WO2017062181A1 - Sub-nanosecond broad spectrum generating laser system - Google Patents
Sub-nanosecond broad spectrum generating laser system Download PDFInfo
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- WO2017062181A1 WO2017062181A1 PCT/US2016/053008 US2016053008W WO2017062181A1 WO 2017062181 A1 WO2017062181 A1 WO 2017062181A1 US 2016053008 W US2016053008 W US 2016053008W WO 2017062181 A1 WO2017062181 A1 WO 2017062181A1
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Definitions
- the disclosure relates to novel laser system configurations and outputs premised upon the simultaneous seeding and pumping of a solid state material with gain and nonlinear properties whereby the solid state material at least amplifies and spectrally broadens a seed pulse in a single pass through the solid state material. Further nonlinear optical effects such as pulse compression are also evident.
- Pulsed laser sources which combine ultra-short or femtosecond (fs) pulse duration, high average power, and broad optical spectrum are in great demand for a variety of applications in spectroscopy, sensing, coherence tomography, bio-medical, and so on. Extending the spectrally broad laser oscillations to 2—10 ⁇ , the so-called mid-IR range, is highly desired for detection of the substances which feature the resonant fingerprints in mid-IR, e.g. common molecules (including, but not limited to H 2 0, C0 2 , CO, and NH 4 ), biomedical materials, air pollutants, hazardous materials. Moreover, high power mid-IR fs sources with broad and coherent optical spectrum are of extreme importance for the time-resolved studies of the fundamental processes in physics and chemistry.
- fs femtosecond
- SCG supercontinuum generation
- SCG in bulk materials started to show new opportunities with its advantages such as relative simplicity, flexibility, high peak and average power. Moreover, SCG in some bulk materials features compression of femtosecond input pulse to even shorter output pulse comprising only few optical cycles.
- An important parameter, which defines the ability of the bulk medium to generate a broad continuum, is so called critical power for self-focusing Pc-
- the critical power is a material-specific parameter and is defined by third-order nonlinearity of the material via the nonlinear refractive index n2: Pc ⁇ ⁇ /n 2 .
- the critical power may vary from hundreds of kW (e.g. in II- VI semiconductors like ZnSe and ZnS) to tens of MW (e.g. in YAG or CaF 2 ).
- FIG.1 A generic mid-IR bulk SCG setup is shown in Fig.1.
- the system consists of a fs master oscillator (MO), frequency conversion stage (FC), fs laser amplifier (AMP), focusing optics (e.g. lens L), bulk medium for continuum generation (SCG).
- the system is configured to spectrally broad mid-IR continuum (Out).
- the frequency conversion stage FC is optional and could be employed prior or after the amplifier (AMP).
- the peak power levels in excess of the critical power cannot be reached directly from the fs oscillator. Therefore, the amplification of fs pulses is required prior to their delivery to SCG stage. Furthermore, many standard fs oscillators (Ti:Sa, fiber-based) emit in near-IR. Therefore, an additional stage for frequency conversion of near-IR fs pulses to mid-IR range is required (prior or after the amplifier stage). On the one hand, the techniques for frequency conversion and amplification of fs pulses are well developed. On the other hand, the overall setup is very complex, bulky and high-cost, which greatly limits the practical use of existing mid-IR bulk SCG sources.
- the present inventors have satisfied that need by constructing a laser system with a single pass amplifier that simultaneously amplifies, spectrally broadens and compresses seed pulses.
- the present invention provides short-pulse, broad spectrum generating laser systems that benefit from an optical scheme configured to amplify and spectrally broaden a seed pulse in a gain media.
- a bulk gain medium having non-linear properties concurrently receives a continuous or discontinuous pump output and a seed pulse.
- Guiding optics is utilized to superimpose the pump and master oscillator emissions on the bulk in a single pass which are emitted from respective optical pump and master oscillator devices. Additional optics is utilized for separating the output pulses from transmitted pump emission.
- the peak power of pulses from the master oscillator approximately equals or exceeds the critical power (PC) for self-focusing in the bulk medium.
- PC critical power
- nonlinear interaction of input pulses from the master oscillator with said bulk results in nonlinear optical effects.
