上；
    两组驱动电容，位于所述环形检测电容的外侧且沿y轴在原点的两侧对称分布；每组所述驱动电容都包括互相配合的可动驱动电极(16)和固定驱动电极(4)；
    两组第二检测电容，位于所述环形检测电容的外侧且沿x轴在原点的两侧对称分布；每组所述第二检测电容都包括互相配合的可动检测电极(17)和固定检测电极(3)；
    联动部，分别与所述可动驱动电极(16)、所述可动检测电极(17)、以及所述环形上极板(8)的外沿连接；其中，所述驱动电容用于提供沿y轴方向的驱动力，并且通过所述联动部带动所述可动检测电极(17)沿y轴方向做线运动以及带动所述环形上极板(8)绕所述第一锚点(5a)做转动运动。
  2. 根据权利要求1所述的三轴微机电陀螺仪，其特征在于：
    所述可动驱动电极(16)和固定驱动电极(4)为梳齿状电极，所述可动检测电极(17)和固定检测电极(3)为梳齿状电极。
  3. 根据权利要求1所述的三轴微机电陀螺仪，其特征在于：
    所述环形上极板(8)为圆环形状或者方环形状。
  4. 根据权利要求1所述的三轴微机电陀螺仪，其特征在于：
    所述第一组下极板(6a)组内的两个下极板形状相同，所述第二组下极板(6b)组内的两个下极板形状相同。
  5. 根据权利要求1所述的三轴微机电陀螺仪，其特征在于：
    所述联动部包括矩形外框架(14)和位于所述矩形外框架(14)内部的第一联动部；
    所述矩形外框架(14)包围所述环形检测电容，所述矩形外框架(14)通过第一联动部与所述环形上极板(8)的外沿连接；
    两组所述驱动电容对称分布在所述矩形外框架(14)平行于x轴的两侧，所述可动驱动电极(16)与所述矩形外框架(14)平行于x轴的侧边连接；
    两组所述第二检测电容对称分布在所述矩形外框架(14)平行于y轴的两侧，所述可动检测电极(17)与所述矩形外框架(14)平行于y轴的侧边连接；
    其中，所述驱动电容驱动所述矩形外框架(14)沿y轴方向做线运动，沿y轴方向做线运动的矩形外框架(14)通过所述第一联动部带动所述环形上极板(8)绕所述第一锚点(5a)做转动运动。
  6. 根据权利要求5所述的三轴微机电陀螺仪，其特征在于：
    所述第一联动部包括第一联动梁(9)，两条杠杆梁(10)、两条第二联动梁(11)、第三联动梁(24)；所述第一联动梁(9)和所述第二联动梁(11)均平行于y轴，所述杠杆梁(10)和第三联动梁(24)均平行于x轴；两条所述杠杆梁(10)分别与所述第一联动梁(9)连接以形成一端开口的方框结构，所述环形检测电容位于两条杠杆梁(10)之间；两条所述第二联动梁(11)关于x轴对称且位于所述杠杆梁(10)和所述矩形外框架(14)之间，所述第二联动梁(11)的一端连接邻近的一条杠杆梁(10)，另一端连接所述矩形外框架(14)；所述第三联动梁(24)的一端连接所述第一联动梁(9)的中部，另一端与所述环形上极板(8)的外沿连接。
  7. 根据权利要求6所述的三轴微机电陀螺仪，其特征在于：
    所述第一联动部还包括两条支撑梁(12)，两条所述支撑梁(12)均平行于y轴；两条所述支撑梁(12)关于x轴对称且位于所述方框结构和 所述环形检测电容之间，一端连接邻近的一条杠杆梁(10)，另一端各通过一第三锚点(5c)固定于所述基板(1)上。
  8. 根据权利要求7所述三轴微机电陀螺仪，其特征在于：
    所述杠杆梁(10)未与所述第一联动梁(9)连接的一端为支撑端，两条所述杠杆梁(10)的支撑端各通过一第二锚点(5b)固定于所述基板(1)上；所述第二联动梁(11)与杠杆梁(10)的连接位置位于杠杆梁(10)的支撑端和杠杆梁(10)与支撑梁(12)的连接点中间。
  9. 根据权利要求6所述的三轴微机电陀螺仪，其特征在于：
    所述第一联动部还包括矩形内框架(13)和第二联动部；
    所述矩形内框架(13)位于所述矩形外框架(14)内并且包围所述方框结构，所述矩形外框架(14)通过第二联动部与所述矩形内框架(13)连接；
    所述第二联动梁(11)位于所述杠杆梁(10)和所述矩形内框架(13)之间，所述第二联动梁(11)通过所述矩形内框架(13)与所述矩形外框架(14)连接；
    其中，沿y轴方向做线运动的矩形外框架(14)通过第二联动部带动所述矩形内框架(13)沿y轴方向做线运动。
  10. 根据权利要求9所述的三轴微机电陀螺仪，其特征在于：
    所述第二联动部为Z型解耦梁(15)，所述Z型解耦梁(15)的一端连接所述矩形内框架(13)平行于y轴的侧边，另一端连接所述矩形外框架(14)平行于y轴的侧边。
  11. 根据权利要求1所述的三轴微机电陀螺仪，其特征在于，包括：