- These nonlinear optical effects may include any one or any combination of self-focusing, self-phase modulation, cross-phase modulation, four-wave mixing, filamentation and pulse compression.
- the bulk media comprise TM:II-VI nanocrystals or polycrystals.
- the TM:II-VI nanocrystals or polycrystals are one of Cr:ZnS, Cr:ZnSe, Cr:CdS, Fe:ZnSe or Fe:ZnS
- the pump utilized for the present invention in any of the above formulated aspects, it is preferable that it is configured as a laser selected from one of Er- or Tm- doped fiber, but TM:II-VI lasers are also contemplated within the scope of the invention.
- the pump may operate a continuous wave (CW) regime.
- the present invention allows for the use of a master oscillator within the context of any of the above-mentioned aspects to produce the seed pulses that are input into the bulk.
- the wavelength of the pulses must significantly exceed the bandgap of a material.
- the master oscillator is a laser selected from pico- or femtosecond TMTI- VI lasers.
- the laser system of the present invention can further benefit from additional optical components integrated in structures of any of the above-disclosed aspects.
- the laser system includes at least one dispersive element placed before or after the bulk medium.
- Such dispersive elements may include any one or a combination of a plane-parallel plate, set of dispersive prisms, or dispersive mirror.
- the dispersive element is configured to compensate for the dispersion of said bulk and other components of the system and in another embodiment the dispersive element is configured to control the parameters of the input pulses from the master oscillator.
- the present invention also provides a method implemented by a laser system configured in accordance with any of and a combination of the above disclosed aspects.
- the inventive method allows for enhancing the properties of a pico-second or femtosecond seed pulse by first inputting the seed pulse from a master oscillator into a bulk medium capable of increasing peak power and broadening the spectrum of the seed; and concurrently pumping the bulk medium with an optical pump sufficient to create a laser interaction with the seed pulse in the bulk medium such that output pulses with greater pulse energy and broader spectmm than those of the seed pulse are emitted from the bulk.
- the nonlinear interactions between propagating optical pulses and the bulk medium are enhanced by the laser interactions induced by optically pumping the bulk medium.
- the spectrum of output pulses is significantly broadened in comparison with the spectrum of input seed pulses from the master oscillator.
- the duration of output pulses is significantly shortened in comparison with the duration of input pulses from the master oscillator.
- Fig. 1 provides a generic mid-IR SCG system of the prior art.
- Fig. 2a provides an optical schematic of a master oscillator with a "cold amplifier”.
- Fig. 2b provides measured spectra of the optical schematic of Fig. 2a.
- FIG. 3 provides an optical schematic of the present invention.
- Fig. 4 provides measured spectra of output pulses emitted by the schematic of Fig. 3.
- Fig. 5 provides the autocorrelations of output pulses.
- Fig. 6 compares measured characteristics of the device with the pump.
- Fig. 7 provides a schematic of a master oscillator for use with the present invention.
- Figs. 2 (a) and 2 (b) set forth respective optical schematic and the measured spectra of the present invention where a mid-IR fs laser is used as the seed laser and the bulk is any one of the following II- VI materials: Cr2+:ZnS/ZnSe/CdSe.
- Figure 2(a) provides a schematic of the setup consisting of: fs master oscillator (MO), focusing lens (L), bulk Cr2+:ZnS/ZnSe/CdSe material.
- Fig 2(b) illustrates the measured spectra of pulses shown on in logarithmic scale: input (dashed line) and output (solid lines). In this configuration, the bulk is not pumped and as such this considered a "cold amplifier", whereby the only energy imparted into the bulk is from the seed pulses.
- Fig. 3 sets forth an optical schematic of the present invention whereby a "hot amplifier” is used.
- the pump used for his configuration was an Erbium fiber laser sold by IPG Photonics, Oxford, MA, model number ELR-20-1567-LP.
- a "hot amplifier” is bulk that is concurrently pumped and subject to the seed pulse. This setup produces spectral broadening and amplification of fs optical pulses in a single pass.
- the system provided in Fig. 3 comprises a fs master oscillator (MO); focusing optics for MO beam (LI); pump laser (Pump); focusing optics for Pump beam (L2); optics for superimposing Pump and MO beams (e.g.