    所述联动部包括位于所述基板上的以原点为中心的三层矩形框架，从内向外依次为内框架(131)、包围所述内框架(131)的中间框架(1314)、以及包围所述中间框架(1314)的外框架(141)，所述内框架(131)、中间框架(1314)、以及外框架(141)各有两条边平行于x轴，另外两条边平行于y轴；
    两组所述驱动电容对称分布在所述外框架(141)平行于x轴的两侧，所述可动驱动电极(16)与所述外框架(141)平行于x轴的侧边连接；
    两组所述第二检测电容对称分布在所述外框架(141)平行于y轴的两侧，所述可动检测电极(17)与所述外框架(141)平行于y轴的侧边连接；
    所述外框架(141)和所述中间框架(1314)之间通过第一解耦梁(151)连接，所述第一解耦梁(151)设置于所述中间框架(1314)平行于y轴的两侧；所述中间框架(1314)和所述内框架(131)之间通过第二解耦梁(152)连接，所述第二解耦梁(152)设置于所述内框架(131)平行于x轴的两侧；
    位于所述内框架(131)内部的第三联动部，所述第三联动部包括第一联动梁(9)，两条杠杆梁(10)、两条第二联动梁(11)、第三联动梁(24)；所述第一联动梁(9)和所述第二联动梁(11)均平行于y轴，所述杠杆梁(10)和第三联动梁(24)均平行于x轴；两条所述杠杆梁(10)关于x轴对称，分别与所述第一联动梁(9)连接以形成一端开口的方框结构，所述环形检测电容位于两条杠杆梁(10)之间；两条所述第二联动梁(11)关于x轴对称且位于所述杠杆梁(10)和所述内框架(131)之间，所述第二联动梁(11)的一端连接邻近的一条杠杆梁(10)，另一端连接所述内框架(131)；所述第三联动梁(24)的一端连接所述第一联动梁(9)的中部，另一端与所述环形上极板(8)的外沿连接。
  12. 根据权利要求11所述的三轴微机电陀螺仪，其特征在于：
    所述第一解耦梁(151)包括关于y轴对称的四个Z型解耦梁，所述Z型解耦梁(151)的一端垂直连接所述中间框架(1314)平行于y轴的侧边，另一端垂直连接所述外框架(141)平行于y轴的侧边；或者，所述第一解耦梁(151)包括关于y轴对称的四个L型解耦梁，所述L型解耦梁的一端垂直连接所述中间框架(1314)平行于y轴的侧边，另一端垂直连接所述外框架(141)平行于x轴的侧边；
    所述第二解耦梁(152)包括关于x轴对称的四个Z型解耦梁，所述Z型解耦梁的一端垂直连接所述内框架(131)平行于x轴的侧边，另一端垂直连接所述中间框架(1314)平行于x轴的侧边；或者，所述第二解耦梁(152)包括关于x轴对称的四个L型解耦梁，所述L型解耦梁的一端垂直 连接所述内框架(131)平行于x轴的侧边，另一端垂直连接所述中间框架(1314)平行于y轴的侧边。
  13. 根据权利要求11所述的三轴微机电陀螺仪，其特征在于：
    所述第三联动部还包括两条支撑梁(12)，两条所述支撑梁(12)均平行于y轴；两条所述支撑梁(12)关于x轴对称且位于所述方框结构和所述环形检测电容之间，一端连接邻近的一条杠杆梁(10)，另一端各通过一第三锚点(5c)固定于所述基板(1)上。
  14. 根据权利要求13所述的三轴微机电陀螺仪，其特征在于：
    所述杠杆梁(10)未与所述第一联动梁(9)连接的一端为支撑端，两条所述杠杆梁(10)的支撑端各通过一第二锚点(5b)固定于所述基板(1)上；所述第二联动梁(11)与杠杆梁(10)的连接位置位于杠杆梁(10)的支撑端和杠杆梁(10)与支撑梁(12)的连接点中间。
  15. 根据权利要求1-14任一项所述的三轴微机电陀螺仪，其特征在于：
    还包括位于所述环形检测电容的环孔内的支撑梁组(18)；
    所述支撑梁组(18)包括同心的内圆环(19)和外圆环(20)、两条内环支撑梁(21)、两条内外环连接梁(22)、以及四条外环连接梁(23)；
    所述四条外环连接梁(23)的一端分别与外圆环(20)连接，另一端分别与所述环形上极板(8)的内沿连接；所述外环连接梁(23)分成两个一组，其中一组沿x轴分布，另一组沿y轴分布；
    两条所述内环支撑梁(21)的一端分别与内圆环(19)连接，另一端在原点处通过所述第一锚点(5a)固定于所述基板(1)上；
    两条所述内外环连接梁(22)的一端分别与内圆环(19)连接，另一端分别与外圆环(20)连接；
    所述内环支撑梁(21)沿y轴分布且所述内外环连接梁(22)沿x轴分布，或者，所述内环支撑梁(21)沿x轴分布且所述内外环连接梁(22)沿y轴分布。
PCT/CN2015/084973 2014-11-27 2015-07-23 三轴微机电陀螺仪 Ceased WO2016082571A1 (zh)

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