- dichroic mirror DM1 dichroic mirror DM1; optional optics for beam steering (M); a bulk material, which combines properties of the laser gain medium and nonlinear medium (GM-NM), e.g. polycrystalline Cr2+:ZnS/ZnSe; and optics for separation of the output beam (Out) from the residual pump radiation (e.g. dichroic mirror DM2).
- M optional optics for beam steering
- GM-NM nonlinear medium
- GM-NM nonlinear medium
- Out optics for separation of the output beam (Out) from the residual pump radiation
- the emission from mid-IR fs master oscillator (MO) is superimposed with CW emission of the Er-doped fiber laser (Pump) using a dichroic mirror DM1.
- the MO and Pump beams are focused with the GM-NM - polycrystalline Cr2+:ZnS or Cr2+:ZnSe (GM-NM).
- the latter combines properties of the laser gain medium and the nonlinear medium: (i) optical pumping of GM-NM results in amplification of input pulses from MO (like in conventional laser amplifier); (ii) nonlinearity of GM-NM results in spectral broadening of input pulses; (iii) amplification of pulses during their propagation through GM-NM results in increase of their peak power and, hence, in further spectral broadening, etc. Apparently, the initial spectral broadening is achieved at high enough peak power of the input pulses.
- Fig. 4 sets forth the measured spectra of output pulses.
- 'Cold spectrum' was measured with the pump laser turned off; that is, with a "cold amplifier”.
- the 'hot spectrum' was measured at 20 W CW pump power input concurrent with the seed pulses, such that is was a "hot amplifier” and 7.1 W average output power was an increase from the 1.9 W of the seed.
- the grey lines illustrate spectral broadening with increase of the pump power.
- Top graph shows transmissions of 1 m standard air and of the pump separator (DM2). As can be seen, the obtained spectrum completely fills 2.0-2.5 ⁇ atmospheric transparency window.
- Fig. 5 provides the measured autocorrelations of output pulses.
- Fig. 6 provides the measured characteristics of the device vs pump power. Top graph compares spectral bandwidth (at -10 dB level) and pulse duration. The bottom graph compares gain of the amplifier. As can be seen, an increase of the pump power results in (i) spectral broadening, (ii) pulse compression, (iii) increase of output power. It is important to note that amplification of fs pulses occurs as efficiently as amplification of CW laser.
- Fig. 7 The master oscillator used in the present invention is shown in Fig. 7. This laser was described in greater detail in PCT US2015/23232 filed on 30 March 2015, the contents of which are fully incorporated by reference in its entirety.
- EDFL Er- doped fiber laser
- An anti-reflective (AR) coated polycrystalline Cr2+:ZnS gain element is mounted in the resonator at normal incidence between two curved mirrors.
- the gain element is 5 mm long with 11% low-signal transmission and is cooled with room temperature water.
- the resonator's legs are unequal with a typical ratio of 2:5.
- the laser has two optical outputs: mid-IR through the output coupler (OC) and SHG trough curved dichroic mirror (DM) with high transmission in SHG wavelength range.
- the reflectivity and the group delay dispersion (GDD) of the optical coatings were optimized in the 2200 - 2700 nm wavelength range. Net GDD of the resonator can be adjusted in discrete steps by changing a type and the number of installed high reflectors (HR) with negative GDD.
- Third order dispersion (TOD) of the gain element was compensated by a dedicated mirror (HR*). The laser was optimized for maximum CW output power.
- the distance between the curved mirrors was then fine-adjusted in order to enable Kerr-Lens mode-locked regime (initiated by OC translation).
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- Crystallography & Structural Chemistry (AREA)
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Abstract
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018517577A JP6946282B2 (en) | 2015-10-06 | 2016-09-22 | Sub-nanosecond wide spectrum generation laser system |
| US15/764,686 US10483709B2 (en) | 2015-10-06 | 2016-09-22 | Sub-nanosecond broad spectrum generating laser system |
| EP16854070.6A EP3360209B1 (en) | 2015-10-06 | 2016-09-22 | Sub-nanosecond broad spectrum generating laser system |
| KR1020187009515A KR102550608B1 (en) | 2015-10-06 | 2016-09-22 | Sub-nanosecond extended spectrum generation laser system |
| LTEP16854070.6T LT3360209T (en) | 2015-10-06 | 2016-09-22 | Sub-nanosecond broad spectrum generating laser system |
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| US201562237821P | 2015-10-06 | 2015-10-06 | |
| US62/237,821 | 2015-10-06 |
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| WO2017062181A1 true WO2017062181A1 (en) | 2017-04-13 |
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| PCT/US2016/053008 Ceased WO2017062181A1 (en) | 2015-10-06 | 2016-09-22 | Sub-nanosecond broad spectrum generating laser system |
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|---|---|
| US (1) | US10483709B2 (en) |
| EP (1) | EP3360209B1 (en) |
| JP (1) | JP6946282B2 (en) |
| KR (1) | KR102550608B1 (en) |
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| WO (1) | WO2017062181A1 (en) |
Cited By (2)
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|---|---|---|---|---|
| US20180113372A1 (en) * | 2015-10-06 | 2018-04-26 | Ipg Photonics Corporation | Single pass laser amplifier with pulsed pumping |
| WO2019063193A1 (en) * | 2017-09-29 | 2019-04-04 | Asml Netherlands B.V. | Radiation source |
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| US10608401B2 (en) * | 2014-04-01 | 2020-03-31 | Ipg Photonics Corporation | Mid-IR Kerr lens mode locked laser with normal incidence mounting of polycrystalline TM:II-VI materials and method for controlling parameters of polycrystalline TM:II-VI Kerr lens mode locked laser |
| KR102550608B1 (en) * | 2015-10-06 | 2023-06-30 | 아이피지 포토닉스 코포레이션 | Sub-nanosecond extended spectrum generation laser system |
| JP6711600B2 (en) * | 2015-12-09 | 2020-06-17 | キヤノン株式会社 | Light source device and information acquisition device |
| CN113015933B (en) * | 2018-11-01 | 2025-06-10 | Ofs菲特尔有限责任公司 | Wavelength scanning light source |
| EP3911260B1 (en) | 2019-01-15 | 2024-05-29 | Boston Scientific Scimed, Inc. | Alignment tools |
| EP4252323A4 (en) * | 2020-12-29 | 2024-10-23 | IPG Photonics Corporation | LOW-THRESHOLD SUPERCONTINUUM GENERATION IN BULK DIELECTRICS AND SEMICONDUCTORS |
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- 2016-09-22 JP JP2018517577A patent/JP6946282B2/en active Active
- 2016-09-22 US US15/764,686 patent/US10483709B2/en active Active
- 2016-09-22 EP EP16854070.6A patent/EP3360209B1/en active Active
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| US10216063B2 (en) * | 2015-10-06 | 2019-02-26 | Ipg Photonics Corporation | Single pass laser amplifier with pulsed pumping |
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| TWI694747B (en) * | 2017-09-29 | 2020-05-21 | 荷蘭商Asml荷蘭公司 | Supercontinuum radiation source, optical measurement system and alignment mark measurement system, lithographic apparatus, and method for generating supercontinuum radiation beam |
| US10811836B2 (en) | 2017-09-29 | 2020-10-20 | Asml Netherlands B.V. | Radiation source |
| JP2020535458A (en) * | 2017-09-29 | 2020-12-03 | エーエスエムエル ネザーランズ ビー.ブイ. | Radiation source |
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Also Published As
| Publication number | Publication date |
|---|---|
| LT3360209T (en) | 2021-01-11 |
| KR102550608B1 (en) | 2023-06-30 |
| US10483709B2 (en) | 2019-11-19 |
| JP2018534615A (en) | 2018-11-22 |
| EP3360209B1 (en) | 2020-09-02 |
| EP3360209A4 (en) | 2019-07-10 |
| EP3360209A1 (en) | 2018-08-15 |
| US20180278006A1 (en) | 2018-09-27 |
| JP6946282B2 (en) | 2021-10-06 |
| KR20180063108A (en) | 2018-06-11 |
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